JP2009506540A - 堆積された障壁層を備えたセミコンダクタ・オン・グラスインシュレータ - Google Patents
堆積された障壁層を備えたセミコンダクタ・オン・グラスインシュレータ Download PDFInfo
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- 239000000758 substrate Substances 0.000 claims abstract description 81
- 238000000034 method Methods 0.000 claims abstract description 57
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 66
- 239000010703 silicon Substances 0.000 claims description 66
- 229910052710 silicon Inorganic materials 0.000 claims description 65
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 35
- 239000000377 silicon dioxide Substances 0.000 claims description 16
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 10
- 238000000926 separation method Methods 0.000 claims description 8
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims description 7
- 229910001936 tantalum oxide Inorganic materials 0.000 claims description 7
- 230000003647 oxidation Effects 0.000 claims description 6
- 238000007254 oxidation reaction Methods 0.000 claims description 6
- 238000005868 electrolysis reaction Methods 0.000 claims description 5
- 229910000449 hafnium oxide Inorganic materials 0.000 claims description 5
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 claims description 5
- 238000011065 in-situ storage Methods 0.000 claims description 5
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- 238000012360 testing method Methods 0.000 description 5
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- -1 oxygen ions Chemical class 0.000 description 4
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- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 229910052732 germanium Inorganic materials 0.000 description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 3
- 150000002431 hydrogen Chemical class 0.000 description 3
- 230000005012 migration Effects 0.000 description 3
- 238000013508 migration Methods 0.000 description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- 238000010306 acid treatment Methods 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
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- 239000001307 helium Substances 0.000 description 2
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- 238000010849 ion bombardment Methods 0.000 description 2
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- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
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- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 150000001342 alkaline earth metals Chemical class 0.000 description 1
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- 238000005336 cracking Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- GWWPLLOVYSCJIO-UHFFFAOYSA-N dialuminum;calcium;disilicate Chemical compound [Al+3].[Al+3].[Ca+2].[O-][Si]([O-])([O-])[O-].[O-][Si]([O-])([O-])[O-] GWWPLLOVYSCJIO-UHFFFAOYSA-N 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- JSKIRARMQDRGJZ-UHFFFAOYSA-N dimagnesium dioxido-bis[(1-oxido-3-oxo-2,4,6,8,9-pentaoxa-1,3-disila-5,7-dialuminabicyclo[3.3.1]nonan-7-yl)oxy]silane Chemical compound [Mg++].[Mg++].[O-][Si]([O-])(O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2)O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2 JSKIRARMQDRGJZ-UHFFFAOYSA-N 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
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- 238000005566 electron beam evaporation Methods 0.000 description 1
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- 229910052863 mullite Inorganic materials 0.000 description 1
- 239000011224 oxide ceramic Substances 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
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- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
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- 238000002207 thermal evaporation Methods 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
- H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
- H01L21/76254—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Thin Film Transistor (AREA)
- Recrystallisation Techniques (AREA)
- Element Separation (AREA)
Abstract
Description
IV-V族半導体等のような他のいずれかの形式の半導体であってもよい。これらの材料の例は、シリコン(Si)、ゲルマニウムがドープされたシリコン(SiGe)、炭化シリコン(SiC)、ゲルマニウム(Ge)、ガリウム砒素(GaAs)、GaPおよびInPを含む。
102 ガラス基板
103 障壁層
104 シリコン層
120 シリコンウエファ
122 剥離層
Claims (10)
- 1枚のガラス基板および1枚の半導体ウエファのうちの少なくとも一方の上に、約60nmから約600nmまでの間の全厚さを有する1層または複数層の障壁層を直接的または間接的に堆積させ、
前記半導体ウエファ内に1層の剥離層を生成させ、
前記半導体ウエファ、前記剥離層、前記1層または複数層の障壁層および前記ガラス基板を含む中間構造を形成し、
電解法を用いて前記中間構造を接合し、
前記接合されたガラス基板、障壁層および剥離層が前記半導体ウエファから分離するように、前記剥離層に対し応力を印加する、
諸ステップを含むことを特徴とする、セミコンダクタ・オン・グラス構造を形成する方法。 - 前記ガラス基板および半導体ウエファのうちの少なくとも一方の上に1層の障壁層を形成するステップが、前記ガラス基板および半導体ウエファのうちの少なくとも一方に対し、化学蒸着法を用いて1種類の障壁材料にてコーティングを施すことを含むことを特徴とする請求項1記載の方法。
