CA2651840A1 - Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air - Google Patents

Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air Download PDF

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Publication number
CA2651840A1
CA2651840A1 CA002651840A CA2651840A CA2651840A1 CA 2651840 A1 CA2651840 A1 CA 2651840A1 CA 002651840 A CA002651840 A CA 002651840A CA 2651840 A CA2651840 A CA 2651840A CA 2651840 A1 CA2651840 A1 CA 2651840A1
Authority
CA
Canada
Prior art keywords
piezoelectric layer
piezoelectric
sensor
cantilever
millimeter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002651840A
Other languages
English (en)
French (fr)
Inventor
Rajakkannu Mutharasan
David L. Delesdernier
Gossett Augustus Campbell
David R. Maraldo
Peter A. Nagy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Drexel University
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2651840A1 publication Critical patent/CA2651840A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02Analysing fluids
    • G01N29/022Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02Analysing fluids
    • G01N29/036Analysing fluids by measuring frequency or resonance of acoustic waves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/025Change of phase or condition
    • G01N2291/0255(Bio)chemical reactions, e.g. on biosensors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/025Change of phase or condition
    • G01N2291/0256Adsorption, desorption, surface mass change, e.g. on biosensors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/04Wave modes and trajectories
    • G01N2291/042Wave modes
    • G01N2291/0426Bulk waves, e.g. quartz crystal microbalance, torsional waves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/04Wave modes and trajectories
    • G01N2291/042Wave modes
    • G01N2291/0427Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Measuring Or Testing Involving Enzymes Or Micro-Organisms (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Micromachines (AREA)
CA002651840A 2006-05-10 2007-05-10 Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air Abandoned CA2651840A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US74695106P 2006-05-10 2006-05-10
US60/746,951 2006-05-10
US80702006P 2006-07-11 2006-07-11
US60/807,020 2006-07-11
PCT/US2007/011402 WO2008020903A2 (en) 2006-05-10 2007-05-10 Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air

Publications (1)

Publication Number Publication Date
CA2651840A1 true CA2651840A1 (en) 2008-02-21

Family

ID=38683473

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002651840A Abandoned CA2651840A1 (en) 2006-05-10 2007-05-10 Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air

Country Status (5)

Country Link
EP (1) EP2032976A1 (enExample)
JP (1) JP5225981B2 (enExample)
AU (1) AU2007284995A1 (enExample)
CA (1) CA2651840A1 (enExample)
WO (1) WO2008020903A2 (enExample)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7497133B2 (en) 2004-05-24 2009-03-03 Drexel University All electric piezoelectric finger sensor (PEFS) for soft material stiffness measurement
US8171795B1 (en) 2006-01-23 2012-05-08 Drexel University Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air
US8481335B2 (en) 2006-11-27 2013-07-09 Drexel University Specificity and sensitivity enhancement in cantilever sensing
US8927259B2 (en) 2006-11-28 2015-01-06 Drexel University Piezoelectric microcantilever sensors for biosensing
US7992431B2 (en) 2006-11-28 2011-08-09 Drexel University Piezoelectric microcantilevers and uses in atomic force microscopy
JP2010518380A (ja) 2007-02-01 2010-05-27 ドレクセル・ユニバーシティー センサー用途向けハンドヘルド型位相シフト検出器
US8241569B2 (en) 2007-11-23 2012-08-14 Drexel University Lead-free piezoelectric ceramic films and a method for making thereof
US8741663B2 (en) 2008-03-11 2014-06-03 Drexel University Enhanced detection sensitivity with piezoelectric sensors
KR20110049748A (ko) 2008-05-16 2011-05-12 드렉셀유니버시티 조직을 평가하는 시스템과 방법
JP5463788B2 (ja) * 2009-08-18 2014-04-09 富士通株式会社 イオン分析装置、及びイオン分析方法
US8722427B2 (en) 2009-10-08 2014-05-13 Drexel University Determination of dissociation constants using piezoelectric microcantilevers
US20130040405A1 (en) * 2011-08-11 2013-02-14 Lockheed Martin Corporation Methods for sensitive and rapid detection of molecules
US9395343B2 (en) 2011-11-04 2016-07-19 Danmarks Tekniske Universitet Resonant fiber based aerosol particle sensor and method
JP6150671B2 (ja) * 2013-08-22 2017-06-21 オリンパス株式会社 ガスセンサ
JP6392679B2 (ja) * 2015-02-09 2018-09-19 オリンパス株式会社 ガスセンサ
CA2992105C (en) * 2015-07-13 2020-08-11 Intrepid Visions Inc. Systems and methods for micro-cantilever actuation by base excitation
KR101819969B1 (ko) 2016-04-15 2018-01-19 전남대학교산학협력단 압저항 센서의 신뢰성이 향상된 pdms 폴리머 외팔보 구조체
BG112997A (bg) 2019-09-17 2021-03-31 "Амг Технолоджи" Оод Прибор за мониторинг на газове
CN112834571B (zh) * 2020-12-30 2023-07-21 中国航空工业集团公司金城南京机电液压工程研究中心 一种基于他激式压电元件的气液两相检测装置及方法
CN112834570B (zh) * 2020-12-30 2023-09-22 中国航空工业集团公司金城南京机电液压工程研究中心 一种基于自激式压电元件的气液两相检测装置及方法
CN112736187B (zh) * 2020-12-30 2024-02-02 中国航空工业集团公司金城南京机电液压工程研究中心 一种基于自激式压电元件的排气装置及方法
CN113294411B (zh) * 2021-04-29 2023-11-07 中国航空工业集团公司金城南京机电液压工程研究中心 一种基于音圈元件的排气装置及方法
WO2024186992A1 (en) * 2023-03-07 2024-09-12 Glydertech, Incorporated Integrated mems sensor with bridged conformational shifting receptors

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3545269B2 (ja) * 1998-09-04 2004-07-21 日本碍子株式会社 質量センサ及び質量検出方法
US7458265B2 (en) * 2003-10-27 2008-12-02 Drexel University Piezoelectric cantilever sensors
KR100613398B1 (ko) * 2003-11-25 2006-08-17 한국과학기술연구원 캔틸레버 센서형 분석 시스템, 제조 방법 및 이를 이용한극미세 물질 감지 방법

Also Published As

Publication number Publication date
JP2009536738A (ja) 2009-10-15
AU2007284995A1 (en) 2008-02-21
WO2008020903A2 (en) 2008-02-21
EP2032976A1 (en) 2009-03-11
AU2007284995A2 (en) 2009-02-12
JP5225981B2 (ja) 2013-07-03
WO2008020903A3 (en) 2009-02-05

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Legal Events

Date Code Title Description
EEER Examination request
FZDE Discontinued

Effective date: 20150512