JP2010191228A - Pressure regulating valve and liquid drop discharge device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a pressure regulating valve, suitable opening and closing a valve element, and a liquid drop discharge device. <P>SOLUTION: This pressure regulating valve includes: a primary chamber 75 communicating with a functional liquid supply means and a secondary chamber 76 communicating a functional liquid drop discharge head 25, which are formed across a partition wall 77 in a valve housing 71; a communicating passage 78 formed to penetrate through the partition wall 77 to communicate the primary chamber 75 with the secondary chamber 76; a valve element 84 taking the primary chamber side opening edge part 82 of the partition wall 77 provided with the communicating passage 78 as a valve seat to open and close the communicating passage 78 from the primary chamber 75 side; a pressure receiving film body 73 constituting one face of the secondary chamber 76 and opening and closing the valve element 84 with reference to the atmospheric pressure; and a coil spring taking the one wall surface of the primary chamber 75 opposite to the partition wall 77 as a receiver to energize the valve element 84 in the valve closing direction while rivaling for the pressure receiving film body 73. A wire material constituting the coil spring is formed to have a flat section in the direction orthogonal to the axis of the coil spring. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a pressure regulating valve that supplies a functional liquid to a functional liquid droplet ejection head under reduced pressure, and a liquid droplet ejection apparatus.

Conventionally, as this kind of pressure regulating valve, there has been known one that supplies a functional liquid under reduced pressure from a functional liquid tank to an ink jet type functional liquid droplet ejection head (see Patent Document 1). The pressure regulating valve includes a primary chamber communicating with the functional liquid tank, a film-like diaphragm having a wall surface having a pressure receiving plate, a secondary chamber communicating with the functional liquid droplet ejection head, a primary chamber, It has a communication channel that communicates with the secondary chamber, and a valve body that opens and closes the communication channel. This valve body is attached to the valve holder consisting of a disc-shaped valve receiving portion and an operating shaft portion extending in one direction from the center of the valve receiving portion, and the operating shaft portion side of the valve receiving portion, and is resistant to chemicals. And a valve seal (valve body main body) formed in a flat annular shape with members.
When the functional liquid is supplied from the secondary chamber along with the ejection driving of the functional droplet ejection head, the secondary chamber is depressurized and the diaphragm is deformed into a concave shape. Due to this deformation, the pressure receiving plate pushes the operating shaft portion of the valve holder, and the valve seal opens away from the edge of the communication flow path serving as the valve seat, thereby opening the valve body. Thereby, the functional liquid in the primary chamber flows into the secondary chamber. On the other hand, when the functional liquid flows into the secondary chamber, the secondary chamber is pressurized and the diaphragm is deformed into a convex shape. By this deformation, the pressure receiving plate is separated from the operating shaft portion of the valve holder, and at the same time, the valve body is advanced by the valve body spring to close the communication flow path. By this operation, the functional liquid is supplied from the secondary chamber side to a constant pressure.

JP 2006-142215 A

  By the way, the opening and closing operation of the valve body is caused by the valve seal of the valve body being flattened by the pressing force of the diaphragm against the spring force of the valve body spring interposed between the valve body and the lid body defining the primary chamber. This is done by moving away from the valve seat. However, in the conventional pressure regulating valve described above, the valve body spring is constituted by a cylindrical coil spring. This valve body spring has a circular cross section in the direction orthogonal to the axis of the coil spring, and the rigidity in the direction orthogonal to the axis is weak, and the processing accuracy of the end of the valve spring is low. Depending on the manufacturing error of the spring spiral structure, there is a problem that the valve body cannot be urged with a uniform force parallel to the valve seat. For this reason, the valve body cannot be moved back and forth while maintaining a parallel posture with respect to the valve seat, and the valve body opens and closes when the valve body is in contact with the valve seat. There was a problem that could not be opened and closed. As a result, the pressure fluctuation in the secondary chamber increases, which affects the ejection performance of the functional liquid droplet ejection head.

  An object of the present invention is to provide a pressure regulating valve and a droplet discharge device that can appropriately open and close a valve body.

