WO2008020903A3 - Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air - Google Patents

Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air Download PDF

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Publication number
WO2008020903A3
WO2008020903A3 PCT/US2007/011402 US2007011402W WO2008020903A3 WO 2008020903 A3 WO2008020903 A3 WO 2008020903A3 US 2007011402 W US2007011402 W US 2007011402W WO 2008020903 A3 WO2008020903 A3 WO 2008020903A3
Authority
WO
WIPO (PCT)
Prior art keywords
self
piezoelectric layer
sensor
detection
cantilever sensor
Prior art date
Application number
PCT/US2007/011402
Other languages
French (fr)
Other versions
WO2008020903A2 (en
Inventor
Rajakkannu Mutharasan
David L Delesdernier
Gossett Campbell
David Maraldo
Peter A Nagy
Original Assignee
Univ Drexel
Rajakkannu Mutharasan
David L Delesdernier
Gossett Campbell
David Maraldo
Peter A Nagy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Drexel, Rajakkannu Mutharasan, David L Delesdernier, Gossett Campbell, David Maraldo, Peter A Nagy filed Critical Univ Drexel
Priority to EP07809068A priority Critical patent/EP2032976A1/en
Priority to CA002651840A priority patent/CA2651840A1/en
Priority to JP2009509876A priority patent/JP5225981B2/en
Priority to AU2007284995A priority patent/AU2007284995A1/en
Publication of WO2008020903A2 publication Critical patent/WO2008020903A2/en
Publication of WO2008020903A3 publication Critical patent/WO2008020903A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0255—(Bio)chemical reactions, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0426—Bulk waves, e.g. quartz crystal microbalance, torsional waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever

Landscapes

  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Acoustics & Sound (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Measuring Or Testing Involving Enzymes Or Micro-Organisms (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Micromachines (AREA)

Abstract

A method for detection of airborne biological agent using a piezoelectric cantilever sensor that includes a piezoelectric layer and a non-piezoelectric layer. A recognition entity is placed on one or both of the two layers. The antibody that recognizes and binds to the airborne species may be chemically immobilized on the cantilever sensor surface. In one embodiment, the cantilever sensor is attached to a base at only one end. In another embodiment, the sensor includes first and second bases and at least one of the piezoelectric layer and the non-piezoelectric layer is affixed to each of the first and second bases to form a piezoelectric cantilever beam sensor. In this embodiment, resonance is measured via stress on the piezoelectric layer and it has been demonstrated that such sensors are robust and exhibit excellent sensing characteristics in gaseous media with sufficient sensitivity to detect airborne species at relatively low concentrations.
PCT/US2007/011402 2006-05-10 2007-05-10 Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air WO2008020903A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP07809068A EP2032976A1 (en) 2006-05-10 2007-05-10 Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air
CA002651840A CA2651840A1 (en) 2006-05-10 2007-05-10 Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air
JP2009509876A JP5225981B2 (en) 2006-05-10 2007-05-10 Self-excited and self-detecting piezoelectric cantilever sensor for direct detection of airborne analytes in air
AU2007284995A AU2007284995A1 (en) 2006-05-10 2007-05-10 Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US74695106P 2006-05-10 2006-05-10
US60/746,951 2006-05-10
US80702006P 2006-07-11 2006-07-11
US60/807,020 2006-07-11

Publications (2)

Publication Number Publication Date
WO2008020903A2 WO2008020903A2 (en) 2008-02-21
WO2008020903A3 true WO2008020903A3 (en) 2009-02-05

Family

ID=38683473

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/011402 WO2008020903A2 (en) 2006-05-10 2007-05-10 Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air

Country Status (5)

