JP2009526254A - 調節可能な光学活性素子 - Google Patents

調節可能な光学活性素子 Download PDF

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Publication number
JP2009526254A
JP2009526254A JP2008553752A JP2008553752A JP2009526254A JP 2009526254 A JP2009526254 A JP 2009526254A JP 2008553752 A JP2008553752 A JP 2008553752A JP 2008553752 A JP2008553752 A JP 2008553752A JP 2009526254 A JP2009526254 A JP 2009526254A
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JP
Japan
Prior art keywords
intermediate layer
optically active
active element
lens
electrodes
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Pending
Application number
JP2008553752A
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English (en)
Japanese (ja)
Inventor
マニュエル アシュワンデン,
マルクス ダニエル ベック,
ユリー ベルヤイヴ,
シュテマー,アンドレアス
Original Assignee
イーティーエイチ チューリッヒ, イーティーエイチ トランスファー
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Application filed by イーティーエイチ チューリッヒ, イーティーエイチ トランスファー filed Critical イーティーエイチ チューリッヒ, イーティーエイチ トランスファー
Priority claimed from PCT/EP2007/051138 external-priority patent/WO2007090843A2/en
Publication of JP2009526254A publication Critical patent/JP2009526254A/ja
Pending legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/18Diffraction gratings
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/18Diffraction gratings
    • G02B5/1847Manufacturing methods
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/18Diffraction gratings
    • G02B5/1828Diffraction gratings having means for producing variable diffraction
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0808Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Integrated Circuits (AREA)
  • Microscoopes, Condenser (AREA)
JP2008553752A 2006-02-07 2007-02-06 調節可能な光学活性素子 Pending JP2009526254A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP06002411A EP1816493A1 (de) 2006-02-07 2006-02-07 Abstimmbares Diffraktionsgitter
EP06018194A EP1826591A1 (de) 2006-02-07 2006-08-31 Abstimmbare optische aktive Elemente
PCT/EP2007/051138 WO2007090843A2 (en) 2006-02-07 2007-02-06 Tunable optical active elements

Publications (1)

Publication Number Publication Date
JP2009526254A true JP2009526254A (ja) 2009-07-16

Family

ID=36603531

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008553752A Pending JP2009526254A (ja) 2006-02-07 2007-02-06 調節可能な光学活性素子

Country Status (6)

Country Link
US (2) US7920330B2 (de)
EP (4) EP1816493A1 (de)
JP (1) JP2009526254A (de)
KR (2) KR101144509B1 (de)
CN (1) CN101379418B (de)
WO (1) WO2007090842A2 (de)

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JP2013152304A (ja) * 2012-01-24 2013-08-08 Olympus Corp 顕微鏡システム
WO2014017067A1 (ja) * 2012-07-27 2014-01-30 株式会社ニコン 構造化照明装置及び構造化照明顕微鏡
JP2015501132A (ja) * 2011-12-21 2015-01-08 コーニンクレッカ フィリップス エヌ ヴェ 制御可能な高分子アクチュエータ
JP2015531884A (ja) * 2012-07-20 2015-11-05 コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. 可変拡散器
WO2017064942A1 (ja) * 2015-10-13 2017-04-20 国立大学法人東京大学 光線位置制御装置

