JP2010114335A - Resin sealing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a resin sealing method by which a semiconductor device having uniformity of quality maintained and also having high reliability can be manufactured. <P>SOLUTION: A substrate to be processed which has a plurality of semiconductor elements 110 mounted is arranged in a cavity 153 of a molding die 150 and while a first resin 131a is injected into the cavity 153 from a first gate 140, a second resin 231a is injected from a second gate 240 disposed opposite the first gate 140 across the cavity 153. Both the resins after being made to collide against each other at a center part of the cavity 153 are made to flow to a peripheral edge of the cavity 153 to seal the semiconductor elements 110. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a resin sealing method, and more particularly to a resin sealing method for sealing a plurality of semiconductor elements mounted on a substrate with a sealing resin.

  In the manufacture of semiconductor devices, a plurality of semiconductor elements mounted on a large support substrate are placed in a cavity of a sealing mold, and after resin sealing in a batch using a transfer molding method, A method (MAP (Molded Array Package) method) is performed in which the sealing resin and the support substrate are diced and separated into semiconductor elements to obtain a plurality of semiconductor devices.

  This method can increase the productivity of the semiconductor device, and is suitable, for example, for manufacturing a FBGA (Fine pitch Ball Grid Array) type or FLGA (Fine pitch Land Grid Array) type semiconductor device.

  In recent years, in order to further improve the productivity of semiconductor devices, a method has been adopted in which the size (planar size) of the support substrate is increased (increased) to increase the number of semiconductor elements mounted on the support substrate. ing. Along with this, the size of the cavity of the mold for sealing for batch sealing tends to increase (large area).

The support substrate is also referred to as a wiring substrate, a circuit substrate, or an interposer.
In addition, with recent downsizing, thinning, and high functionality of electronic devices, semiconductor devices mounted on the electronic devices are becoming more highly functional and highly integrated.

  For this reason, also in the FBGA type or FLGA type semiconductor device, it is required to reduce the thickness of the resin sealing portion. To cope with this, the depth of the cavity in the resin sealing die tends to be shallower.

  On the other hand, with the higher integration and higher functionality of the semiconductor device, the number of bonding wires connecting the electrodes of the semiconductor element and the electrode terminals provided on the support substrate is increased, and the arrangement thereof is becoming higher density. is there.

  However, when the MAP method is applied and a large-sized support base plate on which a plurality of semiconductor elements are mounted is placed in a shallow cavity and resin sealing is performed, the flow distance of the sealing resin is increased. Since it is long and the flowing space is narrow, the fluidity of the sealing resin is lowered in the cavity. In addition, the fluidity of the resin to be filled is hindered by the fact that a large number of bonding wires connecting the electrodes of the semiconductor element and the electrode terminals on the support substrate are arranged at a high density.

As a result, it becomes difficult to uniformly fill the cavity with the sealing resin, and voids or the like are generated in the resin sealing portion, causing a defect in the semiconductor device.
In order to control the fluidity of the resin in the cavity, for example, in the resin filling region on the substrate, a flow rate adjusting unit for blunting the inflow of the resin may be disposed in the periphery of the semiconductor device forming region. It has been proposed (see Patent Document 1).

According to the method proposed in Patent Document 1, the resin is uniformly injected into the cavity by substantially equalizing the injection rate of the sealing resin between the semiconductor formation region and the peripheral portion thereof. It is said that the production can be suppressed and sealed.
Japanese Patent Laying-Open No. 2005-167022

  However, in the method disclosed in Patent Document 1, by disposing the flow rate adjusting unit, the area where the semiconductor elements are arranged on the substrate is reduced, and the productivity improvement effect by the MAP method is reduced. .

  In general, a resin used for sealing a semiconductor element contains a filler for securing the mechanical strength of the solidified resin after sealing and adjusting the thermal expansion coefficient. In order to improve the productivity of semiconductor devices, and in the cavities that have become larger (larger area) or shallower (smaller in cross-sectional area) due to the thinning and high integration of semiconductor devices, the above-mentioned patent documents When the resin is injected from one of the cavities as shown in FIG. 1, the fluidity of the resin in the cavity is lowered, and the filler in the resin is unevenly distributed.

  As a result, the individual semiconductor devices obtained by the subsequent dicing process cannot maintain the uniformity of quality due to a decrease in mechanical strength and / or a change in moisture absorption / dehumidification characteristics, resulting in a decrease in reliability. .

  The present invention has been made in view of such a point, and provides a resin sealing method capable of manufacturing a semiconductor device having high quality uniformity and high reliability.

  To achieve the above object, according to the present invention, a plurality of semiconductor elements are mounted in a resin sealing method in which a plurality of semiconductor elements mounted on a substrate to be processed are collectively sealed with resin. Placing the processed substrate in the cavity of the molding die, injecting the first resin from the first resin injection portion into the cavity, and sandwiching the cavity into the first resin injection portion A step of injecting a second resin from a second resin injecting portion disposed so as to collide both resins at the central portion of the cavity and then causing the resin to flow to the peripheral portion of the cavity; The resin sealing method characterized by comprising is provided.

  According to said resin sealing method, the uniformity of quality is maintained and the resin-sealed semiconductor device which has high reliability can be manufactured.

Hereinafter, embodiments of a resin sealing method according to the present invention will be described with reference to the drawings.
<First Embodiment>
FIG. 1 shows a perspective plan view of the resin sealing device 100 in the first embodiment of the present invention. FIG. 2 is a schematic diagram in the AA ′ cross section of FIG. 1.

The resin sealing device 100 includes a molding die 150 including an upper die 151 and a lower die 152 that face each other.
In the sealing process using the resin sealing device 100, the wiring substrate 120 on which a plurality of semiconductor elements 110 are arranged in a matrix on one main surface is mounted on the lower mold 152 and the upper portion. A sealing resin is injected into a cavity 153 that is disposed between the molds 151 and formed between the lower mold 152 and the upper mold 151, so that the collective resin of the plurality of semiconductor elements 110 is collected. Sealing is performed.