  The pressure regulating valve of the present invention is a pressure regulating valve that regulates the pressure of the functional liquid supplied from the functional liquid supply means and supplies the functional liquid to the ink jet type functional liquid droplet ejection head. A primary chamber that is formed and communicates with the functional liquid supply means, a secondary chamber that communicates with the functional liquid droplet ejection head, a communication passage that is formed through the partition wall and communicates with the primary chamber and the secondary chamber, and communicates A valve body that opens and closes the communication flow path from the primary chamber side with the opening edge of the primary chamber side of the partition wall forming the flow path as a valve seat, and constitutes one surface of the secondary chamber, and the valve body is at atmospheric pressure. A pressure receiving membrane body that opens and closes based on a reference, and a coil spring that receives one wall surface of the primary chamber facing the partition wall and urges the valve body in a valve closing direction while antagonizing the pressure receiving membrane body, The wire constituting the spring has a flat cross section in the direction perpendicular to the axis of the coil spring. Made is characterized in that is.

  In this case, the flat cross section is preferably an oval cross section or a square cross section.

  According to these configurations, when the functional liquid droplet ejection head is driven to eject the functional liquid, the functional liquid in the secondary chamber flows toward the functional liquid droplet ejection head, and the secondary chamber is decompressed. When the secondary chamber is depressurized, the pressure receiving film body is depressed by the atmospheric pressure, and the valve body is opened against the coil spring which is a valve body spring. When the valve element opens, the functional fluid flows from the primary chamber into the secondary chamber, the pressure in the secondary chamber increases, the pressure receiving film body returns to its original state, and the coil spring closes the valve element. By repeating this, the secondary chamber is maintained at a constant pressure, and the functional liquid is supplied to the functional liquid droplet ejection head at a desired pressure. In this case, since the wire constituting the coil spring is formed in a flat cross section having high rigidity in the direction perpendicular to the axis, straightness is maintained regardless of the processing accuracy of the end portion. For this reason, in a state where the valve body maintains a parallel posture with respect to the valve seat, the valve body can be advanced and retracted (parallel movement) with high accuracy, and the contact of the valve body with the valve seat can be effectively prevented. As a result, the valve body can be opened and closed with high accuracy, and the pressure in the secondary chamber can be adjusted appropriately.

  A droplet discharge device of the present invention includes the pressure adjusting valve described above, a functional liquid supply unit, and a functional droplet discharge head, and while moving the functional droplet discharge head relative to the workpiece, Drawing is performed by discharging a functional liquid onto a workpiece.

  According to this configuration, an appropriate amount of functional liquid can be fed into the functional liquid droplet ejection head by causing the pressure regulating valve to function stably by opening and closing the valve body with high accuracy. In addition, pressure fluctuation is adjusted by opening and closing the valve body, and pulsations and the like generated on the primary chamber side are absorbed. Therefore, ejection failure of the functional liquid droplet ejection head is not affected, and ejection failure can be prevented.

It is a perspective view of a droplet discharge device. 4A is a perspective view of a carriage unit (head unit) mounted on a droplet discharge device, and FIG. 4B is a plan view schematically showing a head unit mounted with a functional droplet discharge head. It is a front and back external perspective view of a functional liquid droplet ejection head. It is the systematic diagram which showed the functional liquid supply unit typically. It is an external appearance top view of a pressure regulating valve. It is the longitudinal cross-sectional view which cut | disconnected the pressure regulation valve in the axial direction of the inflow port. (A) Sectional drawing of valve body and valve body spring in 1st Embodiment, (b) Schematic figure which showed flat cross section of valve body spring in 1st Embodiment, (c) Valve body spring in 2nd Embodiment. It is the schematic diagram which showed the flat cross section.

