JP2010188259A - Functional liquid supply system and droplet discharge apparatus provided with the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a functional liquid supply system capable of supplying a functional liquid to a plurality of functional liquid droplet discharge heads from a single pressure adjusting valve under the same pressure condition, and a droplet discharge apparatus provided with the same. <P>SOLUTION: The functional liquid supply system includes: the single pressure adjusting valve 27 for opening/closing a valve body provided in a communicating flow path communicating a primary chamber and a secondary chamber inside a valve housing at an atmospheric pressure standard by a pressure receiving film body configuring one surface of the secondary chamber, adjusting the pressure of the functional liquid supplied from a functional liquid supply device 41 and supplying it; the plurality of functional liquid droplet discharge heads 14 which are communicated with the secondary chamber, receive the supply of the functional liquid from the pressure adjusting valve 27 and are disposed within the same horizontal plane; and a flow path unit 55 for connecting the secondary chamber and the plurality of functional liquid droplet discharge heads 14. The flow path unit 55 is configured such that a plurality of flow paths from the secondary chamber to the respective functional liquid droplet discharge heads 14 have the same pressure loss to the same flow rate. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a functional liquid supply system that collectively supplies functional liquid to a plurality of ink jet type functional liquid droplet ejection heads from a single pressure regulating valve, and a liquid droplet ejection apparatus including the functional liquid supply system.

Conventionally, as this type of functional liquid supply device (functional liquid supply system), a plurality of functional liquid droplet ejection heads that eject functional liquid, and functional liquid droplet ejection that supplies functional liquid to each functional liquid droplet ejection head under reduced pressure. One having a number of pressure regulating valves equal to the number of heads and a plurality of tubes (flow path units) respectively connecting the functional liquid droplet ejection heads and the pressure regulating valves is known (see Patent Document 1).
In this case, the functional liquid droplet ejection head and the pressure adjustment valve are in one-to-one correspondence, and the pressure of the functional liquid supplied to the functional liquid droplet ejection head is always constant by the pressure adjustment valve. Has been.

JP 2006-82538 A

  However, in such a functional liquid supply apparatus, since the pressure regulating valves are provided corresponding to the respective functional liquid droplet ejection heads, pressure regulating valves corresponding to the number of the functional liquid droplet ejection heads are required. In addition, since the apparatus becomes larger in size and there are individual differences in the pressure regulating valve, the functional liquid supply pressure differs for each functional liquid droplet ejection head, and the functional liquid ejection weight from the functional liquid droplet ejection head is made uniform. For this purpose, it is necessary to cancel the pressure difference by adjusting the voltage applied to the functional liquid droplet ejection head. Further, since the pressure adjusting valve is mounted on the carriage together with the functional liquid droplet ejection head, there is a problem that the weight of the carriage increases. In such a case, if one pressure adjusting valve is provided for a plurality of functional liquid droplet ejection heads, the above problem is reduced. For example, the flow path may be branched between a single pressure regulating valve and a plurality of functional liquid droplet ejection heads via a large-diameter pipe-like manifold. However, in this case, since the length of the flow path from the pressure regulating valve to each functional liquid droplet ejection head is different, even if a manifold is used, the pressure loss of each flow path cannot be made the same. That is, the pressure loss cannot be made the same so that the discharge amount is not uneven among the plurality of functional liquid droplet ejection heads that receive the functional liquid supplied from one pressure regulating valve.

  The present invention provides a functional liquid supply system capable of supplying a functional liquid to a plurality of functional liquid droplet ejection heads from a single pressure regulating valve under the same pressure condition, and a liquid droplet ejection apparatus including the functional liquid supply system. That is the issue.

  In the functional liquid supply system of the present invention, a valve body provided in a communication flow path that communicates a primary chamber and a secondary chamber in a valve housing is converted to atmospheric pressure by a pressure-receiving film body that constitutes one surface of the secondary chamber. A single pressure regulating valve that opens and closes on the basis and adjusts the pressure of the functional liquid supplied from the functional liquid supply means to the primary chamber and supplies the pressure through the secondary chamber, and communicates with the secondary chamber. A plurality of ink-jet functional liquid droplet ejection heads that receive the functional liquid from the liquid crystal and are disposed in the same horizontal plane, and a flow path unit that connects the secondary chamber and the plurality of functional liquid droplet ejection heads. The flow path unit is configured such that a plurality of flow paths from the secondary chamber to each functional liquid droplet ejection head have the same pressure loss with respect to the same flow rate.

