JP2010080730A - Circuit board and electronic apparatus - Google Patents

Circuit board and electronic apparatus Download PDF

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Publication number
JP2010080730A
JP2010080730A JP2008248356A JP2008248356A JP2010080730A JP 2010080730 A JP2010080730 A JP 2010080730A JP 2008248356 A JP2008248356 A JP 2008248356A JP 2008248356 A JP2008248356 A JP 2008248356A JP 2010080730 A JP2010080730 A JP 2010080730A
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conductor
circuit board
connecting portion
coaxial connector
outer peripheral
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JP5261104B2 (en
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Toshihiko Kitamura
俊彦 北村
Hiroshi Mizushima
弘 水島
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Kyocera Corp
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Kyocera Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/1517Multilayer substrate
    • H01L2924/15192Resurf arrangement of the internal vias
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/161Cap
    • H01L2924/1615Shape
    • H01L2924/16195Flat cap [not enclosing an internal cavity]

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  • Coupling Device And Connection With Printed Circuit (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Structure Of Printed Boards (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a circuit board and an electronic apparatus wherein an electric signal can be efficiently transmitted in a junction part of coaxial connectors. <P>SOLUTION: The circuit board includes: a substrate including a line conductor 2 which is made of a dielectric and is formed in an inner layer or on a lower principal surface, a center conductor connection part 2b formed on an upper principal surface, an outer peripheral conductor connection part formed around the center conductor connection part, and a via conductor 2a for line which is provided in the dielectric and is electrically connected to the line conductor 2 and the center conductor connection part; and a coaxial connector 3 comprising a cylindrical outer peripheral conductor 3a, a center conductor 3b installed on a center axis of the outer peripheral conductor 3a, and an insulator 3c interposed between them. One end surface of the center conductor 3b of the coaxial connector 3 is electrically and mechanically connected to the center conductor connection part 2b, and one end surface of the outer peripheral conductor 3a of the coaxial connector 3 is electrically and mechanically connected to an outer peripheral conductor connection part 4a of the substrate 1. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、電子部品を作動させるための回路基板および電子装置に関するものである。   The present invention relates to a circuit board and an electronic device for operating electronic components.

従来の高周波信号が伝送される回路基板には、線路導体の一端に同軸コネクタが備えられているものがある。   Some conventional circuit boards that transmit high-frequency signals include a coaxial connector at one end of a line conductor.

このような回路基板として、例えば、線路導体として機能するストリップラインの先端部にスルーホールが形成され、スルーホールに同軸コネクタの中心導体の先端部が挿入されて固定されているものがあった。(例えば、下記の特許文献1参照)。
特開2001−102747号公報
As such a circuit board, for example, there is one in which a through hole is formed at the end of a strip line that functions as a line conductor, and the end of the center conductor of the coaxial connector is inserted and fixed in the through hole. (For example, refer to Patent Document 1 below).
JP 2001-102747 A

しかしながら、同軸コネクタの中心導体がスルーホールに挿通される構成であるため、中心導体がスルーホール内に挿入される長さ等の中心導体のスルーホール内への接合状態によってインピーダンス値が変化する場合があり、インピーダンス値を一定のものにして整合させるのが困難であった。特に、近時は、電気信号の高周波化によって、インピーダンス値を一定のものとするための接合状態の管理が重要になる傾向にある。   However, since the center conductor of the coaxial connector is inserted into the through hole, the impedance value changes depending on the joining state of the center conductor into the through hole such as the length of the center conductor inserted into the through hole. Therefore, it is difficult to match the impedance value to a constant value. In particular, recently, the control of the bonding state for making the impedance value constant tends to be important due to the high frequency of the electric signal.

そのため、同軸コネクタの中心導体がスルーホールに挿入されている箇所において、反射損失等の伝送損失が発生し、電気信号を効率よく伝送させることができないという問題点があった。   For this reason, there is a problem in that transmission loss such as reflection loss occurs at the portion where the central conductor of the coaxial connector is inserted into the through hole, and the electric signal cannot be transmitted efficiently.

従って、本発明は上記問題点に鑑み完成されたものであり、その目的は、同軸コネクタの接合部において、電気信号を効率よく伝送させることのできる回路基板および電子装置を提供することにある。   Accordingly, the present invention has been completed in view of the above problems, and an object of the present invention is to provide a circuit board and an electronic device that can efficiently transmit an electric signal at a joint portion of a coaxial connector.

本発明の回路基板は、誘電体から成り、内層または下側主面に形成された線路導体と、上側主面に形成された中心導体接続部およびこの中心導体接続部の周囲に形成された外周導体接続部と、前記誘電体の内部に設けられ、前記線路導体および前記中心導体接続部に電気的に接続された線路用ビア導体とを有する基体と、円筒状の外周導体および該外周導体の中心軸に設置された中心導体ならびにそれらの間に介在させた絶縁体から成る同軸コネクタとを備え、前記中心導体接続部に前記同軸コネクタの中心導体の一端面が電気的かつ機械的に接合されているとともに、前記外周導体接続部に前記同軸コネクタの外周導体の一端面が電気的かつ機械的に接合されていることを特徴とする。   The circuit board of the present invention comprises a dielectric, a line conductor formed on the inner layer or the lower main surface, a center conductor connecting portion formed on the upper main surface, and an outer periphery formed around the central conductor connecting portion. A base body having a conductor connecting portion and a line via conductor provided inside the dielectric and electrically connected to the line conductor and the central conductor connecting portion; a cylindrical outer conductor; and the outer conductor A central conductor installed on the central axis and a coaxial connector made of an insulator interposed therebetween, and one end surface of the central conductor of the coaxial connector is electrically and mechanically joined to the central conductor connecting portion. In addition, one end face of the outer peripheral conductor of the coaxial connector is electrically and mechanically joined to the outer peripheral conductor connecting portion.

本発明の回路基板において、好ましくは、前記中心導体接続部は、前記中心導体の断面よりも大きいことを特徴とする。   In the circuit board according to the present invention, preferably, the center conductor connecting portion is larger than a cross section of the center conductor.

本発明の回路基板において、好ましくは、前記基体と前記同軸コネクタの前記絶縁体との間に間隙部が設けられていることを特徴とする。   In the circuit board of the present invention, it is preferable that a gap is provided between the base and the insulator of the coaxial connector.

本発明の回路基板において、好ましくは、前記基体の上側主面に前記同軸コネクタの前記外周導体の外周を支持するための支持部が設けられていることを特徴とする。   In the circuit board of the present invention, it is preferable that a support portion for supporting the outer periphery of the outer peripheral conductor of the coaxial connector is provided on the upper main surface of the base.

本発明の回路基板において、好ましくは、前記基体の上側主面に上部接地導体が形成されており、該上部接地導体に前記外周導体接続部が接続されていることを特徴とする。   In the circuit board of the present invention, preferably, an upper ground conductor is formed on the upper main surface of the base body, and the outer peripheral conductor connecting portion is connected to the upper ground conductor.

本発明の回路基板において、好ましくは、前記基体の下側主面に下部接地導体が形成されており、前記上部接地導体と前記下部接地導体とが接地用ビア導体を介して接続されていることを特徴とする。   In the circuit board of the present invention, preferably, a lower ground conductor is formed on the lower main surface of the base, and the upper ground conductor and the lower ground conductor are connected via a ground via conductor. It is characterized by.

本発明の回路基板において、好ましくは、前記基体はセラミックスから成ることを特徴とする。   In the circuit board of the present invention, preferably, the base is made of ceramics.

本発明の回路基板において、好ましくは、前記基体の前記上側主面には電子部品を収容する凹部が形成され、該凹部の外側に前記中心導体接続部と前記外周導体接続部が設けられるとともに前記同軸コネクタが接合され、前記凹部の内側に前記線路導体が導出されていることを特徴とする。   In the circuit board of the present invention, preferably, the upper main surface of the base is formed with a recess for accommodating an electronic component, and the central conductor connecting portion and the outer peripheral conductor connecting portion are provided outside the recess, and A coaxial connector is joined, and the line conductor is led out inside the recess.

本発明の電子装置は、上記構成の回路基板と、前記凹部に収容されるとともに前記線路導体に電気的に接続された電子部品と、前記凹部の上面に前記凹部を塞ぐように接合された蓋体とを具備していることを特徴とする。   An electronic device according to the present invention includes a circuit board configured as described above, an electronic component that is housed in the recess and is electrically connected to the line conductor, and a lid that is joined to the upper surface of the recess so as to close the recess. And a body.

