JP2009532699A - 多領域容量性力検出装置および方法 - Google Patents

多領域容量性力検出装置および方法 Download PDF

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Publication number
JP2009532699A
JP2009532699A JP2009504201A JP2009504201A JP2009532699A JP 2009532699 A JP2009532699 A JP 2009532699A JP 2009504201 A JP2009504201 A JP 2009504201A JP 2009504201 A JP2009504201 A JP 2009504201A JP 2009532699 A JP2009532699 A JP 2009532699A
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Prior art keywords
capacitors
sensor
conductive surface
contact area
data
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Pending
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English (en)
Japanese (ja)
Inventor
ハリッシュ、ディビーアシムハ
デイレンバック、ウィリアム
ウォン、キング
シュルツ、ジョン
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ロードスター センサーズ、インク.
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Application filed by ロードスター センサーズ、インク. filed Critical ロードスター センサーズ、インク.
Publication of JP2009532699A publication Critical patent/JP2009532699A/ja
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01GWEIGHING
    • G01G7/00Weighing apparatus wherein the balancing is effected by magnetic, electromagnetic, or electrostatic action, or by means not provided for in the preceding groups
    • G01G7/06Weighing apparatus wherein the balancing is effected by magnetic, electromagnetic, or electrostatic action, or by means not provided for in the preceding groups by electrostatic action
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/04Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring tension in flexible members, e.g. ropes, cables, wires, threads, belts or bands
    • G01L5/10Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring tension in flexible members, e.g. ropes, cables, wires, threads, belts or bands using electrical means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01GWEIGHING
    • G01G23/00Auxiliary devices for weighing apparatus
    • G01G23/18Indicating devices, e.g. for remote indication; Recording devices; Scales, e.g. graduated
    • G01G23/36Indicating the weight by electrical means, e.g. using photoelectric cells
    • G01G23/37Indicating the weight by electrical means, e.g. using photoelectric cells involving digital counting
    • G01G23/3728Indicating the weight by electrical means, e.g. using photoelectric cells involving digital counting with wireless means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01GWEIGHING
    • G01G23/00Auxiliary devices for weighing apparatus
    • G01G23/18Indicating devices, e.g. for remote indication; Recording devices; Scales, e.g. graduated
    • G01G23/36Indicating the weight by electrical means, e.g. using photoelectric cells
    • G01G23/37Indicating the weight by electrical means, e.g. using photoelectric cells involving digital counting
    • G01G23/3728Indicating the weight by electrical means, e.g. using photoelectric cells involving digital counting with wireless means
    • G01G23/3735Indicating the weight by electrical means, e.g. using photoelectric cells involving digital counting with wireless means using a digital network
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/14Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G01L1/146Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors for measuring force distributions, e.g. using force arrays
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0061Force sensors associated with industrial machines or actuators
    • G01L5/0076Force sensors associated with manufacturing machines
JP2009504201A 2006-04-03 2007-03-23 多領域容量性力検出装置および方法 Pending JP2009532699A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/397,507 US7343814B2 (en) 2006-04-03 2006-04-03 Multi-zone capacitive force sensing device and methods
PCT/US2007/007321 WO2007126716A2 (fr) 2006-04-03 2007-03-23 dispositif de détection de force capacitif multizone et son procédé

Publications (1)

Publication Number Publication Date
JP2009532699A true JP2009532699A (ja) 2009-09-10

Family

ID=38556908

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009504201A Pending JP2009532699A (ja) 2006-04-03 2007-03-23 多領域容量性力検出装置および方法

Country Status (7)