  Hereinafter, a liquid droplet ejection apparatus to which a pressure regulating valve according to an embodiment of the present invention is applied will be described with reference to the accompanying drawings. This droplet discharge device is incorporated in a flat panel display production line, and uses, for example, a function droplet discharge head into which a special ink or a functional liquid that is a light-emitting resin liquid is introduced, and the color of a liquid crystal display device A light emitting element or the like to be used for each pixel of a filter or an organic EL device is formed. The pressure regulating valve supplies the functional liquid at a constant pressure to the functional liquid droplet ejection head.

  As shown in FIG. 1, the droplet discharge device 1 is disposed on an X-axis support base 12a supported by a stone surface plate, extends in the X-axis direction that is the main scanning direction, and moves the workpiece in the X-axis direction. And a Y-axis that is arranged on a pair of Y-axis support bases 13a spanned across the X-axis table 12 via a plurality of support columns 11 and that is in the sub-scanning direction A Y-axis table 13 extending in the direction, and 13 carriage units 14 suspended in a movable manner on the Y-axis table 13 and mounted with a plurality (12) of functional liquid droplet ejection heads 25. ing. Further, the droplet discharge device 1 includes a chamber 15 that houses these devices in an atmosphere in which temperature and humidity are controlled, and a functional liquid that passes through the chamber 15 and supplies the functional liquid to the functional droplet discharge head 25. Supply unit 16 (functional liquid supply means). The droplet discharge device 1 is controlled in an integrated manner by a control device (not shown), and the functional droplet discharge head 25 is driven to discharge in synchronization with the driving of the X-axis table 12 and the Y-axis table 13. The six color functional droplets supplied from the functional liquid supply unit 16 are ejected, and a predetermined drawing pattern is drawn on the work.

  The droplet discharge device 1 includes a maintenance device 18 including a flushing unit 21, a suction unit 22, a wiping unit 23, and a discharge performance inspection unit 24. These units are used for maintenance of the functional droplet discharge head 25. The function of the functional liquid droplet ejection head 25 is maintained / recovered. In the droplet discharge device 1 of the present embodiment, the workpiece is drawn with the carriage unit 14 facing the portion where the X-axis table 12 and the Y-axis table 13 intersect, and the portion where the Y-axis table 13 and the maintenance device 18 intersect. With the carriage unit 14 facing, the function of the functional liquid droplet ejection head 25 is maintained and recovered.

  As shown in FIG. 2, each carriage unit 14 has six colors of R, G, B, C, M, and Y, each of two (total 12) functional liquid droplet ejection heads 25 and twelve functional liquids. A head unit 19 having a head plate 26 that supports six droplet discharge heads 25 divided into two groups and a pressure adjustment valve 27 that supplies the functional liquid droplets to the functional droplet discharge head 25 on the basis of atmospheric pressure is provided. Yes. Each carriage unit 14 is suspended from a bridge plate 13b that spans a pair of Y-axis support bases 13a (see FIG. 1). Each carriage unit 14 uses a natural water head from a sub tank 41 disposed on the bridge plate 13b, and a functional liquid is supplied to each functional liquid droplet ejection head 25 via a pressure regulating valve 27. Yes. The number of carriage units 14 and the number of functional liquid droplet ejection heads 25 mounted on each carriage unit 14 are arbitrary.

  As shown in FIG. 3, the functional liquid droplet ejection head 25 is a so-called double ink jet head, which is a functional liquid introduction part 31 having two connection needles 34 and 2 sideways connected to the side of the functional liquid introduction part 31. A series of head substrates 32, two series of pump units 33 that are continuous below the head substrate 32, and a nozzle plate 35 that is coupled to the pump unit 33 are provided. A head side tube 43 to be described later is connected to the functional liquid introducing portion 31, and two nozzle rows NL are arranged in parallel to each other on the nozzle surface NF of the nozzle plate 35. , 180 discharge nozzles 36 arranged at equal pitches. The head substrate 32 is connected to the above-described control device via a flexible flat cable (not shown), and the drive waveform output from the control device is applied to each pump unit 33 so that each discharge nozzle 36 Functional fluid is discharged.

