JP2010194387A - Pressure control valve, and droplet ejection device including the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a pressure control valve or the like capable of causing its valve element to suitably open or close. <P>SOLUTION: The pressure control valve includes a primary chamber 67 communicating with an inflow port 71 and a secondary chamber 68 communicating with an outflow port 74, each formed in a valve housing 64 and separated by a separation wall 76, a communication flow path 69 communicating with the primary chamber 67 and the secondary chamber 68, a valve element 70 that opens/closes the communication flow path 69 from the primary chamber 67 side with the rim of an opening disposed on the primary chamber 67 side functioning as its valve seat, a pressure receiver membrane 73 that causes the valve element 70 to open/close on the basis of the atmospheric pressure, and a valve-element spring for energizing the valve element 70 in the direction of closing the valve countering the pressure receiver membrane 73. The valve element 70 includes a valve element body 81 that directly opens/closes relative to the valve seat, and an operating shaft member 82c extending from a holding member 82b of holding the valve element body 81 to penetrate the communication flow path 69 to contact the pressure receiver membrane 73 by its tip end. The pressure receiver membrane 73 is concentrically bonded to the center part of the membrane body 73a and includes a pressure receiver plate 73b comprising an engaging part 73c formed thereon for the tip end of the operating shaft member 82c to engage with in a contacting state. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a pressure regulating valve that opens and closes a valve body on the basis of atmospheric pressure, and a droplet discharge device including the pressure regulating valve.

2. Description of the Related Art Conventionally, there is known a pressure adjustment valve that reduces the functional liquid in a sub tank to a predetermined pressure and supplies it to a functional droplet discharge head (Patent Document 1). The pressure regulating valve includes a primary chamber communicating with an inflow port formed in the valve housing, a secondary chamber communicating with the outflow port, and a communication channel communicating with a partition between the primary chamber and the secondary chamber. And a valve body that opens and closes the communication flow path from the primary chamber side with the opening edge of the communication flow path on the primary chamber side as a valve seat, and constitutes one surface of the secondary chamber and A diaphragm (pressure receiving film body) that opens and closes based on a reference and a valve body spring that biases the valve body in the valve closing direction are provided. The valve body is integrally formed by a valve body main body having an annular seal (O-ring) and a shaft portion loosely fitted in the communication flow path from the center thereof and extending toward the secondary chamber. The diaphragm is composed of a film-like diaphragm main body and a flat plate-like pressure receiving plate attached to the inside thereof.
In this pressure regulating valve, the valve body biased by the valve body spring is in a closed state, and the tip of the shaft portion is in contact with the pressure receiving plate or has a predetermined gap. And when a secondary chamber becomes negative pressure, a diaphragm main body will become concave shape, and a valve body will open by pushing in a shaft part via a pressure receiving plate.

JP 2006-163733 A

  However, opening and closing of the valve body with such a pressure regulating valve depends on the atmospheric pressure applied to the diaphragm, but due to the influence of gravity, residual stress at the time of installation, etc., it always bends uniformly when the valve is opened. is not. In this case, when the diaphragm bends unevenly, the flat pressure receiving plate comes into contact with the tip portion of the shaft portion from an oblique direction. Then, the valve body is slightly tilted (rotational force acts), the O-ring constituting the valve body main body comes into contact with the valve seat, and the opening / closing operation becomes unstable. For this reason, there has been a problem that a predetermined pressure control characteristic cannot be obtained.

  An object of the present invention is to provide a pressure regulating valve capable of properly opening and closing a valve body and a droplet discharge device including the pressure regulating valve.

  The pressure regulating valve of the present invention is formed in the valve housing with a partition wall therebetween, a primary chamber communicating with the inflow port, a secondary chamber communicating with the outflow port, and penetratingly formed in the partition wall. A communication channel that communicates with the chamber, a valve body that opens and closes the communication channel from the primary chamber side with the opening edge of the primary chamber side of the partition wall forming the communication channel as a valve seat, and 2 parallel to the partition wall The pressure receiving membrane body that constitutes one surface of the next chamber and opens and closes the valve body on the basis of the atmospheric pressure, and the one wall surface of the primary chamber facing the partition wall receive the valve body while antagonizing the pressure receiving membrane body. A valve body spring energizing in the valve closing direction, the valve body being disposed in the primary chamber and opening / closing directly with respect to the valve seat, a holding portion for holding the valve body main body, and holding An operating shaft portion that extends through the communication channel and contacts the pressure-receiving film body at the tip portion. The pressure-receiving film body includes a film body body, a membrane Bonded coaxially to the central portion of the main body, the distal end portion of the actuating shank, characterized in that it has a pressure receiving plate which is formed an engaging portion which engages in a contact state, the.

