JP2009274067A5 - - Google Patents

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Publication number
JP2009274067A5
JP2009274067A5 JP2009116981A JP2009116981A JP2009274067A5 JP 2009274067 A5 JP2009274067 A5 JP 2009274067A5 JP 2009116981 A JP2009116981 A JP 2009116981A JP 2009116981 A JP2009116981 A JP 2009116981A JP 2009274067 A5 JP2009274067 A5 JP 2009274067A5
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JP
Japan
Prior art keywords
region
valve
valve unit
lower substrate
overlapping portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2009116981A
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English (en)
Japanese (ja)
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JP2009274067A (ja
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Publication date
Priority claimed from KR1020080044728A external-priority patent/KR100955481B1/ko
Application filed filed Critical
Publication of JP2009274067A publication Critical patent/JP2009274067A/ja
Publication of JP2009274067A5 publication Critical patent/JP2009274067A5/ja
Pending legal-status Critical Current

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JP2009116981A 2008-05-14 2009-05-13 弁ユニット、これを備えた微細流動装置、及び該弁ユニットの製造方法 Pending JP2009274067A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020080044728A KR100955481B1 (ko) 2008-05-14 2008-05-14 밸브 유닛, 이를 구비한 미세유동장치, 및 상기 밸브유닛의 제조방법

Publications (2)

Publication Number Publication Date
JP2009274067A JP2009274067A (ja) 2009-11-26
JP2009274067A5 true JP2009274067A5 (enExample) 2012-12-06

Family

ID=40874736

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009116981A Pending JP2009274067A (ja) 2008-05-14 2009-05-13 弁ユニット、これを備えた微細流動装置、及び該弁ユニットの製造方法

Country Status (5)

Country Link
US (1) US8429821B2 (enExample)
EP (1) EP2119505B1 (enExample)
JP (1) JP2009274067A (enExample)
KR (1) KR100955481B1 (enExample)
AT (1) ATE537900T1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8779533B2 (en) * 2011-07-12 2014-07-15 Robert Bosch Gmbh MEMS with single use valve and method of operation
KR102176587B1 (ko) 2013-10-15 2020-11-10 삼성전자주식회사 시료분석장치, 시료분석방법, 및 밸브의 동적 작동 방법
USD841186S1 (en) * 2015-12-23 2019-02-19 Tunghai University Biochip

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6063589A (en) 1997-05-23 2000-05-16 Gamera Bioscience Corporation Devices and methods for using centripetal acceleration to drive fluid movement on a microfluidics system
KR100738113B1 (ko) 2006-05-10 2007-07-12 삼성전자주식회사 상전이형 밸브 및 그 제작방법
EP1884284A1 (en) * 2006-08-04 2008-02-06 Samsung Electronics Co., Ltd. Closing valve unit and reaction apparatus having closing valve
KR100763924B1 (ko) 2006-08-16 2007-10-05 삼성전자주식회사 밸브 유닛, 이를 구비한 반응 장치 및, 채널에 밸브를형성하는 방법
US8464760B2 (en) 2006-08-16 2013-06-18 Samsung Electronic Co., Ltd. Valve unit, reaction apparatus with the same, and method of forming valve in channel
KR101258434B1 (ko) * 2007-05-03 2013-05-02 삼성전자주식회사 미세유동 시스템 및,이의 제조방법

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