  In the molding die 150, a first filling portion 160 and a second filling portion 260 for injecting a sealing resin into the cavity 153 along two opposing sides of the cavity 153 having a rectangular planar shape. Is arranged.

  The first filling portion 160 includes a first cull portion 161 formed in the upper mold 151 and forming a common space, and a cylindrical first pot 163-1 formed in the lower mold 152. 163-5 and first plungers 162-1 to 162-5 that move up and down in the respective first pots 163. The first cull portion 161 is connected to the cavity 153 through first runner portions 141-1 to 141-12 each having a first gate 140.

  On the other hand, the second filling unit 260 includes the second cull unit 261, the second pots 263-1 to 263-5, and the second plunger 262-1 that moves up and down in the respective second pots 263. To 262-5. The second cull portion 261 is connected to the cavity 153 via the second runner portions 241-1 to 241-12 provided with the second gate 240, respectively.

  That is, the first gate 140 that introduces the sealing resin into the cavity 153 from the first filling portion 160 and the second gate 240 that introduces the sealing resin into the cavity 153 from the second filling portion 260. 12 are respectively arranged and connected to the cavity 153.

Thus, in the present embodiment, the sealing resin is injected into the cavity 153 from the two opposite sides.
In such a configuration, the distance between the centers of adjacent gates (gate interval Wp) of the first gate 140 and the second gate 240 is constant, but the width corresponds to the center of the cavity 153. The gate width Wg2 located at the end of the cavity 153 is narrower than the width Wg1 of the gate located at the end.

  For example, in the case of a molding die 150 that seals the wiring substrate 120 with dimensions of 195 mm wide × 70 mm long, and the dimensions of the cavity 153 are horizontal 191 mm × length 60 mm × height 0.4 mm, the gate interval Wp Is 9.4 mm, the width Wg1 of the gate located at the center is set to 4.8 mm, and the width Wg2 of the gate located at the end is set to 3.8 mm.

The width Wg of the gate is gradually reduced from the gate located at the center to the gate located at the end.
Note that the heights H of the first gate 140 and the second gate 240 are each 0.15 mm, for example.

  The molding die 150 has a first air vent 170 and a second air vent 270 that communicate with the cavity 153 at positions facing the cavity 153 on the side where the gates 140 and 240 are not disposed. It is arranged. In the case of the molding die 150 having the above dimensions, the width wg of the first air vent 170 and the second air vent 270 is 1 mm to 4 mm, and the height h (not shown) is 0.005 mm to 0.02 mm, adjacent to each other. The interval wp between the air vents is set to 4 mm to 10 mm.

  In the resin sealing method using the molding die 150, first, the wiring substrate 120 to be processed is placed on the lower die 152. On one main surface (upper surface) of the wiring board 120, a plurality of semiconductor elements are mounted in a matrix with a predetermined interval.

  Thereafter, the upper mold 151 is lowered onto the lower mold 152. As a result, the wiring substrate 120 is disposed in the cavity 153 formed between the lower mold 152 and the upper mold 151.

  In each of the first plungers 162-1 to 162-5 of the first filling unit 160, a solid first resin tablet 131 is set, while the second filling unit 260 has a second A solid second resin tablet 231 is also set on each of the plungers 262-1 to 262-5.

  The molding die 150 is preheated, and the set first resin tablet 131 and second resin tablet 231 are melted, and as the first plunger 162 and the second plunger 262 rise, wiring is performed. It is injected into the cavity 153 in which the substrate 120 is disposed.

  That is, the flow path of the sealing resin in the molten state is adjusted from the first cull portion 161 and the second cull portion 261 in the first runner portion 141 and the second runner portion 241, respectively. It is injected into the cavity 153 through the first gate 140 and the second gate 240.

  Along with the inflow of the sealing resin, the gas in the cavity 153 is discharged from the first air vent 170 and the second air vent 270 disposed on the other two sides of the rectangular cavity.

Here, the flow of the resin in the resin sealing process using the resin sealing device 100 will be described with reference to FIG. 2 and FIGS. 3 to 6.
As described above, the wiring board 120 on which the plurality of semiconductor elements 110 are mounted is disposed in the lower mold 152, the upper mold 151 is lowered, and the upper mold 151 and the lower mold 152 are used to Hold the part.

Thereby, as shown in FIG. 2, the wiring substrate 120 to be processed is disposed in the cavity 153 between the lower mold 152 and the upper mold 151.
Next, the first resin tablet 131 is put on the first plungers 162-to 162-5 in the first pots 163-1 to 163-5, and the first resin tablets 131 are placed in the second pots 263-1 to 263-5. The second resin tablet 231 is put on the second plungers 262-1 to 262-5.

  The resin tablet 131 and the resin tablet 231 contain a filler in advance in order to ensure mechanical strength and adjust the thermal expansion coefficient after being injected into the cavity 153 and cured.

As the filler, fine particles such as silicon dioxide (SiO ₂ ) and calcium carbonate (CaCO ₃ ) having a certain particle size distribution are used. In addition, the shape of the filler includes a spherical shape or a pulverized shape, but a spherical shape is more preferable from the viewpoint of improving the filling rate into the cavity 153 of the sealing resin containing the filler. Of course, fillers having different shapes or materials may be mixed and used in accordance with process conditions and / or required characteristics of the semiconductor device to be formed.

  The molding die 150 is heated in advance to a predetermined temperature (for example, 150 ° C. to 190 ° C.), and the charged first resin tablet 131 and the second resin tablet 231 are heated and melted.

