JP2010016325A - 電子パッケージ方法、及び、その設備 - Google Patents
電子パッケージ方法、及び、その設備 Download PDFInfo
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- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
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- H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/93—Batch processes
- H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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- H01L2223/54473—Marks applied to semiconductor devices or parts for use after dicing
- H01L2223/54486—Located on package parts, e.g. encapsulation, leads, package substrate
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
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- H—ELECTRICITY
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- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
- H01L2224/8385—Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
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- H—ELECTRICITY
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/93—Batch processes
- H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L2224/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/014—Solder alloys
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/06—Polymers
- H01L2924/078—Adhesive characteristics other than chemical
- H01L2924/07802—Adhesive characteristics other than chemical not being an ohmic electrical conductor
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Supply And Installment Of Electrical Components (AREA)
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Abstract
【解決手段】パネル基板101を作業サセプタ10に搭載して、各種パッケージ工程を実行するものである。各種パッケージ装置は、作業サセプタに近接して配置され、機械アームにより作業領域に移動されて、基板の輸送と反りの問題を克服する。パッケージ工程において、パネル基板を利用し、パネル基板の異なる領域上で、同時に、相同、或いは、異なるパッケージ工程を実行することができ、これにより、効果的に歩留まりを増加し、コストダウンを達成する。
【選択図】図2
Description
20 チップ粘着装置
30 ワイヤーボンディング装置
40 モールド装置
50 ボールマウント装置
60 シンギュレーション装置
70 マーク装置
80 その他の装置
100 電子パッケージ設備
101 基板
S10 基板を作業サセプタに搭載する
S20 チップ粘着工程
S30 ワイヤーボンディング工程
S40 モールド工程
S50 ボールマウント工程
S60 単一化工程
S70 マーク工程
S80 その他の工程
Claims (13)
- 電子パッケージ方法であって、
基板を作業サセプタに搭載する工程と、
チップ粘着工程を実行して、複数のチップを前記基板上に固定し、前記チップ粘着工程は、チップ粘着装置を前記作業サセプタに移動して作業する工程と、
ワイヤーボンディング工程を実行し、複数のリード線により、前記チップと前記基板を電気的に接続し、前記ワイヤーボンディング工程は、ワイヤーボンディング装置を前記作業サセプタに移動して作業する工程と、
モールド工程を実行して、前記チップと前記リード線を被覆し、前記モールド工程は、モールド装置を前記作業サセプタに移動して作業する工程と、
前記基板に対し単一化工程を実行して、複数のパッケージ体を獲得し、前記単一化工程は、シンギュレーション装置を作業サセプタに移動して作業する工程と、
からなることを特徴とする電子パッケージ方法。 - 更に、前記パッケージ体に対しマーク工程を実行する工程を含み、前記マーク工程は、マーク装置を前記作業サセプタに移動して作業することを特徴とする請求項1に記載の電子パッケージ方法。
- 前記マーク装置は、機械アームにより、懸掛方式で、前記作業サセプタに移動して作業することを特徴とする請求項2に記載の電子パッケージ方法。
- 前記チップ粘着装置、前記ワイヤーボンディング装置、前記モールド装置、前記シンギュレーション装置は、機械アームにより、懸掛方式で、前記作業サセプタに移動して作業することを特徴とする請求項1に記載の電子パッケージ方法。
- 前記チップ粘着工程、前記ワイヤーボンディング工程、及び、前記モールド工程は、同時に、前記基板上の異なる領域で作業できることを特徴とする請求項1に記載の電子パッケージ方法。
- 更に、前記単一化工程に前に、前記基板を旋転させると共に、前記基板の背面にボールマウント工程を実行する工程を含み、前記ボールマウント工程は、機械アームにより、懸掛方式で、前記作業サセプタに移動して作業することを特徴とする請求項1に記載の電子パッケージ方法。