Country Link
US (1) US7343814B2 (fr)
EP (1) EP2002199A4 (fr)
JP (1) JP2009532699A (fr)
KR (1) KR20090019779A (fr)
CN (1) CN101416021B (fr)
CA (1) CA2648524A1 (fr)
WO (1) WO2007126716A2 (fr)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7644628B2 (en) * 2005-12-16 2010-01-12 Loadstar Sensors, Inc. Resistive force sensing device and method with an advanced communication interface
US20060267321A1 (en) * 2005-05-27 2006-11-30 Loadstar Sensors, Inc. On-board vehicle seat capacitive force sensing device and method
US20090120198A1 (en) * 2005-09-28 2009-05-14 Dallenbach William D Gap-change sensing through capacitive techniques
WO2007133675A2 (fr) * 2006-05-11 2007-11-22 Loadstar Sensors, Inc. Plate-forme de détection de charge à base de dispositif de mesure capacitive de force
US7743667B2 (en) * 2007-02-12 2010-06-29 Loadstar Sensors, Inc. Capacitive device and method with an enhanced measurement error correction capability
CN101868705A (zh) * 2007-10-16 2010-10-20 西门子公司 偏心负载补偿的负载测量单元
JP5061878B2 (ja) * 2007-12-13 2012-10-31 ヤマハ株式会社 圧力センサおよびデータ入力装置
CN101939627B (zh) * 2007-12-14 2013-02-06 西门子公司 测压仪
US20090158856A1 (en) * 2007-12-23 2009-06-25 Divyasimha Harish Capacitive strain gauge system and method
WO2011022665A1 (fr) * 2009-08-21 2011-02-24 Regents Of The University Of Minnesota Capteur flexibles et systèmes associés permettant d’établir les forces exercées sur un objet tel qu’un instrument chirurgical
CN101957168A (zh) * 2010-09-26 2011-01-26 苏州瀚瑞微电子有限公司 电容检测物体形变量的方法
US20140054096A1 (en) * 2010-10-12 2014-02-27 David Carruthers Apparatus capable of measuring load and load movement
JP5149416B2 (ja) * 2011-04-06 2013-02-20 ファナック株式会社 ロボットの異常検出機能を有するロボットシステム及びその制御方法
GB201111340D0 (en) * 2011-07-04 2011-08-17 Meso Ltd Load measuring system
CN102967394A (zh) * 2012-09-15 2013-03-13 华东光电集成器件研究所 对称电容式压力传感器及其制备方法
US9638654B2 (en) 2013-11-25 2017-05-02 Oil States Industries, Inc. Method and system for health monitoring of composite elastomeric flexible elements
ES2552566B1 (es) * 2014-05-29 2016-09-08 Juan Manuel OJEDA PÉREZ Carro de mano adaptado para la recolección y pesaje en balanza electrónica de bayas
CN105021327A (zh) * 2015-07-28 2015-11-04 芜湖科创生产力促进中心有限责任公司 一种圆环式接触式平行板三维压力传感器
TWI627391B (zh) * 2017-03-03 2018-06-21 智動全球股份有限公司 力量感測器
US10241022B2 (en) * 2017-03-30 2019-03-26 Intel Corporation Characterizing a fluid sample based on response of a non-planar structure
CN108181103A (zh) * 2018-03-05 2018-06-19 南京华创交通设备有限公司 一种钢弹簧隔振器检测系统

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49983A (fr) * 1972-04-19 1974-01-07
JPS53112784A (en) * 1977-01-21 1978-10-02 Semperit Ag Condenser for measuring power and method
JPS54131976A (en) * 1978-04-03 1979-10-13 Fuji Electric Co Ltd Load measuring apparatus
JPS6073425A (ja) * 1983-09-16 1985-04-25 メトラー トレド アーゲー 力測定器
US5150759A (en) * 1990-10-29 1992-09-29 Borchard John S Capacitor-sensor
JPH10246647A (ja) * 1997-03-04 1998-09-14 Fuji Electric Co Ltd 静電容量型センサ
JP2000292270A (ja) * 1999-04-09 2000-10-20 Furukawa Electric Co Ltd:The 静電容量型荷重センサ
WO2002044649A1 (fr) * 2000-11-30 2002-06-06 Nitta Corporation Capteur capacitif
JP2003035614A (ja) * 2001-07-23 2003-02-07 Omron Corp 感圧センサ及びその製造方法

