BG112997A - Gas monitoring device - Google Patents

Abstract

The invention relates to a device for determining the physical parameters and chemical composition of a gas by measuring the flow of the said gas and will find application in industry and everyday life, e.g. in air conditioning and ventilation systems in order to determine air quality or to monitor other gas mixtures. With the aid of the device of the invention, more efficient gas control can be performed and comfort and safety can be ensured. The device (1) comprises a body (3) equipped with an inlet and an outlet element for providing gas flow, in which are placed the sensors (12) for gas monitoring. The device (1) is combined for the simultaneous determination of the physical parameters and the chemical components of which the gas is composed and their concentration thereof. The sensors (12) are equipped with microconsoles (13) with carefully chosen selectivity and sensitivity. It comprises means for the said simultaneous determination, each of which contains selected microconsoles (13) and an actuating element (14, 17) thereto, arranged in a common measuring chamber (11) formed inside the body (3).

Description

GAS MONITORING DEVICE

Field of technology

This invention relates to an apparatus for determining the physical parameters and chemical composition of a gas by measuring the flow of that gas and will find application in industry and everyday life, e.g. in air conditioning and ventilation systems, to determine air quality or to monitor other gas mixtures. With the device of the invention, more efficient gas control can be performed and comfort and safety can be ensured.

Prior art

When monitoring the quality of air or gases in general, both physical parameters are determined, such as: pressure, flow, temperature, viscosity, thermal conductivity, dust particles, etc., as well as the composition and concentrations of individual gas components. Typically, each individual gas parameter is measured with a separate specialized sensor having high selectivity. Thus, a system for measurement or monitoring contains at least as many different sensors as the number of defined parameters. Various variants of specialized sensors are known from the prior art, and only the patents for microsensors in the last ten years are hundreds. In addition, individual sensors use different operating principles and, accordingly, different sensitive (sensory) elements. In addition to the use of various designs of said sensor elements, these circumstances lead to the use of various technical means for detecting and processing sensor signals, which complicates the calibration and measurement of many quantities necessary to obtain correct results. It is therefore natural to strive to use a minimum number of measurement principles, preferably a single one.

Specifically for sensors for measuring the physical parameters and chemical composition of air or gas, a gas flow is required. For this purpose, various additional elements are used for reproducible formation and transport of the flow to the sensors. It is preferable to use minimal flows, which requires small sensor elements with high sensitivity.

In addition, each of the specialized sensors is mounted in a housing, and so, due to the presence of many such housings, it is necessary to provide additional volume for them, and the individual sensors measure the corresponding parameter in different spatial areas (measuring points). Therefore, measures should be applied to homogenize the measured flows or additional calculations should be used to take into account the spatial correlations between the individual measured signals. Therefore, those skilled in the art prefer the use of sensor systems that automatically match the sensor signals and all parameters are measured in a sufficiently small spatial area.

Apart from this, determining the chemical composition of a gas, which may contain a large number of components with varying concentrations, is a particularly major challenge. There are a variety of chemical sensors that provide the desired and / or required selectivity and sensitivity, but which are slow or saturated at • · · · · · · · *: 2: · :: ··:: ··:

···· ·· ·· ····· continuous operation. Such sensors are disposable or need to be regenerated periodically. This complicates and increases the cost of their use for monitoring.

In addition, the use of specialized sensors requires prior knowledge of the chemical composition of the gases. In practice, the use of specialized sensors leads either to uncertainty that all components will be registered and measured, or to an unnecessary increase in the cost of the relevant systems when sensors for substances not contained in the test gas are pre-included.

Therefore, although there are many alternative sensory methods for determining the chemical composition of a gas, only optical spectroscopy in a selected wavelength range provides sufficiently high selectivity, sensitivity and accuracy. However, this method is relatively complex, expensive and unsuitable for continuous monitoring.

In practice, microconsole sensors that operate in static mode are known as specialized gas monitoring sensors - their elastic elements bend or twist as a result of the interaction with the measured gas, which generates an aperiodic sensor signal with varying amplitude. Also known are microconsole sensors that operate in a (dynamic) mode of oscillation, in which their elastic elements bend or twist periodically depending on the oscillation mode, while generating periodic sensor signals. The parameters of said oscillation, such as: phase, amplitude, resonant frequency and / or quality factor, called Q-factor, change as a result of the interaction of the elastic elements with the gas flow. Therefore, microconsole sensors are among the potential candidates for a universal sensor approach for simultaneous determination of many physical and chemical parameters of gases.

Separate microconsole sensors are known in the art and are used to measure various gas parameters. These are disclosed, eg: in a dew point determination patent № US6,126,311; in a patent temperature measuring device US 7,928,343 B2; devices for detecting the presence of selected substances are disclosed in: patent EP2032976AI, patent application WO2004083802A2, patent application US2006 / 0191320A1, patent US 8,481,335 B2 and others.

Despite its very high sensitivity and speed (usually <1 sec) for measuring a selected parameter or component of the gas composition, a significant disadvantage of a microconsole sensor is the phenomenon of drift of the sensor signal associated with the dependence of the value of said signal on many parameters. such as: temperature, humidity, pressure, electromagnetic fields, saturation of the sensor element, etc. All this leads to difficulties, limits and increases the cost of measuring and monitoring important parameters of air or gases with the existing specialized microconsole sensors. This applies incl. for the instruments disclosed in the above-cited patents and patent applications, which detect and measure a single parameter or are compensated for a single unmeasured (background) parameter of air or gas.

Therefore, it is preferable that the number of sensor signals is equal to or greater than the number of parameters that determine the behavior of a microconsole, and that the individual signals are received from sensors with different selectivity for each of the parameters.

Also known in the art are microconsole sensors that are used as microphones to record acoustic waves caused by e.g. from.: · ·. ·. · '.! .-.

• · «··· * · · • з ........ ···:

• · · · · ·· • ·· · · · · · · · · · selective light absorption. Examples of such sensors are the acousto-optical sensors disclosed, e.g. in patents: US5,753,797 and US5,933,245, as well as patent applications: US2015 / 0101395A1 and US2018 / 0164215A1. The instruments described in these documents are intended only to determine the chemical composition of gases, but the documents do not disclose how sensory signals distinguish the influence of other (eg, physical) gas parameters.

Therefore, despite the presence of these sensors, there is still a need to create: sensors to determine different physical and chemical parameters using a common principle of operation and the same sensor elements, each sensor must be able to respond selectively to one of the many parameters. The sensors need to be small enough, fast (response time 1 10sec), located in the same small spatial area, to ensure both spatial coherence and correlation of signals in a system, and the use of minimum gas flows . It is preferable for the sensors to have a block construction, allowing quick and easy configuration and pre-configuration, depending on the specific application, and to contain in their construction functional elements, providing the transport of the gas flow and the processing of the sensor signals, without the need for regeneration. .

BRIEF DESCRIPTION OF THE INVENTION

The present invention relates to a gas monitoring device, which consists of a body provided with inlet and outlet elements to provide gas flow. Gas monitoring sensors are housed in the body. The instrument of the invention is combined, and the sensors are equipped with microconsoles, selectivity and sensitivity are selected. The instrument contains means for simultaneously determining the physical parameters and the chemical components of which the gas is composed and their concentration. Each of these means includes selected microconsoles and an actuating element to them, located in a common measuring chamber formed inside the body. Optionally, microfluidic elements can be formed in the sensors to modify the flow.