本発明の回路基板は、誘電体から成り、内層または下側主面に形成された線路導体と、上側主面に形成された中心導体接続部およびこの中心導体接続部の周囲に形成された外周導体接続部と、前記誘電体の内部に設けられ、前記線路導体および前記中心導体接続部に電気的に接続された線路用ビア導体とを有する基体と、円筒状の外周導体および該外周導体の中心軸に設置された中心導体ならびにそれらの間に介在させた絶縁体から成る同軸コネクタとを備え、前記中心導体接続部に前記同軸コネクタの中心導体の一端面が電気的かつ機械的に接合されているとともに、前記外周導体接続部に前記同軸コネクタの外周導体の一端面が電気的かつ機械的に接合されていることから、基板の上側主面に設けられた中心導体接続部に当接されることによって中心導体の軸方向の位置を決定することができる。また、従来のように中心導体をスルーホールの内部に挿入して接合する必要がなく、中心導体および線路用ビア導体の太さを最適なものとすることができるので、接合部のインピーダンス値を整合させ易いものとできる。   The circuit board of the present invention comprises a dielectric, a line conductor formed on the inner layer or the lower main surface, a center conductor connecting portion formed on the upper main surface, and an outer periphery formed around the central conductor connecting portion. A base body having a conductor connecting portion and a line via conductor provided inside the dielectric and electrically connected to the line conductor and the central conductor connecting portion; a cylindrical outer conductor; and the outer conductor A central conductor installed on the central axis and a coaxial connector made of an insulator interposed therebetween, and one end surface of the central conductor of the coaxial connector is electrically and mechanically joined to the central conductor connecting portion. In addition, since one end surface of the outer peripheral conductor of the coaxial connector is electrically and mechanically joined to the outer peripheral conductor connecting portion, it is brought into contact with the central conductor connecting portion provided on the upper main surface of the substrate. That Thus, it is possible to determine the axial position of the center conductor. In addition, it is not necessary to insert the center conductor into the through hole and join as in the conventional case, and the thickness of the center conductor and the via conductor for the line can be optimized. It can be easily aligned.

本発明の回路基板において、好ましくは、前記中心導体接続部は、前記中心導体の断面よりも大きいことから、中心導体の一端面から中心導体接続部に向けて広がる導電性接着剤のメニスカスを形成することができ、中心導体の一端面と中心導体接続部とを強固に接合させることができる。   In the circuit board of the present invention, preferably, the central conductor connecting portion is larger than a cross section of the central conductor, so that a meniscus of a conductive adhesive extending from one end surface of the central conductor toward the central conductor connecting portion is formed. The one end face of the center conductor and the center conductor connecting portion can be firmly joined.

この回路基板において、好ましくは、前記基体と前記同軸コネクタの前記絶縁体との間に間隙部が設けられていることから、基体と同軸コネクタの絶縁体との間に誘電率の低い領域が配置され、中心導体と外周導体との間に生ずる容量成分が小さくなって、この領域でインピーダンス値が所定のインピーダンス値よりも高いものとなる。それに対し、中心導体接続部は中心導体の断面よりも大きく、中心導体接続部と外周導体接続部との間に生ずる容量成分が大きくなって、中心導体接続部の位置でインピーダンス値が所定のインピーダンス値よりも小さくなる。従って、これらの高いインピーダンス値と低いインピーダンス値とが相殺されて、間隙部および中心導体接続部でのインピーダンス値が所定値に整合された状態となる。その結果、中心導体を伝送する電気信号の反射損失等による伝送損失を抑制することができる。   In this circuit board, preferably, since a gap is provided between the base body and the insulator of the coaxial connector, a region having a low dielectric constant is disposed between the base body and the insulator of the coaxial connector. As a result, the capacitance component generated between the central conductor and the outer peripheral conductor is reduced, and the impedance value is higher than a predetermined impedance value in this region. On the other hand, the center conductor connection part is larger than the cross section of the center conductor, and the capacitance component generated between the center conductor connection part and the outer conductor connection part becomes large, and the impedance value at the position of the center conductor connection part is a predetermined impedance. Smaller than the value. Therefore, the high impedance value and the low impedance value are canceled out, and the impedance values at the gap portion and the central conductor connection portion are matched to a predetermined value. As a result, transmission loss due to reflection loss of an electrical signal transmitted through the central conductor can be suppressed.

本発明の回路基板において、好ましくは、前記基体の上側主面に前記同軸コネクタの前記外周導体の外周を支持するための支持部が設けられていることから、基体上側主面の所定位置に同軸コネクタを設置して同軸コネクタを支持することができる。すなわち、中心導体の一端面を中心導体接続部の所定の位置に、外周導体の一端面を外周導体接続部の所定の位置に、それぞれ電気的および機械的に接合する作業を容易とでき、さらに電気信号のインピーダンス値を所定値に整合し易くすることができる。その結果、回路基板を作業性よく製造することができるとともに、中心導体を伝送する電気信号の伝送損失をさらに抑制することができる。   In the circuit board of the present invention, it is preferable that a support portion for supporting the outer periphery of the outer peripheral conductor of the coaxial connector is provided on the upper main surface of the base, so that it is coaxial with a predetermined position on the upper main surface of the base. A connector can be installed to support the coaxial connector. That is, the work of electrically and mechanically joining one end face of the center conductor to a predetermined position of the center conductor connecting portion and one end face of the outer conductor to a predetermined position of the outer conductor connecting section can be facilitated. The impedance value of the electric signal can be easily matched with a predetermined value. As a result, the circuit board can be manufactured with good workability, and transmission loss of an electric signal transmitted through the central conductor can be further suppressed.

本発明の回路基板において、好ましくは、上部接地導体が形成されており、この上部接地導体に前記外周導体接続部が接続されていることから、外周導体接続部の接地電位を強化し安定なものとすることができる。また、上部接地導体を線路導体に対する接地電位導体として機能させることもできる。その結果、中心導体および線路導体に電気信号を伝送させることができる。   In the circuit board of the present invention, preferably, an upper ground conductor is formed, and since the outer conductor connection portion is connected to the upper ground conductor, the ground potential of the outer conductor connection portion is strengthened and stable. It can be. The upper ground conductor can also function as a ground potential conductor for the line conductor. As a result, an electric signal can be transmitted to the center conductor and the line conductor.

本発明の回路基板において、好ましくは、前記基体の下側主面に下部接地導体が形成されており、前記上部接地導体と前記下部接地導体とが接地用ビア導体を介して接続されていることから、接地用ビア導体により、線路用ビア導体を伝送する電気信号を接地することができる。従って、線路用ビア導体を伝送する電気信号を効率よく伝送させることができる。また、上部接地導体と下部接地導体とを同一電位とすることができ、インピーダンス整合し易くすることができる。   In the circuit board of the present invention, preferably, a lower ground conductor is formed on the lower main surface of the base, and the upper ground conductor and the lower ground conductor are connected via a ground via conductor. Thus, the electrical signal transmitted through the line via conductor can be grounded by the ground via conductor. Therefore, it is possible to efficiently transmit the electric signal transmitted through the line via conductor. Further, the upper ground conductor and the lower ground conductor can be set to the same potential, and impedance matching can be facilitated.

本発明の回路基板において、好ましくは、前記基体はセラミックスから成ることから、高温雰囲気中での使用に耐え得る回路基板とすることができる。   In the circuit board of the present invention, preferably, since the base is made of ceramics, the circuit board can withstand use in a high-temperature atmosphere.

本発明の回路基板において、好ましくは、前記基体の前記上側主面には電子部品を収容する凹部が形成され、該凹部の外側に前記中心導体接続部と前記外周導体接続部が設けられるとともに前記同軸コネクタが接合され、前記凹部の内側に前記線路導体が導出されていることから、同軸コネクタを簡単な構造で取り付けることができ、電子部品を気密に封止することができる回路基板とすることができる。   In the circuit board of the present invention, preferably, the upper main surface of the base is formed with a recess for accommodating an electronic component, and the central conductor connecting portion and the outer peripheral conductor connecting portion are provided outside the recess, and Since a coaxial connector is joined and the line conductor is led out inside the recess, the coaxial connector can be attached with a simple structure, and a circuit board capable of hermetically sealing electronic components is provided. Can do.

本発明の電子装置は、上記本発明の回路基板と、前記凹部に収容されるとともに前記線路導体の先端部に電気的に接続された電子部品と、前記凹部の上面に前記凹部を塞ぐように接合された蓋体とを具備していることから、本発明の回路基板を用いた電気信号を効率よく伝送させることができる電子装置とすることができる。   An electronic device according to the present invention includes the circuit board according to the present invention, an electronic component that is housed in the recess and is electrically connected to a distal end portion of the line conductor, and the upper surface of the recess closes the recess. Since the lid is joined, an electronic device that can efficiently transmit an electrical signal using the circuit board of the present invention can be obtained.

本発明の回路基板について以下に詳細に説明する。   The circuit board of the present invention will be described in detail below.

図1(a)は本発明の回路基板について実施の形態の一例を示す断面図、図1(b)は本発明の回路基板について実施の形態の他の例を示す断面図、図1(c)は図1(a)および図1(b)の回路基板について基体の上側主面を示す平面図である。図2(a)は本発明の回路基板について実施の形態の他の例を示す断面図であり、図2(b)は図2(a)の回路基板について基体の上側主面を示す平面図である。また、図3(a)は本発明の回路基板について実施の形態の他の例を示す断面図であり、図3(b),図3(c)は図3(a)の回路基板について基体の上側主面を示す平面図である。   1A is a cross-sectional view showing an example of an embodiment of the circuit board of the present invention, FIG. 1B is a cross-sectional view of another example of the embodiment of the circuit board of the present invention, and FIG. FIG. 2 is a plan view showing an upper main surface of a substrate with respect to the circuit boards of FIG. 1A and FIG. 2A is a cross-sectional view showing another example of the embodiment of the circuit board of the present invention, and FIG. 2B is a plan view showing the upper main surface of the substrate with respect to the circuit board of FIG. It is. FIG. 3A is a cross-sectional view showing another example of the embodiment of the circuit board of the present invention, and FIGS. 3B and 3C show the substrate of the circuit board of FIG. It is a top view which shows the upper main surface.