  According to this configuration, when the functional liquid is ejected from the plurality of functional liquid droplet ejection heads, the pressure in the secondary chamber is reduced, and the valve body opens the communication flow path, so that the functional liquid passes through the secondary chamber. To the functional liquid droplet ejection head. At this time, since each flow path from the pressure regulating valve to each functional liquid droplet ejection head is configured to have the same pressure loss with respect to the same flow rate, the functional liquid from the pressure regulating valve has the same pressure. Are supplied to a plurality of functional liquid droplet ejection heads. That is, the functional liquid can be supplied to each functional liquid droplet ejection head from the single pressure regulating valve under the same pressure condition. Note that the same pressure loss is required for the same flow rate, and the diameter and length of each flow path are not necessarily the same.

  In this case, the flow path unit includes a main flow path connected to the secondary chamber, a branch section connected to the downstream end of the main flow path and branching the main flow path, and a plurality of lines extending from the branch section to each functional liquid droplet ejection head. It is preferable that it is comprised from these branch flow paths.

  According to this configuration, the functional liquid that has flowed through the main flow path is branched into a plurality of branches, and is supplied to the respective functional liquid droplet ejection heads via the respective branched flow paths. Moreover, the pressure loss can be easily made the same by branching radially in the branching section and making the plurality of branch flow paths have the same diameter and the same length.

  In this case, the plurality of functional liquid droplet ejection heads are composed of an even number of functional liquid droplet ejection heads of 4 or more, and the flow path unit includes a main flow path connected to the secondary chamber and a downstream end of the main flow path. Manifold-like distribution flow path connected to the middle position in the direction, a pair of branch sections connected to both outer ends of the distribution flow path, each branching a plurality of flow paths, and each functional liquid from the pair of branch sections It is preferable that it is composed of a plurality of branch passages reaching the droplet discharge head.

  According to this configuration, the functional liquid that has flowed through the main flow path is divided by the manifold-like distribution flow path and the branch portion, and is supplied to the functional liquid droplet ejection head via each branch flow path. Therefore, since the pressure loss from the pressure regulating valve is almost canceled by the manifold-like distribution flow path in which the main flow path is connected to the intermediate position, the pressure of the functional liquid supplied to each functional liquid droplet ejection head is further constant. Can be.

  In this case, each functional liquid droplet ejection head has a plurality of functional liquid inlets, the branch flow path is configured with twice the number of the plurality, and the branching portion branches twice as many as the plurality of branches. Is preferred.

  According to this configuration, even when there are a plurality of functional liquid inlets, the functional liquid can be supplied to each functional liquid droplet ejection head with a constant pressure.

  In this case, the plurality of functional liquid droplet ejection heads are composed of an even number of functional liquid droplet ejection heads, and the flow path unit repeats two branches from the secondary chamber to a plurality of functional liquid droplet ejection heads. It is preferable that the road is composed of roads.

  According to this configuration, since the functional liquid is supplied to a plurality of functional liquid droplet ejection heads by repeating two branches, it is possible to suppress variations in pressure loss due to flow path branching as much as possible. The pressure of the functional liquid supplied to can be made constant with high accuracy.

  In this case, it is preferable that the flow path unit is composed of a plurality of individual supply flow paths corresponding to the plurality of functional liquid droplet ejection heads that are directly connected to the secondary chamber.

  In this case, the secondary chamber is formed with a plurality of outflow ports to which the individual supply channels are connected, and the plurality of outflow ports are arranged radially with respect to the center of the secondary chamber. ,preferable.

  According to these configurations, each individual supply channel is directly connected to the secondary chamber, so that pressure loss due to the branching of the channel can be suppressed and the individual droplet supply heads are supplied. The pressure of the functional liquid can be made the same more accurately and easily.

  A droplet discharge device of the present invention includes the above-described functional liquid supply system and a functional liquid supply unit, and moves a plurality of functional liquid droplet discharge heads relative to the workpiece while discharging the functional liquid onto the workpiece. It is characterized by performing drawing by discharging.

  According to this configuration, since the functional liquid can be supplied to the plurality of functional liquid droplet ejection heads from the single pressure regulating valve under the same pressure condition, the liquid droplet ejection apparatus can be reduced in size and weight. .

