JP2009525621A5 - - Google Patents
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- Publication number
- JP2009525621A5 JP2009525621A5 JP2008553448A JP2008553448A JP2009525621A5 JP 2009525621 A5 JP2009525621 A5 JP 2009525621A5 JP 2008553448 A JP2008553448 A JP 2008553448A JP 2008553448 A JP2008553448 A JP 2008553448A JP 2009525621 A5 JP2009525621 A5 JP 2009525621A5
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- sensor
- nanotopology
- distance
- double
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 15
- 238000011156 evaluation Methods 0.000 claims 12
- 238000003672 processing method Methods 0.000 claims 12
- 238000004458 analytical method Methods 0.000 claims 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 7
- 230000007547 defect Effects 0.000 claims 4
- 238000005259 measurement Methods 0.000 claims 4
- 238000012916 structural analysis Methods 0.000 claims 4
- 239000012530 fluid Substances 0.000 claims 3
- 230000002706 hydrostatic effect Effects 0.000 claims 3
- 238000000034 method Methods 0.000 claims 3
- 230000002093 peripheral effect Effects 0.000 claims 3
- 238000011143 downstream manufacturing Methods 0.000 claims 2
- 230000004888 barrier function Effects 0.000 claims 1
- 230000002950 deficient Effects 0.000 claims 1
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US76345606P | 2006-01-30 | 2006-01-30 | |
| US60/763,456 | 2006-01-30 | ||
| US11/617,433 US7601049B2 (en) | 2006-01-30 | 2006-12-28 | Double side wafer grinder and methods for assessing workpiece nanotopology |
| US11/617,430 US7662023B2 (en) | 2006-01-30 | 2006-12-28 | Double side wafer grinder and methods for assessing workpiece nanotopology |
| US11/617,433 | 2006-12-28 | ||
| US11/617,430 | 2006-12-28 | ||
| PCT/US2007/060981 WO2007130708A1 (en) | 2006-01-30 | 2007-01-24 | Double side wafer grinder and methods for assessing workpiece nanotopology |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009525621A JP2009525621A (ja) | 2009-07-09 |
| JP2009525621A5 true JP2009525621A5 (enExample) | 2010-03-11 |
| JP5518338B2 JP5518338B2 (ja) | 2014-06-11 |
Family
ID=38255858
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008553448A Active JP5518338B2 (ja) | 2006-01-30 | 2007-01-24 | 加工対象物のナノトポロジを評価するためのウェハ両面グラインダ及び方法 |
Country Status (7)
| Country | Link |
|---|---|
| EP (1) | EP1981685B1 (enExample) |
| JP (1) | JP5518338B2 (enExample) |
| KR (1) | KR101247065B1 (enExample) |
| CN (1) | CN101410224B (enExample) |
| MY (1) | MY149762A (enExample) |
| TW (1) | TWI381906B (enExample) |
| WO (1) | WO2007130708A1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7930058B2 (en) * | 2006-01-30 | 2011-04-19 | Memc Electronic Materials, Inc. | Nanotopography control and optimization using feedback from warp data |
| US8712575B2 (en) * | 2010-03-26 | 2014-04-29 | Memc Electronic Materials, Inc. | Hydrostatic pad pressure modulation in a simultaneous double side wafer grinder |
| JP7159861B2 (ja) * | 2018-12-27 | 2022-10-25 | 株式会社Sumco | 両頭研削方法 |
| CN113314430B (zh) * | 2021-01-05 | 2024-04-16 | 长江存储科技有限责任公司 | Cmp工艺中的监测方法以及监测系统 |
| CN114770366B (zh) * | 2022-05-17 | 2023-11-17 | 西安奕斯伟材料科技股份有限公司 | 一种硅片双面研磨装置的静压板及硅片双面研磨装置 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR970077136A (ko) * | 1996-05-11 | 1997-12-12 | 김광호 | 웨이퍼 척을 갖춘 웨이퍼 에지 그라인딩 장치 |
| KR980012012A (ko) * | 1996-07-24 | 1998-04-30 | 김광호 | 웨이퍼 그라인더 |
| US5816895A (en) * | 1997-01-17 | 1998-10-06 | Tokyo Seimitsu Co., Ltd. | Surface grinding method and apparatus |
| EP1125008B1 (en) * | 1998-10-14 | 2003-06-18 | MEMC Electronic Materials, Inc. | Thermally annealed, low defect density single crystal silicon |
| US6479386B1 (en) * | 2000-02-16 | 2002-11-12 | Memc Electronic Materials, Inc. | Process for reducing surface variations for polished wafer |
| JP2001332609A (ja) * | 2000-03-13 | 2001-11-30 | Nikon Corp | 基板保持装置及び露光装置 |
| KR100564125B1 (ko) * | 2001-07-19 | 2006-03-27 | 가부시키가이샤 니콘 | 연마체, 화학 기계적 연마 장치 및 반도체 디바이스의제조 방법 |
| DE10142400B4 (de) * | 2001-08-30 | 2009-09-03 | Siltronic Ag | Halbleiterscheibe mit verbesserter lokaler Ebenheit und Verfahren zu deren Herstellung |
| TW575476B (en) * | 2001-09-07 | 2004-02-11 | United Microelectronics Corp | Control system for in-situ feeding back a polish profile |
| US6937915B1 (en) * | 2002-03-28 | 2005-08-30 | Lam Research Corporation | Apparatus and methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control |
| WO2004033148A1 (ja) * | 2002-10-09 | 2004-04-22 | Koyo Machine Industries Co., Ltd. | 薄肉円板状工作物の両面研削方法および両面研削装置 |
| JP2005025444A (ja) * | 2003-07-01 | 2005-01-27 | Fuji Photo Film Co Ltd | データベースシステムにおけるデータ登録サーバおよびその制御方法 |
| JP2005107854A (ja) * | 2003-09-30 | 2005-04-21 | Komatsu Electronic Metals Co Ltd | ラップ盤のシミュレーションのためのシステム及びプログラム |
| JP3993856B2 (ja) * | 2004-01-22 | 2007-10-17 | 光洋機械工業株式会社 | 両頭平面研削装置 |
| DE102004005702A1 (de) * | 2004-02-05 | 2005-09-01 | Siltronic Ag | Halbleiterscheibe, Vorrichtung und Verfahren zur Herstellung der Halbleiterscheibe |
| DE102004011996B4 (de) * | 2004-03-11 | 2007-12-06 | Siltronic Ag | Vorrichtung zum simultanen beidseitigen Schleifen von scheibenförmigen Werkstücken |
| KR20070030179A (ko) * | 2004-03-19 | 2007-03-15 | 엠이엠씨 일렉트로닉 머티리얼즈, 인크. | 양면 연삭기용 웨이퍼 클램핑 장치 |
-
2007
- 2007-01-24 CN CN2007800116097A patent/CN101410224B/zh not_active Expired - Fee Related
- 2007-01-24 WO PCT/US2007/060981 patent/WO2007130708A1/en not_active Ceased
- 2007-01-24 JP JP2008553448A patent/JP5518338B2/ja active Active
- 2007-01-24 MY MYPI20082826A patent/MY149762A/en unknown
- 2007-01-24 EP EP07797092A patent/EP1981685B1/en not_active Not-in-force
- 2007-01-24 KR KR1020087021294A patent/KR101247065B1/ko active Active
- 2007-01-30 TW TW096103367A patent/TWI381906B/zh not_active IP Right Cessation
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