JP2009503873A - 分割電極ゲートトレンチ・パワーデバイス - Google Patents
分割電極ゲートトレンチ・パワーデバイス Download PDFInfo
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- JP2009503873A JP2009503873A JP2008524187A JP2008524187A JP2009503873A JP 2009503873 A JP2009503873 A JP 2009503873A JP 2008524187 A JP2008524187 A JP 2008524187A JP 2008524187 A JP2008524187 A JP 2008524187A JP 2009503873 A JP2009503873 A JP 2009503873A
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- 239000004065 semiconductor Substances 0.000 claims abstract description 45
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 19
- 238000004519 manufacturing process Methods 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims description 3
- 239000012212 insulator Substances 0.000 claims 4
- 239000004020 conductor Substances 0.000 claims 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 230000001590 oxidative effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 10
- 238000009413 insulation Methods 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910021332 silicide Inorganic materials 0.000 description 5
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42356—Disposition, e.g. buried gate electrode
- H01L29/4236—Disposition, e.g. buried gate electrode within a trench, e.g. trench gate electrode, groove gate electrode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66674—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/66712—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/66734—Vertical DMOS transistors, i.e. VDMOS transistors with a step of recessing the gate electrode, e.g. to form a trench gate electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
- H01L21/28123—Lithography-related aspects, e.g. sub-lithography lengths; Isolation-related aspects, e.g. to solve problems arising at the crossing with the side of the device isolation; Planarisation aspects
- H01L21/2815—Lithography-related aspects, e.g. sub-lithography lengths; Isolation-related aspects, e.g. to solve problems arising at the crossing with the side of the device isolation; Planarisation aspects part or whole of the electrode is a sidewall spacer or made by a similar technique, e.g. transformation under mask, plating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42364—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the insulating layer, e.g. thickness or uniformity
- H01L29/42368—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the insulating layer, e.g. thickness or uniformity the thickness being non-uniform
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/4916—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a silicon layer, e.g. polysilicon doped with boron, phosphorus or nitrogen
- H01L29/4925—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a silicon layer, e.g. polysilicon doped with boron, phosphorus or nitrogen with a multiple layer structure, e.g. several silicon layers with different crystal structure or grain arrangement