Family Cites Families (81)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3336525A (en) * 1963-01-08 1967-08-15 Kaman Aircraft Corp Variable impedance displacement transducer
CH409439A (de) 1963-05-01 1966-03-15 Keller Max Wägevorrichtung mit Zeigerinstrument für die Gewichtsanzeige, insbesondere für feuchte Räume
DK134455C (da) * 1969-04-21 1978-04-24 Nils Aage Juul Eilersen Kapacitetsmålekredsløb.
US3698249A (en) * 1970-08-03 1972-10-17 Umc Electronics Co Fluid pressure monitoring system
DE2039724B1 (de) 1970-08-10 1972-03-09 Siemens Ag Amplitudengeregelter Oszillator
US3880008A (en) * 1973-04-02 1975-04-29 Nils Aage Juul Eilersen Arrangement for occasionally determining the pressure in a hydraulic or pneumatic system
US3859575A (en) * 1974-02-11 1975-01-07 Lee Shih Ying Variable capacitance sensor
SE412956B (sv) 1974-04-04 1980-03-24 Rosemount Inc Kapacitiv avkenningsanordning
US4093915A (en) * 1976-01-12 1978-06-06 Setra Systems, Inc. Capacitance measuring system
US4084438A (en) * 1976-03-29 1978-04-18 Setra Systems, Inc. Capacitive pressure sensing device
US4042876A (en) * 1976-04-29 1977-08-16 The United States Of America As Represented By The United States Energy Research And Development Administration Eddy current gauge for monitoring displacement using printed circuit coil
US4054833A (en) * 1976-06-11 1977-10-18 Setra Systems, Inc. Capacitance measuring system
DK139644B (da) * 1976-12-30 1979-03-19 Nils Aage Juul Eilersen Kapacitiv kraftmåler.
US4229776A (en) * 1978-11-21 1980-10-21 Vaisala Oy Capacitive capsule for aneroid pressure gauge
US4227418A (en) * 1979-09-24 1980-10-14 Fischer & Porter Company Capacitive pressure transducer
US4434451A (en) * 1979-10-29 1984-02-28 Delatorre Leroy C Pressure sensors
JPS56114404A (en) 1980-02-14 1981-09-09 Sony Corp Oscillator
US4434203A (en) * 1980-10-27 1984-02-28 Setra Systems, Inc. Diaphragm
US4358814A (en) * 1980-10-27 1982-11-09 Setra Systems, Inc. Capacitive pressure sensor
US4386312A (en) * 1981-04-24 1983-05-31 Setra Systems, Inc. Linear capacitive sensor system
US4382479A (en) * 1981-05-19 1983-05-10 Setra Systems, Inc. Weighing system
US4463614A (en) * 1981-05-19 1984-08-07 Setra Systems, Inc. Force transducer
US4433742A (en) * 1981-05-19 1984-02-28 Setra Systems, Inc. Linear motion linkage
US4899600A (en) * 1981-05-19 1990-02-13 Setra Systems, Inc. Compact force transducer with mechanical motion amplification
US4464725A (en) * 1981-05-19 1984-08-07 Setra Systems, Inc. Temperature compensated measuring system
US4383586A (en) * 1981-05-19 1983-05-17 Setra Systems, Inc. Adjustable linkage
US4513831A (en) * 1981-05-19 1985-04-30 Setra Systems, Inc. Weighing system
US4448085A (en) * 1981-05-19 1984-05-15 Setra Systems, Inc. Force transducer
US4649759A (en) * 1981-05-19 1987-03-17 Setra Systems, Inc. Force transducer
US4558600A (en) * 1982-03-18 1985-12-17 Setra Systems, Inc. Force transducer
EP0074574A1 (fr) 1981-09-14 1983-03-23 The Perkin-Elmer Corporation Capteur de pression formant conduite de fluide
JPS5922404A (ja) 1982-07-28 1984-02-04 Hitachi Denshi Ltd 電圧制御発振器
DK4383A (da) 1983-01-07 1984-07-08 Nils Aage Juul Eilersen Oscillatorkobling
JPS6177733A (ja) 1984-09-25 1986-04-21 Nec Corp 圧力測定器
US4603308A (en) * 1985-06-24 1986-07-29 Setra Systems, Inc. Temperature stable oscillator
DE3718292A1 (de) 1987-05-30 1987-10-22 Harald Helpert Colpitts-quarzoszillator mit grossem ziehbereich
JPH01249064A (ja) 1988-03-30 1989-10-04 Nikkiso Co Ltd 輸液管の閉塞状態検出装置
DK172663B1 (da) 1988-04-25 1999-05-03 Jens Juul Eilersen Møbel med rygstøtteanordning
US4949054A (en) 1988-08-24 1990-08-14 Setra Systems, Inc. Temperature stable oscillator
US4846293A (en) 1988-10-12 1989-07-11 Setra Systems, Inc. Humidity control system for a scale
US4961055A (en) * 1989-01-04 1990-10-02 Vickers, Incorporated Linear capacitance displacement transducer
DE3910297A1 (de) * 1989-03-30 1990-10-04 Micro Epsilon Messtechnik Beruehrungslos arbeitendes wegmesssystem
DK162015C (da) 1989-08-10 1992-02-17 Jens Juul Eilersen Moebel
