KR100955481B1 - 밸브 유닛, 이를 구비한 미세유동장치, 및 상기 밸브유닛의 제조방법 - Google Patents

밸브 유닛, 이를 구비한 미세유동장치, 및 상기 밸브유닛의 제조방법 Download PDF

Info

Publication number
KR100955481B1
KR100955481B1 KR1020080044728A KR20080044728A KR100955481B1 KR 100955481 B1 KR100955481 B1 KR 100955481B1 KR 1020080044728 A KR1020080044728 A KR 1020080044728A KR 20080044728 A KR20080044728 A KR 20080044728A KR 100955481 B1 KR100955481 B1 KR 100955481B1
Authority
KR
South Korea
Prior art keywords
region
valve
valve material
valve unit
lower substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020080044728A
Other languages
English (en)
Korean (ko)
Other versions
KR20090118753A (ko
Inventor
박종면
이정건
Original Assignee
삼성전자주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전자주식회사 filed Critical 삼성전자주식회사
Priority to KR1020080044728A priority Critical patent/KR100955481B1/ko
Priority to JP2009116981A priority patent/JP2009274067A/ja
Priority to AT09160093T priority patent/ATE537900T1/de
Priority to US12/464,938 priority patent/US8429821B2/en
Priority to EP09160093A priority patent/EP2119505B1/en
Publication of KR20090118753A publication Critical patent/KR20090118753A/ko
Application granted granted Critical
Publication of KR100955481B1 publication Critical patent/KR100955481B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502738Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by integrated valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K99/0001Microvalves
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/08Geometry, shape and general structure
    • B01L2300/0803Disc shape
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/08Geometry, shape and general structure
    • B01L2300/0861Configuration of multiple channels and/or chambers in a single devices
    • B01L2300/0864Configuration of multiple channels and/or chambers in a single devices comprising only one inlet and multiple receiving wells, e.g. for separation, splitting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/08Geometry, shape and general structure
    • B01L2300/0887Laminated structure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/12Specific details about materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/18Means for temperature control
    • B01L2300/1861Means for temperature control using radiation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00Moving or stopping fluids
    • B01L2400/04Moving fluids with specific forces or mechanical means
    • B01L2400/0403Moving fluids with specific forces or mechanical means specific forces
    • B01L2400/0409Moving fluids with specific forces or mechanical means specific forces centrifugal forces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00Moving or stopping fluids
    • B01L2400/06Valves, specific forms thereof
    • B01L2400/0677Valves, specific forms thereof phase change valves; Meltable, freezing, dissolvable plugs; Destructible barriers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49405Valve or choke making

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Hematology (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Micromachines (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
KR1020080044728A 2008-05-14 2008-05-14 밸브 유닛, 이를 구비한 미세유동장치, 및 상기 밸브유닛의 제조방법 Active KR100955481B1 (ko)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1020080044728A KR100955481B1 (ko) 2008-05-14 2008-05-14 밸브 유닛, 이를 구비한 미세유동장치, 및 상기 밸브유닛의 제조방법
JP2009116981A JP2009274067A (ja) 2008-05-14 2009-05-13 弁ユニット、これを備えた微細流動装置、及び該弁ユニットの製造方法
AT09160093T ATE537900T1 (de) 2008-05-14 2009-05-13 Verfahren zur herstellung einer ventileinheit
US12/464,938 US8429821B2 (en) 2008-05-14 2009-05-13 Method of fabricating valve unit in a microfluidic device
EP09160093A EP2119505B1 (en) 2008-05-14 2009-05-13 Method of fabricating a valve unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020080044728A KR100955481B1 (ko) 2008-05-14 2008-05-14 밸브 유닛, 이를 구비한 미세유동장치, 및 상기 밸브유닛의 제조방법

Publications (2)

Publication Number Publication Date
KR20090118753A KR20090118753A (ko) 2009-11-18
KR100955481B1 true KR100955481B1 (ko) 2010-04-30

Family

ID=40874736

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080044728A Active KR100955481B1 (ko) 2008-05-14 2008-05-14 밸브 유닛, 이를 구비한 미세유동장치, 및 상기 밸브유닛의 제조방법

Country Status (5)

Country Link
US (1) US8429821B2 (enExample)
EP (1) EP2119505B1 (enExample)
JP (1) JP2009274067A (enExample)
KR (1) KR100955481B1 (enExample)
AT (1) ATE537900T1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8779533B2 (en) * 2011-07-12 2014-07-15 Robert Bosch Gmbh MEMS with single use valve and method of operation
KR102176587B1 (ko) 2013-10-15 2020-11-10 삼성전자주식회사 시료분석장치, 시료분석방법, 및 밸브의 동적 작동 방법
USD841186S1 (en) * 2015-12-23 2019-02-19 Tunghai University Biochip

