JP2009532658A - 熱処理装置 - Google Patents
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 164
- 238000001816 cooling Methods 0.000 claims abstract description 83
- 239000004215 Carbon black (E152) Substances 0.000 claims description 11
- 229930195733 hydrocarbon Natural products 0.000 claims description 11
- 150000002430 hydrocarbons Chemical class 0.000 claims description 11
- 239000000654 additive Substances 0.000 claims description 8
- 230000000996 additive effect Effects 0.000 claims description 8
- 239000011819 refractory material Substances 0.000 claims description 4
- 238000009530 blood pressure measurement Methods 0.000 claims description 3
- 238000004880 explosion Methods 0.000 abstract description 8
- 238000002485 combustion reaction Methods 0.000 abstract description 6
- 238000003912 environmental pollution Methods 0.000 abstract description 5
- 239000007789 gas Substances 0.000 description 148
- 238000005192 partition Methods 0.000 description 13
- 230000008901 benefit Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 4
- 238000007599 discharging Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000002826 coolant Substances 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 206010017740 Gas poisoning Diseases 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000001273 butane Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 238000003763 carbonization Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000007809 chemical reaction catalyst Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 1
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 1
- 239000003345 natural gas Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/04—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity adapted for treating the charge in vacuum or special atmosphere
- F27B9/045—Furnaces with controlled atmosphere
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/30—Loose or shaped packing elements, e.g. Raschig rings or Berl saddles, for pouring into the apparatus for mass or heat transfer
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
- C21D9/0062—Heat-treating apparatus with a cooling or quenching zone
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/02—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity of multiple-track type; of multiple-chamber type; Combinations of furnaces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/02—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity of multiple-track type; of multiple-chamber type; Combinations of furnaces
- F27B9/028—Multi-chamber type furnaces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/14—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
- F27B9/20—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace
- F27B9/24—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor
- F27B9/2407—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor the conveyor being constituted by rollers (roller hearth furnace)
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
- F27B9/36—Arrangements of heating devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
- F27B9/40—Arrangements of controlling or monitoring devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D21/00—Arrangements of monitoring devices; Arrangements of safety devices