In one embodiment of the instrument of the invention, the total number of microconsoles is equal to or greater than the number of simultaneously determined parameters and components, and the microconsoles have built-in piezoresistors connected in one or more identical or different differential measuring bridges.

In another embodiment of the invention, the number of sensors in the instrument corresponds to the number of parameter groups, the chemical components of the gas and their concentrations to be determined, and the body of the instrument of the present invention is disassembled.

In another embodiment of the device of the invention, the actuating elements for activating the microconsoles are at least two, at least one actuating element is designed to determine the physical parameters of the gas and is selected from electrothermal, piezoacoustic, electromagnetic element, and the other actuating element is infrared beam to determine the chemical components and their concentration in the gas.

In a further embodiment, the means for determining the chemical components and their concentration in the gas consist of one or more microconsoles and an infrared beam actuating element consisting of one or more monochromatic sub-beams with wavelengths Xk corresponding to the absorption lines of each of the components Ak of the gas. The intensity of each sub-beam is modulated at a frequency equal to the resonant frequency of one of said microconsoles, designed to simultaneously determine the respective components Ak. In another embodiment, the monochromatic beams are switched one by one in the actuating element infrared beam, and the microconsole is only one.

In another embodiment, in the means for determining the physical parameters of the gas, the actuating element for activating the microconsoles is electrothermal and is formed as heating metal tracks on the microconsoles; or the actuating element is a piezoacoustic resonator. In an additional embodiment, at least one permanent magnet is attached to the metal tracks. In addition to this variant, the microconsoles with metal tracks are at least one pair and are arranged mutually orthogonally, and the permanent magnet attached to them is located at an angle a to one of said microconsoles, to provide a predetermined ratio of sensor signals from the two selected orthogonal microconsoles.

In a further embodiment, the means for simultaneously determining the physical parameters of the gas comprise microconsoles and at least two actuating elements selected from: an electrothermal actuator, heated metal tracks, a piezo-acoustic resonator, and metal tracks together with a permanent magnet.

Brief description of the figures

FIG. 1 shows a longitudinal side section of an embodiment of an instrument of the present invention;

FIG. 2a is a top view of an active carrier;

FIG. 26 is a top view of a remote insert;

FIG. 2c shows a side view of an alternating active carrier and remote inserts with a connector for galvanic connection;

Fig. 3a shows a top view of a conventional solid body sensor and a microconsole with two built-in piezoresistors;

Fig. 36 shows a top view of a sensor with a solid body and four microconsoles, the piezoresistors of which are connected in a measuring bridge;

FIG. 3b shows a longitudinal side section of a sensor is a solid body and at least one microconsole;

Fig. 4a shows a top view of a sensor with a frame-shaped body comprising a microconsole;

Fig. 46 shows a top view of a sensor with a body having the shape of a frame and comprising two microconsoles with resistors connected in a full bridge;

FIG. 4c shows a longitudinal side section of a sensor with a built-in microfluidic element;

In FIG. 5 is another sectional view of the microfluidic element of a sensor mounted on a support;

In FIG. 6 shows a longitudinal side section of an instrument of the invention with four microconsole sensors with electrothermal activation;

In FIG. 7 shows a longitudinal side section of an instrument of the invention with a microconsole sensor with electrothermal activation;

In FIG. 8a shows an instrument of the invention comprising two microconsole sensors and a piezoacoustic resonator actuating element;

In FIG. 86 is a top view of an active carrier with a piezoacoustic resonator mounted;

FIG. 86 is a top view of a remote insert with a hole for placing a piezoacoustic resonator;

FIG. 9a is a view of a microconsole is a metal track in a longitudinal magnetic field;

FIG. 96 shows a microconsole is a metal track in a transverse magnetic field;

In FIG. 10a shows a longitudinal side section of an instrument with two microconsole sensors and a permanent magnet actuating element;

FIG. 106 is a top view of a remote insert with variants of openings for placing permanent magnets;

FIG. 1 Ov presents a top view of a remote insert with holes for placing permanent magnets at an angle;

In FIG. 11 shows a longitudinal section of an instrument of the invention comprising three microconsole sensors and two actuating elements: a piezoacoustic resonator and a permanent magnet.

Description of the invention

The gas monitoring devices of the present invention are designed to simultaneously determine the physical parameters of gases and their chemical composition, as well as the concentration of the individual components. For this purpose, microsensors containing microconsoles are used in the devices of the present invention.

The use of microconsole sensors in this invention results in the fact that the determination of certain physical parameters with the instrument of the invention, e.g. temperature, flow rate and the like, can be realized directly by the signals provided by the microconsoles of the sensors, and which signals are a consequence of the influence of these parameters on said microconsoles.

To determine another group of physical parameters or chemical composition of the gas, it is necessary to activate the microconsoles of the sensors, e.g. by static or dynamic bending or twisting by an actuating element.

In the instruments of the present invention, in particular, microconsole sensors are used, and in terms of the required functions, each instrument is provided with two separate types of gas monitoring means: means for determining physical parameters and means for determining the chemical composition, and concentrations of the individual gas components. These means contain elements of microconsole sensors and actuating elements, through the optimal combination of which the two complementary functions of the device are performed.

Since a sensor signal, when a microconsole sensor is used, does not have absolutely complete selectivity to a selected gas parameter (because the sensor responds to many gas parameters simultaneously), it is necessary to measure a sufficient number of independent sensor signals and the values of all parameters, incl. the value of the selected parameter to be determined by calculation. The number and type of said sufficient number of signals from one instrument varies for each particular application and is determined by the preliminary information on the nature of the gas and by the noise level which is considered acceptable.

For convenience, the gas monitoring device in each specific application can be considered as a superposition of multiple sensors for common applications in a particular field, each sensor is equipped with sufficient sensor signals for self-determination with the desired accuracy of a fixed number and type of parameters of gas.

In this sense, the devices of the present invention are combined. This is explained in detail further in the examples that follow, which are intended to illustrate the invention without limiting it.

In the present disclosure, the terms "sensor" and "microsensor" are used interchangeably.

Example 1: Device with multiple microconsoles and infrared beam activation

This invention relates to an instrument 1 for determining parameters and monitoring a gas flow 2, as shown in Fig. 1, representing a cross-sectional side view of the instrument 1. After the measurement, the gas flow 2 'is discharged from the instrument 1, which is made up of a body 3 provided with an input element 4 and an output element 4 ', an insulating input connection 5 and / or an output connection 5'. By means of the 5 and / or 5 'connections and an additional external device, such as pump or fan (not shown in the figure), a controlled flow of gas 2 through the device 1 is provided.

