KR101353273B1 - 전자-기계적 파동 장치 - Google Patents

전자-기계적 파동 장치 Download PDF

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Publication number
KR101353273B1
KR101353273B1 KR1020087012533A KR20087012533A KR101353273B1 KR 101353273 B1 KR101353273 B1 KR 101353273B1 KR 1020087012533 A KR1020087012533 A KR 1020087012533A KR 20087012533 A KR20087012533 A KR 20087012533A KR 101353273 B1 KR101353273 B1 KR 101353273B1
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KR
South Korea
Prior art keywords
substrate
actuators
mechanical
wave device
electro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020087012533A
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English (en)
Korean (ko)
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KR20080074906A (ko
Inventor
헨닝 엘레스가드
엘빈드 요한센
탐 올센
헨리크 안데르센
몰텐 하츠빅 한센
Original Assignee
피시비 모터 에이피에스
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Publication of KR20080074906A publication Critical patent/KR20080074906A/ko
Application granted granted Critical
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0271—Arrangements for reducing stress or warp in rigid printed circuit boards, e.g. caused by loads, vibrations or differences in thermal expansion
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/18—Printed circuits structurally associated with non-printed electric components
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163—Motors with ring stator
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/18—Printed circuits structurally associated with non-printed electric components
    • H05K1/181—Printed circuits structurally associated with non-printed electric components associated with surface mounted components
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09009—Substrate related
    • H05K2201/09063—Holes or slots in insulating substrate not used for electrical connections
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10007—Types of components
    • H05K2201/10083—Electromechanical or electro-acoustic component, e.g. microphone
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/20—Details of printed circuits not provided for in H05K2201/01 - H05K2201/10
    • H05K2201/2045—Protection against vibrations

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
KR1020087012533A 2005-10-28 2006-10-27 전자-기계적 파동 장치 Expired - Fee Related KR101353273B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DKPA200501499 2005-10-28
DKPA200501499 2005-10-28
PCT/DK2006/000595 WO2007048412A2 (en) 2005-10-28 2006-10-27 An electro-mechanical wave device

Publications (2)

Publication Number Publication Date
KR20080074906A KR20080074906A (ko) 2008-08-13
KR101353273B1 true KR101353273B1 (ko) 2014-01-22

Family

ID=36999786

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020087012533A Expired - Fee Related KR101353273B1 (ko) 2005-10-28 2006-10-27 전자-기계적 파동 장치

Country Status (6)

Country Link
US (1) US7723900B2 (enExample)
EP (1) EP1941608B1 (enExample)
JP (1) JP5265370B2 (enExample)
KR (1) KR101353273B1 (enExample)
CN (1) CN101297470B (enExample)
WO (1) WO2007048412A2 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4888569B2 (ja) * 2008-05-27 2012-02-29 株式会社村田製作所 超音波モータ
CN102224670B (zh) * 2008-11-25 2014-02-05 株式会社村田制作所 压电振动器及超声波电动机
US8723620B2 (en) * 2009-04-23 2014-05-13 Panasonic Corporation Antenna sharer with a ladder filter
US8373331B2 (en) 2010-09-15 2013-02-12 Visteon Global Technologies, Inc. Use of piezo motor to operate a ring pointer over display
CN103166502B (zh) * 2013-01-30 2015-12-02 东南大学 空间调相环形行波超声波电机及其控制方法
JPWO2015005188A1 (ja) * 2013-07-08 2017-03-02 株式会社村田製作所 アクチュエータ
EP3127231A4 (en) * 2014-04-02 2018-01-03 PCB Motor Aps A stator and a motor
DE202014008041U1 (de) 2014-10-10 2014-11-03 Leica Geosystems Ag Vermessungsgerät mit Wanderwellen-Antrieb
US10393454B2 (en) 2016-09-28 2019-08-27 The Boeing Company Valve system
CN106533250B (zh) * 2016-12-21 2018-08-24 深圳大学 一种多定子平面阵列结构的超声波电机
CN106533253B (zh) * 2016-12-21 2018-07-31 深圳大学 一种多定子轴向叠层的超声波电机
TWI647901B (zh) * 2017-06-22 2019-01-11 中原大學 線性壓電馬達及其滑台傳動系統
US11522473B2 (en) * 2017-10-18 2022-12-06 Nikon Corporation Vibration wave motor and optical device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0569673A1 (de) * 1992-05-15 1993-11-18 Daimler-Benz Aktiengesellschaft Ultraschallwanderwellenmotor mit formschlüssiger Anregung von Wanderwellen
US5471108A (en) * 1993-02-05 1995-11-28 Imra Europe Sa And Techsonic Realization process of a distribution network of electric signals, obtained distribution network and piezoelectric motor including such a network
EP1009095A1 (en) * 1997-04-09 2000-06-14 Seiko Instruments Inc. Ultrasonic motor and electronic apparatus with ultrasonic motor