  The first resin 131a in which the first resin tablet 131 is melted is simultaneously pumped by the first plungers 162-1 to 162-5 with the same pressure, and is filled in the first cull portion 161. Similarly, the second resin 231a in which the second resin tablet 231 is melted is simultaneously pumped by the second plungers 262-1 to 262-5 and filled into the second cull portion 261.

  The first resin 131a filled in the first cull portion 161 is further pumped by the plurality of first plungers 162, passes through the first runner portion 141, and enters the cavity 153 from the first gate 140. Injected. Similarly, the second resin 231 a filled in the second cull portion 261 is further pumped by the plurality of second plungers 262, passes through the second runner portion 241, and passes from the second gate 240 to the cavity 153. It is injected into.

  That is, by simultaneously applying pressure by the plunger 162 and the plunger 262, the first resin 131a and the second resin 231a are brought into the cavity 153 from both the first gate 140 and the second gate 240. Injected at almost the same time.

  At this time, although the first gates 140-1 to 140-12 are arranged at equal intervals Wp, the gate width Wg1 in the central portion is made wider than the gate width Wg2 in the end portion. From the gate located to the gate at the end, the width is gradually reduced step by step. That is, the gate portion at the center has a larger cross-sectional area than the gate at the end.

  Therefore, the first resin 131a injected from the first gate 140 into the cavity 153 is injected in a larger amount than the end portion at the center of the cavity 153 as shown in FIG. . FIG. 4 is a schematic diagram showing the AA ′ cross section of FIG. The AA ′ cross section in FIG. 3 corresponds to the AA ′ cross section in FIG.

At this time, the first resin 131 a has a portion where the flow is delayed due to the presence of the semiconductor element 110, so that the shape of the tip of the first resin 131 a has a waveform and is injected into the cavity 153.
Similarly, the second resin 231a injected from the second gate 240 is also injected in a larger amount than the end portion in the central portion of the cavity 153, and the shape of the tip end portion thereof has a waveform due to the presence of the semiconductor element 110. And is injected into the cavity 153.

  From such an injection state, the first resin 131a and the second resin 231a injected from both the first gate 140 and the second gate 240 first collide at substantially the center of the cavity 153 (such collision). (The state is not shown).

After the collision, the first resin 131a and the second resin 231a at the center flow in the lateral direction (on the side of the first air vent 170 and the second air vent 270) while being integrated.
In addition, the first resin 131a and the second resin 231a injected from the outer gate also flow in the air vent direction while being integrated in the same manner after the collision.

  That is, the first resin 131a and the second resin 231a injected from both the first gate 140 and the second gate 240 are integrated in the central portion of the cavity 153 after colliding at the substantially central portion of the cavity 153. Flow in the horizontal direction (first air vent 170 direction and second air vent 270 direction) (not shown).

  As described above, the first resin 131a and the second resin 231a are injected into the cavity 153 from both the first gate 140 and the second gate 240, so that the cavity 153 has a sealing resin. 130 is filled.

Such a state is shown in FIGS. FIG. 6 is a schematic diagram in the section AA ′ of FIG. The AA ′ cross section of FIG. 5 also corresponds to the AA ′ cross section of FIG.
In the present embodiment, resin for resin is injected from both the first gate 140 and the second gate 240 facing each other across the cavity 153 of the molding die 150 to seal the inside of the cavity 153. Filled with a stop resin 130.

  Therefore, the flow distance can be shortened as compared with the case where the sealing resin is injected only from one side of the cavity 153 as in the prior art. Further, since the sealing resin 130 is filled from the central portion of the cavity 153 toward the first air vent 170 and the second air vent 270, the gas in the cavity 153 is gradually pushed out from the central portion. It is possible to prevent voids from being mixed into the sealing resin 130.

After filling the cavity 153 with the sealing resin 130, the sealing resin 130 is cured by heat in the molding die 150.
After the sealing resin 130 is cured, for example, the upper mold 151 is raised, and the substrate to be processed, that is, the wiring substrate 120 in which the plurality of semiconductor elements 110 are collectively sealed with the sealing resin 130 is transferred to the lower mold. Remove from mold 152.

Thereafter, the wiring substrate 120 is heated to, for example, 150 ° C. to 190 ° C. using a thermostatic bath or the like, and the sealing resin 130 is completely cured.
Here, FIG. 7 shows a wiring substrate 120 in which the plurality of semiconductor elements 110 are collectively sealed with a sealing resin 130. In the figure, the position where the semiconductor element 110 exists is indicated by a dotted line.

And the area | region 121 enclosed with the broken line in the said FIG. 7 is expanded and shown in FIG. In FIG. 8, the display of the sealing resin 130 is omitted.
That is, a plurality of semiconductor elements 110 are mounted in a matrix form on one main surface of the wiring board 120, and each of the semiconductor elements 110 is fixed on the wiring board 120 by the adhesive 122. The electrode 111 of the semiconductor element 110 and the electrode terminal 112 on the wiring substrate 120 are connected by a bonding wire 113.

The plurality of semiconductor elements 110 and bonding wires 113 are collectively sealed with a sealing resin 130 (not shown).
As described above, after the sealing resin 130 is completely cured, solder balls are provided as external connection electrodes on the electrode terminals provided on the other main surface (back surface) of the wiring board 120. (Not shown).

  Thereafter, the wiring substrate 120 and the sealing resin 130 are cut and separated (diced) into individual semiconductor elements 110 in the thickness direction, whereby the semiconductor device 180 shown in FIG. 9 is formed. In FIG. 9, a cross-sectional structure is disclosed in order to illustrate the configuration of the semiconductor device 180.

The semiconductor device 180 is mounted on a circuit board of an electronic device or the like via a solder ball 115 formed on the other main surface of the wiring board 120.
As described above, in the present embodiment, in the molding die 150, resin for resin is injected from both the first gate 140 and the second gate 240 that are opposed to each other with the cavity 153 interposed therebetween. 153 is filled with the sealing resin 130.

