JP2010165649A - 試料ホルダー - Google Patents
試料ホルダー Download PDFInfo
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- JP2010165649A JP2010165649A JP2009024252A JP2009024252A JP2010165649A JP 2010165649 A JP2010165649 A JP 2010165649A JP 2009024252 A JP2009024252 A JP 2009024252A JP 2009024252 A JP2009024252 A JP 2009024252A JP 2010165649 A JP2010165649 A JP 2010165649A
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- sample holder
- sample
- electron microscope
- thermal expansion
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Abstract
【解決手段】試料ホルダー本体の長手方向の主軸材に、熱膨張材料と、前記の熱膨張を打ち消す熱収縮材料を、組み合わせ相殺的にゼロ線膨張にすることで、電顕に試料ホルダーを装着した直後に発生する試料ドリフトの発生を軽減させる機構により、待ち時間を大幅に短縮させ、スループットを向上させる有利な効果を奏する。
【選択図】図3
Description
2 試料ホルダー軸のX軸駆動遠隔距離間の部分を示す。
2e 本発明の2を分割した熱膨張部材
2s 本発明の2を分割した熱収縮部材
3 ゴニオステージが、試料ホルダー軸に与えるX軸駆動の作用点面。
4 試料ホルダーの軸
5 試料ホルダーのハンドル(取手)
6 試料ホルダー保持筒
7 主フレーム部材(X、Y、Z各軸の駆動機構が組みこまれる。)
8 X軸駆動機構アクチュエーター本体
9 X軸駆動機構アクチュエーター本体の駆動ピン
10 試料ホルダーの軸へ、X軸駆動を伝達するリンク部材。
11 Y軸駆動機構で押された保持筒を押し返す部材。
12 Y軸駆動機構用アクチュエーター本体
13 保持筒押し返し部材11用のスプリング
14 試料ホルダー保持筒のピボット駆動部材
15 ピボット駆動部材の真空シール部材(Oリング)
16 試料ホルダーの真空シール部材(Oリング)
17 電子顕微鏡筐体を示す。
18 電子顕微鏡内部の真空領域を示す。
19 X軸(試料ホルダーの長手方向の駆動軸。)
20 Y軸
Claims (2)
- 試料ホルダー本体の主軸材に、熱膨張材料と、前記の熱膨張を打ち消す熱収縮材料を、組み合わせることで、相殺的にゼロ線膨張を得え、試料ホルダー本体の主軸材の温度変化による線膨張を抑制することで、試料位置の長手方向のドリフトの発生を軽減させることを特徴とする試料ホルダー。
- 請求項1において、試料ホルダー本体の主軸材に用いる、熱収縮材料に、Mn3Cu0.5Ge0.5Nで構成された材料を用いたことを特徴とする試料ホルダー。
Priority Applications (1)
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JP2009024252A JP5383235B2 (ja) | 2009-01-13 | 2009-01-13 | 試料ホルダー |
Applications Claiming Priority (1)
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JP2009024252A JP5383235B2 (ja) | 2009-01-13 | 2009-01-13 | 試料ホルダー |
Publications (2)
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JP2010165649A true JP2010165649A (ja) | 2010-07-29 |
JP5383235B2 JP5383235B2 (ja) | 2014-01-08 |
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JP2009024252A Active JP5383235B2 (ja) | 2009-01-13 | 2009-01-13 | 試料ホルダー |
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JP (1) | JP5383235B2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018185962A (ja) * | 2017-04-26 | 2018-11-22 | 日本電子株式会社 | ホルダーおよび荷電粒子線装置 |
CN117967598A (zh) * | 2024-03-28 | 2024-05-03 | 珠海格力电器股份有限公司 | 转轴组件、电机、压缩机 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4703181A (en) * | 1986-04-07 | 1987-10-27 | Gatan Inc. | Anti-drift device for side entry electron microscope specimen holders |
JPH0668828A (ja) * | 1991-10-24 | 1994-03-11 | Hitachi Ltd | 電子顕微鏡用試料ホルダ |
JPH11245899A (ja) * | 1998-02-27 | 1999-09-14 | Mitsubishi Electric Corp | 寸法安定化構造物 |
JP2003068240A (ja) * | 2001-08-30 | 2003-03-07 | Jeol Ltd | 電子顕微鏡用試料ホルダ |
WO2006011590A1 (ja) * | 2004-07-30 | 2006-02-02 | Riken | 熱膨張抑制剤、ゼロ熱膨張材料、負の熱膨張材料、熱膨張抑制方法および熱膨張抑制剤の製造方法 |
JP2007183108A (ja) * | 2006-01-04 | 2007-07-19 | Mitsutoyo Corp | 圧子軸及び材料試験機 |
-
2009
- 2009-01-13 JP JP2009024252A patent/JP5383235B2/ja active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4703181A (en) * | 1986-04-07 | 1987-10-27 | Gatan Inc. | Anti-drift device for side entry electron microscope specimen holders |
JPH0668828A (ja) * | 1991-10-24 | 1994-03-11 | Hitachi Ltd | 電子顕微鏡用試料ホルダ |
JPH11245899A (ja) * | 1998-02-27 | 1999-09-14 | Mitsubishi Electric Corp | 寸法安定化構造物 |
JP2003068240A (ja) * | 2001-08-30 | 2003-03-07 | Jeol Ltd | 電子顕微鏡用試料ホルダ |
WO2006011590A1 (ja) * | 2004-07-30 | 2006-02-02 | Riken | 熱膨張抑制剤、ゼロ熱膨張材料、負の熱膨張材料、熱膨張抑制方法および熱膨張抑制剤の製造方法 |
JP2007183108A (ja) * | 2006-01-04 | 2007-07-19 | Mitsutoyo Corp | 圧子軸及び材料試験機 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018185962A (ja) * | 2017-04-26 | 2018-11-22 | 日本電子株式会社 | ホルダーおよび荷電粒子線装置 |
CN117967598A (zh) * | 2024-03-28 | 2024-05-03 | 珠海格力电器股份有限公司 | 转轴组件、电机、压缩机 |
CN117967598B (zh) * | 2024-03-28 | 2024-06-28 | 珠海格力电器股份有限公司 | 转轴组件、电机、压缩机 |
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JP5383235B2 (ja) | 2014-01-08 |
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