- H01L29/4933—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a silicon layer, e.g. polysilicon doped with boron, phosphorus or nitrogen with a multiple layer structure, e.g. several silicon layers with different crystal structure or grain arrangement with a silicide layer contacting the silicon layer, e.g. Polycide gate
Abstract
【解決手段】 ゲート絶縁ライナーに沿って延びるゲートライナー、および、2つのゲートライナーの間にスペースを設けている絶縁ブロックを備えるパワー半導体デバイス。
【選択図】図1
Description
本出願は、「SPLIT ELECTRODE GATE TRENCH MOSFET STRUCTURE AND PROCESS AND SF6 ETCH PROCESS(分割電極ゲートトレンチMOSFET構造およびプロセスおよびSF6エッチング・プロセス)」という名称の、2005年7月27日に出願された米国特許仮出願第60/702919号に基き、かつその利益を請求するものであって、この仮出願に対する優先権を主張し、かつその開示内容を、参照のために、本明細書に組み込まれるものである。
12 半導体ボディ
14 ゲート酸化膜/絶縁ライナー
16 ゲート電極
16’ フィンガー(ゲートライナー)
16” コネクタ
18 酸化物/絶縁ブロック
20 シリサイド・ボディ
22 ベース領域
24 ドリフト領域
26 ソース領域
28 ソース電極
30 コンタクト領域
32 絶縁キャップ
34 シリコン基板
36 ドレイン電極
38 ハードマスク
40 多結晶シリコン(開口)
42 多結晶シリコンライナー
44 酸化物フィラー
46 多結晶シリコン(酸化物ボディ)
50 トレンチ酸化物ボディ
51 多結晶シリコンボディ
Claims (18)
- 一方の導電型のドリフト領域と他方の導電型のベース領域とを含む半導体ボディと、
少なくとも前記ベース領域を貫通して延びるゲートトレンチと、
前記ゲートトレンチの少なくとも側壁を覆っているゲート絶縁ライナーと、
前記ゲート絶縁ライナーの各々に隣接しているゲート電極と、
前記ゲート電極の間に、かつ、各ゲート電極に隣接して配置されている絶縁ブロックと、
前記ゲートトレンチに隣接する、前記一方の導電型の導電性の領域と、
前記導電性の領域に電気的に接続された第1のパワー電極、
とを備えてなるパワー半導体デバイス。 - 前記ゲート電極を接続しているコネクタをさらに備えてなる、請求項1に記載のデバイス。
- ゲート電極に電気的に接続されたゲートランナーをさらに備え、前記各ゲート電極は、前記ゲートランナーとの電気的コンタクトを形成するシリサイド化された部分を含んでいる、請求項1に記載のデバイス。
- 前記ゲート電極は、前記半導体ボディよりも盛り上がっている、請求項1に記載のデバイス。
- パワーMOSFETである、請求項1に記載のデバイス。
- 前記ゲートトレンチの底壁に絶縁体ボディをさらに備え、かつこの絶縁体ボディは、前記ゲート絶縁ライナーよりも厚い、請求項1に記載のデバイス。
- 前記ゲート絶縁ライナー、前記絶縁ブロック、および、前記絶縁体ボディは、酸化物から成る、請求項1に記載のデバイス。
- ゲートランナーをさらに備えてなる、前記ゲート電極の各々は、低抵抗率のシリサイド化された部分を通して、ゲートランナーに電気的に接続されている、請求項1に記載のデバイス。
- 前記ゲート電極をゲートランナーに接続しているシリサイド化されたコネクタを、さらに備えてなる、請求項1に記載のデバイス。
- 前記一方の導電型の基板であって、その上に前記半導体ボディが配置されている基板をさらに備えてなり、また、該基板に電気的に接続された第2のパワー電極をさらに備えてなる、請求項1に記載のデバイス。
- 前記第1のパワー電極がソース電極であり、前記第2のパワー電極がドレイン電極であり、前記導電性の領域がソース領域である、請求項10に記載のデバイス。
- ドリフト領域と、このドリフト領域に隣接したベース領域とを備える半導体ボディに、トレンチを形成するステップと、
前記トレンチの少なくとも側壁を酸化させて、該側壁に隣接したゲートライナーを形成するステップと、
前記酸化した側壁を導電材料で被覆して、ゲートライナーを形成するステップと、
前記ゲートライナーの間で、かつ、各ゲートライナーに隣接して、絶縁ブロックをデポジットするステップ、
とを有する、パワー半導体デバイスの製造方法。 - 前記トレンチの底壁に、前記ゲートライナーよりも厚い絶縁体ボディを形成するステップをさらに含む、請求項12に記載の方法。
- 前記導電材料は、導電性の多結晶シリコンを有する、請求項12に記載の方法。
- 前記ゲートライナーを、導電性のコネクタに連結させるステップをさらに含む、請求項12に記載の方法。
- 前記ゲートライナーを、シリサイド化されたゲート部分を通して、ゲートランナーに接続するステップをさらに含む、請求項12に記載の方法。
- 前記ゲートライナーは、前記半導体ボディよりも盛り上がっている、請求項12に記載の方法。
- 前記コネクタが、前記半導体ボディよりも盛り上がっている、請求項15に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US70291905P | 2005-07-27 | 2005-07-27 | |
US11/491,743 US7423317B2 (en) | 2005-07-27 | 2006-07-24 | Split electrode gate trench power device |
PCT/US2006/029384 WO2007014321A2 (en) | 2005-07-27 | 2006-07-27 | Split electrode gate trench power device |
Publications (1)
Publication Number | Publication Date |
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JP2009503873A true JP2009503873A (ja) | 2009-01-29 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2008524187A Pending JP2009503873A (ja) | 2005-07-27 | 2006-07-27 | 分割電極ゲートトレンチ・パワーデバイス |
