JP2010078496A5 - - Google Patents
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- Publication number
- JP2010078496A5 JP2010078496A5 JP2008248222A JP2008248222A JP2010078496A5 JP 2010078496 A5 JP2010078496 A5 JP 2010078496A5 JP 2008248222 A JP2008248222 A JP 2008248222A JP 2008248222 A JP2008248222 A JP 2008248222A JP 2010078496 A5 JP2010078496 A5 JP 2010078496A5
- Authority
- JP
- Japan
- Prior art keywords
- inspection object
- scattered light
- light
- inspection
- light receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000007689 inspection Methods 0.000 claims 38
- 230000001678 irradiating effect Effects 0.000 claims 3
- 238000000034 method Methods 0.000 claims 2
- 238000009304 pastoral farming Methods 0.000 claims 2
- 238000000926 separation method Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008248222A JP2010078496A (ja) | 2008-09-26 | 2008-09-26 | 表面検査装置、及び表面検査方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008248222A JP2010078496A (ja) | 2008-09-26 | 2008-09-26 | 表面検査装置、及び表面検査方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2010078496A JP2010078496A (ja) | 2010-04-08 |
| JP2010078496A5 true JP2010078496A5 (enExample) | 2011-11-10 |
Family
ID=42209114
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008248222A Withdrawn JP2010078496A (ja) | 2008-09-26 | 2008-09-26 | 表面検査装置、及び表面検査方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2010078496A (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015184053A (ja) * | 2014-03-20 | 2015-10-22 | バンドー化学株式会社 | 表面モニタリング装置、クリーニング装置、及び搬送装置 |
| US11493453B2 (en) * | 2019-06-28 | 2022-11-08 | Kyocera Document Solutions Inc. | Belt inspection system, belt inspection method, and recording medium for belt inspection program |
| CN110554057B (zh) * | 2019-09-18 | 2024-05-17 | 深圳市深科达智能装备股份有限公司 | 屏幕盖板外观全自动检测设备 |
-
2008
- 2008-09-26 JP JP2008248222A patent/JP2010078496A/ja not_active Withdrawn
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