  According to this configuration, even if the pressure receiving film body is bent unevenly and force is applied obliquely from the pressure receiving plate to the operating shaft portion, the tip of the operating shaft portion is engaged with the engaging portion, so that the component force Therefore, the bending of the pressure receiving membrane body is corrected so that the tip end portion of the operating shaft portion is not repelled outward and the pressure receiving membrane body is parallel to the partition wall. Thereby, the force of the pressure-receiving film body can be transmitted to the operating shaft portion without loss, and the valve body moves in parallel in the straight direction (opening / closing direction), so that the valve body does not hit the valve seat. Therefore, proper valve opening can be performed and proper pressure control characteristics can be maintained.

  In this case, it is preferable that one of the distal end portion of the operating shaft portion and the engaging portion of the pressure receiving plate is formed in a concave shape and the other is formed in a convex shape.

  According to this configuration, the operating shaft portion and the pressure receiving plate can be reliably engaged at a desired position. Thereby, the direction of inappropriate bending of the pressure-receiving film body can be appropriately corrected to the opening / closing direction of the valve body. In addition, in a concave shape and convex shape, it is preferable to make it a hemisphere and a shape complementary to this.

  In this case, it is preferable that the valve body main body, the holding portion, the operating shaft portion, the membrane body main body, the pressure receiving plate, and the engaging portion are disposed on the same axis.

  According to this configuration, the valve body can be translated with high straightness. As a result, the opening and closing operation of the valve body can be performed with high accuracy, and a predetermined pressure can be adjusted. Further, by assembling the pressure adjusting valve in a state where the engaging portion is engaged with the operating shaft portion, the shaft alignment between the valve body and the pressure receiving film body can be easily performed. That is, it is possible to easily assemble a pressure regulating valve with high straightness of the valve body.

  Furthermore, in this case, it is preferable to adjust the pressure of the functional liquid supplied from the functional liquid supply means via the inflow port and supply the functional liquid to the ink jet type functional liquid droplet ejection head via the outflow port.

  According to this configuration, the functional liquid whose pressure is adjusted based on the atmospheric pressure can be stably supplied to the functional liquid droplet ejection head.

  A droplet discharge device of the present invention includes the above-described pressure adjusting valve, a functional liquid supply unit, and a functional droplet discharge head, and moves the functional droplet discharge head relative to the workpiece while moving the functional droplet discharge head relative to the workpiece. Then, drawing is performed by discharging the functional liquid.

  According to this configuration, the functional liquid whose pressure is appropriately adjusted can be supplied to the functional liquid droplet ejection head, so that it is possible to appropriately prevent the ejection failure of the liquid droplet ejection apparatus. Thereby, the reliability of the product manufactured with a droplet discharge apparatus can be improved.

It is a perspective view of the droplet discharge device concerning this embodiment. 3 is a plan view schematically showing a carriage unit (head unit) mounted on the droplet discharge device. FIG. It is a front and back external perspective view of a functional liquid droplet ejection head. It is the systematic diagram which showed the functional liquid supply unit typically. It is an external appearance side view of the pressure control valve mounted in the carriage unit. It is the longitudinal cross-sectional view (a) by the side of the inflow connector of a pressure regulating valve, and the longitudinal cross-sectional view (b) by the side of an outflow connector. It is an enlarged view of the communication flow path, the valve body, and the pressure receiving membrane body of the pressure regulating valve.

