JP2010179299A - Liquid droplet ejection apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a gap adjusting device and the like capable of adjusting a work gap to as a small value as possible by precisely measuring the displacement of a nozzle plane in the up and down directions. <P>SOLUTION: The gap adjusting device comprises a position measuring means 181 for measuring respectively positions in the up and down directions for a plurality of places of a nozzle plane 103 departed from each other, a gap measuring system transferring mechanism 24 for transferring a function droplet ejection head 81 with respect to the position measuring means 181, an ascending and descending means 132 for fine adjusting a work gap by transferring the function droplet ejection head 81 in the up and down directions with respect to a workpiece W, a control means 3 for controlling the ascending and descending means 132 from a measured result of the position measuring means 181 wherein the control means 3 controls the ascending and descending means 132 so that a departed distance between a nearest position among a plurality of measured results by the position measuring means 181 and the surface of the workpiece W may become a set work gap. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a gap adjusting device capable of adjusting a work gap between a surface of a work such as a substrate and a nozzle surface of a functional liquid droplet ejection head represented by an ink jet head, and a calibration jig used therefor And a droplet discharge device including a gap adjusting device, a method of manufacturing an electro-optical device, an electro-optical device, and an electronic apparatus.

  In such a droplet discharge device, gap adjusting means capable of adjusting the work gap is provided in order to discharge functional droplets to the workpiece while keeping the work gap at a constant value. This work gap is desirably set to a value as small as possible (for example, 0.15 mm to 0.3 mm) in order to accurately manage the flight bend, landing diameter, etc. of the functional liquid droplets. Therefore, in the conventional gap adjusting means, one distance sensor is attached to each corner of the functional liquid droplet ejection head, and the nozzle surface is measured based on the smallest measured value of the distances to the surface of the workpiece by each distance sensor. The nozzle surface of the functional liquid droplet ejection head comes into contact with the surface of the workpiece by bringing the functional liquid droplet ejection head into and out of contact with the workpiece so that the gap between the workpiece and the surface of the workpiece is maintained. It is considered to prevent. However, in reality, it is difficult to attach multiple distance sensors to the functional liquid droplet ejection head uniformly in the vertical direction with respect to the nozzle surface, so a single distance sensor is attached to the functional liquid droplet ejection head. The work gap is adjusted based on the measurement results. (For example, refer to Patent Document 1).

Japanese Patent Laid-Open No. 2002-273974 (pages 3, 5, 6 and 1, 9)

  By the way, the functional liquid droplet ejection head is mounted to be inclined with respect to the carriage based on the structural variation or assembly structure variation, or the position of the nozzle surface in the vertical direction is changed during replacement. Since the functional liquid droplet ejection heads are displaced from each other in the vertical direction and are mounted on the carriage, the nozzle surface may be displaced in the vertical direction. However, with a single distance sensor attached to the functional liquid droplet ejection head, the positional deviation in the vertical direction of the nozzle surface cannot be accurately measured. Therefore, when the workpiece gap is adjusted to a value as small as possible, there is a possibility that a portion of the nozzle surface that is displaced downward contacts the workpiece surface.

  The present invention relates to a gap adjusting device capable of adjusting a work gap to a value as small as possible by accurately measuring a positional deviation in a vertical direction of a nozzle surface, a calibration jig used in the gap adjusting device, and a gap adjusting device. And a method of manufacturing an electro-optical device, an electro-optical device, and an electronic apparatus.

  The gap adjusting device of the present invention is a gap adjusting device that finely adjusts the work gap between the surface of the work set on the work table and the nozzle surface of the functional liquid droplet discharge head that discharges the functional liquid onto the work. The position measuring means for measuring the position in the vertical direction with respect to a plurality of locations on the nozzle surface spaced apart from each other, and the functional liquid for the position measuring means so that the plurality of locations on the nozzle surface face the position measuring means in order. A gap measuring system moving mechanism that moves the droplet discharge head relatively in a plane parallel to the surface of the workpiece, and a fine adjustment of the work gap by moving the functional droplet discharge head relative to the workpiece in the vertical direction And a control means for controlling the elevating means based on the measurement result by the position measuring means, the control means comprising a plurality of measurement results by the position measuring means. As the closest position and the surface of the workpiece and the workpiece gap distance was set in, and controlling the lifting means.

According to this structure, the position of the up-down direction with respect to the several location of a nozzle surface is each measured by a position measurement means. For this reason, it is possible to accurately measure the vertical displacement of the nozzle surface without causing a problem in mutual vertical mounting accuracy as in the case of mounting a plurality of distance sensors to the functional liquid droplet ejection head. . Since the distance between the closest position of the plurality of measurement results obtained by the position measuring means and the surface of the workpiece is a set work gap, the nozzle surface does not contact the surface of the workpiece.
In addition, when a plurality of position measuring means can be arranged with high accuracy in the vertical direction, the position in the vertical direction with respect to a plurality of locations on the nozzle surface may be respectively measured by the plurality of position measuring means. .

  In this case, it is preferable that the nozzle surface is formed in a square shape, and the plurality of locations on the nozzle surface include at least four locations that form the four corners of the nozzle surface.

  According to this configuration, since one of the four corners of the nozzle surface is the lowest position on the nozzle surface, the position measurement unit positions the lowest position on the nozzle surface. The location can be measured reliably.

  In these cases, a work thickness measuring means for measuring the thickness of the work is further provided, and the control means updates predetermined work thickness data in accordance with the work thickness data measured by the work thickness measuring means. It is preferable to have data update means.

  According to this configuration, the predetermined workpiece thickness data is updated by the data updating unit based on the workpiece thickness data measured by the workpiece thickness measuring unit, and the updated predetermined workpiece thickness data is updated by the control unit. The distance between the closest position of the plurality of measurement results by the position measuring means and the surface of the workpiece is calculated based on the above. For this reason, the work gap can be finely adjusted according to the thickness of the work.

  In these cases, a calibration jig having a first measurement reference surface whose position is managed with respect to the surface of the work table is further provided, and the position measuring means is a first member in the vertical direction with respect to the first measurement reference surface. The reference distance is measured, and the control means preferably performs zero point correction of the position measurement means based on the first reference distance.

  According to this configuration, even when the position measuring unit is newly installed or replaced, the zero point correction of the position measuring unit is performed. Therefore, the position measuring unit is measured by the vertical position where the position measuring unit is disposed. The result is not affected.

  In this case, the position measuring means is a nozzle surface distance sensor using laser light, and the first measurement reference surface preferably has a reflectance substantially equal to the reflectance of the laser light with respect to the nozzle surface.

  According to this configuration, the measurement result by the nozzle surface distance sensor is not affected by the reflectance of the laser beam with respect to the measurement surface, and the nozzle surface and the first measurement reference surface can be measured under the same conditions. it can. For this reason, accurate zero point correction can be performed on the measurement results of the distances from the nozzle surface distance sensor to a plurality of locations on the nozzle surface.

