JP5527452B2 - Pressure regulating valve and droplet discharge device provided with the same - Google Patents

Description

  The present invention relates to a pressure adjusting valve that appropriately decompresses a functional liquid from a functional liquid supply means to a functional liquid droplet ejection head, and a liquid droplet ejection apparatus including the pressure adjustment valve.

2. Description of the Related Art Conventionally, there is known a pressure adjusting valve that reduces the functional liquid in a sub tank to a predetermined pressure and supplies it to a functional droplet discharge head (see Patent Document 1). The pressure regulating valve includes a primary chamber communicating with an inflow port formed in the valve housing, a secondary chamber communicating with the outflow port, and a communication channel communicating with a partition between the primary chamber and the secondary chamber. And a valve body that opens and closes the communication flow path from the primary chamber side with the opening edge of the communication flow path on the primary chamber side as a valve seat, and one surface of the secondary chamber, and the valve body is based on atmospheric pressure And a valve body spring that urges the valve body in the valve closing direction. Members such as a valve housing, a partition wall, and a valve body constituting the pressure regulating valve are formed of a corrosion-resistant metal such as stainless steel in order to ensure solvent resistance and gas barrier properties against the introduced functional liquid.
On the other hand, the valve body includes an O-ring that directly contacts the valve seat, a holding portion that holds the O-ring, and a valve holder that includes a shaft portion that extends from the holding portion through the communication channel. The communication channel is formed in a cross shape in cross section, and a shaft portion inserted through the communication channel is in contact with the diaphragm. That is, the valve element opens and closes in response to the behavior of the diaphragm in a state where the diaphragm and the valve element spring are antagonistic.

JP 2006-163733 A

  However, in such a pressure regulating valve, although there is a minute gap between the shaft portion of the valve body and the communication flow path, the communication flow path is formed in a cross-shaped cross section. When the shaft portion of the valve body and the flow path wall of the communication flow path come into contact with the opening / closing operation, a relatively large sliding resistance is generated per part. In particular, since the shaft portion of the valve body and the flow path wall of the communication flow path are made of metal such as stainless steel, the friction is large, the smooth opening / closing operation of the valve body is hindered, and the valve body does not operate smoothly. There was a problem.

  An object of the present invention is to provide a pressure regulating valve capable of smoothly opening and closing a valve body and a droplet discharge device including the pressure regulating valve.

  The pressure regulating valve of the present invention includes a communication channel formed through a partition wall defining a primary chamber and a secondary chamber in a valve housing, and a primary chamber side opening edge of the partition wall forming the communication channel. As a valve seat, and a pressure-receiving membrane body that opens and closes the communication passage on the basis of the atmospheric pressure while constituting a surface of the secondary chamber and opening and closing the communication passage on the basis of atmospheric pressure. A pressure adjusting valve that adjusts the pressure of a functional liquid supplied to a next chamber by an opening / closing operation of a valve body, supplies the pressure to a secondary chamber, and supplies the functional fluid to an ink jet type functional liquid droplet ejection head from the secondary chamber. The body is disposed in the primary chamber and opens / closes directly with respect to the valve seat, a holding part for holding the valve body, and a pressure receiving film body extending coaxially through the communication channel from the holding part A valve holder comprising an operating shaft portion that abuts against the pressure shaft, and the operating shaft portion tapers toward the pressure-receiving film body. Is formed into a shape, communication channel is characterized by being formed in a complementary shape with respect to actuation shaft portion.

  In this case, in a closed state where the valve body main body is in close contact with the valve seat, it is preferable that the operating shaft portion is inserted into the communication channel with a minute gap.

  According to these configurations, the operating shaft portion is formed in a tapered shape toward the pressure receiving membrane body, and the communication passage is formed in a shape complementary to the operating shaft portion, so that the valve body is opened. In doing so, the operating shaft portion moves away from the channel wall of the communication channel. Therefore, even if the operating shaft portion contacts the flow path wall of the communication flow path, a large sliding resistance does not occur, and the valve body that opens and closes in response to the movement of the pressure receiving film body can be smoothly It becomes impossible to operate. In addition, since the flow passage area of the communication flow path changes according to the valve opening of the valve body, for example, in the operation of forcibly sucking the functional liquid from the functional liquid droplet ejection head side, when the valve body is largely opened In response to this, a large amount of functional liquid can be allowed to flow into the secondary chamber without channel resistance (without pressure loss).