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Publication number Priority date Publication date Assignee Title
EP2034338A1 (de) * 2007-08-11 2009-03-11 ETH Zurich Flüssiglinsesystem
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US8659835B2 (en) 2009-03-13 2014-02-25 Optotune Ag Lens systems and method
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EP2614542B1 (de) * 2010-09-09 2017-07-19 Philips Lighting Holding B.V. Verstellbarer reflektor basierend auf einem elektroaktiven polymeraktor
US8947784B2 (en) 2010-10-26 2015-02-03 Optotune Ag Variable focus lens having two liquid chambers
US8663563B2 (en) * 2010-12-03 2014-03-04 Purdue Research Foundation Reflective diffractometric hydrogel sensor for biological and chemical detection
DE102011000941B4 (de) 2011-02-25 2013-10-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Polymerlaser mit spannungsgesteuerter Einstellung der Laserwellenlänge
US9364319B2 (en) * 2012-09-25 2016-06-14 Valdemar Portney Refractive-diffractive switchable optical element
DE102012219655B4 (de) * 2012-10-26 2018-10-25 Albert-Ludwigs-Universität Freiburg Optisches element und herstellung desselben
US10139295B2 (en) 2012-11-15 2018-11-27 Arizona Board Of Regents On Behalf Of Arizona State University Methods for in-plane strain measurement of a substrate
CN103837979B (zh) * 2012-11-22 2016-03-30 上海丽恒光微电子科技有限公司 基于mems的焦距调整装置及其制备方法
US9837001B2 (en) * 2012-12-21 2017-12-05 3M Innovative Properties Company Signage overlay article
CN103728722B (zh) * 2012-12-28 2015-12-02 清华大学 变形镜及其致动器组件
US9119289B2 (en) 2013-02-25 2015-08-25 3M Innovative Properties Company Film constructions for interdigitated electrodes with bus bars and methods of making same
EP2802148A1 (de) 2013-05-08 2014-11-12 ETH Zurich Anzeigevorrichtung zeitsequenziellen Inhalt mit mehreren Ansichten
KR102074688B1 (ko) * 2013-10-29 2020-02-10 한국전자통신연구원 가변 프레넬 렌즈
WO2015100414A1 (en) 2013-12-27 2015-07-02 Arizona Board Of Regents On Behalf Of Arizona State University Deformable origami batteries
KR20150093012A (ko) * 2014-02-06 2015-08-17 엘지이노텍 주식회사 조명 부재 및 이를 이용하는 조명 장치
WO2016049444A1 (en) 2014-09-26 2016-03-31 Arizona Board Of Regents On Behalf Of Arizona State University Stretchable batteries
CN107431059B (zh) 2015-01-02 2020-03-17 亚利桑那州立大学董事会 用于可变形电子装置的阿基米德螺线设计
US10502991B2 (en) 2015-02-05 2019-12-10 The Arizona Board Of Regents On Behalf Of Arizona State University Origami displays and methods for their manufacture
DE102015225641A1 (de) * 2015-12-17 2017-06-22 Carl Zeiss Microscopy Gmbh Zoomobjektiv
CN105824063B (zh) * 2016-05-17 2018-03-16 西安交通大学 一种基于电致动的变焦微透镜阵列结构和制备工艺
US10390698B2 (en) 2016-06-16 2019-08-27 Arizona Board Of Regents On Behalf Of Arizona State University Conductive and stretchable polymer composite
EP3842856A1 (de) * 2016-11-21 2021-06-30 Koninklijke Philips N.V. Optische strahlverarbeitungsvorrichtung
US20180341139A1 (en) 2017-05-23 2018-11-29 Government Of The United States, As Represented By The Secretary Of The Air Force Projection using liquid crystal polarization gratings to modulate light
KR20200094128A (ko) * 2017-08-05 2020-08-06 옵토튠 컨슈머 아게 광학 줌 장치
US10996432B2 (en) 2017-12-26 2021-05-04 Electronics And Telecommunications Research Institute Reflective active variable lens and method of fabricating the same
KR102198578B1 (ko) * 2017-12-26 2021-01-06 한국전자통신연구원 반사형 능동 가변 렌즈 및 그 제조 방법
US10908325B1 (en) * 2018-01-19 2021-02-02 Facebook Technologies, Llc Liquid lens for varifocal display
CN108490524B (zh) * 2018-04-04 2020-04-10 中国科学院长春光学精密机械与物理研究所 一种高线密度光栅掩模的制备方法和系统
CN108956664B (zh) * 2018-06-16 2023-11-10 金华职业技术学院 一种高透射率的原子束显微装置
CN110228153B (zh) * 2018-07-17 2021-04-30 山东科技大学 一种具有仿生自我监测功能的力致变色光子晶体材料的制备方法
KR102041278B1 (ko) * 2018-07-25 2019-11-06 한국광기술원 회절광학소자, 회절광학소자 제조장치 및 방법
CN109143425B (zh) * 2018-09-27 2020-10-09 杭州行开科技有限公司 一种用于采集光场影像的微透镜阵列结构
CN109239909B (zh) * 2018-09-27 2020-11-13 广西师范大学 一种无光缆的光信号传输装置
US20200373476A1 (en) * 2019-05-24 2020-11-26 Facebook Technologies, Llc Transparent oriented electroactive ceramics
JP7225424B2 (ja) * 2019-09-27 2023-02-20 富士フイルム株式会社 光学素子
CN212009104U (zh) * 2019-12-05 2020-11-24 晋城三赢精密电子有限公司 镜头模组及电子装置
US11469690B2 (en) 2020-11-24 2022-10-11 Toyota Motor Engineering & Manufacturing North America, Inc. Electrode pairs having saw-tooth configuration and artificial muscles including same
CN112731651A (zh) * 2021-01-05 2021-04-30 南京邮电大学 一种具有电控厚度可调的光学调相器
DE102021202769A1 (de) * 2021-03-22 2022-09-22 Carl Zeiss Smt Gmbh Optische Baugruppe sowie Verfahren zu deren Herstellung, Verfahren zur Deformation eines optischen Elements und Projektionsbelichtungsanlage
US11550163B2 (en) 2021-04-05 2023-01-10 Apple Inc. Tunable blazed grating
CN115113409B (zh) * 2022-08-26 2022-12-30 成都莱普科技股份有限公司 基于达曼光栅的线性平顶光斑的发生系统、方法及设备
CN117452651B (zh) * 2023-12-26 2024-04-02 厦门大学 一种晶面结构观测仪及其观测方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6084502A (ja) * 1983-10-17 1985-05-13 Canon Inc 光学素子
JPH06130443A (ja) * 1992-10-22 1994-05-13 Mitsubishi Kasei Corp 光−光変換装置
JP2002131513A (ja) * 2000-10-27 2002-05-09 Fuji Photo Film Co Ltd 焦点距離可変レンズ
JP2003302615A (ja) * 2002-04-09 2003-10-24 Ricoh Co Ltd 光路偏向素子、光路偏向装置、画像表示装置及び光路偏向素子の駆動方法
WO2005085930A1 (de) * 2004-03-04 2005-09-15 Siemens Aktiengesellschaft Adaptives optisches element mit einem polymeraktor