It is a perspective view of a droplet discharge device. It is a top view of a droplet discharge device. It is a side view of a droplet discharge device. It is an external appearance perspective view of a carriage. It is a front and back external perspective view of a functional liquid droplet ejection head. It is a schematic diagram of a functional liquid supply apparatus. It is a top view of a pressure regulating valve. It is AA sectional drawing of a pressure control valve. It is a mimetic diagram of a functional fluid supply system concerning a 1st embodiment. It is a schematic diagram of the functional liquid supply system which concerns on 2nd Embodiment. It is a schematic diagram of the functional liquid supply system which concerns on 3rd Embodiment. It is a schematic diagram of the functional liquid supply system which concerns on 4th Embodiment.

  Hereinafter, with reference to the attached drawings, a liquid droplet ejection apparatus including a functional liquid supply system according to an embodiment of the present invention will be described. This droplet discharge device is incorporated in a flat panel display production line. For example, a liquid droplet display using a functional droplet discharge head into which a special ink or a functional liquid such as a luminescent resin liquid is introduced at a constant pressure is used. The color filter of the device and the light emitting element that becomes each pixel of the organic EL device are formed. Further, the functional liquid supply system supplies functional liquids to a plurality of functional liquid droplet ejection heads collectively at a constant pressure.

  As shown in FIGS. 1 to 3, the droplet discharge device 1 is disposed on an X-axis support base 11 supported by a stone surface plate, and extends in the X-axis direction, which is the main scanning direction, to extend a workpiece W. Is disposed on a pair of Y-axis support bases 13 that are bridged across the X-axis table 2 via a plurality of columns 12 and in the sub-scanning direction. A Y-axis table 3 extending in the Y-axis direction, and 13 carriage units 4 suspended in a movable manner on the Y-axis table 3 and mounted with a plurality (twelve) functional liquid droplet ejection heads 14; , Is composed of. Further, the droplet discharge device 1 includes a chamber 5 that houses these devices in an atmosphere in which temperature and humidity are controlled, and a functional liquid that passes through the chamber 5 and supplies the functional liquid to the functional droplet discharge head 14. And a supply unit 6. In addition, a tank cabinet 7 for storing a main tank 51 and the like for storing the functional liquid is provided in a part of the side wall of the chamber 5. The droplet discharge device 1 discharges the functional liquid supplied from the functional liquid supply unit 6 by discharging the functional droplet discharge head 14 in synchronization with the driving of the X-axis table 2 and the Y-axis table 3. Then, a predetermined drawing pattern is drawn on the workpiece W.

  The droplet discharge device 1 includes a maintenance device 8 including a flushing unit 15, a suction unit 16, a wiping unit 17, and a discharge performance inspection unit 18, and these units are used for maintenance of the functional droplet discharge head 14. The function of the functional liquid droplet ejection head 14 is maintained and recovered. In the droplet discharge device 1 of the present embodiment, the workpiece W is drawn with the carriage unit 4 facing the area where the X-axis table 2 and the Y-axis table 3 intersect, and the Y-axis table 3 and the maintenance device 8 (suction unit) 16, the carriage unit 4 faces the area where the wiping unit 17) intersects, and the function of the functional liquid droplet ejection head 14 is maintained and recovered.

  As shown in FIGS. 2 and 3, the X-axis table 2 supports the set table 21 having a mechanism capable of sucking and setting the workpiece W and correcting in the θ-axis direction, and the set table 21 slidably in the X-axis direction. The X-axis first slider 22, the X-axis second slider 23 that supports the flushing unit 15 and the discharge performance inspection unit 18 slidably in the X-axis direction, and the X-axis first slider extending in the X-axis direction. A pair of left and right X-axis linear motors (not shown) that move the slider 22 and the X-axis second slider 23 in the X-axis direction are provided.

  The Y-axis table 3 includes 13 bridge plates 24 each having 13 carriage units 4 suspended therein, 13 sets of Y-axis sliders (not shown) that support the bridge plates 24 in both ends, and a pair of Y-axis tables. A pair of Y-axis linear motors (not shown) are provided on the shaft support base 13 and move the bridge plate 24 in the Y-axis direction. In addition, the Y-axis table 3 performs sub-scanning of the functional liquid droplet ejection head 14 during drawing via each carriage unit 4 and causes the functional liquid droplet ejection head 14 to face the suction unit 16 and the wiping unit 17. In this case, the carriage units 4 can be moved independently and individually, or the 13 carriage units 4 can be moved together.