  In these cases, the calibration jig further has a second measurement reference surface whose position is controlled with respect to the surface of the work table, and the workpiece thickness measurement means is in the vertical direction with respect to the second measurement reference surface. The second reference distance is measured, and the control means preferably performs zero point correction of the workpiece thickness measuring means based on the second reference distance.

  According to this configuration, even when the workpiece thickness measuring means is newly installed or replaced, the zero point correction of the workpiece thickness measuring means is performed, so the vertical position where the workpiece thickness measuring means is disposed Therefore, the measurement result of the workpiece thickness measuring means is not affected.

  In this case, the workpiece thickness measuring means is a workpiece thickness distance sensor using laser light, and the second measurement reference surface may have a reflectance substantially equal to the reflectance of the laser beam with respect to the workpiece surface. preferable.

  According to this configuration, the measurement result by the workpiece thickness distance sensor is not affected by the reflectance of the laser beam with respect to the measurement surface, and the surface of the workpiece and the second measurement reference surface are measured under the same conditions. be able to. Therefore, accurate zero point correction can be performed on the measurement result of the distance from the workpiece surface by the workpiece thickness sensor.

  In these cases, it is preferable that the calibration jig is disposed in a mounting hole formed through the work table.

  According to this configuration, it is possible to easily arrange the measurement reference plane at a predetermined distance from the surface of the work table.

  According to the calibration jig of the present invention, the calibration jig is provided in the gap adjusting device.

  According to this configuration, the nozzle surface distance sensor and the workpiece thickness are obtained by having the first measurement reference surface and the second measurement reference surface having the reflectance of the laser light substantially equal to the reflectance of the laser light with respect to the measurement target surface. The zero point correction of both the distance sensors can be performed accurately. For example, when the nozzle plate constituting the nozzle surface is a black stainless steel plate and the workpiece is a quartz glass substrate, the first measurement reference surface of the calibration jig is the black stainless steel plate and the second measurement reference surface is Consists of quartz glass.

  The droplet discharge device of the present invention is characterized by including the gap adjusting device described above.

  According to this configuration, since the gap adjusting device that can adjust the work gap to the smallest possible value is provided, it is possible to function on the work in a state where the flying bend, the landing diameter, etc. of the functional liquid droplets are accurately controlled. Liquid discharge can be performed.

  In this case, the maintenance device for maintaining the functional liquid droplet ejection head, the functional liquid droplet ejection head is moved vertically with respect to the maintenance device, and the vertical distance between the maintenance device and the nozzle surface is adjusted. Z-axis moving means is further provided, and the elevating means is preferably mounted on the carriage and also serves as the Z-axis moving means.

  According to this configuration, since the elevating means also serves as the Z-axis moving means, it is necessary to further include means for elevating the functional liquid droplet ejection head relative to the maintenance device in the maintenance operation, separately from the elevating means. Absent. Therefore, the structure of the entire droplet discharge device can be simplified.

  In these cases, an X-axis table that relatively moves the functional liquid droplet ejection head in a direction orthogonal to the work during a drawing operation in which the functional liquid is ejected from the functional liquid droplet ejection head onto the work. And a Y-axis table, and the gap measuring system moving mechanism is mounted on the carriage, moving means for moving the functional liquid droplet ejection head in one direction parallel to the surface of the workpiece via the carriage, Rotating means for rotating the functional liquid droplet ejection head in a plane parallel to the surface of the workpiece by rotating about the axis, and the moving means preferably also serves as a Y-axis table.

  According to this configuration, since the gap measuring system moving mechanism is configured by the moving means that also serves as the Y-axis table and the rotating means, the functional liquid droplet ejection head can be used in the drawing operation separately from the moving means. A plurality of locations on the nozzle surface can be easily exposed to the position measuring means without further providing means for moving the nozzle. Therefore, the structure of the entire droplet discharge device can be simplified.

  A method for manufacturing an electro-optical device according to the present invention is characterized in that a film-forming unit made of functional droplets is formed on a workpiece using the above-described droplet discharge device.

  In addition, an electro-optical device according to the present invention is characterized in that the above-described droplet discharge device is used to form a film forming portion using functional droplets on a workpiece.

  According to these configurations, since it is manufactured using a droplet discharge device that can perform an appropriate wiping operation according to the purpose such as preventing color mixing between the functional droplet discharge heads, a highly reliable electric An optical device can be manufactured. As the electro-optical device (flat panel display), a color filter, a liquid crystal display device, an organic EL device, a PDP device, an electron emission device, and the like are conceivable. The electron emission device is a concept including a so-called FED (Field Emission Display) or SED (Surface-conduction Electoron-Emitter Display) device. Further, as the electro-optical device, devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable.

  An electronic apparatus according to the present invention includes the above-described electro-optical device.

  In this case, the electronic apparatus corresponds to various electric products in addition to a mobile phone and a personal computer equipped with a so-called flat panel display.

It is a top view of the droplet discharge device concerning an embodiment. It is a front view of a droplet discharge device in an embodiment. It is a side view of the droplet discharge device concerning an embodiment. It is a top view of the head unit concerning an embodiment. It is a perspective view of the functional liquid droplet ejection head concerning an embodiment. It is a perspective view of the main carriage which concerns on embodiment. It is a perspective view of the carriage main body which concerns on embodiment. It is a front view of the head rotation mechanism concerning an embodiment. It is a front view of the head raising / lowering mechanism which concerns on embodiment. It is a perspective view of a discharge inspection unit, a common support frame, and a nozzle surface distance sensor according to the embodiment. It is a mimetic diagram of a gap adjustment device concerning an embodiment. (A) A perspective view of a calibration jig according to the embodiment, (b) a cross-sectional view of the calibration jig according to the embodiment. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a PDP apparatus. It is principal part sectional drawing of the display apparatus which is a FED apparatus.

  Hereinafter, a droplet discharge device of the present invention will be described with reference to the accompanying drawings. The liquid droplet ejection apparatus of this embodiment is applied to a so-called flat panel display manufacturing apparatus such as an organic EL apparatus (details will be described later), and uses a functional liquid droplet ejection head, which has a nozzle surface and a workpiece. In a state where the work gap between the substrate surface and the surface of the substrate is adjusted, a drawing operation for discharging a functional liquid such as a light emitting material to the substrate is performed, and the R, G, B three-color light emitting layer and the positive light A hole injection layer is formed.

  First, the droplet discharge device of this embodiment will be described. As shown in FIGS. 1 to 3, the droplet discharge device 1 of the embodiment includes a drawing device 11 equipped with a functional droplet discharge head 81 and various devices used for maintenance of the functional droplet discharge head 81. And a maintenance device 12 (maintenance device). Further, the droplet discharge device 1 is accommodated in the chamber device 2, and a series of manufacturing processes including a drawing operation are performed in an atmosphere of dry air configured by the chamber device 2.

