JP2009536738A5 - - Google Patents

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Publication number
JP2009536738A5
JP2009536738A5 JP2009509876A JP2009509876A JP2009536738A5 JP 2009536738 A5 JP2009536738 A5 JP 2009536738A5 JP 2009509876 A JP2009509876 A JP 2009509876A JP 2009509876 A JP2009509876 A JP 2009509876A JP 2009536738 A5 JP2009536738 A5 JP 2009536738A5
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JP
Japan
Prior art keywords
piezoelectric layer
layer
piezoelectric
sensors
sensor
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JP2009509876A
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English (en)
Japanese (ja)
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JP5225981B2 (ja
JP2009536738A (ja
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Priority claimed from PCT/US2007/011402 external-priority patent/WO2008020903A2/en
Publication of JP2009536738A publication Critical patent/JP2009536738A/ja
Publication of JP2009536738A5 publication Critical patent/JP2009536738A5/ja
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Publication of JP5225981B2 publication Critical patent/JP5225981B2/ja
Expired - Fee Related legal-status Critical Current
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JP2009509876A 2006-05-10 2007-05-10 空中浮遊分析物を空気中で直接検出するための自己励振・自己検出型圧電カンチレバーセンサー Expired - Fee Related JP5225981B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US74695106P 2006-05-10 2006-05-10
US60/746,951 2006-05-10
US80702006P 2006-07-11 2006-07-11
US60/807,020 2006-07-11
PCT/US2007/011402 WO2008020903A2 (en) 2006-05-10 2007-05-10 Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air

Publications (3)

Publication Number Publication Date
JP2009536738A JP2009536738A (ja) 2009-10-15
JP2009536738A5 true JP2009536738A5 (enExample) 2011-07-07
JP5225981B2 JP5225981B2 (ja) 2013-07-03

Family

ID=38683473

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009509876A Expired - Fee Related JP5225981B2 (ja) 2006-05-10 2007-05-10 空中浮遊分析物を空気中で直接検出するための自己励振・自己検出型圧電カンチレバーセンサー

Country Status (5)

Country Link
EP (1) EP2032976A1 (enExample)
JP (1) JP5225981B2 (enExample)
AU (1) AU2007284995A1 (enExample)
CA (1) CA2651840A1 (enExample)
WO (1) WO2008020903A2 (enExample)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7497133B2 (en) 2004-05-24 2009-03-03 Drexel University All electric piezoelectric finger sensor (PEFS) for soft material stiffness measurement
US8171795B1 (en) 2006-01-23 2012-05-08 Drexel University Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air
US8481335B2 (en) 2006-11-27 2013-07-09 Drexel University Specificity and sensitivity enhancement in cantilever sensing
EP2100125A4 (en) 2006-11-28 2012-02-15 Univ Drexel MICROPORTE-TO-FALSE PIEZOELECTRIC SENSORS FOR BIODETECTION
US7992431B2 (en) 2006-11-28 2011-08-09 Drexel University Piezoelectric microcantilevers and uses in atomic force microscopy
AU2008223285A1 (en) 2007-02-01 2008-09-12 Drexel University A hand-held phase-shift detector for sensor applications
US8241569B2 (en) 2007-11-23 2012-08-14 Drexel University Lead-free piezoelectric ceramic films and a method for making thereof
WO2009126378A2 (en) 2008-03-11 2009-10-15 Drexel University Enhanced detection sensitivity with piezoelectric microcantilever sensors
KR20110049748A (ko) 2008-05-16 2011-05-12 드렉셀유니버시티 조직을 평가하는 시스템과 방법
JP5463788B2 (ja) * 2009-08-18 2014-04-09 富士通株式会社 イオン分析装置、及びイオン分析方法
US8722427B2 (en) 2009-10-08 2014-05-13 Drexel University Determination of dissociation constants using piezoelectric microcantilevers
US20130040405A1 (en) * 2011-08-11 2013-02-14 Lockheed Martin Corporation Methods for sensitive and rapid detection of molecules
US9395343B2 (en) 2011-11-04 2016-07-19 Danmarks Tekniske Universitet Resonant fiber based aerosol particle sensor and method
JP6150671B2 (ja) * 2013-08-22 2017-06-21 オリンパス株式会社 ガスセンサ
JP6392679B2 (ja) * 2015-02-09 2018-09-19 オリンパス株式会社 ガスセンサ
US11242241B2 (en) 2015-07-13 2022-02-08 Intrepid Visions Inc. Systems and methods for micro-cantilever actuation by base excitation
KR101819969B1 (ko) 2016-04-15 2018-01-19 전남대학교산학협력단 압저항 센서의 신뢰성이 향상된 pdms 폴리머 외팔보 구조체
BG112997A (bg) 2019-09-17 2021-03-31 "Амг Технолоджи" Оод Прибор за мониторинг на газове
CN112736187B (zh) * 2020-12-30 2024-02-02 中国航空工业集团公司金城南京机电液压工程研究中心 一种基于自激式压电元件的排气装置及方法
CN112834571B (zh) * 2020-12-30 2023-07-21 中国航空工业集团公司金城南京机电液压工程研究中心 一种基于他激式压电元件的气液两相检测装置及方法
CN112834570B (zh) * 2020-12-30 2023-09-22 中国航空工业集团公司金城南京机电液压工程研究中心 一种基于自激式压电元件的气液两相检测装置及方法
CN113294411B (zh) * 2021-04-29 2023-11-07 中国航空工业集团公司金城南京机电液压工程研究中心 一种基于音圈元件的排气装置及方法
WO2024186992A1 (en) * 2023-03-07 2024-09-12 Glydertech, Incorporated Integrated mems sensor with bridged conformational shifting receptors

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3545269B2 (ja) * 1998-09-04 2004-07-21 日本碍子株式会社 質量センサ及び質量検出方法
US7458265B2 (en) * 2003-10-27 2008-12-02 Drexel University Piezoelectric cantilever sensors
KR100613398B1 (ko) 2003-11-25 2006-08-17 한국과학기술연구원 캔틸레버 센서형 분석 시스템, 제조 방법 및 이를 이용한극미세 물질 감지 방법

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