  As shown in FIGS. 1 and 4, the functional liquid supply unit 16 is disposed on six (six colors) main tanks 40 accommodated in a tank cabinet 50 provided in the chamber 15 and on each bridge plate 13b. A plurality of (13) sub tanks 41, a tank side tube 42 connecting the main tank 40 and the plurality of sub tanks 41, a plurality of head side tubes 43 connecting each sub tank 41 and each functional liquid droplet ejection head 25, It is equipped with. Each head side tube 43 is provided with a pressure regulating valve 27 mounted on the carriage unit 14 together with the functional liquid droplet ejection head 25.

  The functional liquid sent from the main tank 40 is stored in each sub tank 41 through the tank side tube 42. The functional liquid in each sub-tank 41 is supplied to the functional liquid droplet ejection head 25 as a natural water head via the head side tube 43 and the pressure adjustment valve 27 in accordance with the driving of each functional liquid droplet ejection head 25.

Next, the pressure regulating valve 27 will be described with reference to FIGS.
The pressure regulating valve 27 includes a regulating valve main body 61 constituting a main part, an inflow connector 62 inserted and joined to the inflow side of the regulating valve main body 61, and an outflow connector 63 inserted and joined to the outflow side of the regulating valve main body 61. ing. The inflow connector 62 is connected to a tube 29 connected to the sub-tank 41 (not shown) via a presser nut 64. Similarly, the outflow connector 63 is connected to the outflow connector 63 via a presser nut 64 to discharge a functional liquid droplet (not shown). A tube 29 connected to the head 25 is connected.

  The regulating valve main body 61 is substantially disc-shaped and has a front housing and a central portion of the rear surface that are recessed, a lid 72 that defines the primary chamber 75 together with the valve housing 71, and the valve housing 71. The pressure-receiving film body 73 is fixed, and the film body pressing member 74 that defines the secondary chamber 76 together with the valve housing 71 is constituted. The primary chamber 75 and the secondary chamber 76 are coaxially arranged with a partition wall 77 constituting a part of the valve housing 71, and the primary portion (axial center) of the partition wall 77 has a primary portion. A communication channel 78 that communicates the chamber 75 and the secondary chamber 76 is formed to penetrate therethrough.

  The film body pressing member 74 and the lid body 72 are assembled to the valve housing 71 by screwing so as to be sandwiched from the front and rear direction (not shown), and both of them have an axis passing through the center of the circular pressure receiving film body 73. It has a circular outer shape that is a concentric circle. The valve housing 71 and the film body pressing member 74 are butt-joined in a liquid-tight manner with the peripheral portion of the pressure-receiving film body 73 and the seal ring 111 interposed therebetween.

  The primary chamber 75 is formed in a substantially cylindrical shape that is concentric with the pressure-receiving film body 73 by a rear surface of the valve housing 71 mainly including a partition wall 77 and a lid body 72 that closes an open end of the valve housing 71. Yes. In addition, an inflow port 81 extending obliquely in the radial direction from the primary chamber 75 is formed in the upper portion of the primary chamber 75, and a primary chamber side opening edge 82 connected to the communication channel 78 is opened in the center. ing. The primary chamber side opening edge 82 faces a valve body 84 that opens and closes the communication flow path 78 from the primary chamber 75 side, and correspondingly, by the primary chamber side opening edge 82, A valve seat 83 to which the valve body 84 is separated is formed. Further, the valve body 84 is weak in the valve closing direction (secondary chamber 76 side) by a valve body biasing spring (valve body spring) 85 (details will be described later) interposed between the valve body 84 and the lid body 72. It is energized by force.

  The inflow port 81 is connected to the joint receiving portion 112 into which the inflow connector 62 is inserted and joined, the filter housing portion 114 housing the filter 113, the filter housing portion 114, and the primary chamber 75. And an inflow channel portion 115. The connection port portion 128 of the inflow connector 62 is inserted and joined to the joint receiving portion 112. The filter 113 is accommodated in the filter accommodating portion 114 while being urged by a presser spring 116 interposed between the filter 113 and the inflow connector 62. Further, the inflow channel portion 115 is formed to be biased toward the primary chamber 75 with respect to the inflow port 81.