  The drawing apparatus 11 includes a gantry 21 installed on the floor, a stone surface plate 22 installed on the gantry 21, an X axis table 23 installed on the stone surface plate 22, a Y axis table 24 orthogonal thereto, and an X axis A suction table 25 (work table) mounted movably on the table 23, a main carriage 26 (carriage) provided so as to be suspended from the Y-axis table 24, a head unit 27 mounted on the main carriage 26, and a suction And a gap adjusting device for adjusting a work gap between the surface of the work W set on the table 25 and the nozzle surface 103 of the functional liquid droplet ejection head 81 mounted on the head unit 27. In addition to this, the drawing apparatus 11 includes a head recognition camera 29 for recognizing the position of the head unit 27 (functional liquid droplet ejection head 81), a work recognition camera 30 for recognizing the position of the work W, and a work W. Various devices such as a drawing observation camera 31 for observing the drawing result of the discharged functional liquid droplets and a suction switch unit 32 for driving a vacuum pump 34 (described later) are provided.

  In addition, the drawing apparatus 11 includes a functional liquid supply apparatus 33 that supplies a functional liquid to the drawing apparatus 11 and a vacuum pump 34 for workpiece W adsorption connected to the adsorption table 25, separately from the chamber apparatus 2. . A host computer 3 (not shown) is connected to the droplet discharge device 1, and the host computer 3 performs overall control of the drawing device 11 and the maintenance device 12.

  The functional liquid supply device 33 supplies R, G, and B3 functional liquids to three functional liquid droplet ejection heads 81, which will be described later, and R, G, and B3 functional liquid tanks (not shown). ), A case 41 for accommodating the functional liquid tank, and a device base 42 for supporting the case 41. Compressed air for supplying a functional liquid recovery tank for storing the recovered functional liquid, a cleaning liquid tank (not shown) for storing the cleaning liquid, and compressed air (dry air) for driving and controlling each apparatus to the apparatus base 42 A supply device 35 is incorporated. Although illustration is omitted, the functional liquid tubes extending from the three functional liquid tanks and the air tubes extending from the compressed air supply device 35 are collected in one place and taken into the drawing device 11 from the rear portion of the chamber device 2. .

  The suction table 25 is supported by a θ table 61 (described later) of the X-axis table 23, connected to a vacuum tube (not shown) connected to the vacuum pump 34, and the workpiece W set by the air suction is used. This is adsorbed so that the flatness is maintained, that is, the surface of the workpiece W is parallel to the XY plane. Although details will be described later, a mounting hole 51 penetrating in the thickness direction (vertical direction) is provided on the surface of the suction table 25, and the mounting hole 51 is used for calibration of the gap adjusting device 28. A jig 183 is provided.

  The X-axis table 23 is directly installed on the stone surface plate 22, and a θ table 61 that supports the suction table 25 and an X-axis air slider (not shown) that supports the θ table 61 slidably in the X-axis direction. (Omitted), an X-axis linear motor (not shown) for moving the workpiece W in the X-axis direction via the θ table 61 and the suction table 25, and an X-axis linear scale (not shown) attached to the X-axis air slider. It is equipped with. In the X-axis table 23, the drive of the X-axis linear motor moves the set table 63 including the θ table 61 and the suction table 25 in the X-axis direction with the X-axis air slider as a guide.

  Note that the X-axis air slider, the X-axis linear motor, and the X-axis linear scale are disposed in parallel to the X-axis and are accommodated in the X-axis box 62. The head recognition camera 29 is fixed to the θ table 61, and the position of the head unit 27 can be corrected with respect to the suction table 25.

  The Y-axis table 24 is placed on a Y-axis frame 71 with a stand that is erected on the stone surface plate 22, and extends in a direction perpendicular to the X-axis table 23 so as to straddle the X-axis table. Yes. A Y-axis air slider (not shown) that is slidably supported by the Y-axis frame 71 and supports the main carriage, and a Y-axis linear motor (not shown) that moves the head unit 27 in the Y-axis direction via the Y-axis air slider. And a Y-axis linear scale (not shown) attached to the Y-axis air slider.

  The Y-axis table 24 includes the head unit 27 (functional liquid droplet ejection head 81) mounted on the Y-axis table 24 at a drawing area located immediately above the X-axis table 23 and a nozzle surface distance of a gap adjusting device 28 described later. It is appropriately moved between the upper part of the sensor 181 and the upper part of each unit of the maintenance device 12. That is, the Y-axis table 24 allows the head unit 27 to face the drawing area when drawing on the work W set on the suction table 25, and the head unit 27 is used as a nozzle when fine adjustment of the work gap is performed. When performing functional recovery or ejection inspection of the functional liquid droplet ejection head 81 by facing the surface distance sensor 181, the head unit 27 is caused to face each unit of the maintenance device 12.

  In addition to the Y-axis air slider, a camera air slider (not shown) is slidably supported on the Y-axis frame 71. The camera air slider includes the workpiece recognition camera 30 and the drawing observation. The camera 31 is fixed. The camera air slider and the Y-axis slider are configured to be movable independently, and the workpiece recognition camera 30 and the drawing observation camera are driven in the Y-axis direction independently of the main carriage 26 by driving the Y-axis linear motor. Moving.

  As shown in FIG. 4, the head unit 27 includes a head plate 82 in which three functional liquid droplet ejection heads 81 and three mounting openings 83 for positioning and fixing the functional liquid droplet ejection heads 81 are formed side by side. And. The three functional liquid droplet ejection heads 81 correspond to the three types of functional liquids for forming the light emitting layer 617b of the R, G, and B colors described above. Each of the functional liquids forming the light emitting layer 617b of R, G, B colors corresponds to each one. The head unit 27 is detachably held with respect to the main carriage 26.

  As shown in FIG. 5, the functional liquid droplet ejection head 81 is a so-called double type, a functional liquid introduction unit 91 having two connection needles 92, and a dual head substrate connected to the functional liquid introduction unit 91. 93, and a head main body 94 which is connected to the lower side (upper side in FIG. 5) of the functional liquid introduction portion 91 and has an in-head flow path filled with the functional liquid therein. Each connection needle 92 is connected to a functional liquid tube extending from the functional liquid tank via a piping adapter (not shown), and the functional liquid droplet ejection head 81 is supplied with the functional liquid from each connection needle 92. It has become.

