JP2010078496A5 - - Google Patents

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Publication number
JP2010078496A5
JP2010078496A5 JP2008248222A JP2008248222A JP2010078496A5 JP 2010078496 A5 JP2010078496 A5 JP 2010078496A5 JP 2008248222 A JP2008248222 A JP 2008248222A JP 2008248222 A JP2008248222 A JP 2008248222A JP 2010078496 A5 JP2010078496 A5 JP 2010078496A5
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Prior art keywords
inspection object
scattered light
light
inspection
light receiving
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JP2008248222A
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Japanese (ja)
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JP2010078496A (en
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Priority to JP2008248222A priority Critical patent/JP2010078496A/en
Priority claimed from JP2008248222A external-priority patent/JP2010078496A/en
Publication of JP2010078496A publication Critical patent/JP2010078496A/en
Publication of JP2010078496A5 publication Critical patent/JP2010078496A5/ja
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Claims (11)

非分散光ビームを検査対象物の表面に対して所定のグレージング角で照射して、当該検査対象物の表面上の直線ラインに前記非分散光ビームを一括して照射する照射手段と、
前記照射手段により照射された前記非分散光ビームが前記検査対象物の表面で反射した反射光のうちの散乱光成分を受光する受光手段と、
前記受光手段により受光された前記散乱光成分の光強度に基づいて前記検査対象物の表面の状態を判定する判定手段と、
を有することを特徴とする表面検査装置。 An irradiating means for irradiating a predetermined grazing angle, is irradiated collectively the undispersed light beam into a linear line on the surface of the inspection object to the surface of the inspection object undispersed light beam,
A light receiving means for receiving a scattered light component of the reflected light reflected from the surface of the inspection object by the non-dispersed light beam irradiated by the irradiation means;
Determination means for determining the state of the surface of the inspection object based on the light intensity of the scattered light component received by the light receiving means;
A surface inspection apparatus characterized by comprising: 前記受光手段は、単体の受光素子により構成されていることを特徴とする請求項１に記載の表面検査装置。   The surface inspection apparatus according to claim 1, wherein the light receiving unit includes a single light receiving element. 前記受光手段は、前記反射光のうちの前記散乱光成分が到達する散乱光領域に配置されていることを特徴とする請求項１又は２に記載の表面検査装置。 The surface inspection apparatus according to claim 1, wherein the light receiving unit is disposed in a scattered light region where the scattered light component of the reflected light reaches . 前記受光手段は、前記検査対象物の表面の傷に起因する散乱光成分が到達する散乱光領域と、前記検査対象物の表面の汚れに起因する散乱光成分が到達する散乱光領域とに、個別に配置されていることを特徴とする請求項３に記載の表面検査装置。 The light receiving means, a scattered light region where a scattered light component due to a scratch on the surface of the inspection object reaches, and a scattered light region where a scattered light component due to dirt on the surface of the inspection object reaches , The surface inspection apparatus according to claim 3 , wherein the surface inspection apparatus is arranged individually. 前記受光手段は、前記検査対象物の表面の傷に起因する散乱光成分が到達する散乱光領域と、前記検査対象物の表面の汚れに起因する散乱光成分が到達する散乱光領域とが重複する重複領域に配置されていることを特徴とする請求項３に記載の表面検査装置。 The light receiving means overlaps a scattered light region where a scattered light component due to a scratch on the surface of the inspection object and a scattered light region where a scattered light component due to dirt on the surface of the inspection object arrives. The surface inspection apparatus according to claim 3 , wherein the surface inspection apparatus is disposed in an overlapping region. 前記受光手段は、前記検査対象物の表面の傷に起因する散乱光成分が到達する散乱光領域の形状に応じて、当該傷に起因する散乱光成分が到達する散乱光領域に複数配置されていることを特徴とする請求項３に記載の表面検査装置。 A plurality of the light receiving means are arranged in the scattered light region where the scattered light component caused by the scratch reaches , according to the shape of the scattered light region reached by the scattered light component caused by the scratch on the surface of the inspection object. The surface inspection apparatus according to claim 3 . 前記判定手段は、互いにその表面状態が異なるサンプル用の検査対象物と当該サンプル用の検査対象物における前記散乱光成分の光強度との関係に基づいて予め設定された判定情報から、実際に検査対象となっている検査対象物と同一種の前記判定情報を得たサンプル用の検査対象物に係る前記表面状態と前記散乱光成分の光強度とを参照して、前記実際に検査対象となっている検査対象物に係る散乱光成分の光強度を応じて、前記実際に検査対象となっている検査対象物の表面状態を判定することを特徴とする請求項１〜６の何れかに記載の表面検査装置。 