JP2010103805A - 屈曲振動片、屈曲振動子、および圧電デバイス - Google Patents

屈曲振動片、屈曲振動子、および圧電デバイス Download PDF

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Publication number
JP2010103805A
JP2010103805A JP2008273987A JP2008273987A JP2010103805A JP 2010103805 A JP2010103805 A JP 2010103805A JP 2008273987 A JP2008273987 A JP 2008273987A JP 2008273987 A JP2008273987 A JP 2008273987A JP 2010103805 A JP2010103805 A JP 2010103805A
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Japan
Prior art keywords
bending vibration
bending
hole
vibrating piece
vibration
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
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JP2008273987A
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English (en)
Japanese (ja)
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JP2010103805A5 (enrdf_load_stackoverflow
Inventor
Teruo Takizawa
照夫 瀧澤
Makoto Furuhata
誠 古畑
裕史 ▲浜▼山
Yuji Hamayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Publication date
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Priority to JP2008273987A priority Critical patent/JP2010103805A/ja
Publication of JP2010103805A publication Critical patent/JP2010103805A/ja
Publication of JP2010103805A5 publication Critical patent/JP2010103805A5/ja
Withdrawn legal-status Critical Current

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
JP2008273987A 2008-10-24 2008-10-24 屈曲振動片、屈曲振動子、および圧電デバイス Withdrawn JP2010103805A (ja)

Priority Applications (1)

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JP2008273987A JP2010103805A (ja) 2008-10-24 2008-10-24 屈曲振動片、屈曲振動子、および圧電デバイス

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008273987A JP2010103805A (ja) 2008-10-24 2008-10-24 屈曲振動片、屈曲振動子、および圧電デバイス

Publications (2)

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JP2010103805A true JP2010103805A (ja) 2010-05-06
JP2010103805A5 JP2010103805A5 (enrdf_load_stackoverflow) 2011-11-17

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JP2008273987A Withdrawn JP2010103805A (ja) 2008-10-24 2008-10-24 屈曲振動片、屈曲振動子、および圧電デバイス

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JP (1) JP2010103805A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8525606B2 (en) 2011-02-02 2013-09-03 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic device
US8581669B2 (en) 2011-02-02 2013-11-12 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic apparatus
US9461615B2 (en) 2013-07-19 2016-10-04 Seiko Epson Corporation Vibrator element, vibrator, oscillator, electronic apparatus, and moving object
JP2017200015A (ja) * 2016-04-26 2017-11-02 セイコーエプソン株式会社 振動子、発振器、電子機器および移動体

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001235331A (ja) * 2000-02-22 2001-08-31 Seiko Epson Corp 角速度検出装置
JP2003060482A (ja) * 2001-08-10 2003-02-28 River Eletec Kk 音叉型水晶振動片
JP2003133895A (ja) * 2001-10-29 2003-05-09 Seiko Epson Corp 振動片、振動子、発振器及び電子機器
JP2004297343A (ja) * 2003-03-26 2004-10-21 Seiko Epson Corp 音叉型振動片および圧電デバイス
JP2006217603A (ja) * 2006-01-30 2006-08-17 Nippon Dempa Kogyo Co Ltd 圧電振動子
JP2007243995A (ja) * 2001-10-31 2007-09-20 Piedekku Gijutsu Kenkyusho:Kk 水晶振動子の製造方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001235331A (ja) * 2000-02-22 2001-08-31 Seiko Epson Corp 角速度検出装置
JP2003060482A (ja) * 2001-08-10 2003-02-28 River Eletec Kk 音叉型水晶振動片
JP2003133895A (ja) * 2001-10-29 2003-05-09 Seiko Epson Corp 振動片、振動子、発振器及び電子機器
JP2007243995A (ja) * 2001-10-31 2007-09-20 Piedekku Gijutsu Kenkyusho:Kk 水晶振動子の製造方法
JP2004297343A (ja) * 2003-03-26 2004-10-21 Seiko Epson Corp 音叉型振動片および圧電デバイス
JP2006217603A (ja) * 2006-01-30 2006-08-17 Nippon Dempa Kogyo Co Ltd 圧電振動子

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8525606B2 (en) 2011-02-02 2013-09-03 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic device
US8581669B2 (en) 2011-02-02 2013-11-12 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic apparatus
US9461615B2 (en) 2013-07-19 2016-10-04 Seiko Epson Corporation Vibrator element, vibrator, oscillator, electronic apparatus, and moving object
JP2017200015A (ja) * 2016-04-26 2017-11-02 セイコーエプソン株式会社 振動子、発振器、電子機器および移動体

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