JP2010024084A - 型材を用いた石英ガラス材料の成形方法 - Google Patents
型材を用いた石英ガラス材料の成形方法 Download PDFInfo
- Publication number
- JP2010024084A JP2010024084A JP2008186661A JP2008186661A JP2010024084A JP 2010024084 A JP2010024084 A JP 2010024084A JP 2008186661 A JP2008186661 A JP 2008186661A JP 2008186661 A JP2008186661 A JP 2008186661A JP 2010024084 A JP2010024084 A JP 2010024084A
- Authority
- JP
- Japan
- Prior art keywords
- quartz glass
- glass material
- mold
- molding
- mold material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 239000000463 material Substances 0.000 title claims abstract description 464
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 264
- 238000000034 method Methods 0.000 title claims abstract description 110
- 238000000465 moulding Methods 0.000 title claims abstract description 72
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 156
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 151
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 79
- 238000010438 heat treatment Methods 0.000 claims abstract description 77
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 65
- 239000011521 glass Substances 0.000 claims abstract description 36
- 238000002844 melting Methods 0.000 claims abstract description 34
- 230000008018 melting Effects 0.000 claims abstract description 31
- 239000002002 slurry Substances 0.000 claims abstract description 22
- 239000011247 coating layer Substances 0.000 claims description 51
- 239000007789 gas Substances 0.000 claims description 31
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 14
- 239000011261 inert gas Substances 0.000 claims description 11
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 10
- 238000002156 mixing Methods 0.000 claims description 7
- 239000002245 particle Substances 0.000 claims description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 239000004372 Polyvinyl alcohol Substances 0.000 claims description 5
- 239000002270 dispersing agent Substances 0.000 claims description 5
- 239000010410 layer Substances 0.000 claims description 5
- 229920002451 polyvinyl alcohol Polymers 0.000 claims description 5
- 238000005507 spraying Methods 0.000 claims description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 4
- 239000001307 helium Substances 0.000 claims description 3
- 229910052734 helium Inorganic materials 0.000 claims description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 3
- 229910052754 neon Inorganic materials 0.000 claims description 3
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 claims description 3
- 229910052786 argon Inorganic materials 0.000 claims description 2
- 238000010304 firing Methods 0.000 claims description 2
- 238000010030 laminating Methods 0.000 claims description 2
- XJKVPKYVPCWHFO-UHFFFAOYSA-N silicon;hydrate Chemical compound O.[Si] XJKVPKYVPCWHFO-UHFFFAOYSA-N 0.000 claims description 2
- 238000007493 shaping process Methods 0.000 claims 6
- 238000001035 drying Methods 0.000 abstract description 3
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 abstract 1
- 238000010348 incorporation Methods 0.000 abstract 1
- 239000012778 molding material Substances 0.000 abstract 1
- 230000002093 peripheral effect Effects 0.000 description 17
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 12
- 229910002091 carbon monoxide Inorganic materials 0.000 description 12
- 238000001816 cooling Methods 0.000 description 11
- 239000005350 fused silica glass Substances 0.000 description 10
- 238000002474 experimental method Methods 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000012790 confirmation Methods 0.000 description 5
- 239000010439 graphite Substances 0.000 description 5
- 229910002804 graphite Inorganic materials 0.000 description 5
- 238000000227 grinding Methods 0.000 description 5
- 239000000155 melt Substances 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- 238000005530 etching Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 150000001282 organosilanes Chemical class 0.000 description 2
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
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- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008186661A JP2010024084A (ja) | 2008-07-18 | 2008-07-18 | 型材を用いた石英ガラス材料の成形方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008186661A JP2010024084A (ja) | 2008-07-18 | 2008-07-18 | 型材を用いた石英ガラス材料の成形方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2010024084A true JP2010024084A (ja) | 2010-02-04 |
| JP2010024084A5 JP2010024084A5 (enrdf_load_stackoverflow) | 2011-07-21 |
Family
ID=41730245
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008186661A Pending JP2010024084A (ja) | 2008-07-18 | 2008-07-18 | 型材を用いた石英ガラス材料の成形方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2010024084A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013108572A1 (ja) * | 2012-01-18 | 2013-07-25 | 旭硝子株式会社 | 離型シート及びガラス成形品の成形方法 |
| US9027365B2 (en) | 2013-01-08 | 2015-05-12 | Heraeus Quartz America Llc | System and method for forming fused quartz glass |
| JP2015120619A (ja) * | 2013-12-24 | 2015-07-02 | 信越石英株式会社 | 成型用型、石英ガラスインゴットの成型方法及び石英ガラス |
| CN106830638A (zh) * | 2016-12-21 | 2017-06-13 | 重庆天和玻璃有限公司 | 一种玻璃制品的加工方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62148331A (ja) * | 1985-12-20 | 1987-07-02 | Asahi Glass Co Ltd | 石英ガラス成形容器の前処理方法 |
| WO2003076363A1 (fr) * | 2002-03-11 | 2003-09-18 | Bridgestone Corporation | Procede de fabrication d'un gabarit compact fritte en carbure de silicium et gabarit compact fritte en carbure de silicium ainsi fabrique |
| JP2004307263A (ja) * | 2003-04-07 | 2004-11-04 | Nikon Corp | 石英ガラスの成形方法及び成形装置 |
-
2008
- 2008-07-18 JP JP2008186661A patent/JP2010024084A/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62148331A (ja) * | 1985-12-20 | 1987-07-02 | Asahi Glass Co Ltd | 石英ガラス成形容器の前処理方法 |
| WO2003076363A1 (fr) * | 2002-03-11 | 2003-09-18 | Bridgestone Corporation | Procede de fabrication d'un gabarit compact fritte en carbure de silicium et gabarit compact fritte en carbure de silicium ainsi fabrique |
| JP2004307263A (ja) * | 2003-04-07 | 2004-11-04 | Nikon Corp | 石英ガラスの成形方法及び成形装置 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013108572A1 (ja) * | 2012-01-18 | 2013-07-25 | 旭硝子株式会社 | 離型シート及びガラス成形品の成形方法 |
| US9027365B2 (en) | 2013-01-08 | 2015-05-12 | Heraeus Quartz America Llc | System and method for forming fused quartz glass |
| JP2015120619A (ja) * | 2013-12-24 | 2015-07-02 | 信越石英株式会社 | 成型用型、石英ガラスインゴットの成型方法及び石英ガラス |
| CN106830638A (zh) * | 2016-12-21 | 2017-06-13 | 重庆天和玻璃有限公司 | 一种玻璃制品的加工方法 |
| CN106830638B (zh) * | 2016-12-21 | 2019-06-04 | 重庆重玻节能玻璃有限公司 | 一种玻璃制品的加工方法 |
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