図4(a)は本発明の回路基板および電子装置について実施の形態の一例を示す断面図、図4(b)は本発明の回路基板および電子装置について実施の形態の他の例を示す断面図である。   4A is a cross-sectional view illustrating an example of an embodiment of a circuit board and an electronic device according to the present invention, and FIG. 4B is a cross-sectional view illustrating another example of an embodiment of the circuit board and the electronic device according to the present invention. FIG.

これらの図において、1は基体、1aは凹部、1bは載置部、1cは側壁部、2は線路導体、2aは線路用ビア導体、2bは中心導体接続部、2cは先端部、3は同軸コネクタ、3aは外周導体、3bは中心導体、3cは絶縁体、3dは間隙部、4は接地導体、4aは外周導体接続部、4bは上部接地導体、4cは下部接地導体、4dは接地用ビア導体、5は電子部品、7は蓋体である。   In these drawings, 1 is a base, 1a is a recess, 1b is a placement portion, 1c is a side wall portion, 2 is a line conductor, 2a is a line via conductor, 2b is a central conductor connection portion, 2c is a tip portion, Coaxial connector, 3a is outer conductor, 3b is center conductor, 3c is insulator, 3d is gap, 4 is ground conductor, 4a is outer conductor connection, 4b is upper ground conductor, 4c is lower ground conductor, 4d is ground Via conductors 5 are electronic components, and 7 is a lid.

まず、本発明の回路基板について、以下詳細に説明する。   First, the circuit board of the present invention will be described in detail below.

本発明の回路基板は、誘電体から成る基体1を有する。また、本発明の回路基板は、円筒状の外周導体3aおよび外周導体3aの中心軸に設置された中心導体3bならびにそれらの間に介在させた絶縁体3cから成る同軸コネクタ3を有する。基体1には、上側主面に中心導体接続部2bと中心導体接続部2bを取り囲むように周囲に形成された外周導体接続部4aとが平面状に形成され、内層または下側主面に基体1の上側主面または下側主面と平行に線路導体2が形成され、中心導体接続部2bと線路導体2とが内部に設けられた線路用ビア導体2aを介して電気的に接続されている。そして、中心導体接続部2bに同軸コネクタ3の中心導体3bの一端面が電気的かつ機械的に接合されているとともに、基体1の外周導体接続部4aに同軸コネクタ3の外周導体3aの一端面が電気的かつ機械的に接合されている。   The circuit board of the present invention has a base 1 made of a dielectric. The circuit board of the present invention includes a cylindrical outer conductor 3a, a central conductor 3b installed on the central axis of the outer conductor 3a, and a coaxial connector 3 including an insulator 3c interposed therebetween. The base body 1 is formed with a central conductor connecting portion 2b on the upper main surface and an outer peripheral conductor connecting portion 4a formed so as to surround the central conductor connecting portion 2b in a planar shape, and the base body is formed on the inner layer or the lower main surface. A line conductor 2 is formed in parallel with the upper main surface or the lower main surface of 1, and the center conductor connecting portion 2 b and the line conductor 2 are electrically connected via a line via conductor 2 a provided therein. Yes. One end surface of the central conductor 3b of the coaxial connector 3 is electrically and mechanically joined to the central conductor connection portion 2b, and one end surface of the outer peripheral conductor 3a of the coaxial connector 3 is connected to the outer peripheral conductor connection portion 4a of the base body 1. Are electrically and mechanically joined.

図1〜図4において、筒状の外周導体3aおよびその中心軸に設置された中心導体3bならびにそれらの間に介在する絶縁体3cからなる同軸コネクタ3を用いている。同軸コネクタ3を用いることで、中心導体3bを伝送する高周波信号を同軸線路のモードで伝送でき、高周波信号のインピーダンス値を所望の値、例えば同軸コネクタに接続される同軸ケーブルと同じに設定し易くできる。   1-4, the coaxial connector 3 which consists of the cylindrical outer periphery conductor 3a, the center conductor 3b installed in the center axis | shaft, and the insulator 3c interposed between them is used. By using the coaxial connector 3, a high-frequency signal transmitted through the central conductor 3b can be transmitted in a coaxial line mode, and the impedance value of the high-frequency signal can be easily set to a desired value, for example, the same as the coaxial cable connected to the coaxial connector. it can.

基体1はアルミナ(Al)質セラミックス,窒化アルミニウム(AlN)質セラミックス等のセラミックス,樹脂,ガラスからなる誘電体によって形成される。 The substrate 1 is formed of a dielectric made of ceramics such as alumina (Al 2 O 3 ) ceramics and aluminum nitride (AlN) ceramics, resin, and glass.

このような基体1は以下のようにして作製される。例えば、セラミックグリーンシートに、WやMo等の高融点金属粉末に適当な有機バインダ、可塑剤、溶剤等を添加混合して得た金属ペーストを、スクリーン印刷法等の厚膜形成技術により印刷塗布して、線路導体2,線路用ビア導体2a,中心導体接続部2b,先端部2c,外周導体接続部4a,上部接地導体4b,下部接地導体4cおよび接地用ビア導体4dとなるメタライズ層を所定パターンに形成する。   Such a base | substrate 1 is produced as follows. For example, a metal paste obtained by adding and mixing a suitable organic binder, plasticizer, solvent, etc. to a high melting point metal powder such as W or Mo to a ceramic green sheet is printed by a thick film forming technique such as screen printing. Then, a metallized layer which becomes the line conductor 2, the line via conductor 2a, the center conductor connecting portion 2b, the tip end portion 2c, the outer peripheral conductor connecting portion 4a, the upper ground conductor 4b, the lower ground conductor 4c and the ground via conductor 4d is predetermined. Form into a pattern.

しかる後、セラミックグリーンシートを複数枚積層し、これを還元雰囲気中、約1600℃の温度で焼成することにより製作される。   Thereafter, a plurality of ceramic green sheets are laminated and fired at a temperature of about 1600 ° C. in a reducing atmosphere.

なお、同軸コネクタ3において中心導体3bと外周導体3aとを伝送する電気信号は互いに絶縁されており、基体1中でも絶縁を保持する必要がある。従って、中心導体接続部2bに接続される線路導体2は線路用ビア導体2aとして基体1の中心導体接続部2b下方に引き回し、基体1表面に形成された外周導体接続部4a,上部接地導体4bと絶縁させておく。   In the coaxial connector 3, the electrical signals transmitted through the center conductor 3 b and the outer conductor 3 a are insulated from each other, and it is necessary to maintain insulation even in the base 1. Accordingly, the line conductor 2 connected to the center conductor connection portion 2b is routed as a line via conductor 2a below the center conductor connection portion 2b of the base body 1, and the outer conductor connection portion 4a and the upper ground conductor 4b formed on the surface of the base body 1. Insulate with.

なお基体1は焼成後に、基体1表面に露出する線路導体2,中心導体接続部2b,先端部2c,外周導体接続部4a,上部接地導体4b,下部接地導体4c等は、その露出表面にニッケル(Ni)や金(Au)から成るメッキ金属層を1〜20μm程度の厚みに被着させておくのが好ましい。   Note that after the base body 1 is fired, the line conductor 2, the central conductor connecting portion 2b, the tip end portion 2c, the outer peripheral conductor connecting portion 4a, the upper ground conductor 4b, the lower ground conductor 4c, and the like exposed on the surface of the base body 1 are exposed on the exposed surface. It is preferable to deposit a plated metal layer made of (Ni) or gold (Au) to a thickness of about 1 to 20 μm.

また表面に露出する線路導体2,中心導体接続部2b,先端部2c,外周導体接続部4a,上部接地導体4b,下部接地導体4c等はメタライズ層によって形成される代わりに、薄膜形成法によって形成されていてもよく、その場合、線路導体2,中心導体接続部2b,先端部2c,外周導体接続部4a,上部接地導体4b,下部接地導体4c等は窒化タンタル(TaN)、ニクロム(Ni−Cr合金)、チタン(Ti)、パラジウム(Pd)、白金(Pt)等から形成され、セラミックグリーンシートを焼成した後に形成される。 Further, the line conductor 2, the central conductor connecting portion 2b, the tip end portion 2c, the outer peripheral conductor connecting portion 4a, the upper ground conductor 4b, the lower ground conductor 4c and the like exposed on the surface are formed by a thin film forming method instead of being formed by a metallized layer. In this case, the line conductor 2, the central conductor connecting portion 2b, the tip end portion 2c, the outer peripheral conductor connecting portion 4a, the upper ground conductor 4b, the lower ground conductor 4c, etc. are tantalum nitride (Ta 2 N), nichrome ( (Ni—Cr alloy), titanium (Ti), palladium (Pd), platinum (Pt), etc., and formed after firing the ceramic green sheet.