In Example 1, the body 3 comprises three flat active carriers 6.i (i = 1, 2, 3), each with one or more holes 7.i formed. In addition, the body 3 also contains four spacers 8.j (j). = 1, 2, 3, 4), which alternate with the active carriers, each with a shaped hole 9.j. The openings 7.Ϊ and 9.j may be of the same or different shape or of the same or different size. The size of each of the supports and inserts is in the range from bmm to 20mm, preferably from 10mm to 15mm, in this example 12mm. The thickness of the carrier is from 0.2 mm to about 5 mm, preferably from 0.5 mm to 1.5 mm, in this example is 1.0 mm. The input / output elements (4.4 ') and the flat elements 6.i and 8.j are detachably connected, forming the body 3, e.g. with screws and nuts 10 of suitable length or in another manner known to those skilled in the art. Said elements: 4, 4 ', as well as the openings 7.i and 9.j, together form a cavity - a common measuring chamber 11 with variable cross-section, the side walls of which are impermeable to gas. The gas flow 2 passes through the chamber 11, and the velocity and pressure of the flow can be varied along its length, which can achieve a local change in the mode of gas passage (eg, laminar-non-laminar, homogeneous-inhomogeneous, stationary non-stationary). ) and, accordingly, to locally modify the sensitivity and selectivity of the sensors.

Means for determining the physical parameters and chemical composition of the gas 2 include elements of microsensors 12, and in Example 1, one or more piezoresistive microconsole sensors 12.m (m = 1, 2) mounted on the active carriers 6 are most preferred. i. Each of said sensors 12 comprises one or more microconsoles 13.

: 7. ’:

«· · · · · · • · · · · · · · · · · · · · · · · · ·

In the present example, shown in FIG. 1, said means for determining the physical parameters include microconsoles 13.p located on two sensors 12.1 and 12.2 mounted on the brackets 6.1 and 6.3. When it is necessary to activate the microconsoles 13.p, the means also include an actuating element 14 mounted on the support 6.2, the element being located in a specific opening 15 of the insert 8.3. Since the opening 15 is connected to the opening 9.3, the actuating element 14 may also be located in the common measuring chamber 11. In this example, the actuating element 14 can be selected from any of. electrothermal, piezoacoustic, etc., for example electrothermal, as explained in detail later in this description.

Separately, the means for determining the chemical composition of the gas 2 in Example 1 include: input / output elements 16 and 16 ', an infrared (IR) actuating element representing the IR beam 17 and one or more microconsoles 13.k of the sensor 12.1. The optically transparent input / output elements 16 and 16 'allow the IR beam 17 provided by an external device, not shown in the figure, to pass through the chamber 11. Usually, the intensity of the beam 17 is modulated with frequency y? and provides activation of selected microconsoles 13.k when certain conditions are explained, further explained in the example.

A top view of a variant of the active carrier 6.i, is shown in FIG. 2a. It is flat, square in shape, and has a shaped periphery at the bottom, which provides a plurality of galvanically isolated contacts terminals (feathers) 18. The only hole 7.i is formed in the geometric center of the carrier, and around it is a mounting platform 19 of a sensor 12.t or an actuating element 14 with power supply and / or control, the site, usually for the area, being metallized. The terminals of the sensor 12 are connected to the contact pads 20 for wire connection, which in turn are galvanically connected to the contact pins 18 located on the periphery of the carrier 6.1. Through them, each sensor signal is uniquely related to the corresponding microconsole 13.p / 13.k, which generates it, and all received sensor signals are fed to a corresponding device for their processing, as is usual for the field.

Holes 21 are located in the four corners of the carrier, which are used to assemble the sensor device 1.

When the quantity determined by the sensor 12 is related to the gas flow vector 2, such as: transfer of substance or heat, dust particles, etc. similar, it is preferred that the sensor be positioned relative to the aperture 7.i with an overlap. When the determined value is scalar or isotropic, such as: temperature, static pressure and the like, it is preferable for the sensor to be located without overlapping the opening 1l. In FIG. 26 shows a top view of a variant of the remote insert 8.j (j = 1,2), which is also square in shape, with an opening 9.j formed in its geometric center. The size of the hole 9.j may vary, being chosen to accommodate the non-planar elements of a mounted sensor 12 or an actuating element 14, on an adjacent active carrier 6.i. Said elements are usually arranged in a range of dimensions from about 1 mm to about 5 mm, preferably from 1.5 mm to 4.0 mm, in the example 3.5 mm. The thickness of the inserts 8.j exceeds the height of said non-planar elements and may vary in the range from about 0.2 mm to 2 mm, preferably from 0.5 mm to 1 mm, for example 0.8 mm.

Optionally, concentric to the opening 9.j, an additional mounting element 22 is formed, such as a ring of conductive metal layer, a seal of elastic material or the like. the openings 21 of the active carrier 6.Ϊ, which serve to assemble the body 3.

In FIG. 2c shows a side section of an active carrier variant 6.i and two spacers 8.j. The sensor signals are transmitted by means of an electrical connector 24, the contact pins 24.1 of which provide a galvanic connection between the respective pins 18 of the carrier 6.i and the flexible multi-conductor cable 24.2. Thus, the electrical signals from the sensor 12 are fed to the external processing system not shown in the figures.

It is clear to those skilled in the art that on an active carrier 6.i, on which the openings 7.i are more than one, more than one sensor 12 can be mounted, respectively. In addition, the dimensions and shape of the openings 9.j of the adjacent remote insert 8.j are such that they can accommodate all non-planar elements of the sensors. Therefore, both this example and the following examples do not limit the number of sensors 12.sh mounted on a single carrier 6.i.

A top view of a conventional piezoresistive single-cantilever sensor 12.t used in this embodiment of the invention is shown schematically in FIG. For. The microconsole sensor 12.t consists of a solid rigid body 25 with a rectangular shape and a thin elastic microconsole 13, which can be used both for monitoring the physical parameters and for determining the chemical components and their concentration in the gas 2. The microconsole 13 e is a thickness of from about 0.5 μm to about 10 μm, preferably from 1.5 μm to 6.0 μm, for example 4 μm. At its fixed end are built-in sensor elements piezoresistors 26, which change the value of their resistance depending on the bending of the microconsole 13. Typically, the piezoresistors 26 are connected by conductive paths 27 in a differential bridge circuit, optionally together with other sensor or passive elements 26Also optionally, an additional metal track 28 may be arranged on the surface of the microconsole 13, which is formed together with the conductive tracks 27 or separately from them. The path 28 can be used for various purposes, such as making a galvanic connection with a selected local area of the microconsole 13.

The power supply and terminals of the bridge, as well as the metal track 28, are galvanically connected by additional wires (not shown in the figure) to the contact pads 20.

A top view of another embodiment of this embodiment of the invention, when a microconsole sensor with a solid rectangular body 25 and four microconsoles 13.1 - 13.N (N = 4) with varying dimensions is used, is shown in FIG. 36. One piezoresistor 26 is built into each microconsole, and the piezoresistors are connected in a bridge circuit by conductive paths 27. Optionally, a metal path 28 may be additionally formed on selected microconsoles.

Where necessary, the number of microconsoles may be greater than four, and the measuring bridges may be more than one, and the method of connection may be chosen to be the same or different. Accordingly, the carrier 6.i is provided with contact pads 20, the number of which provides independent connection of said differential bridges and metal tracks.

In the present invention, the total number of microconsoles 13.p and 13.k in the instrument 1 is greater than or equal to the number of gas parameters 2 that are desired to be determined simultaneously.

Side view of a longitudinal section of the sensors of FIG. For and FIG. 36, is shown in FIG.