  In this case, the valve body is configured by an O-ring, and a retaining portion of the valve body that is formed by extending the operating shaft is formed at the boundary between the holding portion and the operating shaft. Is preferred.

  According to this configuration, the retaining portion of the O-ring can be easily formed by utilizing the tapered shape of the operating shaft portion.

  A liquid droplet ejection apparatus according to the present invention includes the pressure adjusting valve, a functional liquid supply unit, and a functional liquid droplet ejection head, and moves the functional liquid droplet ejection head relative to the workpiece while moving the functional liquid droplet ejection head relative to the workpiece. Then, drawing is performed by discharging the functional liquid.

  According to this configuration, the functional liquid can be stably supplied from the functional liquid supply means to the functional liquid droplet ejection head at an appropriate pressure, and the drawing quality of the functional liquid droplet ejection head on the workpiece can be improved.

It is a perspective view of a droplet discharge device. It is a top view of a droplet discharge device. It is a side view of a droplet discharge device. It is an external appearance perspective view of a carriage. It is a front and back external perspective view of a functional liquid droplet ejection head. It is a schematic diagram of a functional liquid supply apparatus. It is a top view of a pressure regulating valve. It is AA sectional drawing of a pressure control valve. It is an enlarged view around the valve body. It is explanatory drawing (1) for demonstrating the opening / closing operation | movement of a pressure regulating valve. It is explanatory drawing (2) for demonstrating the opening / closing operation | movement of a pressure regulating valve.

  Hereinafter, with reference to the accompanying drawings, a droplet discharge device including a pressure regulating valve according to an embodiment of the present invention will be described. This droplet discharge device is incorporated in a flat panel display production line, and uses, for example, a function droplet discharge head into which a special ink or a functional liquid that is a light-emitting resin liquid is introduced, and the color of a liquid crystal display device A light emitting element or the like to be used for each pixel of a filter or an organic EL device is formed. The pressure regulating valve supplies the functional liquid to the functional liquid droplet ejection head at a constant pressure.

  As shown in FIGS. 1 to 3, the droplet discharge device 1 is disposed on an X-axis support base 11 supported by a stone surface plate, and extends in the X-axis direction, which is the main scanning direction, to extend a workpiece W. Is disposed on a pair of Y-axis support bases 13 that are bridged across the X-axis table 2 via a plurality of columns 12 and in the sub-scanning direction. A Y-axis table 3 extending in the Y-axis direction, and 13 carriage units 4 suspended in a movable manner on the Y-axis table 3 and mounted with a plurality (twelve) functional liquid droplet ejection heads 14; , Is composed of. Further, the droplet discharge device 1 includes a chamber 5 that houses these devices in an atmosphere in which temperature and humidity are controlled, and a functional liquid that passes through the chamber 5 and supplies the functional liquid to the functional droplet discharge head 14. And a supply unit 6. In addition, a tank cabinet 7 for storing a main tank 51 and the like for storing the functional liquid is provided in a part of the side wall of the chamber 5. The droplet discharge device 1 discharges the functional liquid supplied from the functional liquid supply unit 6 by discharging the functional droplet discharge head 14 in synchronization with the driving of the X-axis table 2 and the Y-axis table 3. Then, a predetermined drawing pattern is drawn on the workpiece W.

  The droplet discharge device 1 includes a maintenance device 8 including a flushing unit 15, a suction unit 16, a wiping unit 17, and a discharge performance inspection unit 18, and these units are used for maintenance of the functional droplet discharge head 14. The function of the functional liquid droplet ejection head 14 is maintained and recovered. In the droplet discharge device 1 of the present embodiment, the workpiece W is drawn with the carriage unit 4 facing the area where the X-axis table 2 and the Y-axis table 3 intersect, and the Y-axis table 3 and the maintenance device 8 (suction unit) 16, the carriage unit 4 faces the area where the wiping unit 17) intersects, and the function of the functional liquid droplet ejection head 14 is maintained and recovered.

  As shown in FIGS. 2 and 3, the X-axis table 2 includes a set table 21 that sucks and sets the workpiece W, an X-axis first slider 22 that slidably supports the set table 21 in the X-axis direction, and the above-described configuration. An X-axis second slider 23 that slidably supports the flushing unit 15 and the discharge performance inspection unit 18 in the X-axis direction, and extends in the X-axis direction, and the X-axis first slider 22 and the X-axis second slider 23 are X A pair of left and right X-axis linear motors (not shown) that move in the axial direction.