  Hereinafter, with reference to the accompanying drawings, a droplet discharge device including a pressure regulating valve according to an embodiment of the present invention will be described. This droplet discharge device is incorporated in a flat panel display production line, and uses, for example, a functional droplet discharge head into which a special ink or a functional liquid that is a light-emitting resin liquid is introduced. A light emitting layer to be a pixel, a filter element of a color filter, and the like are formed. The pressure regulating valve supplies the functional liquid to the functional liquid droplet ejection head with a predetermined pressure.

  As shown in FIG. 1, the droplet discharge device 1 is disposed on an X-axis support base 12a supported by a stone surface plate, extends in the X-axis direction that is the main scanning direction, and moves the workpiece W to the X-axis. And a pair of Y-axis support bases 13a spanned across the X-axis table 12 via a plurality of columns 11 and a Y in the sub-scanning direction. A Y-axis table 13 extending in the axial direction, and 13 carriage units 14 suspended in a movable manner on the Y-axis table 13 and mounted with a plurality (12) of functional liquid droplet ejection heads 25 are configured. Has been. Further, the droplet discharge device 1 includes a chamber 15 that houses these devices in an atmosphere in which temperature and humidity are controlled, and a functional liquid that passes through the chamber 15 and supplies the functional liquid to the functional droplet discharge head 25. A supply unit 16 (functional liquid supply means), and a tank cabinet 50 that houses a main tank 40 and the like that form a main part of the functional liquid supply unit 16 is provided in a part of the side wall of the chamber 15. Yes. The droplet discharge device 1 is controlled in its entirety by the control device 17, and the functional droplet supply head 25 is discharged and driven in synchronization with the driving of the X-axis table 12 and the Y-axis table 13, thereby supplying the functional liquid. The six color functional droplets supplied from the unit 16 are ejected, and a predetermined drawing pattern is drawn on the workpiece W.

  The droplet discharge device 1 includes a maintenance device 18 including a flushing unit 21, a suction unit 22, a wiping unit 23, and a discharge performance inspection unit 24. These units are used for maintenance of the functional droplet discharge head 25. The function of the functional liquid droplet ejection head 25 is maintained / recovered. In the droplet discharge device 1 of the present embodiment, the workpiece W is drawn with the carriage unit 14 facing the portion where the X-axis table 12 and the Y-axis table 13 intersect, and the Y-axis table 13 and the maintenance device 18 (suction unit) 22, the carriage unit 14 faces the portion where the wiping unit 23) intersects to perform the function maintenance / recovery of the functional liquid droplet ejection head 25.

  As shown in FIGS. 1 and 2, each carriage unit 14 has 6 colors of R, G, B, C, M, and Y, each of two (total 12) functional droplet discharge heads 25 and 12 A head plate 26 that supports the six functional liquid droplet ejection heads 25 divided into two groups, and twelve pressure regulating valves 27 that supply the functional liquid to each functional liquid droplet ejection head 25 on the basis of atmospheric pressure. The head unit 19 is provided. Each pressure regulating valve 27 is divided into two groups of six on the head plate 26 in the direction orthogonal to the dividing direction of the functional liquid droplet ejection head 25. Each carriage unit 14 is suspended from a bridge plate 13b that spans a pair of Y-axis support bases 13a. Each carriage unit 14 uses a natural water head from a sub tank 41 disposed on the bridge plate 13b, and a functional liquid is supplied to each functional liquid droplet ejection head 25 via a pressure regulating valve 27. (See FIG. 4). The number of carriage units 14 and the number of functional liquid droplet ejection heads 25 mounted on each carriage unit 14 are arbitrary.

  As shown in FIG. 3, the functional liquid droplet ejection head 25 is a so-called double ink jet head, which is a functional liquid introduction part 31 having two connection needles 34 and 2 sideways connected to the side of the functional liquid introduction part 31. A series of head substrates 32, two series of pump units 33 that are continuous below the head substrate 32, and a nozzle plate 35 that is coupled to the pump unit 33 are provided. Two secondary tubes 43b, which will be described later, are connected to the functional liquid introduction section 31 (see FIG. 4), and two nozzle rows NL are arranged in parallel to each other on the nozzle surface NF of the nozzle plate 35. Each nozzle row NL is composed of 180 discharge nozzles 36 arranged at an equal pitch. The head substrate 32 is connected to the control device 17 via a flexible flat cable (not shown), and the drive waveform output from the control device 17 is applied to each pump unit 33 (piezoelectric element thereof). Thus, the functional liquid is discharged from each discharge nozzle 36.