• · · · * 1 **: 9. ·. ::. · ’· A • · * · ♦ · · • · · · · · · ····· ♦

Vol. When the sensor 12.m has the construction shown in this way, the microconsole 13 can be exposed to the flow 2 of the measured gas, without orientation restrictions, which is shown schematically in FIG. Zv with the two opposite arrows. Additionally, the location of the microconsole 13 relative to the opening 7.Ϊ, incl. its slope can be varied so as to optimize its selectivity and / or sensitivity.

In the most preferred embodiment of the invention, the body 25 of the microconsole sensor 12.t is in the shape of a rectangular frame, as shown in FIG. 4a, top view.

In one embodiment of this embodiment, the microconsole sensor 12.t consists of a rigid body 25 with a rectangular hole 29 formed in its upper surface, in which a thin elastic microconsole 13 is located. The dimensions and thickness are similar to the previous embodiment, as identical In this way, sensor elements of piezoresistors 26 are built-in. Optionally, an additional metal track 28 can be arranged on the microconsole 13.

A top view of another embodiment of the instrument 1 of Example 1 is shown in FIG. 46. The microconsole sensor 12.t with body 25 comprises two microconsoles 13.1 and 13.2 with different lengths, located in an opening 29, in each microconsole 13 are built two separate piezoresistors 26, and the piezoresistors are connected in a differential bridge with conductive paths 27, as a common additional metal path 28 is provided. Optionally, the number of microconsoles and the number of piezoresistors in each of them can be varied, as well as the manner of connecting the piezoresistors 26 in measuring differential bridges.

Each of the thus described microconsoles 13 in the sensors 12.t, can be used to obtain a sensor signal that has increased selectivity to a physical parameter of the gas 2, such as: temperature, flow, presence of dust particles, viscosity, thermal conductivity, and others. similar to or to a component characterizing the chemical composition of the gas.

To achieve selectivity of the sensor signals from different parameters of the gas 2 in the present invention, for each microconsole 13 can be varied: the shape of the body 25 where it is located, the shape, number and / or dimensions of the microconsole itself, the location of the built-in piezoresistors 26 and / or their way of connecting in a bridge with the conducting paths 27, the morphology and / or the properties of additive and / or subtractive local structures on each of the two surfaces of the microconsole, the location of the microconsole 13 in the opening 29, and to be used and other approaches to ensure selectivity and sensitivity of an individual microconsole 13, in response to a specific flow parameter 2.

Accordingly, the carrier 6.i is provided with contact pads 20, the number of which provides independent measurement of a sufficient number of sensor signals.

A longitudinal side view of a similar sensor is shown in FIG. 4c. In addition, on the rear surface of the body 25 of the microconsole sensor 12.t is located an additional hole 30, which in depth of the body is connected to the hole 29. Thus, unexpectedly and unplanned it turned out that when the body 25 is in the form of a frame, in the sensor 12.m, an additional microfluidic element 30 may be formed, which is usually of trapezoidal or rectangular cross-section, as shown in FIG. 5. When the element 30 is formed of single crystal silicon with orientation (100), the shape, as is known to those skilled in the art, is usually a truncated four-walled pyramid.

• · · ♦ · «·· *« ·· * · ··

110. - ..........

• · · · · ·· ···· ·· · · ·····

By varying the dimensions of the microfluidic element 30, the dimensions of the opening 9.j of the remote insert 8.j and the opening 7.i of the active carrier 6.Ϊ can be matched with the opening 29 in which the microconsoles 13 are located. This variant of an embodiment of the invention it is preferable when it is desired to determine one or more parameters of the gas depending on the flow 2, when it is necessary to realize a specific distribution of said flow, or when this leads to an improved specific sensitivity and / or or selectivity. A microfluidic element 30, in addition to sizing, can be used to further change the velocity and pressure of the gas in the area of a selected microconsole 13. When desired, the location of a selected microconsole 13 in the opening 29 can be varied so that to optimize said selectivity and / or sensitivity, especially when flow 2 is inhomogeneous.

Preferably, by changing the orientation of the active carrier 6.Ϊ, the respective microconsole sensor 12.t is oriented relative to the flow of the measured gas 2, as shown by the arrow in FIG. 4c - from the bottom to the top of the sensor.

Due to the anisotropic properties of the single-crystal silicon material, microconsoles 13 with integrated piezoresistors 26 can be oriented only in the direction shown in FIG. For, FIG. 36, FIG. 4a and FIG. 46 or perpendicular to it.

The sensors 12 can operate in static mode, as elastic microconsoles 13 are bent or twisted as a result of the interaction with the gas flow 2, whereby a number of aperiodic sensor signals with varying amplitude are generated. These sensor signals can be used to further amplify or compensate for the response of selected sensors 12.sh in the instrument 1, thereby improving their selectivity and sensitivity.

Also, the sensors 12 can be activated to operate in dynamic mode when the elastic microconsoles 13 oscillate in bending or twisting modes, whereby multiple periodic sensor signals are generated.

Regardless of the purpose, when a plurality of microconsoles 13 whose piezoresistors 26 are connected in a differential bridge are bent in phase, the bridge remains balanced and the sensor signal level is equal to "zero", usually equal to the background noise level. At the resonance of a microconsole 13, its amplitude and phase of oscillation change and therefore in dynamic mode, only at the resonance of the microconsole, the sensor signal from the bridge is different from "zero".

To determine the chemical composition of the gas 2 with the combined device 1 of the invention, the infrared actuating element - IR beam 17 is passed through the chamber 11 through the two optically transparent elements: inlet 16 and outlet 16 '. The bundle 17 may be composed of one or more monochromatic sub-bundles 17.k. Each sub-beam 17.k has a wavelength Xk, which corresponds to the absorption line of a certain component Ak from the gas 2, such as: nitrogen, water vapor, oxygen, carbon dioxide, various organic or inorganic components and the like.

Upon passing a monochromatic IR sub-beam 17.k with a wavelength Xk through the volume 11 between the optical elements 16 and 16 ', part of the sub-beam 17.k is absorbed when the gas contains a component Ak, which has a line of absorption identical to the wavelength Hk. This leads to a local increase in temperature and pressure, and when the intensity of the sub-beam 17.k is modulated with frequency ^, an acoustic oscillation with the same frequency is generated in the gas. When said frequency fi corresponds to the resonant frequency / ^ of a selected microconsole 13 .k, its oscillation amplitude is amplified ί 11 · * · · * * ··· * · * ··· «* ♦ · ·, · · ·· ·· ·· ·· ····· and a sensor signal is generated. Thus, the amplified amplitude of the signal from one microconsole 13 .k is an indication of the presence in the volume of the chamber 11 of component Ak, whose absorption line is equal to the wavelength Xk of sub-beam 17.k with modulated intensity is frequency fi = f _C k. In all cases, the oscillation amplitude of a microconsole is a measure of the concentration of the substance Ak that selectively absorbs light is the wavelength Xk.

Thus, it has unexpectedly turned out that it is preferable for the surfaces of said microconsoles 13.k to be passivated so as not to interact with the components of the Ac gas during measurement. In the described embodiment of the invention, the function of the instrument 1 for determining the chemical composition and concentration of components can be provided by means including an IR beam 17 and microconsoles 13k, which react to the acoustic waves in the gas 2 without interacting is its individual components. This allows continuous operation of the device 1 without regeneration, which is a decisive practical advantage.