  As a result, the filler 132 having a specific particle diameter is not unevenly distributed in the cavity 153, and in the semiconductor device 180, fillers 132 having different particle diameters are mixed in the sealing resin 130 as shown in FIG. Can be made.

  That is, according to the sealing method in the first embodiment, the first resin 131a and the second resin 240a are formed from the first gate 140 and the second gate 240 disposed on the opposite sides of the cavity 153. Since the two resins 231a are respectively injected, the flow distance of the first resin 131a and the second resin 231a is a distance that reaches almost the center of the cavity and is short.

  Therefore, uneven distribution of the filler 132 contained in the first resin 131a and the second resin 231a is prevented, and the filler can be uniformly distributed in the sealing resin 130.

As a result, the quality of the sealing resin 130 in each semiconductor device 180 becomes uniform regardless of the portion in the cavity 153, and the reliability of the semiconductor device can be improved.
Further, since the flow distance of the first resin 131a and the second resin 231a is short, the sealing resin 130 can be filled in the cavity 153 in a short time, and the productivity of the semiconductor device 180 is improved.

Next, as a modification of the first embodiment, a form in which the gate arrangement interval or the gate height is changed will be described.
<Modification 1-1>
FIG. 11 schematically shows a perspective plane of the sealing device 300 in Modification 1-1.

  In the sealing device 300, the interval Wp1 between the gates 140-6 and 140-7 located at the center of the first gates 140-1 to 140-12 arranged to face each other with the cavity 153 interposed therebetween. Is set to about 8 mm, for example, and the interval Wp2 between the gates 140-1 and 140-2 located at the end is set to about 11 mm, for example, and the arrangement interval Wp1 at the center is narrower than the arrangement interval Wp2 on the end side. .

The interval Wp2 between the gates 140-11 and 140-12 located at the other end is also wider than the arrangement interval Wp1 at the center.
Similarly, the interval Wp1 between the gates 240-6 and 240-7 located at the center of the second gates 240-1 to 240-12 is set to about 8 mm, for example, and the gates 240-1 and 240- located at the ends are arranged. The interval Wp2 with respect to 2 is, for example, about 11 mm, and the arrangement interval Wp1 at the center is narrower than the arrangement interval Wp2 on the end side.

The interval Wp2 between the gates 240-11 and 240-12 located at the other end is also wider than the arrangement interval Wp1 at the center.
All the gates have the same cross-sectional area.

  In this way, the arrangement intervals of the first gates 140-1 to 140-12 and the second gates 240-1 to 240-12 are gradually increased from the central part toward the end part. Thus, the injection amount of the first resin 131a and the second resin 231a injected into the cavity from both the first gate 140 and the second gate 240 is large in the central portion of the cavity and approaches the end portion. The amount is reduced accordingly.

  Accordingly, the first resin 131a and the second resin 231a injected from both the first gate 140 and the second gate 240 first spread and collide with each other in the substantially central portion of the cavity 153.

After the collision, the fluid flows laterally (first air vent 170 and second air vent 270 side) while being integrated.
In addition, the first resin 131a and the second resin 231a that have flowed in from the outer gate also collide and flow in the lateral direction (the first air vent 170 and the second air vent 270 side) in the same manner. The cavity 153 is filled with the sealing resin 130.

<Modification 1-2>
The perspective plane of the sealing device 400 in Modification 1-2 is schematically shown in FIG.
Further, a cross section of the sealing device 400 taken along line BB ′ in FIG. 12 is shown in FIG. 13A, and a cross section taken along line CC ′ in FIG. 12 is shown in FIG.

  In the sealing device 400, the width Wg of the first gate 140 (140-1 to 140-12) and the second gate 240 (240-1 to 240-12) is arranged, for example, about 4 mm. The interval Wp is about 9.4 mm, for example.

  Then, the height H1 of the gate (140-6, 140-7, 240-6, 240-7, etc.) located at the center is set to about 0.17 mm, for example (see FIG. 13A). Further, the height H2 of the gate (140-1, 140-12, 240-1, 240-12, etc.) located at the end is set to about 0.15 mm, for example (see FIG. 13B).

  That is, in the plurality of first gates 140 and second gates 240 arranged in the cavity 153, the height of the gate located at the center is higher than the height of the gate on the end side.

The heights of the first gate 140 and the second gate 240 are gradually reduced from the central portion toward the end portion.
According to such a configuration, the gate located at the center has a larger cross-sectional area than the gate located at the end.

  Therefore, the first resin 131a and the second resin 231a injected from both the first gate 140 and the second gate 240 are injected more (in a large amount) from the gate located in the center.

  For this reason, the first resin 131a and the second resin 231a injected from both the first gate 140 and the second gate 240 first collide with each other at the central portion of the cavity 153, and after the collision, they are integrated into the lateral direction. It flows in the direction (first air vent 170 and second air vent 270 side).

  Then, the first resin 131a and the second resin 231a injected from the outer gate also collide sequentially and further in the lateral direction (on the side of the first air vent 170 and the second air vent 270) while being united. To flow.

  In this way, the cavity 153 is filled with the sealing resin 130, and the plurality of semiconductor elements mounted on the wiring substrate 120 to be processed are covered with the sealing resin 130.

  Here, the case where the width, height (injection area) and arrangement interval of the gate are changed is shown. However, each of the gate width, height, or arrangement interval is not limited to changing each individually. They can be combined with each other.

<Second Embodiment>
In the second embodiment, an example in which a wiring board on which semiconductor elements are arranged and mounted is separated into a plurality of small sections.