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59110389A (ja) * 1982-12-16 1984-06-26 Canon Inc 振動波モ−タ
JPS59117473A (ja) * 1982-12-21 1984-07-06 Canon Inc 振動波モ−タ
JPS59201685A (ja) * 1983-04-30 1984-11-15 Canon Inc 振動波モ−タ
JPS6051477A (ja) * 1983-08-26 1985-03-22 Seiko Instr & Electronics Ltd 圧電モ−タ
US4634916A (en) * 1984-10-02 1987-01-06 Ngk Spark Plug Co., Ltd. Piezoelectric rotary driver
US4771203A (en) * 1986-02-24 1988-09-13 Canon Kabushiki Kaisha Vibration wave motor
JP2611296B2 (ja) * 1987-12-29 1997-05-21 アイシン精機株式会社 超音波モータ
JPH02139071A (ja) * 1988-11-18 1990-05-29 Ngk Spark Plug Co Ltd 超音波捩れ振動子
JPH02211070A (ja) * 1989-02-07 1990-08-22 Nec Corp 圧電モータ
WO1991004584A1 (en) * 1989-09-08 1991-04-04 Massachusetts Institute Of Technology Miniature actuator
JPH0421371A (ja) * 1990-05-15 1992-01-24 Canon Inc 振動波モータ
US5172023A (en) * 1990-11-09 1992-12-15 Kabushiki Kaisha Toyota Chuo Kenkyusho Ultrasonic motor
CA2081094A1 (en) * 1992-02-18 1993-08-19 Gordon Walter Culp Walking toothed actuator
DE4216273C2 (de) * 1992-05-16 1996-06-05 Daimler Benz Ag Wanderwellenmotor zum Betrieb mit unterschiedlichen Schwingungsformen
JP3088576B2 (ja) * 1992-11-10 2000-09-18 キヤノン株式会社 集積化アクチュエータを備えた走査型トンネル顕微鏡および前記集積化アクチュエータを備えた情報処理装置
FR2715780B1 (fr) * 1994-02-01 1996-04-05 Imra Europe Sa Stator de moteur rotatif piézoélectrique et moteur rotatif piézoélectrique comportant un tel stator.
DE4438570A1 (de) 1994-10-28 1996-05-02 Bosch Gmbh Robert Wanderwellenmotor
US5872418A (en) * 1994-10-31 1999-02-16 Pi Ceramic Gmbh Piezoelectric motor
DE19605214A1 (de) * 1995-02-23 1996-08-29 Bosch Gmbh Robert Ultraschallantriebselement
JPH11187677A (ja) * 1997-12-19 1999-07-09 Canon Inc 振動装置、振動型駆動装置およびこれを用いた装置
JPH11191970A (ja) * 1997-12-25 1999-07-13 Asmo Co Ltd 超音波モータ
JP2969447B2 (ja) * 1998-01-29 1999-11-02 セイコーインスツルメンツ株式会社 超音波モータ及び超音波モータの製造方法
US6370964B1 (en) 1998-11-23 2002-04-16 The Board Of Trustees Of The Leland Stanford Junior University Diagnostic layer and methods for detecting structural integrity of composite and metallic materials
US6865140B2 (en) * 2003-03-06 2005-03-08 General Electric Company Mosaic arrays using micromachined ultrasound transducers

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0569673A1 (de) * 1992-05-15 1993-11-18 Daimler-Benz Aktiengesellschaft Ultraschallwanderwellenmotor mit formschlüssiger Anregung von Wanderwellen
US5471108A (en) * 1993-02-05 1995-11-28 Imra Europe Sa And Techsonic Realization process of a distribution network of electric signals, obtained distribution network and piezoelectric motor including such a network
EP1009095A1 (en) * 1997-04-09 2000-06-14 Seiko Instruments Inc. Ultrasonic motor and electronic apparatus with ultrasonic motor

Also Published As

Publication number Publication date
JP2009514491A (ja) 2009-04-02
EP1941608B1 (en) 2013-02-13
WO2007048412A2 (en) 2007-05-03
US20080309193A1 (en) 2008-12-18
US7723900B2 (en) 2010-05-25
WO2007048412A3 (en) 2007-06-07
JP5265370B2 (ja) 2013-08-14
KR20080074906A (ko) 2008-08-13
EP1941608A2 (en) 2008-07-09
CN101297470A (zh) 2008-10-29
HK1122408A1 (en) 2009-05-15
CN101297470B (zh) 2013-06-12

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