Another advantage of the invention is that the microconsoles 13 are located entirely in the volume of the common chamber 11, where the spatial coherence of the plurality of sensor signals is automatically ensured, and the detachable body 3 acts as a housing protecting the fragile microconsole 13 during operation.

A surprising advantage of the devices of the present invention is the possibility that the selectivity and sensitivity of each microconsole 13 used in the device to a selected parameter can be appropriately selected by selecting and matching different characteristics - its and the elements of the device 1, such as : location of the active carrier 6 in the body 3; number, shape and dimensions of the holes 7 in the carrier 6; shape and size of the hole 9 of the remote insert 8; the shape and dimensions of the body 25 of the sensor 12 and the dimensions of the opening 29; shape and dimensions of the microfluidic element 30; shape, dimensions, orientation and location of the microconsole 13 relative to the measured gas flow; complete or local change of the properties of each of the surfaces of the microconsole, incl. of its morphology; selection of the number, location and method of connection of the built-in piezoresistors 26 and / or the auxiliary resistors 26 'in a differential measuring bridge; selecting the mode of gas passage through the local environment of the microconsole 13; selection of the operating mode (static or dynamic) and mode of oscillation in dynamic mode of the microconsole 13; presence of additional functional elements: heaters, contact paths, electrodes for measuring currents, etc. similar.

The availability of various approaches for varying the selectivity and sensitivity of a microconsole sensor 12 by modifying its design and location in the device 1, allows with such a device 1 to obtain a sufficient number of independent sensor signals needed to accurately determine physical parameters and chemical composition. and gas concentrations.

Example 2-Apparatus with Infrared and Electrothermal Actuation of Microconsoles In another preferred embodiment of this invention, shown in FIG. 6, the device 1 for determining the parameters and monitoring the flow of gas 2, contains four active carriers 6.i, each with mounted sensor 12.1 -12.4, as well as optical elements 16 and 16 'for passing the IR beam 17 through the measuring chamber 11 .

Unlike the instrument 1 described in Example 1, the bundle 17 is composed of a plurality • 12 · ·. ·. ·· · · · '· «· · · ·, · · • •• e» »··» ··· ♦ monochromatic sub-beams 17.k, each with separate intensity modulation, and the beam 17 is formed using fiber optics and a mixer of the individual subsets 17.k. This embodiment makes it possible to determine simultaneously with the instrument 1 the components Ak of which gas 2 is composed. For this purpose, the number of monochromatic sub-bundles used must be not less than the number of components of gas 2, and for each of which a microconsole 13.k is provided. Thus, the number of microconsoles 13.k, which are simultaneously in resonance, is an indication of the number of components Ak of the gas, and the corresponding amplitudes - for their concentration. Preferably, the microconsoles 13.k in one sensor device 1 are selected with different resonant frequencies f _C k.

As in the embodiment described in Example 1, the means for determining the physical parameters of the gas 2 include at least as many microconsoles 13p as the number of simultaneously determined parameters. On the microconsoles 13.p are located the additional metal tracks 28, which in the present example perform the function of an actuating element 14 for bending or twisting of said microconsoles. The metal tracks 28 shown in detail in FIG. For, FIG. 36, FIG. 4a and FIG. 46, in this case are shaped so as to be heated by the flow of electric current. The thickness of the heated metal tracks 28 is between 0.1 and 5 μm, preferably from 0.2 to 1 μm, depending on their composition. Preferably, the material of these elements is selected with the highest possible coefficient of linear thermal expansion, such as: aluminum (AG), copper (Cu), gold (Ai) and others. In this example, the metal is 0.8 μm thick aluminum. Typically, the width of the elements is between 4 μm and 30 μm, preferably between bkm and 15 μm, in this case 12 μm. Preferably, the heated metal tracks 28 are formed simultaneously with some of the other electrical connection elements 27. Similarly, the metal tracks 28 in Example 1 can also be used as heaters.

When an electric current flows through a heated metal track 28, the respective thin microconsole 13.p bends due to the heating and the difference of its coefficient of linear temperature expansion and the coefficient of the material of the metal track 28.

When a periodic current with frequency f _e flows through the respective microconsoles 13.p, in which a heating metal path 28 is integrated, they bend periodically with said frequency. Accordingly, when a periodic current flows with a changing frequency, the microconsoles bend with a frequency equal to the instantaneous value of the frequency f _e of the flowing electric current or twice as high. When the current also contains a non-periodic component, the double-frequency actuation can be eliminated. This phenomenon is known to those skilled in the art and allows the microconsoles 13.p to be bent or twisted in a desired manner. Such activation of microconsoles is called electrothermal (ET).

It is also known that when the frequency f _e of the pulse current through a heated metal path 28 is close to the resonant frequency f _cp of a microconsole 13.p, its bending amplitude increases is a value that corresponds to the Q-factor j. Therefore, the increased bending amplitude of a microconsole 13.p, expressed, for example, in a disturbed voltage balance of a measuring bridge, is an indication that the frequency of the actuating pulse current f _e and the resonant frequency f _cp are with close values. It is also known to those skilled in the art that the bending amplitude is maximum when the values of the frequencies f _e and f _cp are equal. Therefore, the frequency f _e at which the maximum bending amplitude of a microconsole 13.p,: 1h. :: · ..:. : * · .: • · · · ♦ · · • · · · · · · · · · · expressed e.g. in the maximum signal of a balanced at rest bridge, corresponds to its resonant frequency f _cp .

Upon interaction with the gas 2 entering through the openings 7.i and 9.j and the microfluidic element 30 to the microconsoles 13.p, their bending and twisting change. Since the magnitude of the changes corresponds to the parameters of gas 2 in a specific way, these parameters can be determined.

In another embodiment of this invention, when the actuating pulse current f _e is the sum of two or more currents with different frequencies fei, fe2, etc., microconsoles 13.p with different resonances can be oscillated simultaneously with increased amplitude. frequencies. Accordingly, the changes of the above-mentioned harmonic oscillation parameters of more than one of the microconsoles 13.p, when they interact with the gas 2, can be determined simultaneously.

In addition, when the electric current has a non-periodic (incl., Constant) component, this component can be used to fine-tune the parameters of the sensor signal from a selected microconsole, such as. setting the idle voltage or achieving analog signal compensation when determining two or more different gas parameters 2, with two or more microconsoles 13.p. Therefore, preferably, in the present invention, an additional metal track (microheater) 28 is arranged on each microconsole 13.

Thus, in the device 1 shown in FIG. 6, the means for determining the physical parameters contain only microconsoles 13.p with a heated metal path 28, which are suitable for both static and dynamic simultaneous determination of multiple parameters of the gas 2, the maximum number of which is equal to the number of said microconsoles. Examples of such parameters are: flow of substances or heat, temperature, pressure, viscosity, thermal conductivity, humidity, presence and concentration of selected chemicals, etc. similar.

In this embodiment, the surfaces of all microconsoles can be modified so that the microconsoles 13.k and 13.p do not adsorb gas components 2.