  As shown in FIGS. 1 and 4, the functional liquid supply unit 16 is disposed on six (six colors) main tanks 40 accommodated in a tank cabinet 50 provided in the chamber 15 and on each bridge plate 13b. A plurality of (13) sub tanks 41, a tank side tube 42 connecting the main tank 40 and the plurality of sub tanks 41, a plurality of head side tubes 43 connecting each sub tank 41 and each functional liquid droplet ejection head 25, It is equipped with. Each head side tube 43 is provided with a pressure adjustment valve 27 mounted on the carriage unit 14 together with the functional liquid droplet ejection head 25, and the head side tube 43 connects the sub tank 41 and the pressure adjustment valve 27. The primary side tube 43 a and the secondary side tube 43 b that connects the pressure regulating valve 27 and the functional liquid droplet ejection head 25 are provided.

  The functional liquid sent from the main tank 40 is stored in each sub tank 41 through the tank side tube 42. The functional liquid in each sub-tank 41 is supplied to the functional liquid droplet ejection head 25 as a natural water head via the head side tube 43 and the pressure adjustment valve 27 in accordance with the driving of each functional liquid droplet ejection head 25. On the other hand, when replacing the carriage unit 14 (head unit 19), the open / close valve 43c provided in the primary side tube 43a is closed, and then the primary side tube 43a is disconnected from the pressure adjustment valve 27. (Withdrawal) and exchange is performed in this state.

  As shown in FIG. 1, the flushing unit 21 includes a pair of pre-drawing flushing units 21a and a regular flushing unit 21b, and is performed immediately before the drawing process or when the drawing process is suspended such as when the work W is replaced. Then, the functional liquid droplet discharge head 25 receives the waste discharge. The suction unit 22 includes 13 cap units 44, and forcibly sucks the functional liquid from the discharge nozzles 36 of the respective functional liquid droplet discharge heads 25 and performs capping. The wiping unit 23 wipes the nozzle surface NF of the functional liquid droplet ejection head 25 after suction. The ejection performance inspection unit 24 inspects the presence / absence of ejection of the functional liquid droplet ejection head 25 and the flight bend.

  When the operation of the droplet discharge device 1 in the present embodiment is stopped, the 13 carriage units 14 are moved to the positions of the 13 suction units 22 by the Y-axis table 13, and the cap unit 44 is lifted to the close position, so that all functions So-called capping is performed on the droplet discharge head 25. On the other hand, at the start of the operation, the ejector (not shown) is driven in the capped state to drive the all-function droplet discharge head 25 to perform suction processing (initial filling), and then the wiping processing is performed in units of the carriage unit 14. Done. Then, the 13 carriage units 14 sequentially move onto the workpiece W set on the X-axis table 12.

  Next, the pressure regulating valve 27 will be described with reference to FIGS. The pressure regulating valve 27 includes a regulating valve main body 60 constituting a main part, an inflow connector 61 inserted and joined to the inflow side of the regulating valve main body 60, and an outflow connector 62 inserted and joined to the outflow side of the regulating valve main body 60. ing. The inflow connector 61 is connected to the primary side tube 43 a connected to the sub tank 41, and the outflow connector 62 is connected to the secondary side tube 43 b connected to the functional liquid droplet ejection head 25.

  The regulating valve main body 60 is substantially disc-shaped and has a valve housing 64 in which the central portions of the front and rear surfaces are formed in a concave shape, a lid 65 that defines a primary chamber 67 together with the valve housing 64, and a valve housing 64. The pressure receiving film body 73 (diaphragm) is fixed to form a donut-shaped film body pressing member 66 that defines the secondary chamber 68 together with the valve housing 64. The primary chamber 67 and the secondary chamber 68 are coaxially arranged with a partition wall 76 constituting a part of the valve housing 64 therebetween, and the primary portion (axial center) of the partition wall 76 has a primary portion. A communication channel 69 communicating with the chamber 67 and the secondary chamber 68 is formed to penetrate therethrough. The valve housing 64, the lid body 65, and the film body pressing member 66 are formed of a corrosion resistant material such as stainless steel.