  As shown in FIG. 4, each carriage unit 4 includes three color droplets of R, G, and B, each of four (total 12) functional droplet ejection heads 14 and 12 functional droplet ejection heads 14. Each is divided into two groups, and a head unit 26 including a head plate 25 that supports each functional liquid droplet ejection head 14 so as to be disposed in the same horizontal plane is provided. In addition, each carriage unit 4 has a pressure adjusting valve 27 (details will be described later) that collectively feed the functional liquid to the functional liquid droplet ejection head 14 for each color, and the head unit 26 is subjected to θ correction (θ rotation). A θ rotation mechanism 28 that supports the head unit 26 and the suspension member 29 that supports the head unit 26 on the bridge plate 24 via the θ rotation mechanism 28 are provided. In addition, each carriage unit 4 is provided with a sub-tank 46 (see FIG. 1) for temporarily storing the functional liquid (actually provided on the bridge plate 24). A functional liquid is supplied to each functional liquid droplet ejection head 14 at a constant pressure by a functional liquid supply system 48 (see FIG. 9) described later.

  As shown in FIG. 5, the functional liquid droplet ejection head 14 is a so-called double ink jet head, and includes a functional liquid introduction section 31 having two connection needles (functional liquid introduction ports) 34, and a functional liquid introduction section 31. 2 head substrates 32, and a head body 33 that discharges the functional liquid continuously below the head substrate 32 (see FIG. 5A). The functional liquid introduction unit 31 has two connection needles 34 corresponding to the number of nozzle rows 39, and the functional liquid from the sub tank 46 is supplied via the functional liquid supply system 48. Yes. The head main body 33 includes a double pump unit 35 composed of a piezoelectric element or the like, and a nozzle plate 36 having a nozzle surface 38 on which a plurality of discharge nozzles 37 are formed. A large number of discharge nozzles 37 formed on the nozzle surface 38 of the nozzle plate 36 constitute two nozzle rows 39 arranged in parallel with each other and shifted by a half nozzle pitch position. , 180 discharge nozzles 37 arranged at an equal pitch (see FIG. 5B). The head substrate 32 is provided with two series of connectors 40, and each connector 40 is connected to a control device (not shown) via the flexible flat cable 19 (see FIG. 4). The drive waveform output from the control device is applied to each pump unit 35 (piezoelectric element) via each connector 40, so that the functional liquid is discharged from each discharge nozzle 37.

  Next, the functional liquid supply unit 6 will be described with reference to FIG. The functional liquid supply unit 6 supplies three sets of functional liquid supply devices (functional liquid supply means) 41 corresponding to the three colors described above, and a nitrogen gas supply that supplies compressed nitrogen gas for control to the main tank 51, the sub tank 46, and the like. A facility 42, a compressed air supply facility 43 for supplying compressed air for controlling various on-off valves, and a gas exhaust facility 44 for exhausting gas from each part are provided. The three sets of functional liquid supply devices 41 are connected to the functional liquid droplet ejection heads 14 corresponding to the three colors, respectively, so that the functional liquids of the corresponding colors are supplied to the functional liquid droplet ejection heads 14 of the respective colors. Is done.

  Each functional liquid supply device 41 includes a main tank unit 45 having two main tanks 51 and 51 that constitute a functional liquid supply source, 13 sub tanks 46 corresponding to each carriage unit 4, a main tank unit 45, An upstream-side functional liquid channel 47 connecting each sub-tank 46, a functional liquid supply system 48 that collectively supplies the functional liquid from the sub-tank 46 to the plurality of functional liquid droplet ejection heads 14, and each sub-tank 46 and each functional liquid And 13 sets of downstream-side functional liquid channels 49 that connect the supply system 48. The functional liquid in each main tank 51 is pressurized by compressed nitrogen gas from the nitrogen gas supply equipment 42 connected thereto, and is supplied to the 13 sub-tanks 46 opened to the atmosphere via the gas exhaust equipment 44 in the upstream side functional liquid. It is selectively supplied via the flow path 47. Then, the functional liquid in the sub tank 46 is supplied to each functional liquid droplet ejection head 14 via the downstream functional liquid channel 49 and the functional liquid supply system 48.

  The upstream functional liquid channel 47 has an upstream end connected to the main tank unit 45 and a downstream end connected to the sub tank 46 via a 13-branch channel 52. The upstream functional liquid channel 47 has a bubble removing unit 53 for removing bubbles in the functional liquid and an air vent for removing bubbles mixed in the upstream functional liquid channel 47 on the upstream side. A unit 54 is interposed. The functional liquid supplied from the main tank unit 45 is divided into 13 parts by the 13 branch flow paths 52 and supplied to each sub tank 46.