なお、この場合も露出表面には、NiやAuから成るメッキ金属層を1〜20μm程度の厚みに被着させておくのが好ましい。   In this case as well, it is preferable to deposit a plated metal layer made of Ni or Au to a thickness of about 1 to 20 μm on the exposed surface.

これにより、これらの露出する線路導体2,中心導体接続部2b,先端部2c,外周導体接続部4a,上部接地導体4b,下部接地導体4c等の酸化腐食を有効に防止することができるとともに、中心導体接続部2bおよび外周導体接続部4aのそれぞれのロウ材や半田等の導電性接着剤8の濡れ性を良好なものとし、中心導体3bおよび外周導体3aをロウ付けや半田付け等によって基体1の所定位置に強固に接合することができる。また、線路導体2の先端部2cとボンディングワイヤ等による電気的接続手段6との接続性を良好なものとすることができる。   As a result, it is possible to effectively prevent oxidative corrosion of the exposed line conductor 2, the central conductor connecting portion 2b, the tip end portion 2c, the outer peripheral conductor connecting portion 4a, the upper ground conductor 4b, the lower ground conductor 4c, and the like. The center conductor connection portion 2b and the outer conductor connection portion 4a have good wettability of the conductive adhesive 8 such as brazing material and solder, and the center conductor 3b and the outer conductor 3a are brazed or soldered to form a base. 1 can be firmly joined to a predetermined position. In addition, the connectivity between the tip 2c of the line conductor 2 and the electrical connection means 6 using a bonding wire or the like can be improved.

同軸コネクタ3は、基体1に載置する電子部品5を外部の同軸ケーブルに電気的に接続するものであり、鉄(Fe)−ニッケル(Ni)−コバルト(Co)合金等の金属から成る円筒状の外周導体3aの中心軸に同じくFe−Ni−Co合金等の金属から成る中心導体3bがガラス等の絶縁体から成る絶縁体3cを介して固定された構造をしている。また、基板1との接続端(図1〜4における下側面)において、中心導体3bおよび外周導体3aの一端面が基板1の上側主面と当接可能な面上に位置するように加工されている。   The coaxial connector 3 electrically connects the electronic component 5 placed on the base 1 to an external coaxial cable, and is a cylinder made of a metal such as iron (Fe) -nickel (Ni) -cobalt (Co) alloy. Similarly, a central conductor 3b made of a metal such as an Fe—Ni—Co alloy is fixed to a central axis of the outer peripheral conductor 3a via an insulator 3c made of an insulator such as glass. Further, at the connection end with the substrate 1 (lower side surface in FIGS. 1 to 4), the end surfaces of the center conductor 3 b and the outer peripheral conductor 3 a are processed so as to be positioned on a surface that can contact the upper main surface of the substrate 1. ing.

同軸コネクタ3の中心導体3bおよび外周導体3aは、例えば、金(Au)−錫(Sn)ロウや金(Au)−ゲルマニウム(Ge)ロウ等の導電性接着剤8を介してそれぞれ中心導体接続部2b,外周導体接続部4aに接合されるようにすることで、十分強固に接合することができる。このようなロウ材または半田による接合の場合、基体1の中心導体接続部2bと外周導体接続部4aのそれぞれの上にロウ材または半田のプリフォームを設置し、プリフォームの上に中心導体3b,外周導体3aを設置する。次いで、基体1にプリフォームを介して同軸コネクタ3が設置された状態のものを高温炉等に入れ所定温度まで加熱することにより、ロウ材または半田のプリフォームを溶融させる。その後冷却してロウ材または半田を固化させることにより、基体1の中心導体接続部2b,外周導体接続部4aのそれぞれに同軸コネクタ3の中心導体3bおよび外周導体3aが電気的かつ機械的に接続される。そして、同軸コネクタ3の基体1に接合されない側に同軸ケーブルが接続されることによって、基体1と外部との間で同軸線路のモードの高周波信号を入出力させることができる。   The central conductor 3b and the outer peripheral conductor 3a of the coaxial connector 3 are connected to the central conductor via a conductive adhesive 8 such as gold (Au) -tin (Sn) brazing or gold (Au) -germanium (Ge) brazing. By joining to the part 2b and the outer periphery conductor connection part 4a, it can join sufficiently firmly. In the case of joining with such a brazing material or solder, a preform of brazing material or solder is placed on each of the center conductor connecting portion 2b and the outer conductor connecting portion 4a of the base 1, and the center conductor 3b is placed on the preform. The outer peripheral conductor 3a is installed. Next, the brazing material or solder preform is melted by placing the coaxial connector 3 on the base body 1 via a preform in a high temperature furnace or the like and heating it to a predetermined temperature. Thereafter, the brazing material or solder is solidified by cooling, so that the center conductor 3b and the outer conductor 3a of the coaxial connector 3 are electrically and mechanically connected to the center conductor connecting portion 2b and the outer conductor connecting portion 4a of the base 1, respectively. Is done. A coaxial cable is connected to the side of the coaxial connector 3 that is not joined to the base 1, whereby a coaxial line mode high-frequency signal can be input / output between the base 1 and the outside.

この構成により、中心導体3bの一端面が基体1の上側主面に設けられた平面状の中心導体接続部2bに接合されるとともに、外周導体3aの一端面が基体1の上側主面に設けられた平面状の外周導体接続部4aに接合される。中心導体3bと外周導体3aとは基体1の上側主面に当接されて接合されるので、中心導体3bと外周導体3aとは軸方向の位置を揃えて基体1の上側主面に接合できる。また、中心導体3bの太さに応じて線路用ビア導体の太さを自由に選択することができるので、接合部でのインピーダンス値を一定のものに整合することが容易である。また、同軸線路のモードで伝送するコネクタ側と、これに接続される中心導体接続部2bおよび外周導体接続部4aとは同軸線路のモードであるので、接合部で反射損失等の伝送損失が生ずるのを抑制することができる。   With this configuration, one end surface of the center conductor 3b is joined to the planar center conductor connecting portion 2b provided on the upper main surface of the base 1, and one end surface of the outer peripheral conductor 3a is provided on the upper main surface of the base 1. The planar outer peripheral conductor connecting portion 4a is joined. Since the center conductor 3b and the outer conductor 3a are in contact with and joined to the upper main surface of the base 1, the center conductor 3b and the outer conductor 3a can be joined to the upper main surface of the base 1 with their axial positions aligned. . Further, since the thickness of the line via conductor can be freely selected according to the thickness of the center conductor 3b, it is easy to match the impedance value at the junction to a constant value. In addition, since the connector side for transmitting in the coaxial line mode and the central conductor connecting portion 2b and the outer conductor connecting portion 4a connected thereto are in the coaxial line mode, transmission loss such as reflection loss occurs at the junction. Can be suppressed.

好ましくは、同軸コネクタ3の基体1に接合される側の端面は、研磨加工により、平坦に加工しておくのがよい。この加工により、基体1の上側主面に平面状に形成された中心導体接続部2bと外周導体接続部4aとの接触性を高め、電気的接続をより安定なものとすることができる。   Preferably, the end face of the coaxial connector 3 on the side to be joined to the base body 1 is preferably processed to be flat by polishing. By this processing, the contact between the central conductor connecting portion 2b and the outer peripheral conductor connecting portion 4a formed in a planar shape on the upper main surface of the base 1 can be improved, and the electrical connection can be made more stable.

また好ましくは、図2に示すように、中心導体接続部2bは、中心導体3bの一端面よりも少し大きくしておく。すなわち、中心導体接続部2bの平面視における大きさは、中心導体3bの一端面の平面視における大きさよりも大きくしておく。そして、中心導体接続部2bと中心導体3bの一端面とが導電性接着剤8を介して電気的かつ機械的に接合されているのがよい。   Also preferably, as shown in FIG. 2, the center conductor connecting portion 2b is made slightly larger than one end face of the center conductor 3b. That is, the size of the central conductor connecting portion 2b in plan view is set larger than the size of the one end surface of the central conductor 3b in plan view. The central conductor connecting portion 2b and one end surface of the central conductor 3b are preferably joined electrically and mechanically via the conductive adhesive 8.

この構成により、中心導体3bの一端面から中心導体接続部2bに向けて広がる導電性接着剤8のメニスカスを形成することができ、中心導体3bの一端面と中心導体接続部2bとを強固に接合させることができる。   With this configuration, it is possible to form a meniscus of the conductive adhesive 8 that spreads from one end surface of the center conductor 3b toward the center conductor connection portion 2b, and to firmly connect the one end surface of the center conductor 3b and the center conductor connection portion 2b. Can be joined.