  The filter 113 includes a circular stainless steel filter element 117, a receiving holder 118 for setting the filter element 117, and a presser holder 120 for pressing the filter element 117, so that the filter 113 is seated on the contact step portion of the filter housing portion 114. Is provided. The presser spring 116 and the filter 113 can be taken out by pulling out the inflow connector 62.

  The secondary chamber 76 is formed by a front surface of the valve housing 71 and a pressure receiving film body 73 that closes the open end of the valve housing 71, and the pressure receiving film body 73 is formed by the film body pressing member 74. Is attached. In addition, an outflow port 86 extending right below the secondary chamber 76 is formed in the lower portion of the secondary chamber 76, and a secondary chamber side opening 87 connected to the communication channel 78 is opened in the center. A film body biasing spring 88 that biases the pressure receiving film body 73 forward is interposed between the peripheral edge of the secondary chamber side opening 87 and the pressure receiving film body 73 described later. Yes.

  An annular groove 122 having a rectangular cross section is formed in the ring-shaped end surface 121 that is the front peripheral edge of the valve housing 71, and the above-described seal that seals between the ring-shaped end surface 121 and the pressure-receiving film body 73 is formed in the annular groove 122. A ring 111 is attached. In addition, a plurality (six) of screw holes (not shown) into which a plurality of mounting screws 124 for mounting the film body pressing member 74 are screwed are formed outside the annular groove 122 in the ring-shaped end surface 121.

  The pressure receiving film body 73 includes a film body main body 91 made of a resin film, and a resin pressure receiving plate 92 bonded to the central portion of the film body main body 91. A plurality of (six) cutout holes (not shown) are formed in the peripheral portion of the film body 91 at portions corresponding to the screw holes of the valve housing 71. The pressure receiving plate 92 is formed concentrically with the film body main body 91 and has a sufficiently small diameter with respect to the film body main body 91, and the valve body 84 is in contact with the center thereof.

  The film body pressing member 74 is formed in a donut shape having the same size as that of the ring-shaped end surface 121 of the valve housing 71, and a plurality (six) of hole holes 127 are formed on the peripheral edge thereof. As a result, the pressure-receiving film body 73 is set on the ring-shaped end surface 121 of the valve housing 71 in which the seal ring 111 is mounted in the annular groove 122, and the film body pressing member 74 is screwed to the plurality of mounting screws 124. A secondary chamber 76 is configured.

  The valve body 84 is made of an elastic material, and includes a ring-shaped valve body main body 84a that functions as a valve, and a valve holder 93 that holds the valve body main body 84a (details will be described later). The valve body main body 84 a opens and closes the communication flow path 78 by being separated from and contacting the peripheral edge portion of the primary chamber side opening edge portion 82 that becomes the valve seat 83. Further, the distal end portion (operating shaft portion 97) of the valve holder 93 extends through the communication channel 78, and the distal end portion abuts on the pressure receiving plate 92 so as to open and close. (See FIG. 6).

  The outflow port 86 has the same form as the inflow port 81, and the outflow channel portion (the outflow channel portion (in which the outflow connector 63 is inserted and joined), and the outflow channel portion (communication between the joint reception portion 112 and the secondary chamber 76) (Not shown). The connection port portion 128 of the outflow connector 63 is inserted into and joined to the joint receiving portion 112. The inflow port 81 and the outflow port 86 differ depending on the flow direction of the functional liquid and the presence or absence of the filter 113, but the basic form of the joint portion is the same.

  Here, with reference to FIG. 7, the valve body 84 and the valve body urging spring 85 incorporated in the pressure regulating valve 27 of the present embodiment will be described in detail. As described above, the valve body 84 includes the valve body main body 84 a and the valve holder 93 that holds the valve body main body 84 a, and the valve body main body 84 a serves as the valve seat 83, and the primary chamber side opening edge 82. The valve body 84 is opened and closed by being separated from and contacted with each other, and the functional liquid intermittently flows from the primary chamber 75 into the secondary chamber 76.