- 前記剥離層を前記障壁層に接合するのに先立って、前記剥離層を酸化させるステップをさらに含み、該酸化ステップが、約25℃から約150℃までの間の温度において実行されることを特徴とする請求項1記載の方法。
- 前記接合ステップが、
前記ガラス基板および半導体ウエファのうちの少なくとも一方を加熱し、
前記ガラス基板を、前記剥離層および前記1層または複数層の障壁層を介して直接的または間接的に前記半導体ウエファに接触させ、
前記ガラス基板と前記半導体ウエファとの間に電圧を印加して前記接合を誘起させる、
ことを含むことを特徴とする請求項1記載の方法。 - 前記応力が、前記接合されたガラス基板、剥離層および半導体ウエファを、前記剥離層において割れが実質的に発生するように冷却することによって誘起され、前記分離が、前記ガラス基板、前記障壁層および前記剥離層を含む構造を生じさせる結果となることを特徴とする請求項1記載の方法。
- 前記半導体ウエファ上に1層の障壁層を形成するステップが、熱酸化法、化学蒸着法、ゾル・ゲル法およびスパッタリング法のうちの少なくとも一つを用いて、1種類の障壁材料にてコーティングを施すことを含むことを特徴とする請求項2記載の方法。
- 前記障壁層が、シリカ、酸窒化シリコン、ジルコニア、酸化タンタルおよび酸化ハフニウムのうちの少なくとも一つを含むことを特徴とする請求項2記載の方法。
- 前記接合ステップが、
前記ガラス基板および前記半導体ウエファのうちの少なくとも一方を加熱し、
前記ガラス基板を、前記剥離層および前記1層または複数層の障壁層を介して直接的または間接的に前記半導体ウエファに接触させ、
前記ガラス基板と前記半導体ウエファとの間に電圧を印加して前記接合を誘起させる、
ことを含むことを特徴とする請求項2記載の方法。 - 1枚のガラス基板、
1層の半導体材料層、
前記ガラス基板と前記半導体材料との電解法による接合の結果として前記ガラス基板と前記半導体材料との間に生じる少なくとも1層のその場の障壁層、および
前記ガラス基板と前記半導体材料との間に配置された、約60nmから約600nmまでの間の厚さを有する1層または複数層の堆積された障壁層、
を備えていることを特徴とする、シリコン・オン・インシュレータ構造。 - 前記1層または複数層の堆積された障壁層が、シリカ、酸窒化シリコン、ジルコニア、酸化タンタル、および酸化ハフニウムのうちの少なくとも一つから形成されていることを特徴とする請求項9記載のシリコン・オン・インシュレータ構造。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/213,130 US7268051B2 (en) | 2005-08-26 | 2005-08-26 | Semiconductor on glass insulator with deposited barrier layer |
PCT/US2006/031726 WO2007024549A2 (en) | 2005-08-26 | 2006-08-15 | Semiconductor on glass insulator with deposited barrier layer |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2009506540A true JP2009506540A (ja) | 2009-02-12 |
Family
ID=37772148
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2008527973A Pending JP2009506540A (ja) | 2005-08-26 | 2006-08-15 | 堆積された障壁層を備えたセミコンダクタ・オン・グラスインシュレータ |
Country Status (7)
Country | Link |
---|---|
US (1) | US7268051B2 (ja) |
EP (1) | EP1929511B1 (ja) |
JP (1) | JP2009506540A (ja) |
KR (1) | KR101291956B1 (ja) |
CN (1) | CN101248515B (ja) |
TW (1) | TWI305014B (ja) |
WO (1) | WO2007024549A2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011081146A1 (ja) * | 2009-12-28 | 2011-07-07 | 信越化学工業株式会社 | 応力を低減したsos基板 |
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DE102005052358A1 (de) * | 2005-09-01 | 2007-03-15 | Osram Opto Semiconductors Gmbh | Verfahren zum lateralen Zertrennen eines Halbleiterwafers und optoelektronisches Bauelement |
DE102005052357A1 (de) * | 2005-09-01 | 2007-03-15 | Osram Opto Semiconductors Gmbh | Verfahren zum lateralen Zertrennen eines Halbleiterwafers und optoelektronisches Bauelement |
US7619283B2 (en) | 2007-04-20 | 2009-11-17 | Corning Incorporated | Methods of fabricating glass-based substrates and apparatus employing same |
EP1993128A3 (en) * | 2007-05-17 | 2010-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing soi substrate |
US7696058B2 (en) * | 2007-10-31 | 2010-04-13 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing SOI substrate |
JP5548395B2 (ja) * | 2008-06-25 | 2014-07-16 | 株式会社半導体エネルギー研究所 | Soi基板の作製方法 |
JP5700617B2 (ja) * | 2008-07-08 | 2015-04-15 | 株式会社半導体エネルギー研究所 | Soi基板の作製方法 |
KR101058105B1 (ko) * | 2009-04-06 | 2011-08-24 | 삼성모바일디스플레이주식회사 | 액티브 매트릭스 기판의 제조방법 및 유기 발광 표시장치의 제조방법 |
KR101127574B1 (ko) * | 2009-04-06 | 2012-03-23 | 삼성모바일디스플레이주식회사 | 액티브 매트릭스 기판의 제조방법 및 유기 발광 표시장치의 제조방법 |
US8674468B2 (en) * | 2009-05-29 | 2014-03-18 | Carestream Health, Inc. | Imaging array with dual height semiconductor and method of making same |
US8129810B2 (en) * | 2009-06-19 | 2012-03-06 | Carestream Health, Inc. | Continuous large area imaging and display arrays using readout arrays fabricated in silicon-on-glass substrates |
US7948017B2 (en) * | 2009-06-19 | 2011-05-24 | Carestream Health, Inc. | Digital radiography imager with buried interconnect layer in silicon-on-glass and method of fabricating same |
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DE102009042886A1 (de) | 2009-09-24 | 2011-05-26 | Schott Ag | Verfahren zur Herstellung einer Solarzelle oder eines Transistors mit einer kristallinen Silizium-Dünnschicht |
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- 2006-08-15 CN CN2006800308497A patent/CN101248515B/zh not_active Expired - Fee Related
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Also Published As
Publication number | Publication date |
---|---|
EP1929511B1 (en) | 2016-04-13 |
CN101248515A (zh) | 2008-08-20 |
CN101248515B (zh) | 2012-03-28 |
KR20080049068A (ko) | 2008-06-03 |
EP1929511A4 (en) | 2009-09-23 |
US7268051B2 (en) | 2007-09-11 |
WO2007024549A3 (en) | 2007-09-07 |
EP1929511A2 (en) | 2008-06-11 |
KR101291956B1 (ko) | 2013-08-09 |
TW200721312A (en) | 2007-06-01 |
WO2007024549A2 (en) | 2007-03-01 |
US20070048968A1 (en) | 2007-03-01 |
TWI305014B (en) | 2009-01-01 |
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