  The lid body 65 and the membrane body pressing member 66 have an outer shape that is concentric with an axis passing through the center of the circular pressure-receiving membrane body 73, and are screwed so as to sandwich the valve housing 64 from the front-rear direction (illustrated). (Omitted). Further, the lid body 65 and the film body pressing member 66 are fixed to each other with the seal ring S sandwiched between the valve housing 64 and the primary chamber 67 and the secondary chamber 68 are liquid-tight.

  The primary chamber 67 is formed in a substantially cylindrical shape that is concentric with the pressure-receiving membrane body 73, and an inflow port 71 that extends obliquely in the radial direction from the primary chamber 67 is formed in the upper portion of the primary chamber 67. In addition, a primary chamber side opening 78a continuous with the communication channel 69 is opened at the center of the partition wall 76 on the primary chamber 67 side (see FIG. 7). The primary chamber side opening 78a faces the valve body 70 that opens and closes the communication flow path 69 from the primary chamber 67 side. Correspondingly, the peripheral portion of the primary chamber side opening 78a has a valve A valve seat forming portion 78b serving as a valve seat with which the body 70 is separated and connected is configured (see FIG. 7). An inflow connector 61 is inserted into and joined to the inflow port 71, and an inflow channel portion 72 that connects the inflow connector 61 and the primary chamber 67 is formed (see FIG. 6A).

  In the secondary chamber 68, the pressure receiving film body 73 is attached to the valve housing 64 by the film body pressing member 66, and the pressure receiving film body 73 as a whole is formed by the inner wall 68a and the pressure receiving film body 73 formed in the valve housing 64 (partition wall 76). It is formed in a truncated cone shape with the body 73 as a bottom surface. That is, the inner wall 68a is formed in a bottomed mortar shape having a tapered portion 68b. In addition, a secondary chamber side opening 78c connected to the communication channel 69 is opened at the center of the partition wall 76 on the secondary chamber 68 side (see FIG. 7).

  As shown in FIG. 6 (b), an outflow connector 62 is inserted and joined to an outflow port 74 that extends directly from the lower part of the secondary chamber 68, and the outflow flow that connects the outflow connector 62 and the secondary chamber 68. A path portion 75 is formed. The outflow channel portion 75 opens to a tapered portion 68b in the lower portion of the secondary chamber 68, is formed obliquely downward and rearward, and communicates with the outflow connector 62 in the front-rear direction and substantially in the center.

  Next, the communication channel 69, the valve body 70, and the pressure receiving membrane body 73 will be described in detail with reference to FIGS. The communication flow channel 69 includes a shaft loose insertion portion 69a through which an operating shaft portion 82c of a pressure receiving film body 73, which will be described later, is slidably inserted, and a flow passage portion 69b having a cross-shaped cross section extending in four directions in the radial direction from the shaft free insertion portion 69a. (See FIG. 5). The primary chamber 67, the secondary chamber 68, and the communication channel 69 (the shaft loose insertion portion 69 a) have a circular cross section concentric with the pressure receiving membrane body 73.

  The valve body 70 is made of an elastic material and includes a ring-shaped valve body main body 81 that functions as a valve, and a valve holder 82 that holds the valve body main body 81. The valve body 81 opens and closes the communication channel 69 by being separated from and contacting the valve seat forming portion 78b. The valve holder 82 is formed in a substantially “T” cross section, and is connected from the rear in the axial direction to a thick disc-shaped holder base 82a with which the valve body biasing spring 83 abuts, and the holder base 82a. The holding portion 82b on which the valve body 81 is seated and the operating shaft portion 82c extending forward from the central portion of the holding portion 82b are integrally formed.

  The holder base 82a constitutes a pressure receiving portion on the primary chamber 67 side, and an annular spring receiving portion 82d with which the valve body biasing spring 83 abuts is formed on the back surface thereof. The holder base 82a receives the pressure of the primary chamber 67 on the back surface thereof, and is biased with a weak force in the valve closing direction by a valve body biasing spring 83 that receives the lid body 65. That is, the valve body urging spring 83 is fitted into the annular spring receiving portion 82d and is interposed between the holder base 82a and the lid body 65. The peripheral surface of the holding portion 82b is formed in a complementary shape with the peripheral surface of the valve body main body 81 to be attached to the holding portion 82b, and the valve body main body 81 is inserted from the operating shaft portion 82c side and comes out to the holding portion 82b. Mounted in a stopped state.