  The valve body 84a has a ring shape with a circular cross section, and is configured by a so-called O-ring. The valve body 84a in this case is composed of a chemical-resistant O-ring (perfluoro rubber), and is harder than a silicon rubber O-ring that is normally used. And the front-end part of the valve body main body 84a with which the valve holder 93 was mounted | worn is separated from the valve seat 83, and there exists a function of a valve.

  The valve holder 93 is formed in a substantially “T” cross section, and is a thick disc-shaped holder base 94 with which the valve body biasing spring 85 abuts coaxially from the rear in the axial direction, and a holder base 94. , A seating portion 95 on which the valve body 84a is seated, a retaining portion 96 that is connected to the seating portion 95 and holds the valve body 84a in a retaining state, and extends forward from the center of the retaining portion 96. And the actuating shaft portion 97 formed integrally. The valve body 84a is mounted on a portion extending from the seating portion 95 to the retaining portion 96 over the retaining portion 96 from the operating shaft portion 97 side. Further, the operating shaft portion 97 is inserted into the communication channel 78 and the tip thereof reaches the position of the pressure receiving plate 92 (see FIG. 6).

  The holder base 94 constitutes a pressure receiving portion on the primary chamber 75 side, and a valve body side annular spring receiving portion 101 with which a valve body urging spring 85 described later abuts is formed on the back surface thereof. The holder base 94 receives the pressure of the primary chamber 75 on the back surface, and is biased by a valve body biasing spring 85 with a weak force in the valve closing direction. The front surface of the holder base 94, the peripheral surface of the seating portion 95, and the peripheral surface of the retaining portion 96 are continuous in a “J” cross section. Among these, the retaining portion is removed from the seating portion 95 to which the valve body main body 84 a is attached. A portion extending to 96 is formed in a complementary shape to the valve body 84a.

  The retaining portion 96 is connected to the other end of the connecting seat portion, and retains the valve body main body 84a from the valve seat 83 side in a retained state, leaving a portion where the valve body main body 84a contacts the valve seat 83 slightly. In other words, the front end of the retaining portion 96 is at a position retracted from the front end portion of the valve body main body 84a, and is formed to be slightly thicker than the inner diameter of the valve body main body 84a. In this case, it is designed with zero fitting between the peripheral surface from the seating portion 95 to the retaining portion 96 and the peripheral surface of the valve body 84a, and the mounted valve body 84a is in a free state in the valve holder. 93.

  The operating shaft portion 97 has a circular cross section and is formed to be slightly smaller in diameter than the communication channel 78, and the tip portion is formed in a hemispherical shape. Further, the operating shaft portion 97 is formed to have a length that comes into contact with the pressure receiving plate 92 described above when biased toward the secondary chamber 76 by the valve body biasing spring 85.

  On the other hand, the valve body urging spring 85 is constituted by a cylindrical coil spring, and receives the above-described lid body 72 and moves the valve body 84 from the back side toward the pressure receiving film body 73 (pressure receiving plate 92). (Valve closing direction) Energized. The base end portion of the valve body urging spring 85 is in contact with the lid-side annular spring receiving portion 102 provided at the center of the lid body 72, and the tip portion is a valve formed on the back surface of the valve body 84. The body side annular spring receiving portion 101 is in contact with the body side annular spring receiving portion 101 (FIG. 7A). The wire constituting the coil spring is formed in a flat cross section in a direction perpendicular to the axis of the coil spring, and has an elliptical cross section or an oval cross section formed with the short axis in the axial direction of the coil spring and the long diameter in the direction perpendicular to the axis. (FIG. 7B). For this reason, the valve body urging spring 85 is structurally strong in the direction orthogonal to the axis, and expands and contracts without causing blur in the urging direction.