  The head main body 94 is composed of two pump parts 101 (piezo piezoelectric elements) and a rectangular nozzle plate 102 having a nozzle face 103 made of a stainless steel plate with eutectic plating (black). . On the nozzle surface 103, two rows of nozzle rows 104 composed of a large number (180) of nozzles 105 are formed. The functional liquid droplet ejection head 81 ejects functional liquid from the nozzle 105 by the action of the pump unit 101. When the nozzle surface 103 is inclined with respect to the surface of the workpiece W and mounted on the main carriage 26 (carriage main body 111), one of the four measurement points 106 serving as the four corners of the nozzle surface 103 is This is the lowest position on the nozzle surface 103. Although details will be described later, the position in the vertical direction is measured by the nozzle surface distance sensor 181 of the gap adjusting device 28 at four measurement locations 106 (12 locations in total) of each functional liquid droplet ejection head 81.

  As shown in FIG. 6, the main carriage 26 includes a carriage main body 111 on which the head unit 27 is detachably mounted, a head adjustment mechanism 112 that holds the carriage main body 111 so as to be suspended, and a device such as a power failure. In order to prevent the head unit 27 from being lowered by its own weight during an emergency stop, the head balance mechanism 113 having three tension springs 114 is included. The main carriage 26 is movably attached to the Y-axis table 24, but the head plate 82 is provided by a posture adjustment mechanism 115 having a pair of upper and lower posture adjustment screws 116 for adjusting the posture of attachment to the Y-axis table 24. It is possible to adjust the parallelism of the nozzle surface 103 of the functional liquid droplet ejection head 81 mounted on the whole as a whole.

  As shown in FIG. 7, the carriage body 111 includes a head holder 121 that suspends and supports the head unit 27, and a pair of tilt adjustment mechanisms 122 disposed on the top of the head holder 121.

  Each of the pair of tilt adjusting mechanisms 122 has a tilt adjusting screw 123, and the support posture (tilting) of the head holder 121 is adjusted by moving the tilt adjusting screw 123 up and down. That is, the parallelism of the nozzle surfaces 103 of the three functional liquid droplet ejection heads 81 mounted on the head holder 121 can be adjusted as a whole by the pair of tilt adjustment mechanisms 122.

  The head adjustment mechanism 112 suspends and supports the carriage main body 111, rotates the head unit 27 via the carriage main body 111, and suspends and supports the head rotation means, and the head rotation mechanism 131. And a head lifting / lowering mechanism 132 (Z-axis moving means) that lifts and lowers the head unit 27.

  The head rotating mechanism 131 rotates the head unit 27 around the θ axis that is the axis of the main carriage 26, thereby discharging functional liquid droplets in the XY plane (in a plane parallel to the surface of the workpiece W). The direction of the head 81 is freely changed. When adjusting the nozzle interval of the nozzle 105 and the application density of the functional liquid droplets according to the type of the work W, or the nozzle surface distance sensor 181 of the gap adjusting device 28. This is used when the direction of the functional liquid droplet ejection head 81 is changed corresponding to the above.

  As shown in FIG. 8, the head rotating mechanism 131 includes a suspension member 141 that supports the head holder 93 so as to suspend, a head support frame 142 that rotatably supports the suspension member 141, and a suspension member 141. Via the head rotation motor 143 for rotating the head unit 27 (functional liquid droplet ejection head 81) mounted on the head holder 93, and the power transmission mechanism 144 (which transmits the power of the head rotation motor 143 to the suspension member 141). Harmonic drive), and the suspension member 141 is rotated about the θ axis via the power transmission mechanism 144. Since the head unit 27 is mounted on the carriage body 111 so that its axis coincides with the θ-axis, the rotation of the suspension member 141 causes the head unit 27 to rotate around the axis. .

  As described above, the head rotating mechanism 131 connects the head lifting mechanism 132 and the carriage body 111 to each other, and rotates the head unit 27 forward and backward in the XY plane via the carriage body 111. Thereby, the position of the head unit 27 can be corrected in the θ-axis direction at the initial positioning stage of the head unit 27. As will be described in detail later, the head rotating mechanism 131 is also used when the four corners of the nozzle surface 103 of the functional liquid droplet ejection head 81 are caused to face the nozzle surface distance sensor 181 of the gap adjusting device 28. Is done. Note that a workpiece thickness distance sensor 182 (described later) of the gap adjusting device 28 is attached to the head support frame 142 via an arm member 145.

  In the present embodiment, the head unit 27 is attached to the main carriage 26 with the position where the posture of the functional liquid droplet ejection head 81 mounted on the head unit 27 is parallel to the Y-axis direction as a predetermined head reference position. Thus, the head unit 27 is rotated in the range of 0 ° to ± 90 ° which is the predetermined head reference position.

  The head lifting mechanism 132 lifts and lowers the head unit 27 via the head rotating mechanism 131 and the carriage body 111. The nozzle surface 103 of the functional liquid droplet ejection head 81 is appropriately set in correspondence with each unit of the maintenance device 12. In addition to adjusting to a predetermined height position, it is also used as an elevating means for finely adjusting the work gap.

  As shown in FIG. 9, the head lifting mechanism 132 includes a pair of left and right support blocks 151 that support the head rotation mechanism 131, a lift block 152 that supports the pair of left and right support blocks 151 slidably in the vertical direction, and a support block 151, a pair of left and right head lifting guides 153 for guiding the movement of 151, a head lifting ball screw 154 screwed to the lifting block 152, and a head lifting motor 155 (servo motor with brake) connected to one end of the head lifting ball screw 154. , Is composed of. When the head lifting / lowering motor 155 rotates in the forward / reverse direction, the support block 151 is lifted / lowered via the lifting / lowering block 152, and the head unit 27 (functional liquid droplet ejection head 81) moves in the vertical direction.

  As described above, the three functional liquid droplet ejection heads 81 mounted on the head plate 82 can be moved in the Y-axis direction by the Y-axis table via the carriage body 111 and the head adjustment mechanism 112. Yes. The parallelism of the nozzle surface 103 of the functional liquid droplet ejection head 81 can be adjusted as a whole by the attitude adjustment mechanism 115 and the tilt adjustment mechanism 122. On the other hand, each functional liquid droplet ejection head 81 is mounted to be inclined with respect to the head plate 82 based on the structural variation or the variation of the assembly structure, or the vertical position of the nozzle surface 103 is changed during replacement. Since the three functional liquid droplet ejection heads 81 are shifted in the vertical direction and mounted on the head plate 82, the nozzle surface 103 is shifted in the vertical direction. Therefore, for example, every time the workpiece W is set on the suction table 25, the gap adjustment device 28 accurately measures the vertical displacement of the nozzle surface 103 so that the nozzle surface 103 contacts the surface of the workpiece W. (Details will be described later).

  Here, a series of operations of the drawing apparatus 11 will be briefly described. First, as a preparation before discharging the functional liquid, the workpiece recognition camera 30 faces the workpiece W, the position of the workpiece W set on the suction table 25 is corrected, and the head recognition camera 29 and the head unit 27 are moved. Then, the head unit 27 faces the head recognition camera 29, and the position of the head unit 27 is corrected by the head recognition camera 29.