さらに好ましくは、外周導体接続部4aの平面視における大きさも外周導体3aの一端面の平面視における大きさよりも大きくしておくのがよい。すなわち、外周導体接続部4aの周方向に直交する幅の方が外周導体3aの周方向に直交する幅よりも厚くしておくのがよい。そして、外周導体接続部4aと外周導体3aの一端面とが、中心導体接続部2bと中心導体3bの一端面と同様に導電性接着剤8を介して電気的かつ機械的に接合されているのがよい。   More preferably, the size of the outer peripheral conductor connecting portion 4a in plan view should be larger than the size of the one end face of the outer peripheral conductor 3a in plan view. That is, it is preferable to make the width orthogonal to the circumferential direction of the outer conductor connection portion 4a thicker than the width orthogonal to the circumferential direction of the outer conductor 3a. The outer conductor connecting portion 4a and one end surface of the outer conductor 3a are electrically and mechanically joined via the conductive adhesive 8 in the same manner as the center conductor connecting portion 2b and one end surface of the center conductor 3b. It is good.

また好ましくは、図2に示すように、基体1の上側主面と同軸コネクタ3の絶縁体3cの下面との間に間隙部3dを設けておくとよい。   Preferably, a gap 3d is provided between the upper main surface of the base 1 and the lower surface of the insulator 3c of the coaxial connector 3 as shown in FIG.

この構成により、間隙部3dにおいて中心導体3bと外周導体3aとの間には誘電率の低い空気等が存在する領域を設けることとなり、中心導体3bと外周導体3aとの間に生ずる容量成分が小さくなる。したがって、中心導体3bを伝送する電気信号のインピーダンス値が絶縁体3の存在する部分よりも高いものとなる。一方、中心導体接続部2bは中心導体3bの一端面の平面視よりも大きくなっており、中心導体接続部2bを伝送する電気信号と外周導体接続部4aとの間に生ずる容量成分が大きく、中心導体接続部2bを伝送する電気信号のインピーダンス値が絶縁体3の存在する部分よりも小さくなる。   With this configuration, an area where air having a low dielectric constant exists is provided between the center conductor 3b and the outer conductor 3a in the gap portion 3d, and the capacitance component generated between the center conductor 3b and the outer conductor 3a is reduced. Get smaller. Therefore, the impedance value of the electric signal transmitted through the center conductor 3b is higher than that of the portion where the insulator 3 exists. On the other hand, the center conductor connection portion 2b is larger than a plan view of one end surface of the center conductor 3b, and a capacitance component generated between the electrical signal transmitted through the center conductor connection portion 2b and the outer conductor connection portion 4a is large. The impedance value of the electric signal transmitted through the center conductor connecting portion 2b is smaller than the portion where the insulator 3 exists.

従って、中心導体3bと中心導体接続部2bとを連続して伝送する電気信号は、インピーダンス値の高い箇所と、インピーダンス値の低い箇所とを連続して伝送することとなる。これにより、高いインピーダンス値と低いインピーダンス値とが相殺されて、インピーダンス値が所定値に整合された状態となって、電気信号がスムーズに伝送するようになる。すなわち、中心導体3bと中心導体接続部2bとの接合部で反射損失等の伝送損失が生ずるのを効果的に抑制することができる。   Therefore, the electrical signal transmitted continuously through the center conductor 3b and the center conductor connection portion 2b is transmitted continuously through the portion having a high impedance value and the portion having a low impedance value. As a result, the high impedance value and the low impedance value are canceled out, and the impedance value is matched with the predetermined value, so that the electrical signal is smoothly transmitted. That is, it is possible to effectively suppress the occurrence of transmission loss such as reflection loss at the junction between the center conductor 3b and the center conductor connection portion 2b.

なお、間隙部3dの高さ寸法は0.1mm程度であればよく、間隙部3dによって中心導体3bを伝送するインピーダンス値が高くなっている箇所の長さと、低いインピーダンス値となっている箇所の長さとのバランスをとり、電気信号を効率よく伝送させることができる。   The height of the gap 3d may be about 0.1 mm, and the length of the portion where the impedance value transmitted through the center conductor 3b by the gap 3d is high and the length of the portion where the impedance value is low. The electric signal can be transmitted efficiently.

なお、この構成により、間隙部3dによって露出した中心導体3bの表面に導電性接着剤8を這い上がらせることもできる。導電性接着剤8を這い上がらせることにより、中心導体3bと中心導体接続部2bとの間にさらに良好な導電性接着剤8のメニスカスを形成することができ、中心導体3bと中心導体接続部2bとを強固に接合させることができる。この場合、間隙部3dの高さ寸法も調整すればよい。   With this configuration, the conductive adhesive 8 can be scooped up on the surface of the central conductor 3b exposed by the gap 3d. By rolling up the conductive adhesive 8, a better meniscus of the conductive adhesive 8 can be formed between the central conductor 3b and the central conductor connecting portion 2b, and the central conductor 3b and the central conductor connecting portion can be formed. 2b can be firmly joined. In this case, the height dimension of the gap 3d may be adjusted.

また、好ましくは、図3に示すように基体1の上側主面に同軸コネクタ3の外周導体3aの外周を支持するための支持部10が設けられているのがよい。支持部10は、外周導体3の径よりわずかに大きい孔を有する絶縁体で形成される。この支持部10の孔の内周面をガイドにして同軸コネクタ3の外周導体3aが接するように差し込んで同軸コネクタ3が基体1に組み込まれる。これによって、同軸コネクタ3の組立の作業性を向上することができるとともに、中心導体3bの一端面を中心導体接続部2bの所定の位置に、外周導体3aの一端面を外周導体接続部4aの所定の位置に、それぞれ電気的および機械的に接合でき、電気信号のインピーダンス値を所定値に整合し易くすることができる。その結果、回路基板を効率よく製造することができるとともに、中心導体3aを伝送する電気信号をさらに効率よく伝送させることができる。   Preferably, as shown in FIG. 3, a support portion 10 for supporting the outer periphery of the outer peripheral conductor 3 a of the coaxial connector 3 is provided on the upper main surface of the base 1. The support portion 10 is formed of an insulator having a hole that is slightly larger than the diameter of the outer conductor 3. The coaxial connector 3 is incorporated into the base 1 by being inserted so that the outer peripheral conductor 3a of the coaxial connector 3 is in contact with the inner peripheral surface of the hole of the support portion 10 as a guide. As a result, the workability of assembling the coaxial connector 3 can be improved, one end surface of the center conductor 3b is set at a predetermined position of the center conductor connection portion 2b, and one end surface of the outer conductor 3a is connected to the outer conductor connection portion 4a. It can be electrically and mechanically joined to predetermined positions, respectively, and the impedance value of the electric signal can be easily matched to the predetermined value. As a result, the circuit board can be efficiently manufactured, and the electric signal transmitted through the center conductor 3a can be transmitted more efficiently.

なお、外周導体3aの外側面と支持部10の孔の内周面とは必ずしも接合する必要はないが、必要に応じて接着材等で接合してもよい。   The outer surface of the outer peripheral conductor 3a and the inner peripheral surface of the hole of the support portion 10 do not necessarily have to be joined, but may be joined with an adhesive or the like as necessary.

支持部10の平面視形状は、図3(b)に示すような同軸コネクタ3の外周導体3aと同様な円形状であってもよいし、図3(c)に示すような同軸コネクタ3の外周導体3aの外周面が内接する四角形等の多角形状であってもよい。   The planar view shape of the support portion 10 may be a circular shape similar to the outer peripheral conductor 3a of the coaxial connector 3 as shown in FIG. 3B, or the coaxial connector 3 as shown in FIG. It may be a polygonal shape such as a quadrangle in which the outer peripheral surface of the outer peripheral conductor 3a is inscribed.

また、支持部10はセラミックス,樹脂,ガラス等の誘電体から成っていてもよいし、金属等の導電性材料からなっていてもよい。誘電体からなる場合は、好ましくは、基体1と同様の材料から成るのがよい。例えば、基体1がセラミックスからなり、セラミックグリーンシート積層法によって形成される場合、セラミックグリーンシート積層工程において、基体1の上側主面に支持部10となるセラミックグリーンシートを積層すればよく、支持部10を基体1の製造工程と同一工程で設けることができ、作業効率よく支持部10を設けることができる。   The support portion 10 may be made of a dielectric material such as ceramics, resin, or glass, or may be made of a conductive material such as metal. When it is made of a dielectric, it is preferably made of the same material as that of the substrate 1. For example, when the substrate 1 is made of ceramics and is formed by a ceramic green sheet lamination method, a ceramic green sheet serving as the support portion 10 may be laminated on the upper main surface of the substrate 1 in the ceramic green sheet lamination step. 10 can be provided in the same process as the manufacturing process of the substrate 1, and the support portion 10 can be provided with high work efficiency.

また、好ましくは、図1,図2に示すように、外周導体接続部4aの外側の基体1の上側主面に外周導体接続部4aと同一電位の上部接地導体4bが形成されているのがよい。すなわち、上部接地導体4bと外周導体接続部4aとは一体的に設けられ、上部接地導体4bに設けられた孔の周囲が外周導体接続部4aとして用いられる。   Preferably, as shown in FIGS. 1 and 2, an upper ground conductor 4b having the same potential as that of the outer conductor connecting portion 4a is formed on the upper main surface of the base body 1 outside the outer conductor connecting portion 4a. Good. That is, the upper ground conductor 4b and the outer conductor connection portion 4a are integrally provided, and the periphery of the hole provided in the upper ground conductor 4b is used as the outer conductor connection portion 4a.