  As described above, each carriage unit 4 is provided with three sub-tanks 46 corresponding to the three colors R, G, and B, and each carriage unit 4 is provided with the three colors R, G, and B. Four (total 12) functional liquid droplet ejection heads 14 are mounted. Therefore, the functional liquid of each color is supplied from the corresponding sub tank 46 to the corresponding functional liquid supply system 48 via the downstream functional liquid flow path 49. Further, the functional liquid supplied to the functional liquid supply system 48 for each color is supplied from the single pressure adjusting valve 27 for the same color to the four functional liquid droplet ejection heads 14 for the same color.

  Here, with reference to FIG. 6 thru | or FIG. 9, each functional liquid supply system 48 is demonstrated. Each functional liquid supply system 48 includes a plurality of (four) functional liquid droplet ejection heads 14 described above, a single pressure adjusting valve 27 that supplies the functional liquid droplets to the functional liquid droplet ejection heads 14 under reduced pressure, and And a flow path unit 55 that connects the pressure regulating valve 27 and the plurality of functional liquid droplet ejection heads 14.

  As shown in FIG. 7, the pressure regulating valve 27 includes a regulating valve main body 61 constituting a main part, an inflow connector 62 inserted and joined to the inflow side of the regulating valve main body 61, and an inlet joined to the outflow side of the regulating valve body 61. And an outflow connector 63. The inflow connector 62 is connected to a downstream functional liquid channel 49 connected to the sub tank 46 via an inflow side presser nut 64. Similarly, the outflow connector 63 is connected to the outflow connector 63 via an outflow side presser nut 65. A flow path unit 55 connected to the functional liquid droplet ejection head 14 is connected. Although details will be described later, the outflow connector 63 of the embodiment also serves as the main flow path 101 and the T-shaped joint 102 of the flow path unit 55.

  As shown in FIGS. 7 and 8, the regulating valve main body 61 (pressure regulating valve 27) defines a primary chamber 75 together with the valve housing 71 in which the central portions of the front and rear surfaces are formed in a concave shape, and the valve housing 71. A lid 72 and a film body pressing member 74 that defines a secondary chamber 76 together with the valve housing 71 by fixing the pressure receiving film body 73 to the valve housing 71 are configured. The primary chamber 75 and the secondary chamber 76 are coaxially arranged with a partition wall 77 constituting a part of the valve housing 71, and the primary portion (axial center) of the partition wall 77 has a primary portion. A communication channel 78 that communicates the chamber 75 and the secondary chamber 76 is formed to penetrate therethrough.

  The primary chamber 75 is formed by a rear surface of the valve housing 71 having a partition wall 77 as a main body and a lid 72. In addition, an inflow port 81 extending obliquely in the radial direction from the primary chamber 75 is formed in the upper portion of the primary chamber 75, and a primary chamber side opening 82 connected to the communication channel 78 is opened in the center. Yes. The primary chamber side opening 82 faces a valve body 84 that opens and closes the communication flow path 78 from the primary chamber 75 side. Correspondingly, the peripheral portion of the primary chamber side opening 82 A valve seat 83 to which the valve body 84 is separated is formed. Further, the valve body 84 is urged by a weak force in the valve closing direction (secondary chamber 76 side) by a valve body urging spring 85 interposed between the valve body 84 and the lid body 72.

  The secondary chamber 76 is formed by the front surface of the valve housing 71 and the pressure receiving film body 73. In addition, an outflow port 86 that extends directly below is formed in the lower part of the secondary chamber 76, and a secondary chamber side opening 87 that is continuous with the communication flow path 78 is opened in the center. A film body urging spring 88 for urging the pressure receiving film body 73 in the forward direction is interposed between the peripheral edge of the secondary chamber side opening 87 and the pressure receiving film body 73.

  The pressure receiving film body 73 includes a film body main body 91 made of a resin film, and a resin pressure receiving plate 92 bonded to the central portion of the film body main body 91. The pressure receiving plate 92 is formed in a disc shape concentric with the membrane body main body 91 and has a sufficiently small diameter with respect to the membrane body main body 91, and the valve body 84 is in contact with the center thereof.