The determination means actually inspects from the determination information set in advance based on the relationship between the inspection object for the samples whose surface states are different from each other and the light intensity of the scattered light component in the inspection object for the samples. With reference to the surface state and the light intensity of the scattered light component of the sample inspection object for which the determination information of the same type as that of the inspection object that is the object is obtained, the actual inspection object is obtained. The surface state of the inspection object that is actually the inspection object is determined according to the light intensity of the scattered light component relating to the inspection object that is being inspected. Surface inspection equipment. 前記判定情報は、複数の前記受光手段毎に設定されていることを特徴とする請求項７に記載の表面検査装置。   The surface inspection apparatus according to claim 7, wherein the determination information is set for each of the plurality of light receiving units. 前記検査対象物の表面の傷に起因する散乱光成分が到達する散乱光領域に複数の受光手段が配置されている際、前記検査対象物との離間距離が大きい受光手段ほど、前記判定手段が当該受光手段で受光された散乱光成分の光強度によって傷の程度が大きいと判定するように、前記判定情報が設定されることを特徴とする請求項８に記載の表面検査装置。 When a plurality of light receiving means are arranged in a scattered light region where a scattered light component resulting from a scratch on the surface of the inspection object arrives, the light receiving means having a larger separation distance from the inspection object has the determination means. to determine the extent of thus wound on the light intensity of the scattered light component is received in the light receiving means is larger, the surface inspection apparatus according to claim 8, wherein said decision information Ru is set. 前記判定手段は、前記検査対象物の表面の状態の判定結果に基づいて、当該検査対象物の交換の要否を判定することを特徴とする請求項１〜９の何れかに記載の表面検査装置。 The surface inspection according to claim 1 , wherein the determination unit determines whether or not the inspection object needs to be replaced based on a determination result of a surface state of the inspection object. apparatus. 検査対象物の表面状態を検査するための表面検査方法であって、
発光部から非分散光ビームを検査対象物の表面に対して所定のグレージング角で照射して、当該検査対象物の表面上の直線ラインに前記非分散光ビームを一括して照射する照射工程と、
前記発光部から照射された前記非分散光ビームが前記検査対象物の表面で反射した反射光のうちの散乱光成分を受光部で受光する受光工程と、
判定部によって、前記受光部で受光された前記散乱光成分の光強度に基づいて前記検査対象物の表面の状態を判定する判定工程と、
を行うことを特徴とする表面検査方法。 A surface inspection method for inspecting the surface condition of an inspection object,
It was irradiated at a predetermined grazing angle from the light emitting portion of the non-dispersed light beam to the surface of the test object, an irradiation step of irradiating collectively the undispersed light beam into a linear line on the surface of the test object ,
A light receiving step in which the non-dispersed light beam emitted from the light emitting unit receives a scattered light component of the reflected light reflected from the surface of the inspection object by the light receiving unit ;
A determination step of determining the state of the surface of the inspection object based on the light intensity of the scattered light component received by the light receiving unit by the determination unit ;
Surface inspection method characterized by performing .
JP2008248222A 2008-09-26 2008-09-26 Surface inspecting device and method Withdrawn JP2010078496A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008248222A JP2010078496A (en) 2008-09-26 2008-09-26 Surface inspecting device and method

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Application Number Priority Date Filing Date Title
JP2008248222A JP2010078496A (en) 2008-09-26 2008-09-26 Surface inspecting device and method

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JP2010078496A JP2010078496A (en) 2010-04-08
JP2010078496A5 true JP2010078496A5 (en) 2011-11-10

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015184053A (en) * 2014-03-20 2015-10-22 バンドー化学株式会社 Surface monitoring device, cleaning device, and transport device
US11493453B2 (en) * 2019-06-28 2022-11-08 Kyocera Document Solutions Inc. Belt inspection system, belt inspection method, and recording medium for belt inspection program

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