この上部接地導体4bは、例えば、セラミックグリーンシート積層法によって形成される場合、上記したようにWやMo等の高融点金属粉末に適当な有機バインダ、可塑剤、溶剤等を添加混合して得た金属ペーストを、基体1の上側主面にスクリーン印刷法等の厚膜形成技術により印刷塗布し、焼成することによって形成される。   For example, when the upper ground conductor 4b is formed by a ceramic green sheet lamination method, an appropriate organic binder, plasticizer, solvent, etc. are added to and mixed with a refractory metal powder such as W or Mo as described above. The metal paste is formed by printing on the upper main surface of the substrate 1 by a thick film forming technique such as screen printing and baking.

また、好ましくは、図2に示すように、基体1の下側主面に下部接地導体4cが形成しておき、上部接地導体4bと下部接地導体4cとを接地用ビア導体4dを介して接続しておく。   Preferably, as shown in FIG. 2, a lower ground conductor 4c is formed on the lower main surface of the base 1, and the upper ground conductor 4b and the lower ground conductor 4c are connected via a ground via conductor 4d. Keep it.

この構成により、基体1の上側主面,内部,下側主面の各部位において、接地導体の接地電位を同一電位とすることができ、伝送する電気信号のインピーダンス値を整合し易くすることができる。   With this configuration, the ground potential of the ground conductor can be made the same at each of the upper main surface, the inner main surface, and the lower main surface of the base body 1, and the impedance value of the electric signal to be transmitted can be easily matched. it can.

接地用ビア導体4dは、好ましくは、図2(b)に示すように、平面視で線路用ビア導体2aを中心とする等距離の円周上に複数設けるのがよい。この構成によって、線路用ビア導体2aを伝送する電気信号が、線路用ビア導体2aを中心とする等距離の円周上に複数設けられた接地用ビア導体4dによって接地され、線路用ビア導体2aを伝送する電気信号が同軸線路に近い伝送モードで伝送することができる。その結果、同軸コネクタ3と基体1との間で、電気信号をほぼ同じ伝送モード(同軸線路のモード)とでき、接続が容易なものとなる。   As shown in FIG. 2B, a plurality of ground via conductors 4d are preferably provided on the circumference of an equal distance centered on the line via conductor 2a in plan view. With this configuration, the electrical signal transmitted through the line via conductor 2a is grounded by the plurality of ground via conductors 4d provided on the circumference of the equidistant centered on the line via conductor 2a, and the line via conductor 2a. Can be transmitted in a transmission mode close to a coaxial line. As a result, between the coaxial connector 3 and the base body 1, the electric signal can be set to substantially the same transmission mode (coaxial line mode), and the connection becomes easy.

好ましくは、基体1はセラミックスからなり、同軸コネクタ3がロウ付けまたは半田付け接合されているのがよい。   Preferably, the substrate 1 is made of ceramics, and the coaxial connector 3 is brazed or soldered.

この構成により、基体1が耐熱性を有する材料からなるとともに、同軸コネクタ3が基体1に耐熱性を有する材料によって接合される構成となるので、高温雰囲気中での使用に耐え得る回路基板とすることができる。例えば、ロウ材または半田としてAu−SnロウやAu−Geロウ等を用いることで、300℃程度までの高温雰囲気中での使用に耐えることができ、基体1にAl質セラミックスを用いることで基体1の強度が高い回路基板とすることができる。 With this configuration, the base 1 is made of a heat-resistant material, and the coaxial connector 3 is joined to the base 1 by a heat-resistant material, so that the circuit board can withstand use in a high-temperature atmosphere. be able to. For example, by using Au—Sn brazing, Au—Ge brazing or the like as a brazing material or solder, it can be used in a high temperature atmosphere up to about 300 ° C., and Al 2 O 3 ceramics is used for the substrate 1. Thereby, it can be set as the circuit board with the intensity | strength of the base | substrate 1 being high.

本発明の回路基板において、好ましくは、図4に示すように、基体1の上側主面には電子部品5を収容する凹部1aが形成される。凹部1aは、例えば図4に示すように、基体1上の電子部品5の搭載部1bを取り囲むように側壁部1cが設けられることによって形成される。側壁部1cはAl質セラミックス,AlN質セラミックス等のセラミックス,樹脂,ガラスの誘電体から成り、搭載部1bが形成される底板部1dと一体に形成されていてもよい。または、側壁部1cがFe−Ni−Co合金や銅(Cu),銅(Cu)−クロム(Cr)等の金属からなっていてもよく、この場合、図4(a)に示すように側壁部1cは誘電体からなる底板部1d上に搭載部1bを取り囲むようにロウ付け,半田付け等の方法によって接合される。金属から成る側壁部1cは、そのインゴットに圧延加工や打ち抜き加工等の従来周知の金属加工法を施すことによって、所定の形状に製作される。また、底板部1dおよび側壁部1cは樹脂による一体成形で形成してもよい。 In the circuit board of the present invention, preferably, as shown in FIG. 4, a concave portion 1 a for accommodating the electronic component 5 is formed on the upper main surface of the base 1. For example, as shown in FIG. 4, the recess 1 a is formed by providing a side wall 1 c so as to surround the mounting portion 1 b of the electronic component 5 on the base 1. The side wall portion 1c is made of a dielectric such as ceramics such as Al 2 O 3 ceramics and AlN ceramics, resin, and glass, and may be formed integrally with the bottom plate 1d on which the mounting portion 1b is formed. Alternatively, the side wall portion 1c may be made of a metal such as Fe-Ni-Co alloy, copper (Cu), copper (Cu) -chromium (Cr), and in this case, as shown in FIG. The portion 1c is joined to the bottom plate portion 1d made of a dielectric by a method such as brazing or soldering so as to surround the mounting portion 1b. The side wall portion 1c made of metal is manufactured in a predetermined shape by subjecting the ingot to a conventionally known metal processing method such as rolling or punching. Moreover, you may form the baseplate part 1d and the side wall part 1c by integral molding with resin.

また電子部品5から多量に熱が発生する場合、底板部1dが熱伝導率の高いAlN質セラミックスから形成されるのがよい。この構成により、電子部品5から発生する熱を効率よく外部に放散させることができる。   When a large amount of heat is generated from the electronic component 5, the bottom plate portion 1d is preferably formed from AlN ceramics having high thermal conductivity. With this configuration, heat generated from the electronic component 5 can be efficiently dissipated to the outside.

または、底板部1dのうち搭載部1bのみを金属によって形成してもよく、この場合も電子部品5から発生する熱を効率よく外部に放散させることができる。このような搭載部1bを形成する金属としては、Cu,Cu−W,Cu−Mo,Cu−Cr等の熱放散性に優れた材料から成り、セラミックス等の絶縁体に設けられた貫通孔に嵌め込むように接合される。   Alternatively, only the mounting portion 1b of the bottom plate portion 1d may be formed of metal, and in this case as well, heat generated from the electronic component 5 can be efficiently dissipated to the outside. The metal that forms such a mounting portion 1b is made of a material having excellent heat dissipation such as Cu, Cu-W, Cu-Mo, Cu-Cr, and the like, in a through hole provided in an insulator such as ceramics. Joined to fit.

また、側壁部1cが金属からなる場合、図4(a)に示すように、側壁部1cが接合される部位において、線路導体2が側壁部1cに電気的に接続しないように、線路導体2を基体1の内部に配置する。なお図示していないが、側壁部1cは上部接地導体4bと電気的に接続されているのがよく、側壁部1cをケースグランドとして機能させることができ上部接地導体4bの接地電位を強化することができる。   Further, when the side wall 1c is made of metal, as shown in FIG. 4A, the line conductor 2 is not electrically connected to the side wall 1c at the portion where the side wall 1c is joined. Is placed inside the substrate 1. Although not shown, the side wall portion 1c is preferably electrically connected to the upper ground conductor 4b, and the side wall portion 1c can function as a case ground, thereby strengthening the ground potential of the upper ground conductor 4b. Can do.

さらに、下部接地導体4cが上部接地導体4bと接地用ビア導体4dを介して接続されていることで、金属製の側壁部1cと電気的に接続されケースグランドとなるとともに、上部接地導体4bが下部接地導体4cと同一の電位となり、非常に安定した接地電位とすることができる。ケースグランドとは回路基板の基準となる接地電位のことであり、上部接地導体4b、下部接地導体4c、金属製の側壁部1cの接地電位を同じ電位に保持することにより、接地電位の値を安定なものとできる。その結果、線路導体2に安定した高周波信号を流すことができる。   Further, since the lower ground conductor 4c is connected to the upper ground conductor 4b via the ground via conductor 4d, it is electrically connected to the metal side wall 1c to form a case ground, and the upper ground conductor 4b The potential is the same as that of the lower ground conductor 4c, and a very stable ground potential can be obtained. The case ground is a ground potential serving as a reference of the circuit board. By maintaining the ground potential of the upper ground conductor 4b, the lower ground conductor 4c, and the metal side wall 1c at the same potential, the value of the ground potential is set. Can be stable. As a result, a stable high frequency signal can flow through the line conductor 2.