  The valve body 84 includes an annular O-ring 93 that constitutes the valve body main body, and a valve body holder 94 that holds the O-ring 93, and the incorporated O-ring 93 is an atmospheric pressure by the pressure-receiving film body 73. As a reference, the functional fluid intermittently flows from the primary chamber 75 into the secondary chamber 76 by being separated from and contacting the valve seat 83 (the peripheral portion of the primary chamber side opening 82).

  In the pressure regulating valve 27 configured in this way, for example, when the pressure in the secondary chamber 76 is lowered by the droplet ejection of the functional droplet ejection head 14, the pressure-receiving film body 73 is deformed in a concave shape by the atmospheric pressure, The pressure receiving plate 92 presses the valve body 84 toward the primary chamber 75 side. As a result, the valve body 84 is opened, and the functional liquid flows from the primary chamber 75 into the secondary chamber 76 via the communication channel 78. As the inflow of the functional liquid proceeds, the pressure in the secondary chamber 76 eventually increases, and the pressure-receiving film body 73 is convexly deformed toward the outside. As a result, the pressure receiving plate 92 moves forward away from the valve body 84, and at the same time, the valve body 84 is advanced by the valve body urging spring 85 to be in a closed state.

  That is, the pressure regulating valve 27 opens and closes the communication flow path 78 by the pressure receiving film body 73 being deformed by the balance between the atmospheric pressure and the internal pressure of the secondary chamber 76 connected to the functional liquid droplet ejection head 14. At that time, force acts on the valve body biasing spring 85 and the film body biasing spring 88 in a distributed manner, and the valve body 84 opens and closes very slowly by the elastic force of the O-ring 93. For this reason, pressure fluctuation (cavitation) due to opening and closing of the valve body 84 is suppressed, and the ejection drive of the functional liquid droplet ejection head 14 is not affected. Of course, since the pulsation generated on the primary chamber 75 side is also cut off by the valve body 84, it can be absorbed (damper function).

  Next, each flow path unit 55 will be described with reference to FIG. As described above, the flow path unit 55 supplies the functional liquid from the single pressure regulating valve 27 to the plural (four in this embodiment) functional liquid droplet ejection heads 14 of the same color at the same pressure. The main flow path 101 connected to the secondary chamber 76 (outflow port 86) of the pressure regulating valve 27 and the downstream end of the main flow path 101 are connected via a T-shaped joint 102 (two-branch joint). A manifold-like distribution flow path 103, a pair of branch sections 104 that are connected to both outer ends of the distribution flow path 103, each branching a plurality of flow paths, and each functional liquid droplet ejection head 14 from the pair of branch sections 104. And a plurality of branch channels 105 (four in the illustrated example).

  The distribution channel 103 is formed with a larger diameter than the main channel 101 and the branch channel 105, and the main channel 101 is connected to the intermediate position via a T-shaped joint 102. The main flow path 101 and the T-shaped joint 102 of the embodiment also serve as the outflow connector 63 in practice, and are directly connected to the outflow port 86 of the pressure regulating valve 27 as the outflow connector 63. The functional liquid flowing from the main flow path 101 flows into the distribution flow path 103, so that the pressure loss is almost canceled. Each branch part 104 is a special joint connected to both outer ends of the distribution flow path 103, and is composed of a four-branch joint that radially branches the functional liquid flowing from the distribution flow path 103 in four directions. Yes.

  Each branch channel 105 has an upstream end connected to the branch portion 104 and a downstream end connected to each connection needle 34 of the functional liquid droplet ejection head 14. Further, the total of eight branch flow paths 105 are formed to have the same diameter and the same length so that the pressure loss of the flow paths from the pressure regulating valve 27 to the respective functional liquid droplet ejection heads 14 becomes the same. It is configured. That is, the functional liquid supplied from the secondary chamber 76 is divided into two by the distribution flow path 103, further divided by the branching section 104, and then four functional liquid droplet ejection heads 14 through the connection needles 34. The two nozzle rows 39 are supplied at the same pressure.

  In this embodiment, since the connecting needles 34 of the functional liquid droplet ejection head 14 are configured in two, a four-branch joint (branch portion 104) is used at the downstream end of the distribution channel 103. The number of branches of the branch section 104 is determined according to the number of needles 34, that is, the nozzle rows 39. Further, the two series of functional liquid droplet ejection heads 14 may be branched in a Y-shape or a T-shape in the vicinity of each functional liquid droplet ejection head 14 instead of bifurcating from the branching portion 104. (See FIGS. 10 to 12). Furthermore, the number of functional liquid droplet ejection heads 14 that supply reduced pressure from a single pressure regulating valve 27 is not limited to four, and may be larger as long as it is an even number.