  Next, the work gap is finely adjusted by the gap adjusting device 28 (details will be described later). Further, the head rotating mechanism 131 rotates the head unit 27 to adjust the orientation of the functional liquid droplet ejection head 81 so that the row direction of the nozzle row 104 is parallel to the Y-axis direction.

  Subsequently, the X-axis table 23 moves the workpiece W forward in the main scanning (X-axis) direction. In synchronization with the forward movement of the work W, the functional liquid droplet ejection head 81 is selectively driven, and the functional liquid is selectively ejected onto the work W. When the workpiece W moves once, the Y-axis table 24 moves the main carriage 26 in the sub-scanning (Y-axis) direction. Then, the work W is moved backward by the X-axis table 23, and the functional liquid droplet ejection head 81 is selectively driven in synchronization with the work W. When the backward movement of the work W is completed, the main carriage 26 is sub-scanned by the Y-axis table 24. Then, by repeating this several times, drawing of the work W from end to end (entire area) is performed.

  On the other hand, as shown in FIG. 1, the maintenance device 12 includes a flushing unit 161 for receiving the functional liquid preliminarily discharged from the functional liquid droplet ejection head 81, and a suction unit 162 for performing pump suction of the functional liquid droplet ejection head 81. A wiping unit 163 for wiping off dirt adhering to the nozzle surface 103 of the functional liquid droplet ejection head 81, and an ejection inspection unit 164 for inspecting the ejection state of the functional liquid ejected from the functional liquid droplet ejection head 81. And a weight measuring unit 165 for measuring the weight of the functional liquid ejected from the functional liquid droplet ejection head 81. The flushing unit 161, the suction unit 162, the wiping unit, and the discharge inspection unit 164 are disposed on the left side of the X-axis table 23, and the weight measurement unit 165 is disposed on the right side of the X-axis table 23. . These units are arranged on the movement trajectory of the head unit 27 that moves in the Y-axis direction, and use the movement of the head unit 27 by the Y-axis table 24 to face the head unit 27 and move the head up and down. After the distance from the nozzle surface 103 is adjusted by the mechanism 132, it is used for maintenance. Note that pre-discharge flushing units 166 and 166 are provided before and after the suction table 25 for pre-discharge flushing performed immediately before the functional liquid is discharged to the workpiece W, respectively.

  A common support frame 171 that supports the suction unit 162 and the discharge inspection unit 164 is installed side by side with the X-axis table 23 on the left side of the X-axis table 23 in the drawing. As shown in FIG. 10, the common support frame 171 includes a base portion 172 installed on the stone surface plate 22 and a stand portion 173 erected on one end in the longitudinal direction of the base portion 172. Reference numeral 172 denotes a discharge inspection unit 164, and the stand portion 173 places a suction unit support base 174 that supports the suction unit 162. The suction unit support 174 is provided with a nozzle surface distance sensor 181 having a rectangular shape in plan view via a sensor support member 175 extending in the Y-axis direction.

  Subsequently, the gap adjusting device 28 of the present embodiment will be described in detail with reference to FIGS. 11 and 12. The gap adjusting device 28 is disposed on the suction unit support base 174 and is attached to the nozzle surface distance sensor 181 for measuring the distance from a plurality of locations on the nozzle surface 103 and the head support frame 142. A workpiece thickness sensor 182 for measuring the thickness of the workpiece and a calibration jig 183 disposed on the suction table 25 are provided. Further, the gap adjusting device 28 moves the functional liquid droplet ejection head 81 in a plane parallel to the plane of the workpiece W so that the plurality of measurement points 106 of the nozzle surface 103 are sequentially faced to the nozzle surface distance sensor 181. A gap measuring system moving mechanism, lifting means for finely adjusting the work gap by moving the functional liquid droplet ejection head 81 in the vertical direction with respect to the work W, and a plane parallel to the surface of the work W. And a control means for controlling the lifting / lowering means based on the measurement result of the nozzle surface distance sensor 181. The Y-axis table 24, the head rotating mechanism 131, and the head lifting / lowering mechanism 132 are host computers. 3 function as moving means and rotating means (gap measurement system moving mechanism), elevating means and control means, respectively. . The nozzle surface distance sensor 181 is arranged so as to face the head unit 27 with the calibration jig 183 sandwiched in the vertical direction.

  The nozzle surface distance sensor 181 sets the vertical position of the surface of the suction table 25 as the zero point, and the four measurement points 106 that are the four corners of the nozzle surface 103, that is, the three functional liquid droplet ejection heads 81. It measures the vertical positions of the twelve measurement points 106, and accurately measures each of the above-mentioned positions using the reflection of laser light. In addition, since one of the four measurement locations 106 that are the four corners of the nozzle surface 103 is the lowest position of the nozzle surface 103, the distance measurement means causes the lowest measurement of the nozzle surface 103. It is possible to reliably measure the location located in the area. This measurement result is output to the host computer 3, and the host computer 3 determines the closest position of the plurality of measurement results. The number and position of the measurement locations are arbitrary. For example, when each functional liquid droplet ejection head 81 is accurately mounted in parallel to the main carriage 26 (head plate 82), each nozzle surface What is necessary is just to measure the position of the up-down direction of arbitrary one of 103.

  In addition, when the nozzle surface distance sensor 181 is newly installed or replaced, the nozzle surface distance sensor 181 causes the first vertical measurement surface 192 (to be described later) of the calibration jig 183 to be first in the vertical direction. A reference distance is measured. In this case, the dimension between the first measurement reference surface 192 and the surface of the workpiece W is controlled, and this measurement result is output to the host computer 3, and the host computer 3 generates a nozzle based on the first reference distance. The zero point correction of the surface distance sensor 181 is performed. Therefore, even when the nozzle surface distance sensor 181 is newly installed or replaced, the zero point correction of the nozzle surface distance sensor 181 is performed, so that the measurement result by the nozzle surface distance sensor 181 is the laser beam for the measurement surface. Therefore, accurate zero point correction can be performed on the measurement result of the distance from the plurality of measurement points 106 on the nozzle surface 103 by the nozzle surface distance sensor 181.