  The Y-axis table 3 includes 13 bridge plates 24 each having 13 carriage units 4 suspended therein, 13 sets of Y-axis sliders (not shown) that support the bridge plates 24 in both ends, and a pair of Y-axis tables. A pair of Y-axis linear motors (not shown) are provided on the shaft support base 13 and move the bridge plate 24 in the Y-axis direction. In addition, the Y-axis table 3 performs sub-scanning of the functional liquid droplet ejection head 14 during drawing via each carriage unit 4 and causes the functional liquid droplet ejection head 14 to face the suction unit 16 and the wiping unit 17. In this case, the carriage units 4 can be moved independently and individually, or the 13 carriage units 4 can be moved together.

  As shown in FIG. 4, each carriage unit 4 includes three color droplets of R, G, and B, each of four (total 12) functional droplet ejection heads 14 and 12 functional droplet ejection heads 14. Each is divided into two groups, and a head unit 26 including a head plate 25 that supports each functional liquid droplet ejection head 14 so as to be disposed in the same horizontal plane is provided. In addition, each carriage unit 4 is capable of performing θ correction (θ rotation) on the pressure adjusting valve 27 (details will be described later) for supplying the functional liquid to the functional liquid droplet ejection head 14 under reduced pressure on the basis of atmospheric pressure. A θ rotation mechanism 28 to be supported and a suspension member 29 (both see FIG. 3) for supporting the head unit 26 on the bridge plate 24 via the θ rotation mechanism 28 are provided. In addition, each carriage unit 4 is provided with a sub-tank 46 (see FIG. 1) for temporarily storing the functional liquid (actually provided on the bridge plate 24). A functional liquid is supplied to each functional liquid droplet ejection head 14 at a constant pressure by the valve 27.

  As shown in FIG. 5, the functional liquid droplet ejection head 14 is a so-called double ink jet head, which is a functional liquid introduction part 31 having two connection needles 34, and a double head connected to the functional liquid introduction part 31. A substrate 32 and a head main body 33 that discharges the functional liquid are provided below the head substrate 32 (see FIG. 5A). The functional liquid introduction unit 31 has two connection needles 34 corresponding to the number of nozzle rows 39, and the functional liquid from the sub tank 46 is supplied via the functional liquid supply system 48 (see FIG. 6). It has become so. The head main body 33 includes a double pump unit 35 composed of a piezoelectric element or the like, and a nozzle plate 36 having a nozzle surface 38 on which a plurality of discharge nozzles 37 are formed. A large number of discharge nozzles 37 formed on the nozzle surface 38 of the nozzle plate 36 constitute two nozzle rows 39 arranged in parallel with each other and shifted by a half nozzle pitch position. , 180 discharge nozzles 37 arranged at an equal pitch (see FIG. 5B). The head substrate 32 is provided with two series of connectors 40, and each connector 40 is connected to a control device (not shown) via the flexible flat cable 19 (see FIG. 4). The drive waveform output from the control device is applied to each pump unit 35 (piezoelectric element) via each connector 40, so that the functional liquid is discharged from each discharge nozzle 37.

  Next, the functional liquid supply unit 6 will be described with reference to FIG. The functional liquid supply unit 6 supplies three sets of functional liquid supply devices (functional liquid supply means) 41 corresponding to the three colors described above, and a nitrogen gas supply that supplies compressed nitrogen gas for control to the main tank 51, the sub tank 46, and the like. A facility 42, a compressed air supply facility 43 for supplying compressed air for controlling various on-off valves, and a gas exhaust facility 44 for exhausting gas from each part are provided. The three sets of functional liquid supply devices 41 are connected to the functional liquid droplet ejection heads 14 corresponding to the three colors, respectively, so that the functional liquids of the corresponding colors are supplied to the functional liquid droplet ejection heads 14 of the respective colors. Is done.

  Each functional liquid supply device 41 includes a main tank unit 45 having two main tanks 51 and 51 that constitute a functional liquid supply source, 13 sub tanks 46 corresponding to each carriage unit 4, a main tank unit 45, The upstream-side functional liquid channel 47 connecting each sub-tank 46, the pressure adjusting valve 27 for supplying the functional liquid from the sub-tank 46 to the functional liquid droplet ejection head 14 under reduced pressure, and each sub-tank 46 and each pressure adjusting valve 27 are connected. 13 sets of downstream-side functional liquid channels 49. The functional liquid in each main tank 51 is pressurized by compressed nitrogen gas from the nitrogen gas supply equipment 42 connected thereto, and is supplied to the 13 sub-tanks 46 opened to the atmosphere via the gas exhaust equipment 44 in the upstream side functional liquid. It is selectively supplied via the flow path 47. Then, the functional liquid in the sub tank 46 is supplied to each functional liquid droplet ejection head 14 at a constant pressure via the downstream functional liquid flow path 49 and the pressure adjustment valve 27.