FIG. 14 schematically shows a planar shape of a wiring board on which semiconductor elements are arranged and mounted in the second embodiment.
The wiring substrate 520 has a rectangular planar shape, and the dimensions thereof are, for example, 75 mm long × 250 mm wide, and the wiring substrate region 520 a, the two slits 521 provided in a direction orthogonal to the longitudinal direction. It is divided into 520b and 520c.

A plurality of semiconductor elements 510 are mounted in a matrix in each of the wiring board regions 520a, 520b, and 520c.
In this way, by arranging slits on the wiring board to divide the wiring board into small sections and to form a sealing resin portion for each section, warping that occurs in the wiring board after resin sealing is formed. Although the amount can be reduced, the slit may be applied as necessary.

A sealing device 500 shown in FIG. 15 is applied to perform a resin sealing process on a wiring board having a rectangular shape and mounting a plurality of semiconductor elements for each small section. .
FIG. 15 schematically shows a perspective planar form of the sealing device 500, and FIG. 16 shows a DD ′ cross section in FIG.

The sealing device 500 includes a molding die 150 having an upper die 151 and a lower die 152 facing each other.
As shown in FIG. 15, the molding die 150 is provided with three cavities 153a, 153b, 153c having a rectangular shape corresponding to the wiring board regions 520a, 520b, 520c.

And in each cavity, the 1st filling part 160 and the 2nd filling part 260 are arrange | positioned in the side which opposes.
The first filling portion 160 disposed in the cavity 153 a is formed in the upper mold 151 and has a cylindrical shape formed in the first mold portion 161-1 forming a common space and the lower mold 152. First pots 163-1 and 163-2, and first plungers 162-1 and 162-2 that move up and down in the respective first pots 163. The first cull portion 161 is connected to the cavity 153 via the line-shaped gate 140 from the first runner portions 141-1 to 141-6.

  On the other hand, the second filling unit 260 includes the second cull unit 261, the second pots 263-1 and 263-2, and the second plungers 262-1 that move up and down in the respective second pots 263. , 262-2. The second cull portion 261 is connected to the cavity 153a via the line-shaped gate 240 from the second runner portions 241-1 to 241-6.

  Further, in the upper mold 151, a first dummy cavity 142 is provided between the first gate 140 and the first runner part 141, and between the second gate 240 and the second runner part 241. Second dummy cavities 242 are arranged in a line along the sides of the cavities 153a, 153b, and 153c, respectively (see FIG. 16).

  Note that the lengths of the first dummy cavity 142, the second dummy cavity 242, the first line-shaped gate 140, and the second line-shaped gate 240 are the resin injection sides of the cavity (the first gate 140 and the first gate 140). 2 is set shorter than the length of the side where the gate of 2 is provided, and no gate is arranged near both ends of the resin injection side of the cavity.

  For example, when the dimensions of the cavity 153a corresponding to one small section of the wiring board 520 are 65 mm in length, 78 mm in width, and 0.33 mm in height, the first dummy cavity 142 corresponding to the vertical side of the small section, The lengths of the second dummy cavities 242, the first line-shaped gate 140, and the second line-shaped gate 240 are 62 mm, respectively.

  In the cavities 153a, 153b, and 153c, air vents (not shown) are provided on the sides where the line gates are not arranged, that is, on the sides parallel to the slits.

  In the resin sealing process using the molding die 150, first, the wiring substrate 520 to be processed is disposed in the lower die 152, and for example, the upper die 151 is lowered to the lower die 152 side. .

As a result, the wiring board 520 is sandwiched between the lower mold 152 and the upper mold 151.
At this time, the small-sized wiring board regions 520a, 520b, and 520c in the wiring board 520 are disposed in the cavities 153a, 153b, and 153c, respectively.

  Then, the first resin 131a and the second resin 231a pumped by the first plunger 162 and the second plunger 262 are once filled in the first dummy cavity 142 and the second dummy cavity 242, respectively. Injected into the cavities 153a, 153b, and 153c through the first line-shaped gate 140 and the second line-shaped gate 240, respectively.

  That is, the first resin 131a and the second resin 231a are supplied to the first linear gate 140 and the second resin 153a, 153b, and 153c in which the wiring board regions 520a, 520b, and 520c are disposed. The cavities 153 are filled with the sealing resin 130 by being pumped from both of the line-shaped gates 240.

  When the resin is injected, the first dummy cavity 142, the second dummy cavity 242, the first line-shaped gate 140, and the second line-shaped gate 240 are longer than the length of the resin injection side of the cavity 153. Since the length is set short, the resin is first injected into the central portion of the cavity in each small section, spreads in a fan shape, and collides with the central portion of the cavity.

The resin flows in the direction in which the air vent is arranged while being integrated, reaches the peripheral edge of the cavity, and covers a plurality of semiconductor elements on the wiring board.
Next, as a modification of the second embodiment, a modification of the resin filling portion will be described.

<Modification 2-1>
The sealing device 500a in Modification 2-1 includes a molding die 550a having an upper die and a lower die.

The molding die 550a includes three cavities 553a, 553b, and 553c as shown in FIG.
In each cavity, a first line-shaped gate 540 and a second line-shaped gate 640 are disposed on two opposite sides of the cavity.

  That is, in each of the cavities 553a, 553b, and 553c, the first filling portion 560 is connected to the cavities via the first runner portion 541, the first dummy cavity 542, and the first line-shaped gate 540. The second filling portion 660 communicates with the cavity via the second runner portion 641, the second dummy cavity 642, and the second line-shaped gate 640.

  Here, the first filling portion 560 includes a first cull portion that is a space formed in the upper die, a cylindrical first pot 563 formed in the lower die, and a first pot 563. A first plunger that moves up and down is provided. Further, the first cull portion of the upper mold communicates with the cavities 553a, 553b, and 553c via the first runner portion 541 provided with the first line-shaped gate 540.