In another preferred embodiment of the same embodiment, the IR activating element - the beam 17 is extended to the body 3, as the input / output elements 4 and 4 'are also used as an optical input / output 16 and 16. In this embodiment, the individual microconsoles 13.k are located outside the optical path of the beam 17. For this purpose, suitable shapes and sizes of the openings 7.Ϊ and 9.j are selected, as is customary for the field.

In the most preferred embodiment of this embodiment, the beam 17 is formed by a plurality of sub-beams of narrow-spectrum lasers 17.k, such as solid-state or gas lasers, each with a fixed wavelength λκ and a separate modulator, such as, using fiber optics, the beam is formed 17.

Thus, it was unexpectedly found that the one shown in FIG. 6 is an apparatus 1 comprising means for determining the chemical composition of a gas 2, which includes an optical input 16 and an output 16 for passing an IR light beam 17, which is an IR actuating element and is composed of a discrete plurality of monochromatic sub-beams 17.k, each with a different wavelength λκ · and modulated intensity, is suitable for the simultaneous detection of multiple gas components Ak, when the number of microconsoles 13 .k corresponds to the number of said monochromatic laser sub-beams, the amplitudes of which are modulated with frequencies fk , equal to the resonant frequencies f _c k of the respective microconsoles 13 .k.

This embodiment of the invention does not limit the orientation and number of microconsoles * · ♦ »rf · ♦ • ·« · M: i4. ’. ::. . '..j • · · ♦ · · ♦ • · · · · · · · · · · ·

13.k in the XY plane.

In another particularly preferred embodiment of the present invention, the means for determining the chemical composition of gas 2 include at least two optically transparent elements - inlet 16 and outlet 16 ', an IR actuating element - an IR light beam 17, as illustrated in the example of FIG. 7, and a single microconsole 13.k of the plurality of microconsoles 13 located on a single microsensor 12.1. When the wavelength λk of the beam 17, which has a modulated intensity with frequency fi, changes, upon reaching the absorption line of one component Aj of the gas, it absorbs light and causes acoustic oscillations. The oscillations can be registered with said single microconsole 13.k, provided that the beam 17 is modulated with a frequency fi equal to or close to, the resonant frequency fck of said single microconsole.

When the wavelength λί of the beam changes with time and the amplitude of the beam is modulated with a frequency equal to the resonant frequency fck of the selected microconsole 13.k, the amplified amplitude of the sensor signal from the microconsole 13.k is an indication of the presence of component A with an absorption line corresponding to the instantaneous value of the wavelength λί. Thus, this variant of the instrument 1 is suitable for sequential detection of many components At, Aj + i, ... of the gas 2.

In the most preferred embodiment of this invention, shown in FIG. 7, the beam 17 is monochromatic at any time t, its wavelength λ (ί) changes with time according to a known law λ = λ (ί), and the means for determining the chemical composition contain a single microconsole 13.k, wherein the intensity of the beam 17 is modulated with a frequency fi equal to the resonant frequency fin of said single microconsole 13.k. Thus, when the wavelength λ (ί) changes, multiple components Ai of gas 2 can be sequentially registered.

In another embodiment of this invention, the monochromatic beam 17 is composed of a plurality of sub-beams 17.k of narrow-spectrum lasers, such as solid-state or gas lasers, each with a fixed wavelength λί. The bundle is formed e.g. using fiber optics, a switch for selecting one of the lasers and a common intensity modulator of said lasers, with a frequency fi equal to the resonant frequency fin of the single microconsole 13.k, designed to determine the chemical composition of the gas 2.

In yet another embodiment of the invention, the monochromatic beam 17 is obtained from a broad spectrum source, e.g. semiconductor laser, and a monochromator as known to those skilled in the art.

In the described embodiment of the invention, while the means for determining the chemical composition of the gas 2 include only a single microconsole 13.k, the means for determining the physical parameters of the gas 2 may include a plurality of microconsoles 13.p with microheaters 28, placed on the same microsensor 12.1. Such an instrument is suitable for sequentially detecting multiple components Ak of gases, with a high degree of temporal and spatial coherence of simultaneously measured sensor signals to determine the physical parameters needed to accurately determine each of the gas parameters.

Example 3 -Device with infrared and piezoacoustic actuation of microconsoles

In another embodiment of the invention shown in FIG. 8a, micro .: · * ·. ·. ”.Ι: 15. ' . it's. ’• · · ♦ · * · • · · · · · · · · · · · console sensors 12.m are two: 12.1. and 12.2, and are mounted on two brackets 6.1 and 6.3, and the remote inserts are four 8.1 - 8.4.

In addition, the microconsoles of the sensor 12.1 are part of the means for monitoring the chemical composition and for determining normal physical parameters of gas 2, such as temperature, pressure and the like, and the microconsoles of the sensor 12.2 are part of the means for determining and monitoring specific physical gas parameters 2, eg viscosity, heat capacity and the like. A piezoacoustic (PA) resonator 31 is mounted on the support 6.2, which performs the function of an actuating element 14 for bending or twisting the microconsoles 13.p to determine the physical parameters, and a hole 32 for forming said resonator 31 is formed on the remote insert 8.3.

All microconsoles 13 of the sensor 12.1, not indicated in the figure, with the exception of one selected microconsole 13.k, are designed to determine a common set of physical parameters of the gas 2, while said 13.k, like the previous example, is designed to determine chemical components and their concentrations in the gas 2.

The remaining microconsoles 13.p (p 7 k) of sensors 12.1 and 12.2 can be oscillated by means of acoustic oscillations of the gas 2 in the chamber 11. The oscillations are created by an additional element 31, e.g. PA resonator 31 or other instrument with a similar function. For this purpose, a PA or other resonator 31 is mounted on the modified active carrier 6.2, as shown in FIG. 86. The resonator 31 is partially mounted above the hole 7 and when a suitable voltage is applied, it generates acoustic waves in the volume of the chamber 11. For this purpose, an additional hole 32 is formed on the insert 8.3, which is connected to the hole 9 and whose overall dimensions are such that the PA resonator 31 is housed without contact with the walls of the hole 32. Since the hole 32 is connected to the hole 9.3 of the insert 8.3, the resonator 31 is housed entirely in the common chamber 11 with a small volume, which increases the efficiency of acoustic vibration of the gas.

Microconsoles 13.p respond to acoustic waves by bending or twisting, and when the waves have a frequency f _a that is close to the resonant frequency f _cp of a microconsole 13.p, the corresponding activation amplitude is increased. However, there are no additional requirements for the spatial orientation of said microconsoles to be imposed by the use of a PA resonator 31. Thus, by changing the frequency f _a of the generated acoustic waves, changes in the characteristics of the harmonic oscillation of each of the elastic microconsoles 13.p, such as: resonant frequency, amplitude and phase of oscillation, quality factor, which changes are a result of the interaction of the microconsole with gas 2. Accordingly, changes in the mentioned characteristics can be determined by the interaction of microconsoles 13.p is the components of gas 2, which allows their use for its accurate characterization.