  The nozzle surface distance sensor 181 drives the head rotation mechanism 131 to adjust the head unit 27 so that the row direction of the nozzle row is parallel to the Y-axis direction (position of + 90 ° with respect to a predetermined head reference position). The nozzle surface 103 is rotated so that one short side of each nozzle surface 103 is positioned on the nozzle surface distance sensor 181. Next, out of 12 measurement points 106 that are four corners of each nozzle surface 103 of the three functional liquid droplet ejection heads 81, six measurement points 106 that are both ends of one short side of each nozzle surface 103. Are sequentially directed to the nozzle surface distance sensor 181 by the Y-axis table 24, and the vertical positions of the six measurement points 106 are measured. Subsequently, the head rotating mechanism 131 rotates the head unit 27 by 180 ° (position of −90 ° with respect to a predetermined head reference position) about the θ axis, and the other short side of each nozzle surface 103 is set to the nozzle. It is located on the surface distance sensor 181. Then, among the 12 measurement points 106, the six measurement points 106 which are the opposite ends of the other short side of each nozzle surface 103 are sequentially exposed to the nozzle surface distance sensor 181 by the Y-axis table 24, and the six measurement points 106 are exposed. The vertical position of the measurement location 106 is measured.

  In this manner, the vertical positions of 12 measurement points 106 that are the four corners of each nozzle surface 103 of the three functional liquid droplet ejection heads 81 are measured. Accordingly, the upper and lower surfaces of the nozzle surface 103 of the functional liquid droplet ejection head 81 are not affected by the mounting accuracy in the vertical direction of each other as in the case where the plurality of nozzle surface distance sensors 181 are attached to the functional liquid droplet ejection head 81. It is possible to accurately measure the displacement in the direction. Further, the Y-axis table 24 and the head rotation mechanism used during the drawing operation and the maintenance operation can easily cause the measurement location 106 of the nozzle surface 103 to face the distance measurement sensor. There is no need to further include means for facing the nozzle surface distance sensor 181, and the entire structure of the droplet discharge device 1 can be simplified.

  In order to cause the plurality of measurement points 106 of the nozzle surface 103 to sequentially face the nozzle surface distance sensor 181, the nozzle surface distance sensor 181 is disposed on the suction table 25, and the functional liquid droplet ejection head 81 and the nozzle surface are arranged. Both the distance sensors 181 for use may be moved. In addition, a plurality of nozzle surface distance sensors 181 are arranged with high accuracy in the vertical direction at positions corresponding to the plurality of measurement locations, and the plurality of nozzle surface distance sensors 181 are arranged in the vertical direction with respect to the plurality of measurement locations 106. Each position may be measured.

  Further, since the nozzle surface distance sensor 181 is located on the movement locus of the suction table 25 that moves in the X-axis direction, the movement of the suction table 25 by the X-axis table 23 is used for the calibration jig 183. It comes to face.

  The workpiece thickness distance sensor 182 measures the position of the surface of the workpiece W using the vertical position of the surface of the suction table 25 as a zero point, and uses the reflection of laser light to accurately determine the above position. Measure well. This measurement result is output to the host computer 3, and the thickness of the workpiece W is calculated by the host computer 3.

  When the workpiece thickness sensor 182 is newly installed or replaced, the second measurement reference surface 197 of the calibration jig 183 is measured by the workpiece thickness sensor 182 in the same manner as the nozzle surface sensor 181. Measurement of the second reference distance in the vertical direction (described later) is performed. In this case, the dimension between the second measurement reference surface 197 and the surface of the workpiece W is controlled, and the measurement result is output to the host computer 3, and the host computer 3 outputs the workpiece based on the second reference distance. Zero point correction of the thickness distance sensor 182 is performed.

  In order to measure and measure the position in the vertical direction, a laser beam reflection sensor (laser distance sensor) such as the nozzle surface distance sensor 181 and the workpiece thickness distance sensor 182 used in this embodiment is used. In addition, various measuring means such as a sensor based on image recognition and a photosensor including a light emitting / receiving element can be used.

  As shown in FIG. 12, the calibration jig 183 is used for zero point correction of the nozzle surface distance sensor 181 and the workpiece thickness distance sensor 182, and is a disc-shaped reference made of a stainless steel plate. A plate 191 and a disk-shaped glass plate 196 made of quartz glass are fitted in a concave portion 193 formed concentrically on the upper surface thereof. The reference plate 191 is attached to the mounting hole 51 (the surface of the suction table 25) so that the peripheral portion on the back surface side is formed thin through a step portion, and the half portion is immersed in the step portion. The back surface side of the reference plate 191 is a part where the first measurement reference surface 192 is formed, and eutectic plating (black) similar to the nozzle plate 102 is applied to this back surface. The surface of the glass plate 196 is a second measurement reference surface 197 and is fitted in the recess 193 so as to be flush with the surface of the reference plate 191. Positioned around the recess 193, four screw holes 195 are formed in the reference plate 191 at equal intervals in the circumferential direction, and four screws (not shown) screwed into these screw holes 195 are formed. The glass plate 196 is fixed on the recess 193 at four locations by the seating surface.

  The calibration jig 183 is disposed in the mounting hole 51 so that the first measurement reference surface 192 faces downward and the second measurement reference surface faces upward. The position of the first measurement reference surface 192 is managed at a distance corresponding to the thickness of the reference plate 191 from the surface of the suction table 25, and the second measurement reference surface 197 is the thickness of the glass plate 196 from the surface of the suction table 25. The position is managed at a distance corresponding to this. Differences between the first measurement reference plane 192, the second measurement reference plane, and the suction table 25 are added to the data of the host computer 3.

  11, the first measurement reference surface 192 of the reference plate 191 serves as a reference when the zero point correction of the nozzle surface distance sensor 181 is performed, and the nozzle surface distance sensor 181 is used as a reference. As a result, the first measurement reference plane 192 is irradiated with laser light, and the first reference distance is measured. Based on the first reference distance and the distance from the surface of the suction table 25 to the first measurement reference surface 192 (the thickness of the reference plate 191), the vertical position of the surface of the suction table 25 becomes a zero point. Zero point correction is performed. Since the reference plate 191 is made of a stainless steel plate that has been subjected to co-plating similarly to the nozzle plate 102, the first measurement reference surface 192 has a reflectance that is substantially equal to the reflectance of the laser beam with respect to the nozzle surface 103. ing. Therefore, the measurement result by the nozzle surface distance sensor 181 is not affected by the reflectance of the laser beam with respect to the measurement surface, and the nozzle surface 103 and the first measurement reference surface 192 can be measured under the same conditions. Thus, accurate zero point correction can be performed on the measurement result of the distance from the nozzle surface 103 by the nozzle surface distance sensor 181.

  Similar to the first measurement reference surface 192, the second measurement reference surface 197 of the reference plate 191 serves as a reference when the zero point correction of the workpiece thickness distance sensor 182 is performed, and is a workpiece thickness distance. The sensor 182 irradiates the second measurement reference surface 197 with laser light, and the second reference distance is measured. Since the second measurement reference surface 197 is formed on the glass plate 196, the second measurement reference surface 197 has a reflectance substantially equal to the reflectance of the laser beam with respect to the workpiece W (quartz glass substrate). Therefore, the measurement result by the workpiece thickness distance sensor 182 is not affected by the reflectance of the laser beam with respect to the measurement surface, and the surface of the workpiece W and the second measurement reference surface 197 are measured under the same conditions. Therefore, accurate zero point correction can be performed on the measurement result of the distance from the surface of the workpiece W by the workpiece thickness sensor 182.