Country Link
EP (1) EP2032976A1 (en)
JP (1) JP5225981B2 (en)
AU (1) AU2007284995A1 (en)
CA (1) CA2651840A1 (en)
WO (1) WO2008020903A2 (en)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7497133B2 (en) 2004-05-24 2009-03-03 Drexel University All electric piezoelectric finger sensor (PEFS) for soft material stiffness measurement
US8171795B1 (en) 2006-01-23 2012-05-08 Drexel University Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air
US8481335B2 (en) 2006-11-27 2013-07-09 Drexel University Specificity and sensitivity enhancement in cantilever sensing
US8927259B2 (en) 2006-11-28 2015-01-06 Drexel University Piezoelectric microcantilever sensors for biosensing
US7992431B2 (en) 2006-11-28 2011-08-09 Drexel University Piezoelectric microcantilevers and uses in atomic force microscopy
US8456150B2 (en) 2007-02-01 2013-06-04 Drexel University Hand-held phase-shift detector for sensor applications
WO2009079154A2 (en) 2007-11-23 2009-06-25 Drexel University Lead-free piezoelectric ceramic films and a method for making thereof
WO2009126378A2 (en) 2008-03-11 2009-10-15 Drexel University Enhanced detection sensitivity with piezoelectric microcantilever sensors
WO2009140660A2 (en) 2008-05-16 2009-11-19 Drexel University System and method for evaluating tissue
JP5463788B2 (en) * 2009-08-18 2014-04-09 富士通株式会社 Ion analyzer and ion analysis method
US8722427B2 (en) 2009-10-08 2014-05-13 Drexel University Determination of dissociation constants using piezoelectric microcantilevers
US20130040405A1 (en) * 2011-08-11 2013-02-14 Lockheed Martin Corporation Methods for sensitive and rapid detection of molecules
EP2773941A1 (en) 2011-11-04 2014-09-10 Danmarks Tekniske Universitet Resonant fiber based aerosol particle sensor and method
JP6150671B2 (en) * 2013-08-22 2017-06-21 オリンパス株式会社 Gas sensor
JP6392679B2 (en) * 2015-02-09 2018-09-19 オリンパス株式会社 Gas sensor
EP3322665B1 (en) 2015-07-13 2023-11-22 Intrepid Visions Inc. Systems and methods for micro-cantilever actuation by base excitation
KR101819969B1 (en) 2016-04-15 2018-01-19 전남대학교산학협력단 Pdms polymer cantilever structure for improving reliavility of piezoresistive sensor
BG112997A (en) 2019-09-17 2021-03-31 "Амг Технолоджи" Оод Gas monitoring device
CN112834571B (en) * 2020-12-30 2023-07-21 中国航空工业集团公司金城南京机电液压工程研究中心 Gas-liquid two-phase detection device and method based on separate excitation type piezoelectric element
CN112736187B (en) * 2020-12-30 2024-02-02 中国航空工业集团公司金城南京机电液压工程研究中心 Exhaust device and method based on self-excitation type piezoelectric element
CN112834570B (en) * 2020-12-30 2023-09-22 中国航空工业集团公司金城南京机电液压工程研究中心 Gas-liquid two-phase detection device and method based on self-excitation type piezoelectric element
CN113294411B (en) * 2021-04-29 2023-11-07 中国航空工业集团公司金城南京机电液压工程研究中心 Exhaust device and method based on voice coil element
WO2024186992A1 (en) * 2023-03-07 2024-09-12 Glydertech, Incorporated Integrated mems sensor with bridged conformational shifting receptors

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1536227A2 (en) * 2003-11-25 2005-06-01 Korea Institute of Science and Technology Quantitative biopolymer detecting system using monolithic piezoelectric cantilever by resonant frequency shift, method for fabricating the same system and method for detecting biopolymer quantitatively using the same system

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3545269B2 (en) * 1998-09-04 2004-07-21 日本碍子株式会社 Mass sensor and mass detection method
WO2005043126A2 (en) * 2003-10-27 2005-05-12 Drexel University Piezoelectric cantilever sensors

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1536227A2 (en) * 2003-11-25 2005-06-01 Korea Institute of Science and Technology Quantitative biopolymer detecting system using monolithic piezoelectric cantilever by resonant frequency shift, method for fabricating the same system and method for detecting biopolymer quantitatively using the same system

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
CAMPBELL ET AL: "Detection of pathogen Escherichia coli O157:H7 using self-excited PZT-glass microcantilevers", BIOSENSORS & BIOELECTRONICS, ELSEVIER SCIENCE PUBLISHERS, BARKING, GB, vol. 21, no. 3, 15 September 2005 (2005-09-15), pages 462 - 473, XP005001261, ISSN: 0956-5663 *
YI JEONG W ET AL: "In situ cell detection using piezoelectric lead zirconate titanate-stainless steel cantilevers", JOURNAL OF APPLIED PHYSICS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 93, no. 1, 1 January 2003 (2003-01-01), pages 619 - 625, XP012057718, ISSN: 0021-8979 *
ZHOU J ET AL: "Zeolite-modified microcantilever gas sensor for indoor air quality control", SENSORS AND ACTUATORS B, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 94, no. 3, 1 October 2003 (2003-10-01), pages 337 - 342, XP004442296, ISSN: 0925-4005 *

Also Published As

Publication number Publication date
WO2008020903A2 (en) 2008-02-21
EP2032976A1 (en) 2009-03-11
AU2007284995A1 (en) 2008-02-21
JP2009536738A (en) 2009-10-15
AU2007284995A2 (en) 2009-02-12
CA2651840A1 (en) 2008-02-21
JP5225981B2 (en) 2013-07-03

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