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- General Engineering & Computer Science (AREA)
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- Thermal Sciences (AREA)
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- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Furnace Details (AREA)
- Tunnel Furnaces (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Abstract
【選択図】図2
Description
前記吸気弁は、制御ユニットによって作動制御される電磁弁であり、
前記熱処理装置は、排気管に備えられて制御ユニットによって作動制御される電磁弁としての排気弁、および加熱室に備えられて加熱室の内部圧力を測定する圧力センサーをさらに含み、
制御ユニットは、圧力センサーから圧力測定値を受信し、電磁弁である吸気弁と排気弁の作動を制御することにより、雰囲気ガスの供給と排出を統制する構造で出来ている、熱処理装置を提供する。
このように構成された熱処理装置は、常に十分な量の雰囲気ガスを供給しなければならない従来の熱処理装置とは異なり、前記加熱室12または冷却室13の圧力が制御ユニット80に設定された値より低くなる場合にのみ前記吸気弁91aが開放されて雰囲気ガスが供給されるので、雰囲気ガスの使用量を著しく低めて雰囲気ガスの使用によるコストを節減することができるという利点がある。
また、出入り口開閉装置20が開放されるか、或いは加熱された被加工物1が冷却ユニットによって急激に冷却されることにより、加熱室12と冷却室13の圧力が急激に低くなる場合、前記制御ユニット80は、吸気弁91aを全開して最大限多量の雰囲気ガスを加熱室12と冷却室13に供給し、加熱室12と冷却室13内の雰囲気ガスの組成比が最適状態を保つようにするので、雰囲気ガスの組成が不安定になって熱処理品質が低下すること、および雰囲気ガスと空気との混合比がガス爆発領域に到達して爆発事故が発生することを防止することができるという利点がある。
12;加熱室 13;冷却室
20;出入り口開閉装置 30;内部開閉装置
40;移送ユニット 50;加熱ユニット
60;冷却ユニット 70;温度センサー
80;制御ユニット 90;雰囲気ガス供給装置
91;雰囲気ガス供給管 91a;吸気弁
91b;貯留タンク 91c;支管
100;雰囲気ガス分析器 110;添加ガス供給ユニット
120;ファン 130;第1燃焼器
131;排気管 131a;排気弁
140;第2燃焼器 150;圧力センサー
Claims (4)
- 被加工物が出入りする少なくとも一つの出入り口を備えた耐火物材質の本体と;前記本体に設置され、前記出入り口を開閉する少なくとも一つの出入り口開閉装置と;前記本体に開閉可能に設置され、前記本体の内部空間を加熱室と冷却室に区画し、閉鎖された状態では前記加熱室と前記冷却室とを連通させる通路を形成する内部開閉装置と;前記出入り口を介して投入された前記被加工物を前記加熱室と前記冷却室に移送し、前記出入り口を介して前記本体の外部に排出する移送ユニットと;前記加熱室に備えられ、前記被加工物を加熱する加熱ユニット;前記冷却室に備えられ、前記被加工物を冷却する冷却ユニットと;吸気弁付きの雰囲気ガス供給管を介して前記加熱室に連結され、雰囲気ガスを前記加熱室に供給する雰囲気ガス供給装置と;排気管を介して前記冷却室に連結され、前記冷却室からの雰囲気ガスを燃焼させて外部に排出する第1燃焼器と;前記本体の出入り口の外側に配置され、前記出入り口を介して排出される雰囲気ガスを燃焼させる少なくとも一つの第2燃焼器と;前記加熱室に設置され、前記加熱室の内部温度を測定する温度センサーと;前記温度センサから出力信号を受信して前記加熱ユニットを制御し、前記出入り口開閉装置、前記内部開閉装置、前記移送ユニットおよび前記第2燃焼器の作動を制御する制御ユニットとを含む熱処理装置において、
前記吸気弁は、前記制御ユニットによって作動制御される電磁弁であり、
前記熱処理装置は、前記排気管に備えられて前記制御ユニットによって作動制御される電磁弁としての排気弁と、前記加熱室に備えられて前記加熱室の内部圧力を測定する圧力センサーとをさらに含み、
前記制御ユニットは、前記圧力センサーから圧力測定値を受信し、電磁弁である前記吸気弁と前記排気弁の作動を制御することにより、雰囲気ガスの供給と排出を統制することを特徴とする、熱処理装置。 - 前記雰囲気ガス供給管に備えられ、前記雰囲気ガス供給装置から発生した雰囲気ガスを貯留する貯留タンクをさらに含むことを特徴とする、請求項1に記載の熱処理装置。
- 前記加熱室には、前記加熱室内の雰囲気ガスの組成を分析する雰囲気ガス分析器と、炭化水素系ガスを供給するガス供給管、空気を供給する空気供給管、およびガス供給管と空気供給管に設けられ、前記制御ユニットによって作動制御される電磁弁としての調節弁からなる添加ガス供給ユニットとがさらに備えられ、
前記制御ユニットは、前記雰囲気ガス分析器から組成比データを受信して前記調節弁を制御し、炭化水素系ガスと空気を前記加熱室にさらに供給することにより、前記加熱室の雰囲気ガスの組成を調節することができるように構成されたことを特徴とする、請求項1に記載の熱処理装置。 - 前記冷却室が前記雰囲気ガス供給管を介して前記雰囲気ガス供給装置に連結され、前記冷却室には前記冷却室の圧力を測定する圧力センサーがさらに備えられ、前記制御ユニットが前記圧力センサーから圧力測定値を受信して前記雰囲気ガス供給管の前記吸気弁を制御して前記冷却室に雰囲気ガスを供給することにより、前記冷却室の圧力を迅速に回復することができるように構成されたことを特徴とする、請求項1に記載の熱処理装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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KR1020070020360A KR100796767B1 (ko) | 2007-02-28 | 2007-02-28 | 분위기가스 소모 최소화 및 이산화탄소 가스 발생 최소화를위한 열처리장치 |
KR10-2007-0020360 | 2007-02-28 | ||
PCT/KR2007/001264 WO2008105573A1 (en) | 2007-02-28 | 2007-03-14 | A heat treatment equipment |
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JP2009532658A true JP2009532658A (ja) | 2009-09-10 |
JP5049338B2 JP5049338B2 (ja) | 2012-10-17 |