Here, the opening / closing operation | movement of the valve body 84 by the valve body urging | biasing spring 85 is demonstrated.
When the functional liquid droplet ejection head 25 is driven to eject the functional liquid, the functional liquid in the secondary chamber 76 flows toward the functional liquid droplet ejection head 25 and the secondary chamber 76 is decompressed. When the secondary chamber 76 is depressurized, the pressure receiving film body 73 is depressed by the atmospheric pressure, and the valve body 84 in the closed state is opened against the valve body biasing spring 85. When the valve body 84 is opened, the functional liquid flows from the primary chamber 75 into the secondary chamber 76, the pressure in the secondary chamber 76 increases, the pressure receiving film body 73 returns to its original state, and the valve body biasing spring 85 is The body 84 is closed. At this time, the valve body urging spring 85 is maintained in a straight posture with respect to the valve seat 83 because the straight cross-sectional shape of the wire rod maintains the straightness regardless of the processing accuracy of the end portion. In such a state, it is possible to accurately move back and forth (translate). In addition, the operating shaft portion 97 can also be prevented from abutting the valve body 84 against the valve seat 83 by advancing and retracting following the straight advanceability of the valve body urging spring 85.

Next, the pressure regulating valve 27 according to the second embodiment will be described with reference to FIG. The pressure regulating valve 27 is different from the first embodiment only in the shape of the valve body biasing spring 85. Therefore, only the valve body urging spring 85 will be described in order to avoid redundant description.
As described above, the valve body urging spring 85 is formed of a cylindrical coil spring, and receives the lid body 72, so that the valve body 84 is moved from the back side to the pressure receiving film body 73 (pressure receiving plate 92). It is energizing (valve closing direction). The wire constituting the coil spring is formed in a flat cross section in a direction perpendicular to the axis of the coil spring, and is a rectangular cross section formed with the short axis as the axial direction and the long side as the direction perpendicular to the axial line (FIG. 7C). Do it. For this reason, similarly to the valve body urging spring 85 in the first embodiment, structurally, the rigidity is strong in the direction orthogonal to the axis, and the straightness is high in the urging direction.

  According to the above configuration, the wire constituting the valve body urging spring 85 is formed in a flat cross section in a direction perpendicular to the axis, so that the opening / closing operation of the valve body 84 accompanying the deformation of the pressure receiving film body 73 can be performed. Performed with high accuracy. Therefore, the pressure in the secondary chamber 76 can be adjusted appropriately.

  DESCRIPTION OF SYMBOLS 16 ... Functional liquid supply unit 25 ... Functional liquid droplet discharge head 27 ... Pressure adjustment valve 71 ... Valve housing 73 ... Pressure receiving film body 75 ... Primary chamber 76 ... Secondary chamber 77 ... Septum 78 ... Communication flow path 82 ... Primary chamber Side opening edge 84 ... Valve element 85 ... Valve element biasing spring

Claims (4)

A pressure adjusting valve that adjusts the pressure of the functional liquid supplied from the functional liquid supply means and supplies the functional liquid to an ink jet type functional liquid droplet ejection head;
A primary chamber formed in the valve housing with a partition wall therebetween and communicating with the functional liquid supply means and a secondary chamber communicating with the functional liquid droplet ejection head;
A communication channel formed through the partition wall and communicating the primary chamber and the secondary chamber;
A valve body that opens and closes the communication channel from the primary chamber side, using the primary chamber side opening edge of the partition wall forming the communication channel as a valve seat;
A pressure-receiving membrane body that constitutes one surface of the secondary chamber and that opens and closes the valve body on the basis of atmospheric pressure;
A coil spring that receives one wall surface of the primary chamber facing the partition wall and biases the valve body in a valve closing direction while antagonizing the pressure receiving film body,
The pressure regulating valve, wherein the wire constituting the coil spring is formed in a flat cross section in a direction perpendicular to the axis of the coil spring.   The pressure regulating valve according to claim 1, wherein the flat cross section is an elliptical cross section.   The pressure regulating valve according to claim 1, wherein the flat cross section is a square cross section. A pressure regulating valve according to any one of claims 1 to 3,
The functional liquid supply means;
The functional liquid droplet ejection head,
A droplet discharge apparatus for performing drawing by discharging a functional liquid onto the workpiece while moving the functional droplet discharge head relative to the workpiece.

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