また、側壁部1cが金属から成る場合、側壁部1cの上面に蓋体7をシーム溶接法等の溶接法を用いて接合させることができ、蓋体7を気密に接合させ易くできるという作用効果がある。   Moreover, when the side wall part 1c consists of metal, the lid body 7 can be joined to the upper surface of the side wall part 1c using welding methods, such as a seam welding method, and the effect that the lid body 7 can be easily joined airtightly. There is.

蓋体7をシーム溶接法等の溶接法を用いて接合させるための形態としては、側壁部1cの下側(底板部1d側)をAl質セラミックス,AlN質セラミックス等のセラミックス,樹脂,ガラスの誘電体で形成し、蓋体7と接合される側壁部1cの上側を金属で形成するという形態であっても構わない。この構成によっても、側壁部1cの上面に蓋体7をシーム溶接法等の溶接法を用いて接合させることができ、蓋体7を気密に接合させ易くできるという作用効果がある。 As a form for joining the lid 7 by using a welding method such as a seam welding method, the lower side (bottom plate 1d side) of the side wall portion 1c is a ceramic or resin such as Al 2 O 3 ceramics or AlN ceramics. , Formed of a glass dielectric, and the upper side of the side wall 1c joined to the lid 7 may be formed of metal. Also with this configuration, the lid body 7 can be joined to the upper surface of the side wall portion 1c by using a welding method such as a seam welding method, so that the lid body 7 can be easily joined in an airtight manner.

また、凹部1aの内側に線路導体2の先端部2cが設けられていることにより、凹部1aの内側に収容された電子部品5を線路導体2に接続させて、凹部1a外側との間で電気信号を良好に入出力させることができる。   In addition, since the tip end 2c of the line conductor 2 is provided inside the recess 1a, the electronic component 5 accommodated inside the recess 1a is connected to the line conductor 2 and is electrically connected to the outside of the recess 1a. Signals can be input and output satisfactorily.

また好ましくは、図4(b)に示すように、同軸コネクタ3が接合される面が、電子部品5の搭載部1bよりも上側に設けられるのがよい。   Preferably, the surface to which the coaxial connector 3 is joined is provided above the mounting portion 1b of the electronic component 5 as shown in FIG.

この構成により、同軸コネクタ3の中心導体3bが接合される中心導体接続部2bから搭載部1bと同一面まで下方向に線路用ビア導体2aを設け、次いで線路導体2を電子部品5の搭載部1b付近まで設けることで、同軸コネクタ3と電子部品5との接続ができるようになる。その結果、図4(a)に示す同軸コネクタ3と電子部品5とが同一面に設けられる場合に比べ、線路用ビア導体2aを2箇所から1箇所に減らして、線路導体2の配線を単純化することができるとともに屈曲部を少なくすることができ、線路導体2を伝送する電気信号に反射損失等の伝送損失が発生するのを抑制することができる。   With this configuration, the line via conductor 2a is provided downward from the central conductor connecting portion 2b to which the central conductor 3b of the coaxial connector 3 is joined to the same surface as the mounting portion 1b, and then the line conductor 2 is mounted on the mounting portion of the electronic component 5 By providing up to about 1b, the coaxial connector 3 and the electronic component 5 can be connected. As a result, compared to the case where the coaxial connector 3 and the electronic component 5 shown in FIG. 4A are provided on the same surface, the line via conductor 2a is reduced from two to one, and the wiring of the line conductor 2 is simplified. In addition, the number of bent portions can be reduced, and transmission loss such as reflection loss can be suppressed from occurring in the electric signal transmitted through the line conductor 2.

次に、本発明の電子装置について、以下詳細に説明する。   Next, the electronic device of the present invention will be described in detail below.

本発明の電子装置は、凹部1aの内側に半導体レーザ(LD),フォトダイオード(PD),トランジスタ,IC,LSI等の電子部品5または回路基板上にこれら半導体素子やコンデンサ等の受動部品を搭載した電子部品5が収納される。例えば、枠状の側壁部1cと底板部1dによって取り囲まれた領域に凹部1aが形成され、凹部1aの底面と成る底板部1a上の搭載部1bに電子部品5が搭載される。   In the electronic device of the present invention, an electronic component 5 such as a semiconductor laser (LD), a photodiode (PD), a transistor, an IC, an LSI, or the like, or a passive component such as a semiconductor element or a capacitor is mounted on the inside of the recess 1a. The electronic component 5 is stored. For example, the recess 1a is formed in a region surrounded by the frame-shaped side wall 1c and the bottom plate 1d, and the electronic component 5 is mounted on the mounting portion 1b on the bottom plate 1a serving as the bottom surface of the recess 1a.

電子部品5は、その電極が、線路導体2の先端部2cにボンディングワイヤ等の電気的接続手段6を介して電気的に接続される。   The electrode of the electronic component 5 is electrically connected to the tip end portion 2c of the line conductor 2 via an electrical connection means 6 such as a bonding wire.

つまり、線路導体2は、その一端が同軸コネクタ3の中心導体3bに、他端が電子部品5にそれぞれ電気的に接続される。   That is, one end of the line conductor 2 is electrically connected to the central conductor 3 b of the coaxial connector 3 and the other end is electrically connected to the electronic component 5.

ここで、線路導体2の先端部2cの同一面の両側には等間隔を隔てて同一面接地導体が設けられているのがよく、この構成により、先端部2cをコプレーナ伝送線路とすることができ、より高い高周波信号にも対応し易くなる。線路導体2の中心導体3bが接続される側と反対側の端に電子部品5の電極を電気的に接続する際に、線路導体2の両側に設けられた上部接地導体4bの他端を電子部品5の接地用電極に電気的に接続することにより、線路導体2の電子部品5との接続部の伝送モードを電子部品5の電極部に多く採用されているコプレーナ伝送線路モードと同様とすることができ、線路導体2を伝送する高周波信号の伝送モードを電子部品5の電極部の伝送モードとマッチングさせやすくできる。高周波信号を効率よく伝送させることができる。   Here, it is preferable that the same-surface ground conductors are provided at equal intervals on both sides of the same surface of the end portion 2c of the line conductor 2, and this configuration allows the end portion 2c to be a coplanar transmission line. This makes it easier to handle higher frequency signals. When the electrode of the electronic component 5 is electrically connected to the end of the line conductor 2 opposite to the side to which the center conductor 3b is connected, the other end of the upper ground conductor 4b provided on both sides of the line conductor 2 is connected to the electron. By electrically connecting to the grounding electrode of the component 5, the transmission mode of the connection portion of the line conductor 2 with the electronic component 5 is made the same as the coplanar transmission line mode often used for the electrode portion of the electronic component 5. It is possible to easily match the transmission mode of the high-frequency signal transmitted through the line conductor 2 with the transmission mode of the electrode portion of the electronic component 5. High-frequency signals can be transmitted efficiently.

また、蓋体7はFe−Ni−Co合金等の金属,セラミックス,ガラス,樹脂等から成る。蓋体7の断面形状は、図4(a),(b)に示す平板状であったり、逆凹字状(キャップ状)であったりする。   The lid 7 is made of a metal such as an Fe—Ni—Co alloy, ceramics, glass, resin, or the like. The cross-sectional shape of the lid body 7 is a flat plate shape shown in FIGS. 4A and 4B or an inverted concave shape (cap shape).

本発明の回路基板の凹部1a内の搭載部1bに電子部品5を載置固定するとともにその電極を線路導体2の先端部2cにボンディングワイヤ等の電気的接続手段6を介して電気的に接続し、しかる後、側壁部2cの上面に蓋体7を半田付け法,ロウ付け法やシームウエルド法等により取着することにより製品としての電子装置となる。この構成により、凹部1a内部に電子部品5を気密に収容し、電子部品5を安定に作動させることができる。   The electronic component 5 is placed and fixed on the mounting portion 1b in the recess 1a of the circuit board of the present invention, and the electrode is electrically connected to the tip end portion 2c of the line conductor 2 through the electrical connection means 6 such as a bonding wire. Thereafter, the lid 7 is attached to the upper surface of the side wall portion 2c by a soldering method, a brazing method, a seam weld method, or the like, thereby obtaining an electronic device as a product. With this configuration, the electronic component 5 can be hermetically accommodated in the recess 1a, and the electronic component 5 can be stably operated.

このような電子装置は、同軸コネクタ3に外部電気回路に接続される同軸ケーブルを接続することにより内部に収容する電子部品5が外部電気回路に電気的に接続されることとなる。   In such an electronic device, by connecting a coaxial cable connected to an external electric circuit to the coaxial connector 3, the electronic component 5 housed therein is electrically connected to the external electric circuit.

以上の構成により、本発明の回路基板を用いた電気信号を効率よく伝送させることができ、作動性に優れた電子装置とすることができる。   With the above configuration, an electric signal using the circuit board of the present invention can be efficiently transmitted, and an electronic device having excellent operability can be obtained.