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2271586B1 (de) * 1973-11-29 1978-03-24 Instruments Sa
US4011009A (en) * 1975-05-27 1977-03-08 Xerox Corporation Reflection diffraction grating having a controllable blaze angle
US4494826A (en) * 1979-12-31 1985-01-22 Smith James L Surface deformation image device
FR2517436B1 (fr) * 1981-11-27 1985-09-20 Bosc Dominique Dispositif de commutation optique, a reseau optique a pas variable
SE440581B (sv) 1983-12-22 1985-08-05 Ericsson Telefon Ab L M Forfarande for framstellning av elektroakustiska omvandlare med slutet resonansrum, foretredesvis mikrofoner, samt elektroakustisk omvandlare framstelld enligt forfarandet
US4802746A (en) * 1985-02-26 1989-02-07 Canon Kabushiki Kaisha Variable-focus optical element and focus detecting device utilizing the same
JPS62148903A (ja) * 1985-12-24 1987-07-02 Canon Inc 可変焦点光学素子
US4850682A (en) * 1986-07-14 1989-07-25 Advanced Environmental Research Group Diffraction grating structures
JPH05203878A (ja) * 1992-01-27 1993-08-13 Jeol Ltd 走査型レーザー顕微鏡
US6812624B1 (en) * 1999-07-20 2004-11-02 Sri International Electroactive polymers
JP4040726B2 (ja) * 1997-10-03 2008-01-30 フジノン株式会社 回折光学素子
AU3451499A (en) * 1998-03-16 1999-10-11 Trex Communications Corporation Piezoelectric difraction grating light steering device
US7646544B2 (en) * 2005-05-14 2010-01-12 Batchko Robert G Fluidic optical devices
JP2002267825A (ja) * 2001-03-09 2002-09-18 Sony Corp 回折型レンズ素子及びこれを用いた照明装置
FI20010917A (fi) * 2001-05-03 2002-11-04 Nokia Corp Sähköisesti uudelleen konfigurotuvia optisia laitteita ja menetelmä niiden muodostamiseksi
US6856461B2 (en) * 2001-06-08 2005-02-15 Inphase Technologies, Inc. Tunable optical filter
WO2003081762A1 (en) * 2002-03-18 2003-10-02 Sri International Electroactive polymer devices for moving fluid
TW525793U (en) * 2002-07-23 2003-03-21 Coretronic Corp Adjusting apparatus for an optical element
FI114945B (fi) * 2002-09-19 2005-01-31 Nokia Corp Sähköisesti säädettävä diffraktiivinen hilaelementti
EP1581832A1 (de) * 2002-12-30 2005-10-05 Koninklijke Philips Electronics N.V. Optisches gerät mit einem polymeraktor
US6930817B2 (en) * 2003-04-25 2005-08-16 Palo Alto Research Center Incorporated Configurable grating based on surface relief pattern for use as a variable optical attenuator
US7435495B2 (en) * 2004-01-23 2008-10-14 The University Of North Carolina At Chapel Hill Liquid materials for use in electrochemical cells
JP2007526517A (ja) * 2004-03-05 2007-09-13 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 可変焦点レンズ
US7002737B1 (en) * 2004-08-31 2006-02-21 Yokogawa Electric Corp. Three-dimensional confocal microscope