  The upstream functional liquid channel 47 has an upstream end connected to the main tank unit 45 and a downstream end connected to the sub tank 46 via a 13-branch channel 52. The upstream functional liquid channel 47 has a bubble removing unit 53 for removing bubbles in the functional liquid and an air vent for removing bubbles mixed in the upstream functional liquid channel 47 on the upstream side. A unit 54 is interposed. The functional liquid supplied from the main tank unit 45 is divided into 13 parts by the 13 branch flow paths 52 and supplied to each sub tank 46.

  Next, the pressure regulating valve 27 will be described with reference to FIGS. The pressure regulating valve 27 includes a regulating valve main body 61 constituting a main part, an inflow connector 62 inserted and joined to the inflow side of the regulating valve main body 61, and an outflow connector 63 inserted and joined to the outflow side of the regulating valve main body 61. ing. The inflow connector 62 is connected to the downstream functional liquid channel 49 connected to the sub tank 46 via the inflow side presser nut 64, and the outflow connector 63 is connected to the functional liquid via the outflow side presser nut 65. A head connection tube 100 connected to the droplet discharge head 14 is connected.

  The regulating valve main body 61 (pressure regulating valve 27) includes a valve housing 71 having a concave front center portion and a rear central portion, a lid body 72 that defines the primary chamber 75 together with the valve housing 71, and pressure received by the valve housing 71. A film body pressing member 74 that defines a secondary chamber 76 together with the valve housing 71 by fixing the film body 73. The primary chamber 75 and the secondary chamber 76 are coaxially arranged with a partition wall 77 constituting a part of the valve housing 71, and the primary portion (axial center) of the partition wall 77 has a primary portion. A communication channel 78 that communicates the chamber 75 and the secondary chamber 76 is formed to penetrate therethrough.

  The primary chamber 75 is formed by a rear surface of the valve housing 71 having a partition wall 77 as a main body and a lid 72. In addition, an inflow port 81 extending obliquely in the radial direction from the primary chamber 75 is formed in the upper portion of the primary chamber 75, and a primary chamber side opening 82 connected to the communication channel 78 is opened in the center. Yes. The primary chamber side opening 82 faces a valve body 84 that opens and closes the communication flow path 78 from the primary chamber 75 side. Correspondingly, the peripheral portion of the primary chamber side opening 82 A valve seat 83 to which the valve body 84 is separated is formed. The valve body 84 is biased with a weak force in the valve closing direction (secondary chamber 76 side) by the engaged valve body biasing spring 85.

  The secondary chamber 76 is formed by the front surface of the valve housing 71 and the pressure receiving film body 73. In addition, an outflow port 86 that extends directly below is formed in the lower part of the secondary chamber 76, and a secondary chamber side opening 87 that is continuous with the communication flow path 78 is opened in the center. A film body urging spring 88 for urging the pressure receiving film body 73 in the forward direction is interposed between the peripheral edge of the secondary chamber side opening 87 and the pressure receiving film body 73.

  The pressure receiving film body 73 includes a film body main body 91 made of a resin film, and a resin pressure receiving plate 92 bonded to the central portion of the film body main body 91. The pressure receiving plate 92 is formed in a disk shape concentric with the membrane body main body 91 and has a sufficiently small diameter with respect to the membrane body main body 91, and the valve body 84 comes into contact with the center thereof.

  As described above, the communication channel 78 is formed so as to penetrate the partition wall 77 constituting the central portion of the valve housing 71 from the orthogonal direction. The communication channel 78 is formed in a tapered shape with a primary chamber side opening 82 having a large diameter and a secondary chamber side opening 87 having a small diameter. As will be described in detail later, the operating shaft portion 99 of the valve body 84 inserted into the communication channel 78 is formed in a tapered shape, and the communication channel 78 is formed in a complementary shape to the operation shaft portion 99. ing.

