JP2010103805A - 屈曲振動片、屈曲振動子、および圧電デバイス - Google Patents
屈曲振動片、屈曲振動子、および圧電デバイス Download PDFInfo
- Publication number
- JP2010103805A JP2010103805A JP2008273987A JP2008273987A JP2010103805A JP 2010103805 A JP2010103805 A JP 2010103805A JP 2008273987 A JP2008273987 A JP 2008273987A JP 2008273987 A JP2008273987 A JP 2008273987A JP 2010103805 A JP2010103805 A JP 2010103805A
- Authority
- JP
- Japan
- Prior art keywords
- bending vibration
- bending
- hole
- vibrating piece
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000005452 bending Methods 0.000 title claims abstract description 144
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 239000013078 crystal Substances 0.000 abstract description 67
- 239000010453 quartz Substances 0.000 abstract description 21
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 21
- 230000000694 effects Effects 0.000 abstract description 19
- 238000005549 size reduction Methods 0.000 abstract description 3
- 238000011067 equilibration Methods 0.000 abstract description 2
- 230000005284 excitation Effects 0.000 description 34
- 239000000758 substrate Substances 0.000 description 29
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 239000010931 gold Substances 0.000 description 8
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 5
- 239000004332 silver Substances 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 239000011651 chromium Substances 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 229910000833 kovar Inorganic materials 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- PSHMSSXLYVAENJ-UHFFFAOYSA-N dilithium;[oxido(oxoboranyloxy)boranyl]oxy-oxoboranyloxyborinate Chemical compound [Li+].[Li+].O=BOB([O-])OB([O-])OB=O PSHMSSXLYVAENJ-UHFFFAOYSA-N 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Oscillators With Electromechanical Resonators (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008273987A JP2010103805A (ja) | 2008-10-24 | 2008-10-24 | 屈曲振動片、屈曲振動子、および圧電デバイス |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008273987A JP2010103805A (ja) | 2008-10-24 | 2008-10-24 | 屈曲振動片、屈曲振動子、および圧電デバイス |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010103805A true JP2010103805A (ja) | 2010-05-06 |
JP2010103805A5 JP2010103805A5 (enrdf_load_stackoverflow) | 2011-11-17 |
Family
ID=42294028
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008273987A Withdrawn JP2010103805A (ja) | 2008-10-24 | 2008-10-24 | 屈曲振動片、屈曲振動子、および圧電デバイス |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2010103805A (enrdf_load_stackoverflow) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8525606B2 (en) | 2011-02-02 | 2013-09-03 | Seiko Epson Corporation | Vibrator element, vibrator, oscillator, and electronic device |
US8581669B2 (en) | 2011-02-02 | 2013-11-12 | Seiko Epson Corporation | Vibrator element, vibrator, oscillator, and electronic apparatus |
US9461615B2 (en) | 2013-07-19 | 2016-10-04 | Seiko Epson Corporation | Vibrator element, vibrator, oscillator, electronic apparatus, and moving object |
JP2017200015A (ja) * | 2016-04-26 | 2017-11-02 | セイコーエプソン株式会社 | 振動子、発振器、電子機器および移動体 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001235331A (ja) * | 2000-02-22 | 2001-08-31 | Seiko Epson Corp | 角速度検出装置 |
JP2003060482A (ja) * | 2001-08-10 | 2003-02-28 | River Eletec Kk | 音叉型水晶振動片 |
JP2003133895A (ja) * | 2001-10-29 | 2003-05-09 | Seiko Epson Corp | 振動片、振動子、発振器及び電子機器 |
JP2004297343A (ja) * | 2003-03-26 | 2004-10-21 | Seiko Epson Corp | 音叉型振動片および圧電デバイス |
JP2006217603A (ja) * | 2006-01-30 | 2006-08-17 | Nippon Dempa Kogyo Co Ltd | 圧電振動子 |
JP2007243995A (ja) * | 2001-10-31 | 2007-09-20 | Piedekku Gijutsu Kenkyusho:Kk | 水晶振動子の製造方法 |
-
2008
- 2008-10-24 JP JP2008273987A patent/JP2010103805A/ja not_active Withdrawn
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001235331A (ja) * | 2000-02-22 | 2001-08-31 | Seiko Epson Corp | 角速度検出装置 |
JP2003060482A (ja) * | 2001-08-10 | 2003-02-28 | River Eletec Kk | 音叉型水晶振動片 |
JP2003133895A (ja) * | 2001-10-29 | 2003-05-09 | Seiko Epson Corp | 振動片、振動子、発振器及び電子機器 |
JP2007243995A (ja) * | 2001-10-31 | 2007-09-20 | Piedekku Gijutsu Kenkyusho:Kk | 水晶振動子の製造方法 |
JP2004297343A (ja) * | 2003-03-26 | 2004-10-21 | Seiko Epson Corp | 音叉型振動片および圧電デバイス |
JP2006217603A (ja) * | 2006-01-30 | 2006-08-17 | Nippon Dempa Kogyo Co Ltd | 圧電振動子 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8525606B2 (en) | 2011-02-02 | 2013-09-03 | Seiko Epson Corporation | Vibrator element, vibrator, oscillator, and electronic device |
US8581669B2 (en) | 2011-02-02 | 2013-11-12 | Seiko Epson Corporation | Vibrator element, vibrator, oscillator, and electronic apparatus |
US9461615B2 (en) | 2013-07-19 | 2016-10-04 | Seiko Epson Corporation | Vibrator element, vibrator, oscillator, electronic apparatus, and moving object |
JP2017200015A (ja) * | 2016-04-26 | 2017-11-02 | セイコーエプソン株式会社 | 振動子、発振器、電子機器および移動体 |
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