  Similarly, the second filling portion 660 includes a second cull portion, a second pot 663, and a second plunger that moves up and down in the second pot 663, while the second cull portion includes It communicates with the cavities 553a, 553b, and 553c via the second runner portion 641 provided with the second line-shaped gate 640.

  In each of the cavities 553a, 553b, and 553c, air vents (not shown) are provided on the sides where the gate is not arranged, that is, on the two sides perpendicular to the slits.

  According to such a configuration, all of the first filling portion 560 and the second filling portion 660 are arranged in a line on the same side (the left side of the paper surface in FIG. 17) with respect to the cavities 553a, 553b, and 553c. .

Therefore, the molding die 550a is further downsized, and the sealing device 500a can be downsized as compared with the sealing device 500.
In the resin sealing process using the sealing device 500a, first, the first resin tablet is put on the first plunger of the first pot 563, and the second resin in the second pot 663 is second. A second resin tablet is put on the plunger.

The first resin tablet and the second resin tablet contain a filler.
After charging the first resin tablet and the second resin tablet, heating is performed by the molding die 550a, and the first resin in which the first resin tablet is melted is pumped by the first plunger, The cull part is filled. Similarly, the second resin in which the second resin tablet is melted is pumped by the second plunger and filled in the second cull portion.

  The first resin filled in the first cull portion is further pumped by the first plunger, passes through the first runner portion 541 and is filled into the first dummy cavity 542, and further the first line. It is injected from the gate 540 into the cavity 553a. Similarly, the second resin filled in the second cull portion by the second plunger is further pumped by the second plunger, passes through the second runner portion 641, and enters the second dummy cavity 642. And is injected from the second line-shaped gate 640 into the cavity 553a.

The resin is similarly injected into the cavities 553b and 553c.
That is, the first resin and the second resin are independently injected into the cavities 553a, 553b, and 553c from both the first line-shaped gate 540 and the second line-shaped gate 640, respectively.

  When the resin is injected, the first dummy cavity 542, the second dummy cavity 642, the first line-shaped gate 540, and the second line-shaped gate 640 are longer than the length of the resin injection side of the cavity 553a. Since the length is set short, the resin is first injected into the central portion of the cavity in each small section, spreads in a fan shape, and collides with the central portion of the cavity.

The resin flows in the direction in which the air vent is arranged while being integrated, reaches the peripheral edge of the cavity, and covers a plurality of semiconductor elements on the wiring board.
And the to-be-processed substrate arrange | positioned in cavity 553a, 553b, 553c is sealed with sealing resin.

<Modification 2-2>
The sealing device 500b according to the modification 2-2 includes a molding die 550b having an upper die and a lower die as shown in FIG.

The molding die 550b includes three cavities 553a, 553b, and 553c.
In each cavity, a first line-shaped gate 540 and a second line-shaped gate 640 are disposed on two opposite sides of the cavity.

  In each of the cavities 553a, 553b, and 553c, air vents (not shown) are provided on the sides where the gates are not arranged, that is, the sides perpendicular to the slits.

  When the first first runner portion 541 and the second runner portion 641 are disposed between the adjacent cavities 553a and 553b and between the cavities 553b and 553c, they are integrated into a common runner portion 741. Is configured.

  By disposing the shared runner portion 741, the distance between adjacent cavities can be reduced, and the sealing device 500b can be further downsized as compared with the sealing device 500a.

  That is, the first resin (not shown) pumped by the first plunger (not shown) flows from the first pot 563 to the shared runner portion 741. Similarly, the second resin (not shown) also flows from the second pot 663 to the common runner portion 741 by the second plunger (not shown). The first resin and the second resin merge at the shared runner portion 741.

  The resin merged in the shared runner portion 741 is further pumped, branched into the first dummy cavity and the second dummy cavity, and filled into the first dummy cavity and the second dummy cavity. The cavities 553a, 553b, and 553c are injected from the first line-shaped gate 540 and the second line-shaped gate 640.

  When the resin is injected, the first dummy cavity 542, the second dummy cavity 642, the first line-shaped gate 540, and the second line-shaped gate 640 are longer than the length of the resin injection side of the cavity 553a. Since the length is set short, the resin is first injected into the central portion of the cavity in each small section, spreads in a fan shape, and collides with the central portion of the cavity.

The resin flows in the direction in which the air vent is arranged while being integrated, reaches the peripheral edge of the cavity, and covers a plurality of semiconductor elements on the wiring board.
And the to-be-processed substrate arrange | positioned in cavity 553a, 553b, 553c is sealed with sealing resin.

<Third Embodiment>
In the third embodiment, a plurality of plungers arranged in the cavity are independently controlled and operated.

FIG. 19 schematically shows a perspective planar form of the sealing device 600 according to the third embodiment.
The sealing device 600 includes a molding die 150 having an upper die 151 and a lower die 152.

  In the molding die 150, five first filling portions 160 and two second filling portions 260 for injecting the sealing resin into the cavities 153 are separated from each other at positions opposite to each other with the cavity 153 interposed therebetween. And it is arranged in a row.

  During the sealing process, the wiring substrate 120 on which a plurality of semiconductor elements 110 are mounted is set between the lower mold 152 and the upper mold 151, and a sealing resin is injected into the cavity 153 between them. Thus, the plurality of semiconductor elements 110 mounted on the wiring board 120 are collectively sealed with resin.

In the sealing device 600, the first runner portion 141 and the second runner portion 241 are not integrally formed.
That is, as shown in FIG. 19, the first runner portion 141 and the second runner portion 241 include the first pots 163-1 to 163-5 and the second pots 263-1 to 263-5. They are arranged separately from each other.

