JP2010044061A - Memsデバイスにおけるソー・デブリの低減 - Google Patents
Memsデバイスにおけるソー・デブリの低減 Download PDFInfo
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- JP2010044061A JP2010044061A JP2009168678A JP2009168678A JP2010044061A JP 2010044061 A JP2010044061 A JP 2010044061A JP 2009168678 A JP2009168678 A JP 2009168678A JP 2009168678 A JP2009168678 A JP 2009168678A JP 2010044061 A JP2010044061 A JP 2010044061A
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- Prior art keywords
- channels
- substrate
- mems device
- mems
- channel
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- 239000000758 substrate Substances 0.000 claims abstract description 12
- 238000004519 manufacturing process Methods 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 9
- 239000002245 particle Substances 0.000 abstract description 8
- 235000012431 wafers Nutrition 0.000 description 22
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 239000012530 fluid Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000009958 sewing Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00865—Multistep processes for the separation of wafers into individual elements
- B81C1/00896—Temporary protection during separation into individual elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2207/00—Microstructural systems or auxiliary parts thereof
- B81B2207/07—Interconnects
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/01—Packaging MEMS
- B81C2203/0118—Bonding a wafer on the substrate, i.e. where the cap consists of another wafer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/01—Packaging MEMS
- B81C2203/0172—Seals
- B81C2203/019—Seals characterised by the material or arrangement of seals between parts
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Micromachines (AREA)
- Gyroscopes (AREA)
Abstract
【解決手段】改良されたMEMSデバイスおよび製造方法においては、チャネルが、先に第1の基板上に形成された複数のMEMSデバイス領域の周りの第1の基板に形成される。次いで、複数のシールリングが、形成されたチャネルの少なくとも一部の上で、複数のMEMSデバイス領域の周りに適用される。第2の基板は、第1の基板に取り付けられ、次いで、MEMSデバイス領域を取り囲むシールリングは、互いから離される。チャネルは、第1及び第2の断面領域を含む。第1の断面領域は、ソー・デブリ粒子がMEMSデバイス領域に入らないように寸法決めされる。
【選択図】図1
Description
Claims (3)
- 微小電子機械(MEMS)デバイスを製造する方法であって、
少なくとも第1(40,78)および第2(74)の基板の一方に1またはそれ以上のチャネル(54,58)を形成するステップであって、前記チャネル(54,58)の少なくとも一方が、第1の基板(40,78)に形成された少なくとも1つのMEMSデバイス領域(42)の周りに形成されることを特徴とする、ステップと、
前記形成されたチャネル(54,58)の少なくとも一部の上に1又はそれ以上のシールリング(50,76)を適用するステップと、
前記シールリング(50,76)に第2の基板(74)を取り付けるステップと、
を有し、
1又はそれ以上のチャネル(54,58)が、第1及び第2の断面積を有することを特徴とする方法。 - 対応するシールリング(50,76)を適用する前に、1又はそれ以上のチャネル(54,58)の一部内に1又はそれ以上の電気的トレース(60)を配置するステップを更に有することを特徴とする請求項1に記載の方法。
- 請求項1に記載の方法において、2又はそれ以上のMEMSデバイス領域(42)が、MEMSダイを含み、
少なくとも1つの単一のMEMSダイ・パッケージを形成するために、取り付けられた第1(40,78)および第2(74)の基板をソーイング(切断)するステップと、
を更に有することを特徴とする請求項1に記載の方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/180,320 US7977786B2 (en) | 2008-07-25 | 2008-07-25 | Saw debris reduction in MEMS devices |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2010044061A true JP2010044061A (ja) | 2010-02-25 |
Family
ID=40951520
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009168678A Pending JP2010044061A (ja) | 2008-07-25 | 2009-07-17 | Memsデバイスにおけるソー・デブリの低減 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7977786B2 (ja) |
EP (1) | EP2147894B1 (ja) |
JP (1) | JP2010044061A (ja) |
KR (1) | KR20100011941A (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9199840B2 (en) | 2013-11-01 | 2015-12-01 | Freescale Semiconductor, Inc. | Sensor protective coating |
CN114477073B (zh) * | 2021-12-08 | 2024-05-03 | 江苏普诺威电子股份有限公司 | 改善mems载板边缘掉屑的制作方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09178578A (ja) * | 1995-12-27 | 1997-07-11 | Omron Corp | 静電容量型センサ |
JP2006519707A (ja) * | 2003-03-10 | 2006-08-31 | ハネウェル・インターナショナル・インコーポレーテッド | ガラス−シリコンmemsプロセスで埋め込まれた電気的フィードスルーに関するシステム及び方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7005732B2 (en) | 2003-10-21 | 2006-02-28 | Honeywell International Inc. | Methods and systems for providing MEMS devices with a top cap and upper sense plate |
US7430359B2 (en) | 2006-10-02 | 2008-09-30 | Miradia, Inc. | Micromechanical system containing a microfluidic lubricant channel |
-
2008
- 2008-07-25 US US12/180,320 patent/US7977786B2/en active Active
-
2009
- 2009-07-10 EP EP09165255.2A patent/EP2147894B1/en active Active
- 2009-07-17 JP JP2009168678A patent/JP2010044061A/ja active Pending
- 2009-07-24 KR KR1020090067605A patent/KR20100011941A/ko not_active Application Discontinuation
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09178578A (ja) * | 1995-12-27 | 1997-07-11 | Omron Corp | 静電容量型センサ |
JP2006519707A (ja) * | 2003-03-10 | 2006-08-31 | ハネウェル・インターナショナル・インコーポレーテッド | ガラス−シリコンmemsプロセスで埋め込まれた電気的フィードスルーに関するシステム及び方法 |
Also Published As
Publication number | Publication date |
---|---|
EP2147894B1 (en) | 2014-04-16 |
US20100019364A1 (en) | 2010-01-28 |
US7977786B2 (en) | 2011-07-12 |
KR20100011941A (ko) | 2010-02-03 |
EP2147894A3 (en) | 2010-06-16 |
EP2147894A2 (en) | 2010-01-27 |
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