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6084502A (ja) * 1983-10-17 1985-05-13 Canon Inc 光学素子
JPH06130443A (ja) * 1992-10-22 1994-05-13 Mitsubishi Kasei Corp 光−光変換装置
JP2002131513A (ja) * 2000-10-27 2002-05-09 Fuji Photo Film Co Ltd 焦点距離可変レンズ
JP2003302615A (ja) * 2002-04-09 2003-10-24 Ricoh Co Ltd 光路偏向素子、光路偏向装置、画像表示装置及び光路偏向素子の駆動方法
WO2005085930A1 (de) * 2004-03-04 2005-09-15 Siemens Aktiengesellschaft Adaptives optisches element mit einem polymeraktor

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015501132A (ja) * 2011-12-21 2015-01-08 コーニンクレッカ フィリップス エヌ ヴェ 制御可能な高分子アクチュエータ
JP2013152304A (ja) * 2012-01-24 2013-08-08 Olympus Corp 顕微鏡システム
JP2015531884A (ja) * 2012-07-20 2015-11-05 コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. 可変拡散器
WO2014017067A1 (ja) * 2012-07-27 2014-01-30 株式会社ニコン 構造化照明装置及び構造化照明顕微鏡
JP5915748B2 (ja) * 2012-07-27 2016-05-11 株式会社ニコン 構造化照明装置及び構造化照明顕微鏡
WO2017064942A1 (ja) * 2015-10-13 2017-04-20 国立大学法人東京大学 光線位置制御装置
JPWO2017064942A1 (ja) * 2015-10-13 2018-08-02 国立大学法人 東京大学 光線位置制御装置

Also Published As

Publication number Publication date
EP1826591A1 (de) 2007-08-29
US20090310209A1 (en) 2009-12-17
KR101144509B1 (ko) 2012-05-11
EP1816493A1 (de) 2007-08-08
WO2007090842A2 (en) 2007-08-16
WO2007090842A3 (en) 2007-12-13
EP1984767A2 (de) 2008-10-29
KR20090008181A (ko) 2009-01-21
KR20080107409A (ko) 2008-12-10
US20090310221A1 (en) 2009-12-17
US7920330B2 (en) 2011-04-05
CN101379418B (zh) 2011-07-06
CN101379418A (zh) 2009-03-04
EP1984766A2 (de) 2008-10-29

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