It will be apparent to those skilled in the art that when a PA resonator 31 is appropriately selected, it can provide acoustic oscillations in a desired frequency range. Preferably, a disk resonator with a minimum size and a hole in the middle is mounted symmetrically to the hole 9.j. Including, the resonant frequency of the microconsole 13.k designed to determine the chemical components and the frequency range of the resonator 31 can be selected so that the resonator 31 optionally activates or does not activate the microconsole 13.k with resonant amplitude. It is also clear that when more than one resonator 31 is used, by simultaneously acting on the gas 2 in the chamber 11, the frequency scanning can be accelerated and / or increased: ⁴ : * ····: 16: '·: ::' Ч · ··· 4 »······· the efficiency of acoustic activation.

The location of one or more modified active carriers 6.i with PA resonators 31 in the device 1 can be selected so as to further ensure maximum efficiency of their operation.

Thus shown in FIG. 8a, a device 1 comprising at least one modified carrier 6.i with a PA resonator 31 or other acoustic oscillation source mounted, and one or more remote 8.j inserts with additional openings 32 to accommodate the source 31, is suitable for activating multiple, randomly oriented microconsoles 13.p. The small volume of the measuring chamber 11 provides increased efficiency of the acoustic energy transfer from the source 31 to the microconsoles 13.p, as well as the temporal and spatial coherence of the sensor signals.

Example 4 - Device with infrared and electromagnetic actuation of multiple microconsoles

In another preferred embodiment of the gas monitoring device 1 of the invention, the means for determining the physical parameters include a selected plurality of microconsoles 13.p, on which are formed metal tracks 28 for their activation in an external magnetic field B. In this example the metal tracks, together with the source of the magnetic field B, perform the function of the actuating element 14 for activating the microconsoles 13.p, which is independent of the composition of the gas 2. Such microconsoles are shown in FIG. 9a and FIG. 96. The magnetic field B is created by e.g. permanent magnet not shown in the figures. In order to activate the microconsoles, the metal paths 28 are shaped so that a current flows in them in the range from 0.01 mA to 10 mA, preferably from 0.05 mA to 5 mA, without substantially heating the microconsoles. It is customary to call such activation of microconsoles electromagnetic (EM).

When the current I (f _e ) is aperiodic, incl. constant, the bending of the microconsole is in phase with the current and aperiodically, incl., constant. When the current I (f _e ) is periodic with frequency f _e and a microconsole 13.p is located in a constant magnetic field (B = const), as shown in FIG. 9a or FIG. 96, it is acted upon by periodic electromagnetic forces F (f _e ) with frequency f _e , the direction and strength of which depend on the direction of the magnetic field B and the magnitude of the current I (f _e ).

In the example shown in FIG. 9a, when the magnetic field lines are oriented along the Micro-IZ.r is generated Lorentz force F _c (f _e), perpendicular to the surface of Micro-which acts only on the portion in which the direction of the metal track 28 is different from the direction of magnetic field lines. Accordingly, when changing the pulse current frequency l (f _e ), the microconsole can be bent under the action of said force F _c (f _e ), the bending being of increased amplitude when the current frequency I (f _e ) coincides with resonant frequency f _C k of bending.

Alternatively, in the example shown in FIG. 96, when the magnetic field lines are oriented transversely to the microconsole 13.p, a pair of Lorentz forces F _c (fe) is generated, perpendicular to its surface, which act on the sections in which the metal track 28 is oriented in a direction different from the direction of the magnetic field B. Such a pair of forces twists the microconsole 13.p around its longitudinal axis. Accordingly, when the pulse current frequency I (f _e ) changes,

the microconsole 13.p is twisted periodically under the action of said pair of forces Fctfe), and when the frequency f _e of the current coincides with the resonant frequency fck of torsion, the torsion is of increased amplitude.

Thus, it was unexpectedly found that the activation efficiency of a microconsole 13.p can be modulated by choosing its orientation relative to the magnetic field B. When aiming to use bending modes, the most effective is a field that is oriented longitudinally. on the selected microconsole. When the goal is to use torsion modes - the most effective is a field that is oriented perpendicularly (transversely) to the microconsole 13.p.

Accordingly, the use of an external magnetic field B allows the activation of microconsoles 13.p in different oscillation modes when the pulse current frequency I (fe) is close to the corresponding resonant frequencies fck of bending or twisting.

Another important advantage of sensors 12 with EM activation is that the same oscillation amplitude can be achieved with an electric current I (f _e ), whose value at EM activation, depending on the value of the magnetic field, is from 10 to more than 30 times less than the current required for ET activation, which leads to a reduction of 100 and more times unwanted heating of the microconsoles 13.p and the sensors 12.

One embodiment of device 1 is EM actuation, shown in FIG. 10a. There are two active carriers, each of which is equipped with a sensor 12, m (m = 1, 2). The permanent magnetic field B is generated by a permanent magnet 33 located in an opening 34 formed in the spacer insert 8.3. A top view of such a remote insert 8.j is shown in FIG. 106. In this case, the width w of the hole 34 and the thickness d of the insert are chosen to correspond to the dimensions of the permanent magnet 33. Preferably, w ~ d and the permanent magnet is chosen to be cylindrical in shape, the diameter of which is approximately equal to and smaller than said sizes w and d.

The openings 34 may be more than one and be oriented in different directions, relative to the orientation of the microconsoles 13.p. When one hole 34 is oriented relative to two mutually perpendicular microconsoles at an angle a other than 0 ° or 90 ° (where 0 ° <a <90 °), the corresponding magnet 33 can be used to simultaneously activate said microconsoles, at the expense of reduced actuation force Fk (f _e ). Thus, it was unexpectedly found that for every two orthogonal microconsoles 13.p, eg, oriented in the X and Y directions, even when it is desired to oscillate them with the same modes or bend them in static mode under the same current I (fe ), an angle a of the magnet 33 relative to the X direction can be determined, as shown schematically in FIG. 1 Ov, so that the respective sensor signals are of the selected ratio, incl., Identical or different. This allows, for example, analog compensation of the amplitudes of the sensor signals from two or more microconsoles 13.p when they selectively measure different gas parameters 2. Alternatively and where possible, such compensation can be provided by changing the magnitudes of the currents. I (f _e ) through metal tracks 28.

Thus, the one shown in FIG. 10a, a device 1 comprising a remote insert 8.j with an opening 34 for accommodating a permanent magnet 33 is suitable both for activating a plurality of differently oriented microconsoles 13.p with metal tracks 28 and for achieving desired ratios of sensor signals therefrom. , with repeatedly (> 100 times) reduced heating of the microconsoles compared to the case when ET actuation was used. The location in the device 1 and the orientation of a modified remote insert 8.j with permanent magnets 33 mounted therein can be selected so as to provide the desired ratio of sensor signals from pre-selected EM-activated microconsoles.

_{When a direct current I e} = const flows through the metal track 28, the corresponding microconsole 13.p can be used for static measurement. _{When a periodic current 1 e} of frequency f _e flows through a metal path 28, the corresponding microconsole 13.p can be used to dynamically measure a gas parameter 2. In doing so, the actuation energy of the microconsoles 13.p can be reduced. more than 100 times compared to ET activation with similar amplitude.