  As shown in FIG. 9, the valve body 84 includes a valve body main body 94 that performs a valve function, and a valve holder 95 that holds the valve body main body 94. The valve body 84 opens and closes by being separated from and contacting the peripheral edge of the primary chamber side opening 82 serving as the valve seat 83 on the basis of the atmospheric pressure by the pressure receiving film body 73, and the functional liquid is primary by repeating this opening and closing. It flows intermittently from the chamber 75 into the secondary chamber 76.

  The valve body 94 is a so-called O-ring made of a chemical-resistant perfluoro rubber material, and is harder than the normally used silicone rubber valve body 94. And the front-end part of the valve body main body 94 with which the valve holder 95 was mounted | worn is separated from the valve seat 83, and there exists a function of a valve.

  The valve holder 95 is formed to have a substantially “T” cross section, and is a thick disk-shaped holder base 96 that engages with the valve body biasing spring 85 from the rear side in the axial direction on the same axis, and a holder base. 96, a holding part 97 that directly holds the valve body 94, a retaining part 98 that is connected to the holding part 97 and holds the valve body 94 in a retaining state, and extends from the tip of the retaining part 98. And an operating shaft portion 99. The valve body 94 is mounted over the retaining portion 98 from the operating shaft 99 side. Further, the operating shaft 99 (valve holder 95) is inserted into the communication channel 78, and the tip thereof is in contact with the pressure receiving plate 92 (pressure receiving film body 73). In addition, the holding part said to the claim is comprised from said holder base 96 and the holding part 97. FIG.

  The holder base 96 is formed in a circular plate shape and constitutes a pressure receiving portion on the primary chamber 75 side, and an annular spring receiving portion 102 to which a valve body urging spring 85 is engaged on the back side. Is formed. The holder base 96 receives the pressure of the primary chamber 75 on the back surface, and is biased by a valve body biasing spring 85 with a weak force in the valve closing direction.

  The holding portion 97 is connected to the holder base 96, is formed with a diameter slightly larger than the inner diameter of the valve body main body 94, and has a length that does not protrude from the front end of the valve body main body 94 when the valve body main body 94 is mounted. ing.

  The retaining portion 98 is constituted by a stepped portion that is continuous with the tip of the retaining portion 97, and retains the portion where the valve body main body 94 abuts against the valve seat 83 in a retaining state. That is, the front end of the retaining portion 98 is at a position retracted from the front end of the valve body main body 94, and is constituted by an extended portion from the operating shaft portion 99 formed slightly thicker than the inner diameter of the valve body main body 94. Yes.

  The operating shaft portion 99 is formed in a tapered shape tapered from the tip of the retaining portion 98 formed in a large diameter, and the tip is flat or hemispherical (not shown) so as to receive the pressure from the pressure receiving plate 92. ). Further, the operating shaft portion 99 is inserted into the communication channel 78 from the primary chamber 75 side, and the communication channel 78 has a complementary shape with respect to the operation shaft portion 99. In the valve closing state in which the valve body 94 is in contact with the valve seat 83, a minute gap is formed between the operating shaft portion 99 and the flow path wall of the communication flow path 78. Before the valve body main body 94 comes into contact with the valve seat 83, the operation shaft portion 99 does not contact the flow path wall. Then, when the valve body 94 is opened from this state and the operating shaft portion 99 is retracted, a flow passage having a sufficient cross-sectional area is secured between the flow passage wall of the communication flow passage 78 of the operating shaft portion 99. . In this case, the flow path area between the operating shaft portion 99 and the flow path wall changes in proportion to the stroke of the valve body 84.

  Next, the opening / closing operation of the valve body 84 will be described with reference to FIGS. 10 and 11. In the pressure regulating valve 27 configured as described above, for example, when the pressure in the secondary chamber 76 is lowered by the droplet ejection of the functional droplet ejection head 14 (see FIG. 10A), the pressure receiving film is caused by the atmospheric pressure. The body 73 is concavely deformed, and the pressure receiving plate 92 presses the valve body 84 toward the primary chamber 75 via the operating shaft portion 99. At this time, the operating shaft 99 moves backward so that the peripheral surface thereof is separated from the flow path wall of the communication flow path 78. At the same time, the valve body main body 94 is separated from the valve seat 83 and is opened (see FIG. 10B). In this way, when the valve body 84 is opened, the functional fluid in the primary chamber 75 flows into the secondary chamber 76 via the communication channel 78 and the pressure in the secondary chamber 76 increases, so that the pressure receiving membrane The body 73 is convexly deformed toward the outside. At this time, the operating shaft portion 99 moves forward by the urging force of the valve body urging spring 85 so that the peripheral surface thereof approaches the channel wall of the communication channel 78. At the same time, the valve body main body 94 comes into contact with the valve seat 83 by the spring force of the valve body urging spring 85 to be in a closed state.