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003270252A (ja) 1997-05-23 2003-09-25 Gamera Bioscience Corp ミクロ流体工学システムでの流動運動を駆動するために向心的加速を使用するための装置および方法
KR100738113B1 (ko) 2006-05-10 2007-07-12 삼성전자주식회사 상전이형 밸브 및 그 제작방법
KR100763924B1 (ko) 2006-08-16 2007-10-05 삼성전자주식회사 밸브 유닛, 이를 구비한 반응 장치 및, 채널에 밸브를형성하는 방법
KR20080097763A (ko) * 2007-05-03 2008-11-06 삼성전자주식회사 미세유동 시스템 및,이의 제조방법

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1884284A1 (en) 2006-08-04 2008-02-06 Samsung Electronics Co., Ltd. Closing valve unit and reaction apparatus having closing valve
US8464760B2 (en) * 2006-08-16 2013-06-18 Samsung Electronic Co., Ltd. Valve unit, reaction apparatus with the same, and method of forming valve in channel

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003270252A (ja) 1997-05-23 2003-09-25 Gamera Bioscience Corp ミクロ流体工学システムでの流動運動を駆動するために向心的加速を使用するための装置および方法
KR100738113B1 (ko) 2006-05-10 2007-07-12 삼성전자주식회사 상전이형 밸브 및 그 제작방법
KR100763924B1 (ko) 2006-08-16 2007-10-05 삼성전자주식회사 밸브 유닛, 이를 구비한 반응 장치 및, 채널에 밸브를형성하는 방법
KR20080097763A (ko) * 2007-05-03 2008-11-06 삼성전자주식회사 미세유동 시스템 및,이의 제조방법

Also Published As

Publication number Publication date
US8429821B2 (en) 2013-04-30
EP2119505A1 (en) 2009-11-18
US20090282681A1 (en) 2009-11-19
EP2119505B1 (en) 2011-12-21
KR20090118753A (ko) 2009-11-18
JP2009274067A (ja) 2009-11-26
ATE537900T1 (de) 2012-01-15

Similar Documents

Publication Publication Date Title
KR101258434B1 (ko) 미세유동 시스템 및,이의 제조방법
KR101130698B1 (ko) 밸브 유닛과 이를 구비한 미세유동장치 및 밸브 유닛의 구동방법
KR100919400B1 (ko) 미세유동장치 및 그 제조방법
US9011795B2 (en) Valve unit, microfluidic device with the valve unit, and microfluidic substrate
US8119079B2 (en) Microfluidic apparatus having fluid container
KR101578149B1 (ko) 미세유체 제어용 밸브 유닛, 및 이의 제조방법
JP5171153B2 (ja) バルブユニット、これを備えた反応装置、及びチャンネルにバルブを形成する方法
CN101126465B (zh) 阀单元,具有该阀单元的反应装置以及在通道中形成阀的方法
KR100955481B1 (ko) 밸브 유닛, 이를 구비한 미세유동장치, 및 상기 밸브유닛의 제조방법
KR101473871B1 (ko) 미세유체 제어용 밸브 유닛의 제조방법, 미세유체 제어용밸브 유닛 및, 상기 밸브 유닛을 구비한 미세유동 장치
KR101391736B1 (ko) 미세유동 밸브, 상기 미세유동 밸브의 제조 방법 및 상기미세유동 밸브를 포함하는 미세유동 장치

Legal Events

Date Code Title Description
A201 Request for examination
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 20080514

PA0201 Request for examination
E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20090930

Patent event code: PE09021S01D

PG1501 Laying open of application
E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20100326

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20100422

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20100423

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
FPAY Annual fee payment
PR1001 Payment of annual fee

Payment date: 20130328

Start annual number: 4

End annual number: 4

PR1001 Payment of annual fee

Payment date: 20140328

Start annual number: 5

End annual number: 5

PR1001 Payment of annual fee

Payment date: 20150330

Start annual number: 6

End annual number: 6

FPAY Annual fee payment

Payment date: 20160330

Year of fee payment: 7

PR1001 Payment of annual fee

Payment date: 20160330

Start annual number: 7

End annual number: 7

FPAY Annual fee payment

Payment date: 20170330

Year of fee payment: 8

PR1001 Payment of annual fee

Payment date: 20170330

Start annual number: 8

End annual number: 8

FPAY Annual fee payment

Payment date: 20180329

Year of fee payment: 9

PR1001 Payment of annual fee

Payment date: 20180329

Start annual number: 9

End annual number: 9

FPAY Annual fee payment

Payment date: 20190328

Year of fee payment: 10

PR1001 Payment of annual fee

Payment date: 20190328

Start annual number: 10

End annual number: 10

PR1001 Payment of annual fee

Payment date: 20200330

Start annual number: 11

End annual number: 11

PR1001 Payment of annual fee

Payment date: 20210330

Start annual number: 12

End annual number: 12

PR1001 Payment of annual fee

Payment date: 20220330

Start annual number: 13

End annual number: 13

PR1001 Payment of annual fee

Payment date: 20230329

Start annual number: 14

End annual number: 14