なお、本発明は上記実施の形態に限定されるものではなく、本発明の要旨を逸脱しない範囲内で種々の変更を施すことは何等差し支えない。例えば、側壁部1cの断面形状は、階段状とされてもよい。また、凹部1aの平面視形状は四角形であっても、円形であってもよい。または、接地用ビア導体4dが設けられる代わりに、基体1の線路用ビア導体2aが延設される方向と平行な側面に側面導体が設けられてもよい。この構成によっても、上部接地導体4bと下部接地導体4cとを電気的に接続できる。   Note that the present invention is not limited to the above-described embodiment, and various modifications may be made without departing from the scope of the present invention. For example, the cross-sectional shape of the side wall 1c may be a step shape. Moreover, the planar view shape of the recessed part 1a may be a rectangle, or a circle. Alternatively, instead of providing the grounding via conductor 4d, a side conductor may be provided on a side surface parallel to the direction in which the line via conductor 2a of the base 1 is extended. Also with this configuration, the upper ground conductor 4b and the lower ground conductor 4c can be electrically connected.

(a)は本発明の回路基板について実施の形態の一例を示す断面図、(b)は本発明の回路基板について実施の形態の他の例を示す断面図、(c)は図1(a)および図1(b)の回路基板について基体の上側主面を示す平面図である。(A) is sectional drawing which shows an example of embodiment about the circuit board of this invention, (b) is sectional drawing which shows the other example of embodiment about the circuit board of this invention, (c) is FIG. And FIG. 1B is a plan view showing an upper main surface of the base body of the circuit board of FIG. (a)は本発明の回路基板について実施の形態の他の例を示す断面図であり、(b)は図2(a)の回路基板について基体の上側主面を示す平面図である。(A) is sectional drawing which shows the other example of embodiment about the circuit board of this invention, (b) is a top view which shows the upper side main surface of a base | substrate about the circuit board of Fig.2 (a). (a)は本発明の回路基板について実施の形態の他の例を示す断面図であり、(b),(c)は図3(a)の回路基板について基体の上側主面を示す平面図である。(A) is sectional drawing which shows the other example of embodiment about the circuit board of this invention, (b), (c) is a top view which shows the upper main surface of a base | substrate about the circuit board of Fig.3 (a) It is. (a)は本発明の回路基板および電子装置について実施の形態の一例を示す断面図、(b)は本発明の回路基板および電子装置について実施の形態の他の例を示す断面図である。(A) is sectional drawing which shows an example of embodiment about the circuit board and electronic device of this invention, (b) is sectional drawing which shows the other example of embodiment about the circuit board and electronic device of this invention.

符号の説明Explanation of symbols

1:基体
1a:凹部
1b:載置部
1c:側壁部
2:線路導体
2a:線路用ビア導体
2b:中心導体接続部
2c:先端部
3:同軸コネクタ
3a:外周導体
3b:中心導体
3c:絶縁体
3d:間隙部
4a:外周導体接続部
4b:上部接地導体
4c:下部接地導体
4d:接地用ビア導体
5:電子部品
6:電気的接続手段
7:蓋体
8:導電性接着剤
10:支持部
DESCRIPTION OF SYMBOLS 1: Substrate 1a: Concave part 1b: Placement part 1c: Side wall part 2: Line conductor 2a: Line via conductor 2b: Center conductor connection part 2c: Tip part 3: Coaxial connector 3a: Outer conductor 3b: Center conductor 3c: Insulation Body 3d: Gap 4a: Peripheral conductor connection 4b: Upper ground conductor 4c: Lower ground conductor 4d: Ground via conductor 5: Electronic component 6: Electrical connection means 7: Lid 8: Conductive adhesive
10: Support section

Claims (9)

誘電体から成り、内層または下側主面に形成された線路導体と、上側主面に形成された中心導体接続部および該中心導体接続部の周囲に形成された外周導体接続部と、前記誘電体の内部に設けられ、前記線路導体および前記中心導体接続部に電気的に接続された線路用ビア導体とを有する基体と、
円筒状の外周導体および該外周導体の中心軸に設置された中心導体ならびにそれらの間に介在させた絶縁体から成る同軸コネクタとを備え、
前記中心導体接続部に前記同軸コネクタの中心導体の一端面が電気的かつ機械的に接合されているとともに、前記外周導体接続部に前記同軸コネクタの外周導体の一端面が電気的かつ機械的に接合されていることを特徴とする回路基板。
A line conductor formed on an inner layer or a lower main surface, a central conductor connecting portion formed on an upper main surface, and an outer peripheral conductor connecting portion formed around the central conductor connecting portion; A base body having a via conductor for a line provided in a body and electrically connected to the line conductor and the central conductor connection;
A cylindrical outer conductor, a central conductor installed on the central axis of the outer conductor, and a coaxial connector made of an insulator interposed therebetween,
One end surface of the central conductor of the coaxial connector is electrically and mechanically joined to the central conductor connecting portion, and one end surface of the outer peripheral conductor of the coaxial connector is electrically and mechanically joined to the outer peripheral conductor connecting portion. A circuit board characterized by being bonded.
前記中心導体接続部は、前記中心導体の断面よりも大きいことを特徴とする請求項1記載の回路基板。 The circuit board according to claim 1, wherein the central conductor connecting portion is larger than a cross section of the central conductor. 前記基体と前記同軸コネクタの前記絶縁体との間に間隙部が設けられていることを特徴とする請求項2記載の回路基板。 The circuit board according to claim 2, wherein a gap is provided between the base and the insulator of the coaxial connector. 前記基体の上側主面に前記同軸コネクタの前記外周導体の外周を支持するための支持部が設けられていることを特徴とする請求項1乃至請求項3のいずれかに記載の回路基板。 The circuit board according to any one of claims 1 to 3, wherein a support portion for supporting an outer periphery of the outer peripheral conductor of the coaxial connector is provided on an upper main surface of the base body. 前記基体の上側主面に上部接地導体が形成されており、該上部接地導体に前記外周導体接続部が接続されていることを特徴とする請求項1乃至請求項4のいずれかに記載の回路基板。 5. The circuit according to claim 1, wherein an upper ground conductor is formed on an upper main surface of the base body, and the outer peripheral conductor connection portion is connected to the upper ground conductor. substrate. 前記基体の下側主面に下部接地導体が形成されており、前記上部接地導体と前記下部接地導体とが接地用ビア導体を介して接続されていることを特徴とする請求項5記載の回路基板。 6. The circuit according to claim 5, wherein a lower ground conductor is formed on a lower main surface of the base body, and the upper ground conductor and the lower ground conductor are connected via a ground via conductor. substrate. 前記基体はセラミックスから成ることを特徴とする請求項1乃至請求項6のいずれかに記載の回路基板。 The circuit board according to claim 1, wherein the substrate is made of ceramics. 前記基体の前記上側主面には電子部品を収容する凹部が形成され、該凹部の外側に前記中心導体接続部と前記外周導体接続部が設けられるとともに前記同軸コネクタが接合され、前記凹部の内側に前記線路導体が導出されていることを特徴とする請求項1乃至請求項7のいずれかに記載の回路基板。 A concave portion for accommodating an electronic component is formed on the upper main surface of the base body, the central conductor connecting portion and the outer peripheral conductor connecting portion are provided outside the concave portion, and the coaxial connector is joined to the inner side of the concave portion. The circuit board according to claim 1, wherein the line conductor is led out to the circuit board. 請求項8に記載の回路基板と、前記凹部に収容されるとともに前記線路導体に電気的に接続された電子部品と、前記凹部の上面に前記凹部を塞ぐように接合された蓋体とを具備していることを特徴とする電子装置。 9. A circuit board according to claim 8, an electronic component housed in the recess and electrically connected to the line conductor, and a lid joined to the upper surface of the recess so as to close the recess. An electronic device characterized by that.
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CN110581390A (en) * 2019-09-12 2019-12-17 深圳市通茂电子有限公司 SMP bundling box
EP3813200A4 (en) * 2018-05-29 2021-07-14 Huawei Technologies Co., Ltd. Printed circuit board transmission belt line and electronic device
CN115831942A (en) * 2023-01-10 2023-03-21 四川斯艾普电子科技有限公司 Thick film circuit multilayer through hole connection impedance matching structure and method and radio frequency system

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JPH05343554A (en) * 1992-06-08 1993-12-24 Shinko Electric Ind Co Ltd High-frequency wiring substrate
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Cited By (5)

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Publication number Priority date Publication date Assignee Title
EP3813200A4 (en) * 2018-05-29 2021-07-14 Huawei Technologies Co., Ltd. Printed circuit board transmission belt line and electronic device
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CN110581390A (en) * 2019-09-12 2019-12-17 深圳市通茂电子有限公司 SMP bundling box
CN115831942A (en) * 2023-01-10 2023-03-21 四川斯艾普电子科技有限公司 Thick film circuit multilayer through hole connection impedance matching structure and method and radio frequency system
CN115831942B (en) * 2023-01-10 2023-05-05 四川斯艾普电子科技有限公司 Multi-layer via connection impedance matching structure and method of thick film circuit and radio frequency system

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