JP2009520678A - 結晶性組成物、デバイスと関連方法 - Google Patents
結晶性組成物、デバイスと関連方法 Download PDFInfo
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- JP2009520678A JP2009520678A JP2008547331A JP2008547331A JP2009520678A JP 2009520678 A JP2009520678 A JP 2009520678A JP 2008547331 A JP2008547331 A JP 2008547331A JP 2008547331 A JP2008547331 A JP 2008547331A JP 2009520678 A JP2009520678 A JP 2009520678A
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- metal
- metal nitride
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- 238000000034 method Methods 0.000 title claims abstract description 34
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- 239000002184 metal Substances 0.000 claims abstract description 132
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- 239000002994 raw material Substances 0.000 claims abstract description 72
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims abstract description 57
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- 238000004519 manufacturing process Methods 0.000 claims description 20
- 229910052760 oxygen Inorganic materials 0.000 claims description 19
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical group [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 18
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- 238000004891 communication Methods 0.000 claims description 14
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 9
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- 229910052749 magnesium Inorganic materials 0.000 claims description 6
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 5
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- 229910052582 BN Inorganic materials 0.000 claims description 3
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- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
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- 238000009835 boiling Methods 0.000 claims 1
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- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 2
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- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
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- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
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- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
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- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
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- 231100000719 pollutant Toxicity 0.000 description 1
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/0602—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with two or more other elements chosen from metals, silicon or boron
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/0632—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with gallium, indium or thallium
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- C—CHEMISTRY; METALLURGY
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Abstract
Description
約100gのガリウム金属が3本のポリエチレンボトルに入れられる。そのポリエチレンボトルは、ガリウム金属を溶融するのに十分な温度に加熱された水に漬けられる。ガリウムの溶融点は、約摂氏29.8度である。
実施例2は、大きな装填量と長いるつぼ以外の部分で実施例1と類似している。約500gのガリウムが実施例1の300gに対応して使用される。また、浸漬温度は、実施例1では摂氏980度なのに対し、実施例2では1000度まで引き上げられる。