  The operating shaft portion 82c is provided so as to protrude at a right angle from the center of the holding portion 82b, and is formed to have a diameter that can be inserted into the shaft free insertion portion 69a. Further, the distal end portion of the operating shaft portion 82c is a hemispherical portion 82e formed in a hemispherical shape. The hemispherical portion 82e is engaged with an engaging portion 73c formed on a pressure receiving plate 73b, which will be described later, in a contact state, and the valve body 70 is pushed backward to open the valve.

  The pressure receiving film body 73 (diaphragm) includes a film body main body 73a made of a resin film, and a resin pressure receiving plate 73b bonded to the center of the film body main body 73a. The pressure receiving plate 73b is formed in a disk shape concentric with the film body main body 73a and has a sufficiently small diameter with respect to the film body main body 73a. In the center of the pressure receiving plate 73b, an engagement portion 73c that is recessed in a hemispherical shape is formed so that the operation shaft portion 82c of the valve body 70 is engaged in a contact state. The engaging portion 73c has a complementary shape to the hemispherical portion 82e.

  As a result, the operating shaft portion 82c and the pressure receiving plate 73b are securely engaged with each other at the center portion, and therefore, even when the pressure receiving film body 73 does not bend uniformly, the bending direction is changed to the opening / closing direction of the valve body 70. And can be corrected appropriately. Further, a film body biasing spring 79 that biases the pressure receiving plate 73b (pressure receiving film body 73) in the forward direction is interposed between the peripheral edge of the secondary chamber side opening 78c and the pressure receiving plate 73b. ing. The valve body 81, the holder base 82a, the holding portion 82b, the operating shaft portion 82c, the membrane body main body 73a, the pressure receiving plate 73b, and the engaging portion 73c are disposed on the same axis. Thereby, the valve body 70 can be translated in parallel with high straightness, the valve body 70 can be opened and closed with high accuracy, and a predetermined pressure can be adjusted.

  In the pressure regulating valve 27 configured as described above, when the pressure in the secondary chamber 68 decreases due to discharge of the functional liquid or the like, the pressure receiving film body 73 is deformed rearward (inside), and the pressure receiving plate 73b moves the valve body 70 rearward. And the functional liquid flows from the primary chamber 67 into the secondary chamber 68. When the inflow of the functional liquid proceeds and the pressure in the secondary chamber 68 increases, the pressure receiving film body 73 is deformed forward (outside), and the valve body 70 is closed. That is, the pressure regulating valve 27 opens and closes the communication channel 69 by the pressure-receiving film body 73 being deformed by the balance between the atmospheric pressure and the internal pressure of the secondary chamber 68.

  As described above, since the opening and closing of the valve body 70 depends on the atmospheric pressure applied to the film body main body 73a, the film body main body 73a (pressure receiving film body 73) is always bent with a certain shape change when the valve is opened. However, there is a case where the operation shaft portion 82c is pushed in an oblique direction due to uneven bending. However, even in such a case, in the pressure adjusting valve 27, the hemispherical portion 82e of the operating shaft portion 82c is engaged with the engaging portion 73c, so that the operating shaft portion 82c is generated by a component force acting in a direction other than the opening / closing direction. The pressure-receiving film body 73 is corrected in the bending direction so as to be parallel to the partition wall 76 without being repelled outward. Thereby, the force of the pressure-receiving film body 73 can be transmitted to the operating shaft portion 82c without loss, and the valve body 70 moves in parallel in the rectilinear direction (opening / closing direction). Therefore, the valve body 70 does not come into contact with the valve seat forming portion 78b, and the valve can be properly opened and the proper pressure control characteristic can be maintained.