Therefore, the pressurization in the 1st filling part 160 and the 2nd filling part 260 can change pressurization pressure and / or pressurization timing, respectively.
A resin sealing method using such a sealing device 600 will be described with reference to FIGS. 20 shows a cross section taken along the line EE ′ of FIG. 19, and FIG. 21 schematically shows a sealing state of a plurality of semiconductor elements mounted on the wiring board with a perspective plane.

  First, the wiring board 120 on which the plurality of semiconductor elements 110 are mounted is installed in the lower mold 152, the upper mold 151 is lowered, and the edge of the wiring board 120 is moved by the upper mold 151 and the lower mold 152. Hold it.

As a result, the wiring substrate 120 is disposed in the cavity 153 between the lower mold 152 and the upper mold 151.
Next, the first resin tablet 131 is loaded on the first plungers 162-1 to 162-5 of the first pots 163-1 to 163-5, respectively, and the second pots 263-1 to 263- The second resin tablets 231 are put on the second plungers 262-1 to 262-5, respectively. Since the molding die 150 is preheated, the first resin tablet 131 and the second resin tablet 231 are melted.

  The first resin 131a in which the first resin tablet 131 is melted is pumped by each of the first plungers 162 to fill the first cull parts 161-1 to 161-5. Similarly, the second resin 231a in which the second resin tablet 231 is melted is pumped by each of the second plungers 262 and filled in the second cull portions 261-1 to 261-5.

  At this time, the pressing force in the five first plungers 162 and the five second plungers 262 is the same as the pressing force in the central plungers (162-3, 262-3). 1, 162-5, 262-1, 262-5).

  Plungers (162-2, 162-4, 262-2, 262-4) positioned between the central plunger and the edge plunger are set to an intermediate pressurizing force (see FIG. 20). ).

  The first resin 131 a filled in the first cull portion 161 is further pumped by the first plunger 162, passes through the first runner portion 141, and is injected from the first gate 140 into the cavity 153.

  Similarly, the second resin 231a filled in the second cull portion 261 by the second plunger 262 is further pumped by the second plunger 262, passes through the second runner portion 241 and passes through the second resin 231a. It is injected from the gate 240 into the cavity 153.

That is, the first resin 131 a and the second resin 231 a are injected into the cavity 153 from both the first gate 140 and the second gate 240.
As described above, by changing the pressurizing force in the plunger according to the position of the plunger, the pressurizing force of the plunger located at the center of the first plunger 162 array and the second plunger 262 array is changed to the edge. Since it is larger than the applied pressure of the plunger located, as shown in FIG. 21, the injection rate of the resin at the center is faster than that at the edge.

Similarly, the second resin 231a injected from the second gate 240 also has a higher injection speed at the center than at the edge.
Therefore, the first resin 131a and the second resin 231a injected from both the first gate 140 and the second gate 240 first collide with each other on the wiring board portion located at the center of the cavity, and after the collision. Flow in the lateral direction (first air vent 170 and second air vent 270 side) while being integrated.

  Further, the first resin 131a and the second resin 231a injected from the outer gate also collide and flow in the horizontal direction (the first air vent 170 and the second air vent 270 side) in the same manner.

  As described above, the first resin 131a and the second resin 231a injected from both the first gate 140 and the second gate 240 are laterally (from the central portion of the cavity 153 (first air vent 170 and The semiconductor element 110 is injected toward the second air vent 270 side) and covers the semiconductor element 110 mounted on the wiring substrate 120 accommodated in the cavity.

  As a modification of the third embodiment, the pressurization timing and / or the applied pressure to the resin in the first filling portion and the second filling portion of the sealing mold can be made different.

<Modification 3-1>
Here, the timing of pressurizing the resin is varied depending on the positions where the first filling unit 160 and the second filling unit 260 are arranged.

  In the molding die 150 in the sealing device 600, the pressurizing pressures in the first plungers 162-1 to 162-5 and the second plungers 262-1 to 262-5 are all made equal.

  On the other hand, the pressurization timings for starting pressurization of the first plunger 162 and the second plunger 262 are set to the plungers 162-3 and 262-3 located at the center and the plungers 162-1 and 162-1 located at the edges. Different from 162-5, 262-1, 262-5, control is performed so as to accelerate the pressurization of the plungers 162-3, 262-3 located in the center.

  That is, of the five first plungers 162, pressurization is first started at the plunger 162-3 located at the center thereof, and among the five first plungers 262, the plunger 262-3 located at the center thereof is started. Then, pressurization is started at the plungers (162-2, 162-4, 262-2, 262-4) located on both sides thereof, and then the plungers (162-1, 162-5, 262) located at both ends thereafter. Pressurization is started at -1,262-5).

  Also by such a resin injection method, as shown in FIG. 21, the first resin 131a and the second resin 231a are injected from both the first gate 140 and the second gate 240, and the first resin 131a. In the cavity 153, the second resin 231a first collides with the central portion thereof, and starts flowing from the central portion toward the side end portion while being integrated.

The resin flows in the lateral direction (the first air vent 170 and the second air vent 270 side), and the inside of the cavity 153 is filled with the sealing resin 130.
<Modification 3-2>
Here, the pressure for injection and the pressurizing timing are made different depending on the arrangement positions of the first filling unit 160 and the second filling unit 260.

  In the molding die 150 in the sealing device 600, the pressurizing pressures of the first plungers 162-1 to 162-5 and the second plungers 262-1 to 262-5 are made different according to the arrangement positions. In addition, the pressurization start timing for the first plungers 162-1 to 162-5 and the second plungers 262-1 to 262-5 is changed to the plungers 162-3 and 262-3 located at the center portion and the edge portion. The plungers 162-1, 162-5, 262-1, and 262-5 located at the center are controlled so as to accelerate the pressurization of the plungers 162-3 and 262-3 located at the center.