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JP2009504112A Expired - Fee Related JP5049338B2 (ja) | 2007-02-28 | 2007-03-14 | 熱処理装置 |
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US (1) | US8182263B2 (ja) |
JP (1) | JP5049338B2 (ja) |
KR (1) | KR100796767B1 (ja) |
WO (1) | WO2008105573A1 (ja) |
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JP2011112030A (ja) * | 2009-11-30 | 2011-06-09 | Ntn Corp | ガス供給装置および排ガス発電システム |
US10392676B2 (en) | 2014-11-20 | 2019-08-27 | Ihi Corporation | Heat treatment device and cooling device |
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JP5394292B2 (ja) * | 2010-03-12 | 2014-01-22 | 東京エレクトロン株式会社 | 縦型熱処理装置および圧力検知システムと温度センサの組合体 |
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JP2002270493A (ja) * | 2001-03-12 | 2002-09-20 | Oki Electric Ind Co Ltd | 被処理体の加熱処理装置及びその排気方法 |
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JPS5848009B2 (ja) * | 1979-11-26 | 1983-10-26 | 日本鋼管株式会社 | 多帯式加熱炉の温度制御方法 |
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JPS6386812A (ja) * | 1986-09-29 | 1988-04-18 | Chugai Ro Kogyo Kaisha Ltd | 誘導加熱式型焼入設備 |
DE69918821T2 (de) | 1998-03-26 | 2005-10-13 | Jfe Engineering Corp. | Verfahren zum kontrollieren der atmosphäre und der zugspannung in einem ofen zur kontinuierlichen wärmebehandlung von metallband |
US6336809B1 (en) * | 1998-12-15 | 2002-01-08 | Consolidated Engineering Company, Inc. | Combination conduction/convection furnace |
US6217317B1 (en) * | 1998-12-15 | 2001-04-17 | Consolidated Engineering Company, Inc. | Combination conduction/convection furnace |
JP4305716B2 (ja) * | 2002-02-12 | 2009-07-29 | Dowaホールディングス株式会社 | 熱処理炉 |
KR20060055856A (ko) * | 2004-11-19 | 2006-05-24 | 뉴영엠테크 주식회사 | 유리기판에 증착된 필름의 열처리 장치 및 방법 |
US7150627B2 (en) * | 2005-04-30 | 2006-12-19 | Siddhartha Gaur | Transported material heating with controlled atmosphere |
JP2007046073A (ja) * | 2005-08-05 | 2007-02-22 | Hirohisa Taniguchi | 連続式金属熱処理システム |
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2007
- 2007-02-28 KR KR1020070020360A patent/KR100796767B1/ko active IP Right Grant
- 2007-03-14 US US12/293,464 patent/US8182263B2/en not_active Expired - Fee Related
- 2007-03-14 JP JP2009504112A patent/JP5049338B2/ja not_active Expired - Fee Related
- 2007-03-14 WO PCT/KR2007/001264 patent/WO2008105573A1/en active Application Filing
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JPS5855523A (ja) * | 1981-09-29 | 1983-04-01 | 中外炉工業株式会社 | 雰囲気熱処理炉における装入・抽出ベスチブルのパ−ジ方法 |
JPS63160228A (ja) * | 1986-12-24 | 1988-07-04 | Hitachi Ltd | ウエハ処理装置 |
JP2002270493A (ja) * | 2001-03-12 | 2002-09-20 | Oki Electric Ind Co Ltd | 被処理体の加熱処理装置及びその排気方法 |
Cited By (2)
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JP2011112030A (ja) * | 2009-11-30 | 2011-06-09 | Ntn Corp | ガス供給装置および排ガス発電システム |
US10392676B2 (en) | 2014-11-20 | 2019-08-27 | Ihi Corporation | Heat treatment device and cooling device |
Also Published As
Publication number | Publication date |
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KR100796767B1 (ko) | 2008-01-22 |
US8182263B2 (en) | 2012-05-22 |
WO2008105573A1 (en) | 2008-09-04 |
JP5049338B2 (ja) | 2012-10-17 |
US20090269713A1 (en) | 2009-10-29 |
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