When the pressure regulating valve 27 is assembled, the pressure receiving film body 73 is fixed to the valve housing 64 so that the engaging portion 73c is engaged with the operating shaft portion 82c, whereby the valve body 70 and the pressure receiving film body are fixed. Axis alignment with 73 can be performed easily and reliably. That is, by engaging the engaging portion 73c with the operating shaft portion 82c, the pressure-receiving film body 73 is automatically positioned around the center. Therefore, it is necessary to position the pressure-receiving film body 73 separately using a jig or the like. Disappear. In this way, it is possible to easily assemble the pressure regulating valve 27 in which the valve body 70 has high straightness.
In this embodiment, the tip end portion of the operating shaft portion 82c is formed in a convex hemispherical shape, and the engaging portion 73c is formed in a concave hemispherical shape, but the tip end portion of the operating shaft portion 82c is formed. May be formed in a concave shape, and the engaging portion 73c may be formed in a convex shape. That is, the engaging portion 73c may be formed in a complementary shape corresponding to the shape of the distal end portion of the operating shaft portion 82c.

  According to the above configuration, even when the pressure-receiving film body 73 pushed to the atmospheric pressure bends in an oblique direction with respect to the valve body 70, it is possible to perform proper valve opening, and to achieve appropriate pressure control characteristics. Can be maintained. Thereby, since the functional liquid appropriately pressure-adjusted on the basis of the atmospheric pressure can be supplied to the functional liquid droplet ejection head 25, it is possible to appropriately prevent the ejection failure of the liquid droplet ejection apparatus 1, The reliability of products manufactured with the droplet discharge device 1 can be improved.

  1: droplet ejection device, 25: functional droplet ejection head, 27: pressure regulating valve, 64: valve housing, 67: primary chamber, 68: secondary chamber, 69: communication channel, 70: valve body, 71 : Inflow port, 73: pressure receiving membrane body, 73a: membrane body main body, 73b: pressure receiving plate, 73c: engagement portion, 74: outflow port, 76: partition wall, 78a: primary chamber side opening, 78b: valve seat formation 81, valve body, 82: valve holder, 82a: holder base, 82b: holding part, 82c: operating shaft part, 82e: hemispherical part, 83: valve body biasing spring, W: work

Claims (5)

A primary chamber that is formed in the valve housing across a partition wall and communicates with the inflow port and a secondary chamber that communicates with the outflow port;
A communication channel formed through the partition wall and communicating the primary chamber and the secondary chamber;
A valve body that opens and closes the communication channel from the primary chamber side, using the primary chamber side opening edge of the partition wall forming the communication channel as a valve seat;
A pressure-receiving film body that constitutes one surface of the secondary chamber parallel to the partition wall and opens and closes the valve body on the basis of atmospheric pressure;
A valve body spring that urges the valve body in a valve closing direction while antagonizing the pressure-receiving film body in response to one wall surface of the primary chamber facing the partition;
The valve body is disposed in the primary chamber and directly opens and closes with respect to the valve seat; a holding portion that holds the valve body main body; and the communication passage is inserted through the holding portion. An operating shaft portion that extends and abuts against the pressure-receiving film body at a tip portion,
The pressure receiving film body includes a film body main body, a pressure receiving plate that is concentrically bonded to a central portion of the film body main body, and that forms an engaging portion that engages the tip end portion of the operating shaft portion in a contact state. And a pressure regulating valve characterized by comprising:   2. The pressure regulating valve according to claim 1, wherein one of the distal end portion of the operating shaft portion and the engaging portion of the pressure receiving plate is formed in a concave shape and the other is formed in a convex shape.   The said valve body main body, the said holding | maintenance part, the said action | operation shaft part, the said film body main body, the said pressure receiving plate, and the said engaging part are arrange | positioned on the same axis line, The Claim 1 or 2 characterized by the above-mentioned. Pressure regulating valve.   4. The functional liquid supplied from the functional liquid supply means via the inflow port is adjusted in pressure and supplied to an ink jet type functional liquid droplet ejection head via the outflow port. The pressure regulating valve according to any one of the above. A pressure regulating valve according to claim 4;
The functional liquid supply means;
The functional liquid droplet ejection head,
A liquid droplet ejection apparatus for performing drawing by ejecting a functional liquid onto the work while moving the functional liquid droplet ejection head relative to the work.

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