  Next, a functional liquid supply system 48 according to the second embodiment will be described with reference to FIG. In addition, in order to avoid the duplicate description, a different part from 1st Embodiment is mainly demonstrated. The functional liquid supply system 48 has a plurality of functions by repeating two branches from the pressure regulating valve 27, the even number (four in the illustrated example) of the functional liquid droplet ejection heads 14, and the secondary chamber 76. And a tree-type flow path unit 55 extending to the droplet discharge head 14. In this case, the outflow connector 63 is formed of a union-type joint (half union) unlike the first embodiment.

  Specifically, the flow path unit 55 includes the above-described main flow path 101, a first branch flow path 112 branched from the downstream end of the main flow path 101 via the first branch portion 111 (T-shaped branch), and a first branch A second branch channel 114 that is bifurcated (T-shaped branch) from the downstream end of the channel 112 via the second branch unit 113, and a third branch unit 115 from the downstream end of the second branch channel 114, respectively. And a third branch channel 116 that is bifurcated (Y-shaped branch). In other words, the channel unit 55 includes one main channel 101, two first branch channels 112, four second branch channels 114, eight third branch channels 116, and each channel. Each branch part 111, 113, 115 is branched, and each third branch flow path 116 is connected to each connection needle 34. Further, each first branch channel 112, each second branch channel 114, and each third branch channel 116 are formed to have the same diameter and the same length. The pressure loss of the flow path to the discharge head 14 is configured to be the same. That is, the functional liquid supplied from the secondary chamber 76 is divided into eight by repeating two branches three times, and is supplied to the plurality of functional liquid droplet ejection heads 14 through the connecting needles 34 at the same pressure. .

  Next, a functional liquid supply system 48 according to the third embodiment will be described with reference to FIG. The functional liquid supply system 48 includes a pressure control valve 27 improved to have a plurality of (four in the illustrated example) outflow ports 86 and a plurality (four in the illustrated example) of functional liquid droplet ejection heads. 14 and a channel unit 55 that is directly connected to the secondary chamber 76 and includes a plurality of (four in the illustrated example) individual supply channels 121 corresponding to the plurality of functional liquid droplet ejection heads 14. I have.

  Specifically, a plurality of outflow ports 86 in which four union type (half union) outflow connectors 63 are inserted and joined are formed in the lower part of the valve housing 71 constituting the secondary chamber 76 of the pressure regulating valve 27. The outflow ports 86 are arranged radially with respect to the center of the secondary chamber 76 and at equal intervals in the circumferential direction. Each individual supply channel 121 has an upstream end connected to each outflow connector 63, and is divided into two branches (Y-shaped branches) on the downstream side and connected to each connection needle 34. In addition, each individual supply channel 121 has the same diameter and the same length, and the pressure loss of the channel from the pressure regulating valve 27 to each functional liquid droplet ejection head 14 becomes the same. ing. That is, the functional liquid is supplied by being directly divided into four from the secondary chamber 76, branched into two on the downstream side, and then supplied to the respective functional liquid droplet ejection heads 14 at the same pressure via the respective connecting needles 34. .

  Next, a functional liquid supply system 48 according to the fourth embodiment will be described with reference to FIG. The functional liquid supply system 48 includes a plurality of (four in the illustrated example) functional liquid droplet ejection heads 14, the pressure regulating valve 27 having a single outflow port 86 formed therein, and a pressure regulating valve. 27 and a flow path unit 55 that is branched into a plurality and connected to each functional liquid droplet ejection head 14.

  Specifically, the channel unit 55 is connected to the union type (half union) outflow connector 63 inserted into and joined to the outflow port 86 and the downstream end of the main channel 101. And a plurality of branch flow paths 105 extending from the branch portion 104 to each functional liquid droplet ejection head 14. In this case, the branch section 104 includes a branch section main body 108 that is a main body, an inflow branch port 106 that is connected to the upstream side and into which the functional liquid flows, and an outflow branch port 107 that is connected to the downstream side and from which the functional liquid flows out. The functional liquid flowing from the main flow path 101 is branched into four. Each branch channel 105 is connected to the branch part 104, and is branched into two branches (Y-shaped branch) on the downstream side, and connected to each connection needle 34.