  As shown in FIG. 11, the host computer 3 controls the lifting operation of the head lifting mechanism 132 based on the measurement results of the nozzle surface distance sensor 181 and the workpiece thickness distance sensor 182. As described above, the nozzle surface distance sensor 181 and the workpiece thickness distance sensor 182 have the vertical position on the surface of the suction table 25 as a zero point, and are zero when newly installed or replaced. Point adjustment has been made.

  The nozzle surface distance sensor 181 measures the vertical positions of twelve measurement locations 106 for the three functional liquid droplet ejection heads 81, and sends the measurement results to the host computer 3. The host computer 3 selects the minimum measurement value (distance from the closest measurement point 106) from the 12 measurement results.

  When the workpiece W is set on the suction table 25, the vertical position of the surface of the workpiece W is measured by the workpiece thickness sensor 182, and the measurement result, that is, the workpiece thickness data is sent to the host computer 3. Sent. The host computer 3 has data updating means 201 for updating the stored workpiece thickness data, and the workpiece thickness data is updated every time the workpiece W is set. For this reason, the work gap can be finely adjusted according to the thickness of the work W.

The host computer 3 calculates the distance between the closest measurement location 106 and the surface of the workpiece W from the workpiece thickness data updated by the data updating means 201 and the selected minimum measurement value. Then, the host computer 3 drives the head elevating mechanism 132 to raise and lower the head unit 27 (nozzle surface 103) so that the calculated separation distance becomes a set work gap (for example, 0.15 mm). The head gap is finely adjusted. Accordingly, since the distance between the closest position of the 12 measurement results obtained by the nozzle surface distance sensor 181 and the surface of the workpiece W is a set work gap, the nozzle surface 103 does not contact the surface of the workpiece W. .
In order to finely adjust the work gap, the work W may be moved up and down, or both the head unit 27 and the work W may be moved up and down.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of the present embodiment, a color filter, a liquid crystal display device, an organic EL device, a PDP device, an electron emission device (FED device, SED). The structure and the manufacturing method thereof will be described by taking a device) as an example.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 13 is a flowchart showing the manufacturing process of the color filter, and FIG. 14 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix formation step (S1), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in the bank formation step (S2), the bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 14B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 14C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 therebelow serve as a partition wall portion 507b that partitions each pixel region 507a, and the colored layer (film forming portions) 508R, 508G, When forming 508B, the landing area of the functional droplet is defined.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material for the bank 503, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. The landing position accuracy is improved.

  Next, in the colored layer forming step (S3), as shown in FIG. 14 (d), functional droplets are ejected by the functional droplet ejection head 81 to enter each pixel region 507a surrounded by the partition wall portion 507b. Make it land. In this case, the functional liquid droplet ejection head 81 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. When the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S4), and as shown in FIG. 14E, the substrate 501, the partition wall portion 507b, and the colored layers 508R, 508G, and 508B are moved. A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
After forming the protective film 509, the color filter 500 is obtained by cutting the substrate 501 for each effective pixel region.

  FIG. 15 is a cross-sectional view of a principal part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 14, the corresponding parts are denoted by the same reference numerals, and description thereof is omitted.

The liquid crystal device 520 is roughly composed of a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 of the color filter 500 (on the liquid crystal layer side), a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 15 are formed at predetermined intervals. The color of the first electrode 523 A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are formed of a transparent conductive material such as ITO (Indium Tin Oxide).

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, a spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material Liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 529. In addition, the above-described sealing material 529 can be printed by the functional liquid droplet ejection head 81. Furthermore, the first and second alignment films 524 and 527 can be applied by the functional liquid droplet ejection head 81.

FIG. 16 is a cross-sectional view of a principal part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 17 shows a third example in which a liquid crystal device is configured using the color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also.

  Next, FIG. 18 is a cross-sectional view of a main part of a display region (hereinafter simply referred to as a display device 600) of the organic EL device.

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 stacked on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power line 614 is disposed on the first interlayer insulating film 611a, and the power line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a formed of an inorganic material such as SiO, SiO ₂ , TiO _{2, and the} like, and is made of an acrylic resin, a polyimide resin, or the like. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. In addition, you may further form the other functional layer which has another function adjacent to this light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. As the hole injection / transport layer forming material, for example, a mixture of a polythiophene derivative such as polyethylenedioxythiophene and polystyrenesulfonic acid is used.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. The solvent (nonpolar solvent) of the second composition is preferably insoluble in the hole injection / transport layer 120a. For example, cyclohexylbenzene, dihydrobenzofuran, trimethylbenzene, tetramethylbenzene, or the like is used. be able to. By using such a nonpolar solvent for the second composition of the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, a manufacturing process of the display device 600 will be described with reference to FIGS.
As shown in FIG. 19, the display device 600 includes a bank part forming step (S21), a surface treatment step (S22), a hole injection / transport layer forming step (S23), a light emitting layer forming step (S24), It is manufactured through an electrode formation step (S25). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S21), as shown in FIG. 20, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film by a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, an organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S22), a lyophilic process and a lyophobic process are performed. The regions to be subjected to the lyophilic treatment are the first stacked portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by plasma treatment using oxygen as a processing gas, for example. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b, and the surface is fluorinated (treated to be liquid repellent) by plasma treatment using, for example, tetrafluoromethane. )
By performing this surface treatment process, when forming the functional layer 617 using the functional liquid droplet ejection head 81, the functional liquid droplets can be landed more reliably on the pixel area. It is possible to prevent the functional droplets from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. The display device base 600A is placed on the set table 63 of the droplet discharge device 1 shown in FIG. 1, and the following hole injection / transport layer forming step (S23) and light emitting layer forming step (S24) are performed. .

  As shown in FIG. 22, in the hole injection / transport layer forming step (S23), the first composition containing the hole injection / transport layer forming material is transferred from the functional liquid droplet ejection head 81 to each opening 619 that is a pixel region. Discharge inside. Thereafter, as shown in FIG. 23, a drying treatment and a heat treatment are performed to evaporate the polar solvent contained in the first composition, and a hole injection / transport layer 617a is formed on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S24) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform a surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Then, as shown in FIG. 24, the second composition containing the light-emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 24) is used as a functional droplet as a pixel region ( A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process or the like, the discharged second composition is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 25, a hole injection / transport layer 617a is obtained. A light emitting layer 617b is formed thereon. In the case of this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 81, as shown in FIG. 26, the same steps as in the case of the light emitting layer 617b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 617b corresponding to green (G) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. Further, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S25).

