JP5383235B2 - 試料ホルダー - Google Patents
試料ホルダー Download PDFInfo
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- JP5383235B2 JP5383235B2 JP2009024252A JP2009024252A JP5383235B2 JP 5383235 B2 JP5383235 B2 JP 5383235B2 JP 2009024252 A JP2009024252 A JP 2009024252A JP 2009024252 A JP2009024252 A JP 2009024252A JP 5383235 B2 JP5383235 B2 JP 5383235B2
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- sample
- sample holder
- thermal expansion
- electron microscope
- linear expansion
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2 試料ホルダー軸のX軸駆動遠隔距離間の部分を示す。
2e 本発明の2を分割した熱膨張部材
2s 本発明の2を分割した熱収縮部材
3 ゴニオステージが、試料ホルダー軸に与えるX軸駆動の作用点面。
4 試料ホルダーの軸
5 試料ホルダーのハンドル(取手)
6 試料ホルダー保持筒
7 主フレーム部材(X、Y、Z各軸の駆動機構が組みこまれる。)
8 X軸駆動機構アクチュエーター本体
9 X軸駆動機構アクチュエーター本体の駆動ピン
10 試料ホルダーの軸へ、X軸駆動を伝達するリンク部材。
11 Y軸駆動機構で押された保持筒を押し返す部材。
12 Y軸駆動機構用アクチュエーター本体
13 保持筒押し返し部材11用のスプリング
14 試料ホルダー保持筒のピボット駆動部材
15 ピボット駆動部材の真空シール部材(Oリング)
16 試料ホルダーの真空シール部材(Oリング)
17 電子顕微鏡筐体を示す。
18 電子顕微鏡内部の真空領域を示す。
19 X軸(試料ホルダーの長手方向の駆動軸。)
20 Y軸
Claims (2)
- 試料ホルダー本体の主軸材であって、試料の観察点と、ゴニオステージに備わる試料ホルダーのX軸駆動の作用点との間に介在する部分の前記主軸材の材料は、熱膨張材料と、前記熱膨張材料の熱膨張を打ち消す熱収縮材料とを、組み合わせて構成されており、相殺的にゼロ線膨張を得、前記主軸材の温度変化による線膨張を抑制することで、試料位置の長手方向のドリフトの発生を軽減させることを特徴とする試料ホルダー。
- 前記熱収縮材料は、Mn 3 Cu 0.5 Ge 0.5 Nで構成された材料であることを特徴とする請求項1記載の試料ホルダー。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2009024252A JP5383235B2 (ja) | 2009-01-13 | 2009-01-13 | 試料ホルダー |
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JP2009024252A JP5383235B2 (ja) | 2009-01-13 | 2009-01-13 | 試料ホルダー |
Publications (2)
Publication Number | Publication Date |
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JP2010165649A JP2010165649A (ja) | 2010-07-29 |
JP5383235B2 true JP5383235B2 (ja) | 2014-01-08 |
Family
ID=42581655
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JP2009024252A Active JP5383235B2 (ja) | 2009-01-13 | 2009-01-13 | 試料ホルダー |
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JP (1) | JP5383235B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6796541B2 (ja) * | 2017-04-26 | 2020-12-09 | 日本電子株式会社 | ホルダーおよび荷電粒子線装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4703181A (en) * | 1986-04-07 | 1987-10-27 | Gatan Inc. | Anti-drift device for side entry electron microscope specimen holders |
JP3314422B2 (ja) * | 1991-10-24 | 2002-08-12 | 株式会社日立製作所 | 電子顕微鏡用試料ホルダ |
JPH11245899A (ja) * | 1998-02-27 | 1999-09-14 | Mitsubishi Electric Corp | 寸法安定化構造物 |
JP4119627B2 (ja) * | 2001-08-30 | 2008-07-16 | 日本電子株式会社 | 電子顕微鏡用試料ホルダ |
JP5099478B2 (ja) * | 2004-07-30 | 2012-12-19 | 独立行政法人理化学研究所 | 熱膨張抑制剤、ゼロ熱膨張材料、熱膨張抑制方法および熱膨張抑制剤の製造方法 |
JP4863354B2 (ja) * | 2006-01-04 | 2012-01-25 | 株式会社ミツトヨ | 圧子軸及び材料試験機 |
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2009
- 2009-01-13 JP JP2009024252A patent/JP5383235B2/ja active Active
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JP2010165649A (ja) | 2010-07-29 |
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