All microconsoles 13 except one selected, e.g. 13.1 of the sensor 12.1, are designed to determine the usual parameters of the gas 2. The microconsole 13.1 can be activated using an IR actuating element - monochromatic IR beam 17, which has a modulated intensity, with a frequency ft equal to or close to its resonant frequency f _c i. Analogously to Examples 2 and 3, when the volume of the chamber 11 contains a component Ak with an absorption line corresponding to the length Xk of the beam 17, the amplified oscillation amplitude of the microconsole 13.1 is an indication of the presence of a component Akv gas 2. Thus with one microconsole 13.1, sequentially, substance-substance, the concentrations of the specific chemical components of gas 2 can be determined without it interacting directly with them. Therefore, such a sensor is suitable for continuous operation without regeneration.

Example 5 - Device with three actuating elements

Another embodiment of the present invention is shown in FIG. 11, in which two different ways of activating the microconsoles 13 are used, intended for determining the physical parameters of the gas 2. The device 1 contains four active carriers 6.1 - 6.4 and six remote inserts 8.1 - 8.6. The sensors 12.1., 12. 2 and 12.3 are mounted on the brackets 6.1., 6.3 and 6.4 respectively. A PA resonator 31 is mounted on the support 6.2 and is placed in an opening 32 formed in the insert 8.3. A permanent magnet 33 is mounted in the opening 34 of the insert 8.5.

When a constant electric current flows through the metal tracks 28 of the microconsoles 13, which are desired to be EM activated, the current value can be selected so as to achieve the desired static values of the sensor signals of the individual selected microconsoles. Optionally, this setting is performed in the presence or absence of gas flow 2.

At the same time, in the volume of the chamber lie with the help of the acoustic resonator 31 acoustic waves with frequency ^ are generated, and when alternating current with frequency fe passes through the metal tracks 28, the microconsoles 13 are additionally shaken with this frequency.

When said frequencies f _a wfe have close or significantly different values, additional external elements for heterodyne mixing and / or phase detection of said different frequencies may be used, as is known to those skilled in the art. Thus, increased accuracy of signal analysis can be achieved, e.g. to accurately determine the amplitude, phase and oscillation frequency of a selected microconsole 13. Since the instrument 1 contains two independent actuating elements, between which a beat can be generated or the phase difference between the acoustic wave and the EM oscillation of the microconsole 13 can be determined, the characteristics of the oscillation of each microconsole 13 can be determined by

further increased accuracy.

It will be apparent to those skilled in the art that said heterodyne mixing and / or phase detection is an actuating element 14 may also be applied to the microconsoles 13k, which are activated by an infrared beam 17 in Examples 1 to 4, without limitation.

The 12.t sensors are multi-console, as each sensor provides signals for determining different groups of quantities. For example, optionally, the microconsoles of the sensor 12.1 and the PA resonator 31 can be selected so that the sensor signals from this sensor alone are sufficient to determine a common set of physical parameters of the gas 2 is the desired accuracy, regardless of the presence of magnetic field. The microconsoles of the sensors 12.3 and the orientation of the permanent magnet 33 can be selected so that their static and / or dynamic signals serve to accurately determine another set of specific physical parameters of the gas. Finally, one part of the microconsoles 13.k of the sensor 12.2 are designed to determine the chemical composition of the gas and the approximate concentration of its components by activation is an infrared beam 17. The other microconsoles 13.p of the sensor 12.2. are designed to determine specific physical parameters, such as: viscosity, thermal conductivity, etc. similar, necessary to further specify said concentrations of gas components 2.

It will be apparent to those skilled in the art that elements of each of said embodiments of the invention may be freely combined in a single sensor device 1. Preferably, each of the individual sensors 12m comprises a plurality of microconsoles 13, the number and constructions to provide the determination of a specific set of physical parameters and / or gas composition common to an industry or life. This allows both quick and easy assembly of the instrument 1 for a specific application, as well as temporal and spatial coherence of a sufficient number of sensor signals necessary for accurate determination of the gas parameters. A key advantage is the use of microconsole sensors that do not require regeneration and can operate continuously.

It is clear to those skilled in the art that to determine the gas parameters, each of the described options for activating microconsoles - ET, PA and EM, can be used together with the IR beam or alone in arbitrary combinations.

Claims (12)

Gas monitoring device consisting of a body provided with inlet and outlet elements for providing gas flow, in which gas monitoring sensors are placed in the body, characterized in that the device (1) is combined for simultaneous determination of the physical parameters and of the chemical components of which the gas is composed and their concentration, at which the sensors (12) are provided with microconsoles (13) with selected selectivity and sensitivity, the instrument (1) containing means for said simultaneous determination of the physical parameters and chemical components and their concentration in the gas, each of which includes selected microconsoles (13) and an actuating element (14, 17) to them, located in a common measuring chamber (11) formed inside the body (3) , and optionally microfluidic elements (30) are formed in the sensors (12) to modify the gas flow. Apparatus according to claim 1, characterized in that the total number of microconsoles (13) is equal to or greater than the number of simultaneously determined parameters and components, and the microconsoles (13) have built-in piezoresistors (26) connected in one or more identical or different differential measuring bridges. Device according to claims 1 and 2, characterized in that the number of sensors (12) included in the device (1) corresponds to the number of groups of parameters, the chemical components of the gas and their concentrations to be determined. Device according to claims 1 to 3, characterized in that the body (3) of the device (1) is detachable. Device according to claims 1 to 4, characterized in that the actuating elements (14, 17) for activating the microconsoles (13) are at least two, at least one actuating element (14) is intended for determining the physical parameters of gas and is selected from an electrothermal, piezoacoustic, electromagnetic element, and the other actuating element is an infrared beam (17) for determining the chemical components and their concentration in the gas. Apparatus according to claim 5, characterized in that the means for determining the chemical components and their concentration in the gas consist of one or more microconsoles (13.k) and an actuating element infrared beam (17) consisting of one or more more monochromatic sub-beams (17.k) with wavelengths Hk corresponding to the absorption lines of each of the gas components Ak, the intensity of each sub-beam (17.k) being modulated with a frequency equal to the resonant frequency of one of the mentioned microconsoles (13.k), intended for simultaneous determination of the respective components Ac. Device according to claim 6, characterized in that the monochromatic beams (17.k) are switched one by one in the actuating element infrared beam (17), and the microconsole 13.k is only one. Device according to any one of the preceding claims, characterized in that in the means for determining the physical parameters of the gas, the actuating element (14) for activating the microconsoles (13) is electrothermal and is formed as heating metal tracks (28) on the microconsoles. (13). Apparatus according to claims 1 to 7, characterized in that in the means for determining the physical parameters of the gas, the actuating element (14) is a piezoacoustic resonator (31). Apparatus according to claims 1 to 7, characterized in that the means for determining the physical parameters of the gas comprise as an actuating element (14) metal tracks (28) on the microconsoles (13) and mounted thereon in the body (3). at least one permanent magnet (33). Device according to claim 10, characterized in that it comprises at least one pair of microconsoles (13) arranged mutually orthogonally, and the permanent magnet (33) attached to them is arranged at an angle a to one of said microconsoles (13), which all are provided with metal tracks (28) to provide a predetermined ratio of sensor signals from the two selected orthogonal microconsoles (13). Apparatus according to any one of the preceding claims, characterized in that the means for simultaneously determining the physical parameters of the gas comprise microconsoles (13) and at least two actuating elements (14) selected from: an electrothermal actuator, heated metal tracks (28) ), a piezoacoustic resonator (31) and metal tracks (28) together with a permanent magnet (33).