JP2010192549A5 - - Google Patents

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Publication number
JP2010192549A5
JP2010192549A5 JP2009033382A JP2009033382A JP2010192549A5 JP 2010192549 A5 JP2010192549 A5 JP 2010192549A5 JP 2009033382 A JP2009033382 A JP 2009033382A JP 2009033382 A JP2009033382 A JP 2009033382A JP 2010192549 A5 JP2010192549 A5 JP 2010192549A5
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JP
Japan
Prior art keywords
microbubbles
liquid
liquid containing
substrate
electric field
Prior art date
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Application number
JP2009033382A
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English (en)
Japanese (ja)
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JP5412131B2 (ja
JP2010192549A (ja
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Priority to JP2009033382A priority Critical patent/JP5412131B2/ja
Priority claimed from JP2009033382A external-priority patent/JP5412131B2/ja
Publication of JP2010192549A publication Critical patent/JP2010192549A/ja
Publication of JP2010192549A5 publication Critical patent/JP2010192549A5/ja
Application granted granted Critical
Publication of JP5412131B2 publication Critical patent/JP5412131B2/ja
Expired - Fee Related legal-status Critical Current
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JP2009033382A 2009-02-17 2009-02-17 基板処理装置および基板処理方法 Expired - Fee Related JP5412131B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009033382A JP5412131B2 (ja) 2009-02-17 2009-02-17 基板処理装置および基板処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009033382A JP5412131B2 (ja) 2009-02-17 2009-02-17 基板処理装置および基板処理方法

Publications (3)

Publication Number Publication Date
JP2010192549A JP2010192549A (ja) 2010-09-02
JP2010192549A5 true JP2010192549A5 (enExample) 2012-03-29
JP5412131B2 JP5412131B2 (ja) 2014-02-12

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Family Applications (1)

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JP2009033382A Expired - Fee Related JP5412131B2 (ja) 2009-02-17 2009-02-17 基板処理装置および基板処理方法

Country Status (1)

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JP (1) JP5412131B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012090815A1 (ja) * 2010-12-28 2012-07-05 シャープ株式会社 レジスト除去装置及びレジスト除去方法
JP2012250301A (ja) * 2011-05-31 2012-12-20 Kyocera Crystal Device Corp ナノバブル循環型研磨装置
JP5854668B2 (ja) * 2011-07-07 2016-02-09 芝浦メカトロニクス株式会社 気液混合流体生成装置、気液混合流体生成方法、処理装置及び処理方法
US9308542B2 (en) 2011-07-29 2016-04-12 Tokyo Electron Limited Treatment solution supply apparatus, treatment solution supply method, and computer storage medium
JP5781015B2 (ja) * 2012-05-31 2015-09-16 三菱電機株式会社 ウェハ洗浄装置及び洗浄槽の洗浄方法
JP6372329B2 (ja) * 2014-12-03 2018-08-15 富士通セミコンダクター株式会社 半導体装置の製造方法
TWI718962B (zh) * 2020-06-11 2021-02-11 威光自動化科技股份有限公司 液管內之氣泡篩選器

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3205413B2 (ja) * 1993-02-15 2001-09-04 株式会社日立製作所 微粒子計測装置及び微粒子計測方法
JP2006179765A (ja) * 2004-12-24 2006-07-06 Dainippon Screen Mfg Co Ltd 基板処理装置およびパーティクル除去方法
JP2007117799A (ja) * 2005-10-25 2007-05-17 Goto Tekkosho:Kk 微細気泡生成器及びこれを用いた微細気泡生成装置

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