JP2009514491A5 - - Google Patents

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Publication number
JP2009514491A5
JP2009514491A5 JP2008536931A JP2008536931A JP2009514491A5 JP 2009514491 A5 JP2009514491 A5 JP 2009514491A5 JP 2008536931 A JP2008536931 A JP 2008536931A JP 2008536931 A JP2008536931 A JP 2008536931A JP 2009514491 A5 JP2009514491 A5 JP 2009514491A5
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JP
Japan
Prior art keywords
substrate
mechanical
wave device
actuators
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008536931A
Other languages
English (en)
Japanese (ja)
Other versions
JP5265370B2 (ja
JP2009514491A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/DK2006/000595 external-priority patent/WO2007048412A2/en
Publication of JP2009514491A publication Critical patent/JP2009514491A/ja
Publication of JP2009514491A5 publication Critical patent/JP2009514491A5/ja
Application granted granted Critical
Publication of JP5265370B2 publication Critical patent/JP5265370B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2008536931A 2005-10-28 2006-10-27 電気機械波デバイス Expired - Fee Related JP5265370B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DKPA200501499 2005-10-28
DKPA200501499 2005-10-28
PCT/DK2006/000595 WO2007048412A2 (en) 2005-10-28 2006-10-27 An electro-mechanical wave device

Publications (3)

Publication Number Publication Date
JP2009514491A JP2009514491A (ja) 2009-04-02
JP2009514491A5 true JP2009514491A5 (enExample) 2009-11-26
JP5265370B2 JP5265370B2 (ja) 2013-08-14

Family

ID=36999786

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008536931A Expired - Fee Related JP5265370B2 (ja) 2005-10-28 2006-10-27 電気機械波デバイス

Country Status (6)

Country Link
US (1) US7723900B2 (enExample)
EP (1) EP1941608B1 (enExample)
JP (1) JP5265370B2 (enExample)
KR (1) KR101353273B1 (enExample)
CN (1) CN101297470B (enExample)
WO (1) WO2007048412A2 (enExample)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4888569B2 (ja) * 2008-05-27 2012-02-29 株式会社村田製作所 超音波モータ
WO2010061508A1 (ja) * 2008-11-25 2010-06-03 株式会社村田製作所 圧電振動子及び超音波モータ
CN102405596B (zh) * 2009-04-23 2014-07-30 松下电器产业株式会社 天线共用器
US8373331B2 (en) 2010-09-15 2013-02-12 Visteon Global Technologies, Inc. Use of piezo motor to operate a ring pointer over display
CN103166502B (zh) * 2013-01-30 2015-12-02 东南大学 空间调相环形行波超声波电机及其控制方法
CN105453289A (zh) * 2013-07-08 2016-03-30 株式会社村田制作所 致动器
US10404191B2 (en) 2014-04-02 2019-09-03 Pcb Motor Aps Stator and a motor
DE202014008041U1 (de) 2014-10-10 2014-11-03 Leica Geosystems Ag Vermessungsgerät mit Wanderwellen-Antrieb
US10393454B2 (en) 2016-09-28 2019-08-27 The Boeing Company Valve system
CN106533253B (zh) * 2016-12-21 2018-07-31 深圳大学 一种多定子轴向叠层的超声波电机
CN106533250B (zh) * 2016-12-21 2018-08-24 深圳大学 一种多定子平面阵列结构的超声波电机
TWI647901B (zh) * 2017-06-22 2019-01-11 中原大學 線性壓電馬達及其滑台傳動系統
CN117335685A (zh) * 2017-10-18 2024-01-02 株式会社尼康 振动波马达、透镜镜筒及拍摄装置

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JPS59117473A (ja) * 1982-12-21 1984-07-06 Canon Inc 振動波モ−タ
JPS59201685A (ja) * 1983-04-30 1984-11-15 Canon Inc 振動波モ−タ
JPS6051477A (ja) * 1983-08-26 1985-03-22 Seiko Instr & Electronics Ltd 圧電モ−タ
US4634916A (en) * 1984-10-02 1987-01-06 Ngk Spark Plug Co., Ltd. Piezoelectric rotary driver
US4771203A (en) * 1986-02-24 1988-09-13 Canon Kabushiki Kaisha Vibration wave motor
JP2611296B2 (ja) * 1987-12-29 1997-05-21 アイシン精機株式会社 超音波モータ
JPH02139071A (ja) * 1988-11-18 1990-05-29 Ngk Spark Plug Co Ltd 超音波捩れ振動子
JPH02211070A (ja) * 1989-02-07 1990-08-22 Nec Corp 圧電モータ
WO1991004584A1 (en) 1989-09-08 1991-04-04 Massachusetts Institute Of Technology Miniature actuator
JPH0421371A (ja) * 1990-05-15 1992-01-24 Canon Inc 振動波モータ
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JP3088576B2 (ja) * 1992-11-10 2000-09-18 キヤノン株式会社 集積化アクチュエータを備えた走査型トンネル顕微鏡および前記集積化アクチュエータを備えた情報処理装置
FR2701340B1 (fr) * 1993-02-05 1995-03-24 Imra Europe Sa Procédé de réalisation d'un circuit de distribution de signaux électriques, circuit de distribution obtenu et moteur piézoélectrique comportant un tel circuit.
FR2715780B1 (fr) * 1994-02-01 1996-04-05 Imra Europe Sa Stator de moteur rotatif piézoélectrique et moteur rotatif piézoélectrique comportant un tel stator.
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JPH11191970A (ja) 1997-12-25 1999-07-13 Asmo Co Ltd 超音波モータ
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US6370964B1 (en) 1998-11-23 2002-04-16 The Board Of Trustees Of The Leland Stanford Junior University Diagnostic layer and methods for detecting structural integrity of composite and metallic materials
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