本実施例は、装填が少ないという以外で、実施例1と2に類似している。実施例2の300gに対して、約200gのガリウムが使用される。他の変更点は、短い浸漬温度時間(20時間対24時間)、及び高いNH3とHCl流速を含む。流速は、NH3が600cm3/分、HClが30cm3/分に対して、アンモニアが200cm3/分とHClが25cm3/分である。
実施例1から実施例3が、一つのるつぼでの小型の実験用反応炉における多結晶窒化カリウムの合成/生成を描いている一方、実施例4は規模を大きくした反応炉による稼動を描写したものである。反応炉の外周は15cmで、59mmの外周を有する其々の4つの小型水晶インナーチューブが配置される。実施例1のようなグラファイトフォイルインナーは反応炉に配置される。二つずつのるつぼがそれぞれ四つのインナー水晶チューブのなかに、3ゾーンシームクラフト・スプリット炉(3−Zone THERMCRAFT split furnace)に沿って配置される。
Claims (25)
- 組成物であって、
柱状構造を有する複数の粒子を含む多結晶金属窒化物と、以下の1つ又は2以上を備えていることを特徴とする組成物。
10nmから1mmの範囲内の平均粒子サイズを有する粒子、
不純物含量が200ppm未満の金属窒化物、
体積分率における気孔率が0.1%から30%の範囲内である金属窒化物、
金属窒化物と対応している理論密度値の70%から99.8%の範囲内の見掛け密度を有する金属窒化物、又は、
0.49から0.55の範囲内である金属窒化物内の金属の分子分率。 - 前記金属が、アルミニウム、インジウム、又はガリウムの一つかそれ以上からなる請求項1に記載の組成物。
- 複数の粒子の平均量の範囲が、1立方センチメートルあたり100から10,000であって、金属窒化物の気孔率の体積分率が、0.1%から10%の範囲内である、請求項1又は請求項2に記載の組成物。
- 平均粒子直径が1mmから10μmの範囲内である、請求項1から請求項3のいずれか一項に記載の組成物。
- 前記金属窒化物の不純物含有が15から100ppmの範囲内であり、前記不純物が酸素からなる、請求項1から請求項4のいずれか一項に記載の構成。
- 前記金属窒化物の酸素含量が20ppm未満である請求項1から請求項5のいずれか一項に記載の組成物。
- 前記多結晶金属窒化物の前記見掛け密度が前記理論密度値の85%から95%の範囲であって、前記金属窒化物の前記金属の前記分子分率が0.50から0.51の範囲である、請求項1から請求項6のいずれか一項に記載の組成物。
- n−type材料、p−type材料、半絶縁材料、磁性材料、及び発光性材料の一つかまたはそれ以上を生成可能な1又は複数のドーパントを備える請求項1から請求項7のいずれか一項に記載の組成物。
- 前記ドーパント濃縮が1立方センチメートルにつき1016原子以上である請求項1から請求項8のいずれか一項に記載の組成物。
- 前記多結晶金属窒化物が20MPa以上の内粒子曲げ強度を有する請求項1から請求項8のいずれか一項に記載の組成物。
- 長さ、高さ、または幅の一つ又は2以上が1mm以上の寸法の外形を有する請求項1から請求項10のいずれか一項に記載の組成物からなる部材。
- 前記部材の二乗平均平方根ラフネスが1nm未満の一つかそれ以上の表面を有する請求項11に記載の部材。
- 前記部材が、ウエハと規定されるようにエッチングされ、研磨、切断、又は裁断の一つ又は2以上の表面を有する請求項11又は請求項12に記載の部材。
- 請求項11から請求項13のいずれか一項に記載の部材の電子装置であって、その部材に1又は2以上装着される構成が、
陽極、陰極、電気伝導リード、又はそれら2つ以上の組合せからなるグループから選択され、且つ
変換機、ダイオード、探知機、又はセンサの1以上として操作可能な電子装置。 - 原料として多結晶の金属窒化物材料を第III族金属から製造する製造装置であって、
チャンバーを規定する内表面を有するハウジング、
前記ハウジングに近接し、前記チャンバーにエネルギーの供給が可能なエネルギー源、
前記チャンバーと連通し、前記チャンバーに窒素含有ガスを流入するために構成された第一注入口、
前記チャンバーと連通し、前記チャンバーにハロゲン化物含有ガスの流入が可能な第二注入口、
前記窒素含有ガスと前記ハロゲン化物含有ガスとの混合物を生成するリフル表面、調整板、開口、及びフリットの少なくとも一つ、
前記窒素含有ガスと前記ハロゲン化物含有ガスとの混合流入の完全な下流側になるように、前記第III族金属原料を受け取ることが可能であり、第一及び第二注入口に関連して前記チャンバー内に配置されているるつぼ、
前記チャンバーと前記チャンバーの外とを連通し、前記チャンバー内からチャンバー外へガスを放出する操作が可能な排気口、
一以上の注入口への流れを止めることができるバルブ、及び
一以上のセンサ、バルブ又はエネルギー源と連通しているコントローラー、
を備えている製造装置。 - 前記るつぼを構成している耐火組成物が、酸化物、窒化物又はシリコンホウ化物、アルミニウム、マグネシウム、ボロン、ジルコニウム、ベリリウム、グラファイト、モリブデン、タングステン、又はレニウム、又はそれらの混合物から成る請求項15に記載の製造装置。
- 少なくとも一つの注入口に連通するユースポイント精製器を備え、前記ハウジングが垂直炉又は水平炉であることを更に含んだ請求項15又は請求項16のいずれかに記載の製造装置。
- 前記るつぼが、前記チャンバーに配置された複数のるつぼの一つであり、前記複数のるつぼが互いに関連した位置に垂直にまたは平行に配置された請求項15から請求項17のいずれか一項に記載の製造装置。
- 前記チャンバーと連通していて、少なくとも第III族金属を原材料原料として前記チャンバーに流入させるように構成されている原材料注入口を更に備える請求項15から請求項18のいずれか一項に記載の製造装置。
- 前記第III族の金属原材料原料が溶融されていて、
前記原材料注入口が溶融石英、アルミナ、窒化ホウ素の混合物、ニホウ化チタン、のグループから選ばれた材料と、酸化物、炭化物、窒化物及びそれらの化合物の一つから選ばれた約0.15から10重量%の希土類金属化合物とからなる請求項15から請求項19のいずれか一項に記載の製造装置。 - 溶融状の第III族金属の原材料原料が注入口から複数のチャンバーに流入するように、前記原材料注入口が複数の配置された出口を有し、且つそれぞれのるつぼは対応したそれぞれの複数の出口に配置されている請求項15から請求項21のいずれか一項に記載の製造装置。
- 第III族金属から多結晶金属窒化物を生成する方法であって、
窒素含有材料をハウジングで規定されたチャンバーへ流入し、
前記第III族金属を前記チャンバー内のるつぼに原材料材料として提供し、
前記チャンバーを所定温度へ加熱し、及び所定圧力への加圧し、
前記窒素含有材料と混合させるためハロゲン化水素を前記チャンバーへの流入し、
前記窒素含有材料と前記第III族金属とを反応させ、
本来金属を有している前記るつぼ内での金属窒化物を生成することを含む方法。 - 前記第III族金属が、アルミニウム、ガリウム、及びインジウム、の一以上からなり、窒素含有材料の流入のステップがアンモニアの流入である請求項22に記載の方法。
- 排気口換気温度を約200度C以上に維持することを更に含む請求項22又は請求項23のいずれかに記載の方法。
- 前記金属窒化物の表面のスクレーピング、洗浄(Scouring)、または除去(scarifying)、
前記金属窒化物の表面を空気中または乾燥酸素大気中での酸化、及び過塩素酸での前記金属窒化物の沸騰、
の1以上での前記金属窒化物の処理する請求項22から請求項24のいずれか一項に記載の方法。
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