US5024099A (en) 1989-11-20 1991-06-18 Setra Systems, Inc. Pressure transducer with flow-through measurement capability
US5115676A (en) * 1990-01-10 1992-05-26 Setra Systems, Inc. Flush-mounted pressure sensor
US5194819A (en) * 1990-08-10 1993-03-16 Setra Systems, Inc. Linearized capacitance sensor system
US5078220A (en) * 1990-08-10 1992-01-07 Setra Systems, Inc. Multiple sensor capacitive measurement system
US6314823B1 (en) * 1991-09-20 2001-11-13 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same
US5150275A (en) * 1991-07-01 1992-09-22 Setra Systems, Inc. Capacitive pressure sensor
US5442962A (en) * 1993-08-20 1995-08-22 Setra Systems, Inc. Capacitive pressure sensor having a pedestal supported electrode
DE4330808C5 (de) 1993-09-10 2012-08-30 Klaus Nordmann Vorrichtung zum Messen der Bearbeitungskraft von Werkzeugen
US5542300A (en) 1994-01-24 1996-08-06 Setra Systems, Inc. Low cost, center-mounted capacitive pressure sensor
DE4420691C1 (de) 1994-06-14 1996-01-18 Bizerba Gmbh & Co Kg Kraftmeßzelle
US5604315A (en) * 1995-01-12 1997-02-18 Setra Systems, Inc. Apparatus using a feedback network to measure fluid pressures
US5705751A (en) * 1995-06-07 1998-01-06 Setra Systems, Inc. Magnetic diaphragm pressure transducer with magnetic field shield
US6019002A (en) 1997-12-02 2000-02-01 Setra Systems, Inc. Pressure transducer having a tensioned diaphragm
US5939639A (en) * 1997-12-04 1999-08-17 Setra Systems, Inc. Pressure transducer housing with barometric pressure isolation
US6087926A (en) * 1998-06-12 2000-07-11 Hajianpour; Mohammed A. Foot pressure monitor
FI105237B (fi) * 1998-06-24 2000-06-30 Valtion Teknillinen Piimikromekaaninen vaaka
EP0967468A1 (fr) * 1998-06-26 1999-12-29 Bossard AG Capteur de force capacitif
US6316948B1 (en) * 1998-07-01 2001-11-13 Setra Systems, Inc. Charge balance network with floating ground capacitive sensing
US6191722B1 (en) * 1999-01-14 2001-02-20 Setra Systems, Inc. Pulse width modulation digital to analog converter
US6205861B1 (en) * 1999-01-22 2001-03-27 Setra Systems, Inc. Transducer having temperature compensation
US6180892B1 (en) * 1999-06-22 2001-01-30 Setra Systems, Inc. Mixing scale
US6789429B2 (en) * 1999-08-06 2004-09-14 Setra System, Inc. Capacitive pressure sensor having encapsulated resonating components
US6532834B1 (en) * 1999-08-06 2003-03-18 Setra Systems, Inc. Capacitive pressure sensor having encapsulated resonating components
US6257068B1 (en) * 1999-11-15 2001-07-10 Setra Systems, Inc. Capacitive pressure sensor having petal electrodes
EP1117052A1 (fr) 2000-01-17 2001-07-18 Anders Juul Eilersen Méthode de transfert d'objets ou d'unités au détail
US6496019B1 (en) * 2000-08-18 2002-12-17 Setra Systems, Inc. Temperature compensated pressure sensor network
DE60201751T2 (de) 2001-03-16 2006-02-09 Eilersen, Nils Age Juul Kapazitätsmessschaltung
WO2002077593A1 (fr) 2001-03-27 2002-10-03 Nils Aage Juul Eilersen Dynamometre capacitif
US6809529B2 (en) * 2001-08-10 2004-10-26 Wacoh Corporation Force detector
JP4524108B2 (ja) 2001-12-07 2010-08-11 アエイジ,ジュウル エイラーセン,ニルス 密封型ロードセル
JP2003329444A (ja) * 2002-03-07 2003-11-19 Alps Electric Co Ltd 静電容量式センサ
US7100432B2 (en) * 2002-06-06 2006-09-05 Mineral Lassen Llc Capacitive pressure sensor
US6718827B1 (en) * 2002-11-15 2004-04-13 Setray Systems, Inc. Center-mount capacitive sensor with overload protection
US7047818B2 (en) * 2003-04-09 2006-05-23 Loadstar Sensors, Inc. Capacitive force sensing device
US7187185B2 (en) * 2004-09-29 2007-03-06 Loadstar Sensors Inc Area-change sensing through capacitive techniques
US7353713B2 (en) * 2003-04-09 2008-04-08 Loadstar Sensors, Inc. Flexible apparatus and method to enhance capacitive force sensing
EP1794792A4 (fr) * 2004-09-29 2010-02-17 Loadstar Sensors Inc Detection de variation de distance d'isolement au moyen de techniques capacitives
US20060267321A1 (en) * 2005-05-27 2006-11-30 Loadstar Sensors, Inc. On-board vehicle seat capacitive force sensing device and method