  On the other hand, when the functional liquid is forcibly sucked at the initial filling or cleaning of the functional liquid, a large amount of the functional liquid is sucked, and accordingly, the negative pressure in the secondary chamber 76 increases rapidly. Opening is maximized. In such a case, a large amount of the functional liquid flows into the communication flow path 78, but the flow area of the communication flow path 78 further increases according to the valve opening (see FIG. 11), so that the functional liquid is discharged without pressure loss. 76.

  Thus, the pressure regulating valve 27 opens and closes the communication flow path 78 by the pressure receiving film body 73 being deformed by the balance between the atmospheric pressure and the internal pressure of the secondary chamber 76 connected to the functional liquid droplet ejection head 14. At that time, force acts on the valve body biasing spring 85 and the film body biasing spring 88 in a distributed manner, and the valve body 84 opens and closes very slowly by the elastic force of the valve body main body 94. For this reason, pressure fluctuation (cavitation) due to opening and closing of the valve body 84 is suppressed, and the ejection drive of the functional liquid droplet ejection head 14 is not affected.

  According to the above configuration, since both the operating shaft portion 99 and the communication channel 78 are formed in a tapered shape toward the pressure receiving membrane body 73, a sliding resistance is generated when the valve body 84 is opened. The valve body 84 can be opened and closed smoothly. Further, since the cross-sectional area of the communication flow path 78 changes according to the valve opening degree of the valve body 84, a predetermined functional liquid can be supplied to the secondary chamber 76 without any pressure loss regardless of the amount of the functional liquid flowing in. it can.

  DESCRIPTION OF SYMBOLS 1 ... Droplet discharge device 14 ... Functional droplet discharge head 27 ... Pressure adjustment valve 41 ... Functional liquid supply device 71 ... Valve housing 73 ... Pressure-receiving film body 75 ... Primary chamber 76 ... Secondary chamber 77 ... Septum 78 ... Communication flow Path 83 ... Valve seat 84 ... Valve body 94 ... Valve body body 95 ... Valve holder 97 ... Holding part 98 ... Stopping part 99 ... Operating shaft part W ... Workpiece

Claims (4)

A communication channel formed through a partition wall defining a primary chamber and a secondary chamber in the valve housing, and a primary chamber side opening edge of the partition wall forming the communication channel as a valve seat, A valve body that advances and retreats with respect to the valve seat to open and close the communication flow path; and a pressure receiving film body that constitutes one surface of the secondary chamber and opens and closes the valve body on the basis of atmospheric pressure,
The functional liquid supplied from the functional liquid supply means to the primary chamber is pressure-adjusted by the opening and closing operation of the valve body and supplied to the secondary chamber, and the secondary chamber supplies an ink jet type functional liquid droplet ejection head. A pressure regulating valve to be supplied,
The valve body is disposed in the primary chamber and is separated from and in contact with the valve seat; a holding portion that holds the valve body main body; and the communication channel is coaxially inserted from the holding portion. A valve holder comprising an operating shaft portion extending and abutting against the pressure-receiving membrane body,
The primary chamber side opening edge portion serving as the valve seat is configured perpendicular to the advancing / retreating direction of the valve body,
The holding portion is formed with a retaining portion that retains the valve body main body and prevents the valve body main body from moving forward and backward in the forward / backward direction, and the front end of the retaining portion in the forward / backward direction is The pressure regulating valve is located at a position retracted from the front end of the valve body in the forward / backward direction.   2. The pressure according to claim 1, wherein when the valve body is in close contact with the valve seat, the operating shaft portion is inserted into the communication channel with a minute gap. tuning valve. The valve body is composed of an O-ring,
The pressure regulating valve according to claim 1, wherein the retaining portion is formed by extending the operating shaft portion at a boundary portion between the holding portion and the operating shaft portion. A pressure regulating valve according to any one of claims 1 to 3,
The functional liquid supply means;
The functional liquid droplet ejection head,
A liquid droplet ejection apparatus for performing drawing by ejecting a functional liquid onto the work while moving the functional liquid droplet ejection head relative to the work.

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