In the counter electrode forming step (S25), as shown in FIG. 27, a cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
At the top of the cathode 604, Al film as the electrode, Ag film and a protective layer of SiO _2, SiN, or the like for its antioxidant is appropriately provided.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 28 is an exploded perspective view of an essential part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701 and a second substrate 702 that are disposed to face each other, and a discharge display portion 703 that is formed therebetween. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence, and the red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are arranged at the bottom and the blue discharge chamber 705B, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following steps are performed with the first substrate 701 placed on the set table 63 of the droplet discharge device 1.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 81. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode formation regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
Further, in the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the functional liquid droplet ejection head 81, and corresponding. Land in the color discharge chamber 705.

Next, FIG. 29 is a cross-sectional view of an essential part of an electron emission device (FED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 includes a first substrate 801, a second substrate 802, and a field emission display unit 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  On the upper surface of the first substrate 801, a first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed so as to be orthogonal to each other. In addition, an element film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, a plurality of electron emission portions 805 are configured by the first element electrode 806a, the second element electrode 806b, and the element film 807. The element film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after the element film 807 is formed.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A lattice-shaped bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in a predetermined pattern.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes are applied to the phosphor 813 formed on the anode electrode 809 that is an anode through the element film (gap 808) 807. Excited light emission enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, and the anode electrode 809 can be formed using the droplet discharge device 1, and each color phosphor 813R, 813G and 813B can be formed using the droplet discharge device 1.

  Further, as other electro-optical devices, devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable. By using the droplet discharge device 1 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

  As described above, according to the gap adjusting device and the droplet discharge device of the present invention, the work gap can be adjusted to a minimum value by accurately measuring the vertical displacement of the nozzle surface. Therefore, it is possible to accurately manage the flight bend, the landing diameter, and the like of the functional droplet.

  According to the method of manufacturing an electro-optical device, the electro-optical device, and the electronic apparatus of the present invention, since it is manufactured using a droplet discharge device in which the flying bend, the landing diameter, etc. of the functional droplet are accurately controlled, the reliability It is possible to provide a high-quality electro-optical device and electronic equipment.

  DESCRIPTION OF SYMBOLS 1 Droplet discharge device, 3 Host computer, 11 Drawing apparatus, 22 X-axis table, 23 Y-axis table, 25 Suction table, 26 Main carriage, 27 Head unit, 28 Gap adjustment device, 51 Mounting hole, 81 Functional droplet Discharge head, 813 nozzle surface, 106 measurement location, 131 head rotation mechanism, 132 head lifting mechanism, 181 nozzle surface distance sensor, 182 workpiece thickness distance sensor, 183 calibration jig, 192 first measurement reference surface, 197 Second measurement reference plane, 201 data updating means, W work.

Claims (15)

In a gap adjustment device that finely adjusts a work gap between a work surface set on a work table and a nozzle surface of a functional liquid droplet ejection head that discharges a functional liquid onto the work,
Position measuring means for measuring the position in the vertical direction with respect to a plurality of locations on the nozzle surface spaced from each other;
A gap measuring system that moves the functional liquid droplet ejection head relative to the position measuring unit in a plane parallel to the surface of the workpiece so that a plurality of locations on the nozzle surface are sequentially exposed to the position measuring unit. A moving mechanism;
Elevating means for finely adjusting the work gap by moving the functional liquid droplet ejection head relative to the work in the vertical direction;
Control means for controlling the elevating means based on the measurement result by the position measuring means,
The control means controls the elevating means so that a separation distance between the closest position of a plurality of measurement results by the position measuring means and the surface of the work becomes a set work gap. apparatus. The nozzle surface is formed in a square shape,
2. The gap adjusting device according to claim 1, wherein the plurality of locations on the nozzle surface include at least four locations that form four corners of the nozzle surface. A work thickness measuring means for measuring the thickness of the work is further provided,
The said control means has a data update means which updates predetermined | prescribed workpiece thickness data according to the workpiece | work thickness data measured by the said workpiece | work thickness measurement means, The Claim 1 or 2 characterized by the above-mentioned. Gap adjustment device. A calibration jig having a first measurement reference surface whose position is controlled with respect to the surface of the work table,
The position measuring means measures a first reference distance in a vertical direction with respect to the first measurement reference plane;
4. The gap adjusting device according to claim 1, wherein the control unit performs zero point correction of the position measuring unit based on the first reference distance. 5. The position measuring means is a nozzle surface distance sensor using laser light,
The gap adjusting device according to claim 4, wherein the first measurement reference surface has a reflectance that is substantially equal to a reflectance of the laser beam with respect to the nozzle surface. The calibration jig further includes a second measurement reference surface whose position is managed with respect to the surface of the work table,
The workpiece thickness measuring means measures a second reference distance in the vertical direction with respect to the second measurement reference plane,
6. The gap adjusting device according to claim 4, wherein the control unit performs zero point correction of the workpiece thickness measuring unit based on the second reference distance. The workpiece thickness measuring means is a workpiece thickness distance sensor using laser light,
The gap adjusting device according to claim 6, wherein the second measurement reference plane has a reflectance substantially equal to a reflectance of the laser beam with respect to a surface of the workpiece.   The gap adjusting device according to any one of claims 4 to 7, wherein the calibration jig is disposed in a mounting hole penetratingly formed in the work table.   A calibration jig provided in the gap adjusting device according to claim 4.   A liquid droplet ejection apparatus comprising the gap adjusting apparatus according to claim 1. A maintenance device for maintaining the functional liquid droplet ejection head;
A Z-axis moving means for moving the functional liquid droplet ejection head in the vertical direction with respect to the maintenance device and adjusting the vertical distance between the maintenance device and the nozzle surface;
11. The liquid droplet ejection apparatus according to claim 10, wherein the elevating means is mounted on the carriage and also serves as the Z-axis moving means. An X-axis table that relatively moves the functional liquid droplet ejection head in a direction orthogonal to the work during a drawing operation in which the functional liquid is ejected from the functional liquid droplet ejection head onto the work; A Y-axis table,
The gap measuring system moving mechanism is mounted on the carriage and moving means for moving the functional liquid droplet ejection head in one direction parallel to the surface of the workpiece via the carriage, and the carriage has an axis thereof. Rotation means for rotating the functional liquid droplet ejection head in a plane parallel to the surface of the workpiece by
The liquid droplet ejection apparatus according to claim 10, wherein the moving unit also serves as the Y-axis table.   13. A method for manufacturing an electro-optical device, wherein the droplet discharge device according to claim 10 is used to form a film forming portion with functional droplets on a workpiece.   An electro-optical device using the droplet discharge device according to claim 10, wherein a film forming portion is formed by functional droplets on a workpiece.   15. An electronic apparatus comprising the electro-optical device manufactured by the method for manufacturing the electro-optical device according to claim 13 or the electro-optical device according to claim 14.

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