Country Status (5)
Country | Link |
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US (1) | US7423317B2 (ja) |
JP (1) | JP2009503873A (ja) |
DE (1) | DE112006001969T5 (ja) |
TW (1) | TWI341072B (ja) |
WO (1) | WO2007014321A2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2009164183A (ja) * | 2007-12-28 | 2009-07-23 | Toshiba Corp | 半導体装置及びその製造方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01192174A (ja) * | 1988-01-27 | 1989-08-02 | Hitachi Ltd | 半導体装置の製造方法 |
JPH11163342A (ja) * | 1997-11-27 | 1999-06-18 | Nec Corp | 半導体装置 |
JP2002368220A (ja) * | 2001-06-04 | 2002-12-20 | Hitachi Ltd | 半導体装置及びこれを用いた電源システム |
JP2003158268A (ja) * | 2001-11-21 | 2003-05-30 | Yokogawa Electric Corp | トレンチ型2重拡散mos電界効果トランジスタ及びその製造方法 |
JP2003174167A (ja) * | 2001-12-06 | 2003-06-20 | Hitachi Ltd | 半導体装置及びその製造方法 |
WO2004055904A1 (en) * | 2002-12-14 | 2004-07-01 | Koninklijke Philips Electronics N.V. | Vertical insulated gate transistor and manufacturing method |
JP2007035841A (ja) * | 2005-07-26 | 2007-02-08 | Toshiba Corp | 半導体装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6387803B2 (en) * | 1997-01-29 | 2002-05-14 | Ultratech Stepper, Inc. | Method for forming a silicide region on a silicon body |
US6573569B2 (en) * | 2001-11-06 | 2003-06-03 | Fairchild Semiconductor Corporation | Trench MOSFET with low gate charge |
JP3954541B2 (ja) * | 2003-08-05 | 2007-08-08 | 株式会社東芝 | 半導体装置及びその製造方法 |
-
2006
- 2006-07-24 US US11/491,743 patent/US7423317B2/en active Active
- 2006-07-26 TW TW095127305A patent/TWI341072B/zh active
- 2006-07-27 DE DE112006001969T patent/DE112006001969T5/de not_active Withdrawn
- 2006-07-27 WO PCT/US2006/029384 patent/WO2007014321A2/en active Application Filing
- 2006-07-27 JP JP2008524187A patent/JP2009503873A/ja active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01192174A (ja) * | 1988-01-27 | 1989-08-02 | Hitachi Ltd | 半導体装置の製造方法 |
JPH11163342A (ja) * | 1997-11-27 | 1999-06-18 | Nec Corp | 半導体装置 |
JP2002368220A (ja) * | 2001-06-04 | 2002-12-20 | Hitachi Ltd | 半導体装置及びこれを用いた電源システム |
JP2003158268A (ja) * | 2001-11-21 | 2003-05-30 | Yokogawa Electric Corp | トレンチ型2重拡散mos電界効果トランジスタ及びその製造方法 |
JP2003174167A (ja) * | 2001-12-06 | 2003-06-20 | Hitachi Ltd | 半導体装置及びその製造方法 |
WO2004055904A1 (en) * | 2002-12-14 | 2004-07-01 | Koninklijke Philips Electronics N.V. | Vertical insulated gate transistor and manufacturing method |
JP2007035841A (ja) * | 2005-07-26 | 2007-02-08 | Toshiba Corp | 半導体装置 |
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Publication number | Publication date |
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WO2007014321A3 (en) | 2008-01-03 |
WO2007014321A2 (en) | 2007-02-01 |
US7423317B2 (en) | 2008-09-09 |
TWI341072B (en) | 2011-04-21 |
TW200711270A (en) | 2007-03-16 |
DE112006001969T5 (de) | 2008-07-31 |
US20070023829A1 (en) | 2007-02-01 |
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