  That is, pressurization is started with the first pressure at the plunger 162-3 located at the center of the first plunger 162 and at the plunger 262-3 located at the center of the second plunger 262. Then, pressurization is started at a pressure of, for example, 90% of the first pressure at the plungers 162-2, 162-4, 262-2, and 262-4) located on both sides thereof.

After that, pressurization is started with a pressure of, for example, 75% of the first pressure in the plungers (162-1, 162-5, 262-1, 262-5) located at both ends.
Also in such a resin injection method, as shown in FIG. 21, when the first resin 131a and the second resin 231a are injected from both the first gate 140 and the second gate 240, the first resin 131a and the second resin 231a are injected. In the cavity 153, the resin 131a and the second resin 231a first collide at the central portion thereof, and start to flow from the central portion toward the side end portion while being integrated.

The resin flows in the lateral direction (the first air vent 170 and the second air vent 270 side), and the inside of the cavity 153 is filled with the sealing resin 130.
Also in the third embodiment, the width, arrangement interval, arrangement interval and height, width and height, or width, arrangement interval and height of the first gate 140 and the second gate 240 are changed. You may do that.

It is a perspective plane schematic diagram which shows the structure of the sealing device in the 1st Embodiment of this invention. It is a cross-sectional schematic diagram which shows the structure of the sealing device in the said 1st Embodiment. It is a perspective plane schematic diagram which shows the sealing process of the semiconductor element in the said 1st Embodiment. It is a cross-sectional schematic diagram which shows the sealing process of the semiconductor element in the said 1st Embodiment. In the said 1st Embodiment, it is a perspective plane schematic diagram which shows the sealing form of the semiconductor element in a sealing device. In the said 1st Embodiment, it is a cross-sectional schematic diagram which shows the sealing form of the semiconductor element in a sealing device. It is a plane schematic diagram which shows the form of the semiconductor element on a wiring board in the said 1st Embodiment. FIG. 3 is an enlarged schematic plan view of a main part of a semiconductor element on a wiring board in the first embodiment. FIG. 3 is a schematic cross-sectional view of a separated semiconductor device in the first embodiment. FIG. 4 is an enlarged schematic cross-sectional view of an individualized semiconductor device in the first embodiment. It is a perspective plane schematic diagram which shows the structure of the sealing device in the modification 1-1 of the said 1st Embodiment. It is a perspective plane schematic diagram which shows the structure of the sealing device in the modification 1-2 of the said 1st Embodiment. It is a principal part cross-section schematic diagram which shows the structure of the sealing device in the modification 1-2 of the said 1st Embodiment. It is a plane schematic diagram which shows the structure of the wiring board in the 2nd Embodiment of this invention. It is a perspective plane schematic diagram which shows the structure of the sealing device in the said 2nd Embodiment. It is a cross-sectional schematic diagram which shows the structure of the sealing device in the said 2nd Embodiment. It is a perspective plane schematic diagram which shows the structure of the sealing device in the modification 2-1 of the said 2nd Embodiment. It is a perspective plane schematic diagram which shows the structure of the sealing device in the modification 2-2 of the said 2nd Embodiment. It is a perspective plane schematic diagram which shows the structure of the sealing device in the 3rd Embodiment of this invention. It is a cross-sectional schematic diagram which shows the structure of the filling part of the sealing device in the said 3rd Embodiment. It is a perspective plane schematic diagram which shows the sealing form of the semiconductor element in the sealing device in the said 3rd Embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 Resin sealing apparatus 110 Semiconductor element 120 Wiring board 140 1st gate 141 1st runner part 150 Molding die 153 Cavity 160 1st filling part 161 1st cull part 163 1st pot 170 1st air Vent 240 Second gate 241 Second runner portion 260 Second filling portion 261 Second cull portion 263 Second pot 270 Second air vent

Claims (8)

In a resin sealing method in which a plurality of semiconductor elements mounted on a substrate to be processed are collectively sealed with a resin,
Arranging a substrate to be processed on which a plurality of semiconductor elements are mounted in a cavity of a molding die;
A first resin is injected from the first resin injection portion into the cavity, and a second resin is injected from the second resin injection portion disposed opposite the first resin injection portion with the cavity interposed therebetween. Injecting the first resin and the second resin at the center of the cavity, and flowing the resin to the peripheral edge of the cavity;
A resin sealing method comprising:   The resin sealing method according to claim 1, wherein the resin contains a filler. A plurality of the first and second resin injection portions are arranged,
From the first and second resin holding portions that respectively hold the first and second resins and are arranged in communication with the first and second resin injection portions, respectively. 2. The resin sealing method according to claim 1, wherein two resins are injected into the cavity through the plurality of first and second resin injection portions.   4. The resin sealing method according to claim 3, wherein an arrangement interval of the first and second resin injection portions is gradually reduced in a stepwise manner from a central portion to an end portion of the array.   4. The resin according to claim 3, wherein an injection area of the first and second resin injection portions into the cavity is gradually reduced from a center portion to an end portion of the array. Sealing method. A plurality of the first and second resin holding portions communicated with the plurality of first and second resin injection portions;
The arrangement timing of injection of the first and second resins from the plurality of first and second resin holding portions into the cavity through the first and second resin injection portions The resin sealing method according to claim 3, wherein the resin sealing method gradually slows stepwise from the center to the end. A plurality of the first and second resin holding portions communicated with the plurality of first and second resin injection portions;
The injection pressures of the first and second resins from the plurality of first and second resin holding portions into the cavity through the first and second resin injection portions are arranged as described above. The resin sealing method according to claim 3, wherein the resin sealing method gradually decreases in a stepwise manner from the center to the end.   A dummy cavity is disposed in the first and second resin injection portions, and the first and second resins are passed through the dummy cavity from the first and second resin injection portions. The resin sealing method according to claim 1, wherein the resin sealing is performed in the cavity.

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