JP2009536335A - 表面測定プローブ - Google Patents

表面測定プローブ Download PDF

Info

Publication number
JP2009536335A
JP2009536335A JP2009508473A JP2009508473A JP2009536335A JP 2009536335 A JP2009536335 A JP 2009536335A JP 2009508473 A JP2009508473 A JP 2009508473A JP 2009508473 A JP2009508473 A JP 2009508473A JP 2009536335 A JP2009536335 A JP 2009536335A
Authority
JP
Japan
Prior art keywords
stylus
probe
parameter
vibration
vibration generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2009508473A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009536335A5 (https=
Inventor
ジョン ウェストン ニコラス
ファーガス ロバートソン ジェイムズ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renishaw PLC
Original Assignee
Renishaw PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renishaw PLC filed Critical Renishaw PLC
Publication of JP2009536335A publication Critical patent/JP2009536335A/ja
Publication of JP2009536335A5 publication Critical patent/JP2009536335A5/ja
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
    • G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
    • G01B7/012—Contact-making feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045—Correction of measurements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
    • G01B5/0014—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to temperature

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2009508473A 2006-05-08 2007-05-08 表面測定プローブ Withdrawn JP2009536335A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0608999.9A GB0608999D0 (en) 2006-05-08 2006-05-08 Surface measurement probe
PCT/GB2007/001667 WO2007129075A2 (en) 2006-05-08 2007-05-08 Surface measurement probe

Publications (2)

Publication Number Publication Date
JP2009536335A true JP2009536335A (ja) 2009-10-08
JP2009536335A5 JP2009536335A5 (https=) 2010-06-24

Family

ID=36604074

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009508473A Withdrawn JP2009536335A (ja) 2006-05-08 2007-05-08 表面測定プローブ

Country Status (6)

Country Link
US (1) US20090320553A1 (https=)
EP (1) EP2027436A2 (https=)
JP (1) JP2009536335A (https=)
CN (1) CN101438130A (https=)
GB (1) GB0608999D0 (https=)
WO (1) WO2007129075A2 (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019519776A (ja) * 2016-06-10 2019-07-11 オネラ（オフィス ナシオナル デチュドゥ エ ドゥ ルシェルシュ アエロスパシアル） 正弦波信号の振幅、および位相遅延を提供するためのシステム、および方法
JP2020201101A (ja) * 2019-06-07 2020-12-17 株式会社ミツトヨ 測定プローブの不具合判定ユニット及びその不具合判定方法
JP2021183926A (ja) * 2020-05-21 2021-12-02 株式会社ミツトヨ 測定器

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008132483A1 (en) 2007-04-30 2008-11-06 Renishaw Plc Analogue probe with temperature control and method of operation
EP3128287A1 (en) 2015-08-06 2017-02-08 Renishaw plc Method of measurement of a slot
JP6727306B2 (ja) * 2015-12-22 2020-07-22 株式会社ミツトヨ Ｃｍｍタッチプローブのためのセンサ信号オフセット補正システム
EP3460384A1 (en) * 2017-09-26 2019-03-27 Renishaw PLC Measurement probe
CN112179298B (zh) * 2020-08-21 2021-11-26 成都现代万通锚固技术有限公司 一种通过固有频率检测锚杆长度的方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6147502A (ja) * 1984-08-13 1986-03-08 Mitsutoyo Mfg Co Ltd タツチ信号検出回路
US5247751A (en) * 1990-09-29 1993-09-28 Nikon Corporation Touch probe
JPH07167638A (ja) * 1993-12-15 1995-07-04 Nikon Corp タッチプローブ
JP2889196B2 (ja) * 1996-10-08 1999-05-10 株式会社ミツトヨ センサ信号の直流レベル変化検知回路
US6708420B1 (en) * 1999-01-06 2004-03-23 Patrick M. Flanagan Piezoelectric touch probe
US7532202B2 (en) * 2002-05-08 2009-05-12 3M Innovative Properties Company Baselining techniques in force-based touch panel systems
US7041963B2 (en) * 2003-11-26 2006-05-09 Massachusetts Institute Of Technology Height calibration of scanning probe microscope actuators

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019519776A (ja) * 2016-06-10 2019-07-11 オネラ（オフィス ナシオナル デチュドゥ エ ドゥ ルシェルシュ アエロスパシアル） 正弦波信号の振幅、および位相遅延を提供するためのシステム、および方法
US11307230B2 (en) 2016-06-10 2022-04-19 Office National D'etudes Et De Recherches Aérospatiales System and method for providing the amplitude and phase delay of a sinusoidal signal
JP2020201101A (ja) * 2019-06-07 2020-12-17 株式会社ミツトヨ 測定プローブの不具合判定ユニット及びその不具合判定方法
JP2021183926A (ja) * 2020-05-21 2021-12-02 株式会社ミツトヨ 測定器
US12148286B2 (en) 2020-05-21 2024-11-19 Mitutoyo Corporation Precision length measuring device

Also Published As

Publication number Publication date
WO2007129075A3 (en) 2008-03-06
EP2027436A2 (en) 2009-02-25
US20090320553A1 (en) 2009-12-31
CN101438130A (zh) 2009-05-20
GB0608999D0 (en) 2006-06-14
WO2007129075A8 (en) 2008-04-17
WO2007129075A2 (en) 2007-11-15

Similar Documents

Publication Publication Date Title
JP2009536335A (ja) 表面測定プローブ
CN101443626B (zh) 接触感测探头
JP2013532581A (ja) 超音波トランスデューサ制御のためのシステムおよび方法
JP6316777B2 (ja) ヒートシンクの放熱性能の異常を検知するモータ駆動装置、および検知方法
US8593230B2 (en) Circuit and method for correcting temperature dependence of frequency for piezoresistive oscillators
JP2012257246A (ja) 恒温制御されたｍｅｍｓ発振器デバイス
JP7145985B2 (ja) アクチュエータ制御装置および方法
JP2018080947A (ja) 物質検出システム及び物質検出方法
JP4084253B2 (ja) 超音波手術装置、超音波駆動装置および超音波駆動装置の制御方法
KR100450537B1 (ko) 부품공급기 및 그 제어방법
CN102811022A (zh) 烘箱控制mems振荡器装置
JP2015132570A (ja) 粘度測定装置及び粘度測定方法
KR20160100088A (ko) 자이로센서의 구동장치 및 그 제어방법
EP0663646B1 (en) Coordinate input device
JP2012225756A (ja) 湿度計測装置
JPH07167638A (ja) タッチプローブ
JP2015190829A (ja) 流動体の降伏値を求める方法、そのプログラム及び装置
WO2024066517A1 (zh) 控制电路、气溶胶生成装置及控制电路的控制方法
JP2000074733A (ja) センサ装置、ピエゾ抵抗型センサ装置、及び振動波検出装置
JPH10332504A (ja) 圧力センサ
KR100719778B1 (ko) 초음파세척기의 과열방지장치 및 그 방법
WO2001079794A1 (en) Electronic sensor with an inertial system for detecting vibrations
JPH0587508A (ja) タツチプローブ
JPH0587509A (ja) タツチプローブ
JP2681603B2 (ja) 超音波発振器の自動追尾方法及び装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100510

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20100510

A761 Written withdrawal of application

Free format text: JAPANESE INTERMEDIATE CODE: A761

Effective date: 20110119