- 電子パッケージ設備であって、
基板を搭載する作業サセプタと、
懸掛設置し、前記作業サセプタに移動して、複数のチップを前記基板上に固定するチップ粘着装置と、
懸掛設置し、前記作業サセプタに移動して、ワイヤーボンディングを実行し、前記チップと前記基板を複数のリード線により電気的に接続するワイヤーボンディング装置と、
懸掛設置し、前記作業サセプタに移動して、前記チップと前記リード線を被覆するモールド装置と、
懸掛設置し、前記作業サセプタに移動して、前記基板に対し単一化工程を実行して、複数のパッケージ体を獲得するシンギュレーション装置と、
からなることを特徴とする電子パッケージ設備。 - 更に、マーク装置を有し、懸掛設置され、前記作業サセプタに移動して、前記パッケージ体に対しマークを実行することを特徴とする請求項7に記載の電子パッケージ設備。
- 更に、機械アームを有し、前記マーク装置を移動することを特徴とする請求項8に記載の電子パッケージ設備。
- 更に、機械アームを有し、それぞれ、前記チップ粘着装置、前記ワイヤーボンディング装置、前記モールド装置、及び、前記シンギュレーション装置に設置されて、前記作業サセプタに移動して、各種工程を実行することを特徴とする請求項7に記載の電子パッケージ設備。
- 前記チップ粘着装置、前記ワイヤーボンディング装置、及び、前記モールド装置は、同時に、前記作業サセプタに移動して、前記基板の異なる領域で作業を実行することを特徴とする請求項7に記載の電子パッケージ設備。
- 更に、旋転装置を有し、前記基板を旋転し、前記旋転装置は、機械アームにより、懸掛方式で、前記作業サセプタに移動して作業することを特徴とする請求項7に記載の電子パッケージ設備。
- 更に、ボールマウント装置を含み、機械アームにより、懸掛方式で、前記作業サセプタに移動して、前記基板の背面に対し、ボールマウントを実行することを特徴とする請求項12に記載の電子パッケージ設備。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW097124948A TW201003802A (en) | 2008-07-02 | 2008-07-02 | Equipment and method for electrical package |
TW097124948 | 2008-07-02 |
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JP2010016325A true JP2010016325A (ja) | 2010-01-21 |
JP4816978B2 JP4816978B2 (ja) | 2011-11-16 |
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JP2008209234A Expired - Fee Related JP4816978B2 (ja) | 2008-07-02 | 2008-08-15 | 電子パッケージ方法、及び、その設備 |
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JP (1) | JP4816978B2 (ja) |
TW (1) | TW201003802A (ja) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2007305628A (ja) * | 2006-05-08 | 2007-11-22 | Disco Abrasive Syst Ltd | 加工装置および加工方法 |
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US6730545B1 (en) * | 2001-02-27 | 2004-05-04 | Cypress Semiconductor Corporation | Method of performing back-end manufacturing of an integrated circuit device |
US6537848B2 (en) * | 2001-05-30 | 2003-03-25 | St. Assembly Test Services Ltd. | Super thin/super thermal ball grid array package |
WO2007005639A2 (en) * | 2005-06-30 | 2007-01-11 | Controlled Semiconductor, Inc. | Lead frame isolation using laser technology |
US7790512B1 (en) * | 2007-11-06 | 2010-09-07 | Utac Thai Limited | Molded leadframe substrate semiconductor package |
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2008
- 2008-07-02 TW TW097124948A patent/TW201003802A/zh unknown
- 2008-08-15 JP JP2008209234A patent/JP4816978B2/ja not_active Expired - Fee Related
- 2008-08-19 US US12/194,182 patent/US20090200685A1/en not_active Abandoned
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2007305628A (ja) * | 2006-05-08 | 2007-11-22 | Disco Abrasive Syst Ltd | 加工装置および加工方法 |
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JP4816978B2 (ja) | 2011-11-16 |
US20090200685A1 (en) | 2009-08-13 |
TW201003802A (en) | 2010-01-16 |
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