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49983A (fr) * 1972-04-19 1974-01-07
JPS53112784A (en) * 1977-01-21 1978-10-02 Semperit Ag Condenser for measuring power and method
JPS54131976A (en) * 1978-04-03 1979-10-13 Fuji Electric Co Ltd Load measuring apparatus
JPS6073425A (ja) * 1983-09-16 1985-04-25 メトラー トレド アーゲー 力測定器
US5150759A (en) * 1990-10-29 1992-09-29 Borchard John S Capacitor-sensor
JPH10246647A (ja) * 1997-03-04 1998-09-14 Fuji Electric Co Ltd 静電容量型センサ
JP2000292270A (ja) * 1999-04-09 2000-10-20 Furukawa Electric Co Ltd:The 静電容量型荷重センサ
WO2002044649A1 (fr) * 2000-11-30 2002-06-06 Nitta Corporation Capteur capacitif
JP2003035614A (ja) * 2001-07-23 2003-02-07 Omron Corp 感圧センサ及びその製造方法

Also Published As

Publication number Publication date
CN101416021B (zh) 2011-06-15
US7343814B2 (en) 2008-03-18
WO2007126716A2 (fr) 2007-11-08
KR20090019779A (ko) 2009-02-25
CA2648524A1 (fr) 2007-11-08
US20070227257A1 (en) 2007-10-04
EP2002199A4 (fr) 2010-09-08
WO2007126716A3 (fr) 2008-06-05
CN101416021A (zh) 2009-04-22
EP2002199A2 (fr) 2008-12-17

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