CA2651840A1 - Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air - Google Patents
Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air Download PDFInfo
- Publication number
- CA2651840A1 CA2651840A1 CA002651840A CA2651840A CA2651840A1 CA 2651840 A1 CA2651840 A1 CA 2651840A1 CA 002651840 A CA002651840 A CA 002651840A CA 2651840 A CA2651840 A CA 2651840A CA 2651840 A1 CA2651840 A1 CA 2651840A1
- Authority
- CA
- Canada
- Prior art keywords
- piezoelectric layer
- piezoelectric
- sensor
- cantilever
- millimeter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0255—(Bio)chemical reactions, e.g. on biosensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0426—Bulk waves, e.g. quartz crystal microbalance, torsional waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Apparatus Associated With Microorganisms And Enzymes (AREA)
- Measuring Or Testing Involving Enzymes Or Micro-Organisms (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Micromachines (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US74695106P | 2006-05-10 | 2006-05-10 | |
| US60/746,951 | 2006-05-10 | ||
| US80702006P | 2006-07-11 | 2006-07-11 | |
| US60/807,020 | 2006-07-11 | ||
| PCT/US2007/011402 WO2008020903A2 (en) | 2006-05-10 | 2007-05-10 | Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2651840A1 true CA2651840A1 (en) | 2008-02-21 |
Family
ID=38683473
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002651840A Abandoned CA2651840A1 (en) | 2006-05-10 | 2007-05-10 | Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP2032976A1 (enExample) |
| JP (1) | JP5225981B2 (enExample) |
| AU (1) | AU2007284995A1 (enExample) |
| CA (1) | CA2651840A1 (enExample) |
| WO (1) | WO2008020903A2 (enExample) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7497133B2 (en) | 2004-05-24 | 2009-03-03 | Drexel University | All electric piezoelectric finger sensor (PEFS) for soft material stiffness measurement |
| US8171795B1 (en) | 2006-01-23 | 2012-05-08 | Drexel University | Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air |
| US8481335B2 (en) | 2006-11-27 | 2013-07-09 | Drexel University | Specificity and sensitivity enhancement in cantilever sensing |
| US8927259B2 (en) | 2006-11-28 | 2015-01-06 | Drexel University | Piezoelectric microcantilever sensors for biosensing |
| US7992431B2 (en) | 2006-11-28 | 2011-08-09 | Drexel University | Piezoelectric microcantilevers and uses in atomic force microscopy |
| JP2010518380A (ja) | 2007-02-01 | 2010-05-27 | ドレクセル・ユニバーシティー | センサー用途向けハンドヘルド型位相シフト検出器 |
| US8241569B2 (en) | 2007-11-23 | 2012-08-14 | Drexel University | Lead-free piezoelectric ceramic films and a method for making thereof |
| US8741663B2 (en) | 2008-03-11 | 2014-06-03 | Drexel University | Enhanced detection sensitivity with piezoelectric sensors |
| KR20110049748A (ko) | 2008-05-16 | 2011-05-12 | 드렉셀유니버시티 | 조직을 평가하는 시스템과 방법 |
| JP5463788B2 (ja) * | 2009-08-18 | 2014-04-09 | 富士通株式会社 | イオン分析装置、及びイオン分析方法 |
| US8722427B2 (en) | 2009-10-08 | 2014-05-13 | Drexel University | Determination of dissociation constants using piezoelectric microcantilevers |
| US20130040405A1 (en) * | 2011-08-11 | 2013-02-14 | Lockheed Martin Corporation | Methods for sensitive and rapid detection of molecules |
| US9395343B2 (en) | 2011-11-04 | 2016-07-19 | Danmarks Tekniske Universitet | Resonant fiber based aerosol particle sensor and method |
| JP6150671B2 (ja) * | 2013-08-22 | 2017-06-21 | オリンパス株式会社 | ガスセンサ |
| JP6392679B2 (ja) * | 2015-02-09 | 2018-09-19 | オリンパス株式会社 | ガスセンサ |
| CA2992105C (en) * | 2015-07-13 | 2020-08-11 | Intrepid Visions Inc. | Systems and methods for micro-cantilever actuation by base excitation |
| KR101819969B1 (ko) | 2016-04-15 | 2018-01-19 | 전남대학교산학협력단 | 압저항 센서의 신뢰성이 향상된 pdms 폴리머 외팔보 구조체 |
| BG112997A (bg) | 2019-09-17 | 2021-03-31 | "Амг Технолоджи" Оод | Прибор за мониторинг на газове |
| CN112834571B (zh) * | 2020-12-30 | 2023-07-21 | 中国航空工业集团公司金城南京机电液压工程研究中心 | 一种基于他激式压电元件的气液两相检测装置及方法 |
| CN112834570B (zh) * | 2020-12-30 | 2023-09-22 | 中国航空工业集团公司金城南京机电液压工程研究中心 | 一种基于自激式压电元件的气液两相检测装置及方法 |
| CN112736187B (zh) * | 2020-12-30 | 2024-02-02 | 中国航空工业集团公司金城南京机电液压工程研究中心 | 一种基于自激式压电元件的排气装置及方法 |
| CN113294411B (zh) * | 2021-04-29 | 2023-11-07 | 中国航空工业集团公司金城南京机电液压工程研究中心 | 一种基于音圈元件的排气装置及方法 |
| WO2024186992A1 (en) * | 2023-03-07 | 2024-09-12 | Glydertech, Incorporated | Integrated mems sensor with bridged conformational shifting receptors |
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| JP3545269B2 (ja) * | 1998-09-04 | 2004-07-21 | 日本碍子株式会社 | 質量センサ及び質量検出方法 |
| US7458265B2 (en) * | 2003-10-27 | 2008-12-02 | Drexel University | Piezoelectric cantilever sensors |
| KR100613398B1 (ko) * | 2003-11-25 | 2006-08-17 | 한국과학기술연구원 | 캔틸레버 센서형 분석 시스템, 제조 방법 및 이를 이용한극미세 물질 감지 방법 |
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| JP2009536738A (ja) | 2009-10-15 |
| AU2007284995A1 (en) | 2008-02-21 |
| WO2008020903A2 (en) | 2008-02-21 |
| EP2032976A1 (en) | 2009-03-11 |
| AU2007284995A2 (en) | 2009-02-12 |
| JP5225981B2 (ja) | 2013-07-03 |
| WO2008020903A3 (en) | 2009-02-05 |
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