  Each branch channel 105 is formed to have the same diameter and the same length, and the pressure loss of the channel from the pressure regulating valve 27 to each functional liquid droplet ejection head 14 becomes the same. Yes. That is, the functional liquid is divided into four parts and supplied by the branching section 104, and is branched into two parts on the downstream side, and then supplied to each functional liquid droplet ejection head 14 through the connection needles 34 at the same pressure. In the fourth embodiment, the main channel 101 may be formed with a large diameter so that the manifold has a function, and a four-branch joint may be provided in place of the cylindrical manifold (not shown).

  According to the above configuration, each flow path from the pressure regulating valve 27 to each functional liquid droplet ejection head 14 is configured to have the same pressure loss with respect to the same flow rate. 27, the functional liquid can be supplied to each functional liquid droplet ejection head 14 under the same pressure condition.

  In this embodiment, the case of using functional liquids of three colors of R, G, and B is shown. However, a total of six functional liquids including three colors of C, M, and Y in addition to R, G, and B are used. Even when it is used, the pressure loss of the flow path from the pressure regulating valve 27 to each functional liquid droplet ejection head 14 may be made the same.

  DESCRIPTION OF SYMBOLS 1 ... Droplet discharge device 14 ... Functional droplet discharge head 27 ... Pressure adjusting valve 34 ... Connection needle 41 ... Functional liquid supply device 48 ... Functional liquid supply system 55 ... Flow path unit 71 ... Valve housing 73 ... Pressure receiving film body 75 ... Primary chamber 76 ... Secondary chamber 78 ... Communication channel 84 ... Valve element 86 ... Outlet port 101 ... Main channel 103 ... Distribution channel 104 ... Branch part 105 ... Branch channel 121 ... Individual supply channel W ... Workpiece

Claims (8)

Supply of functional fluid by opening and closing the valve body provided in the communication flow path that communicates the primary chamber and the secondary chamber in the valve housing with reference to the atmospheric pressure by the pressure-receiving film body constituting one surface of the secondary chamber. A single pressure regulating valve for regulating the pressure of the functional liquid supplied from the means to the primary chamber and supplying the functional fluid via the secondary chamber;
A plurality of ink jet type functional liquid droplet ejection heads that communicate with the secondary chamber, receive functional liquid from the pressure regulating valve, and are disposed in the same horizontal plane;
A flow path unit connecting the secondary chamber and the plurality of functional liquid droplet ejection heads,
The flow path unit is configured such that a plurality of flow paths from the secondary chamber to the functional liquid droplet ejection heads have the same pressure loss with respect to the same flow rate. Supply system. The flow path unit includes a main flow path connected to the secondary chamber;
A branching section connected to the downstream end of the main flow path and branching the main flow path in a plurality;
The functional liquid supply system according to claim 1, wherein the functional liquid supply system includes a plurality of branch flow paths extending from the branch portion to the functional droplet discharge heads. The plurality of functional liquid droplet ejection heads is composed of an even number of functional liquid droplet ejection heads of 4 or more,
The flow path unit includes a main flow path connected to the secondary chamber;
A manifold-like distribution channel in which the downstream end of the main channel is connected to an intermediate position in the extending direction;
A pair of branch portions connected to both outer ends of the distribution flow path, each branching a plurality of flow paths;
2. The functional liquid supply system according to claim 1, comprising a plurality of branch flow paths from the pair of branch portions to each of the functional liquid droplet ejection heads. Each functional droplet discharge head has a plurality of functional liquid inlets,
The branch flow path is configured with twice the number of the plurality,
The functional liquid supply system according to claim 2, wherein the branching portion branches twice as many as the plurality of branches. The plurality of functional liquid droplet ejection heads are composed of an even number of functional liquid droplet ejection heads,
2. The functional liquid supply according to claim 1, wherein the flow path unit is configured by a tree-shaped flow path that repeats two branches from the secondary chamber and reaches the plurality of functional liquid droplet ejection heads. system.   The said flow path unit is comprised by the several separate supply flow path corresponding to the said several functional liquid droplet discharge head directly connected to the said secondary chamber. Functional liquid supply system. In the secondary chamber, a plurality of outflow ports to which the individual supply channels are connected are formed.
The functional fluid supply system according to claim 6, wherein the plurality of outflow ports are arranged radially with respect to a center of the secondary chamber. A functional liquid supply system according to any one of claims 1 to 7,
The functional liquid supply means,
A droplet discharge apparatus for performing drawing by discharging a functional liquid onto the workpiece while moving the plurality of functional droplet discharge heads relative to the workpiece.

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