JP2009257891A - 絶対位置測長型エンコーダ - Google Patents
絶対位置測長型エンコーダ Download PDFInfo
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- JP2009257891A JP2009257891A JP2008106131A JP2008106131A JP2009257891A JP 2009257891 A JP2009257891 A JP 2009257891A JP 2008106131 A JP2008106131 A JP 2008106131A JP 2008106131 A JP2008106131 A JP 2008106131A JP 2009257891 A JP2009257891 A JP 2009257891A
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- 238000005259 measurement Methods 0.000 title claims abstract description 19
- 238000012545 processing Methods 0.000 claims abstract description 15
- 238000001514 detection method Methods 0.000 claims abstract description 14
- 238000013461 design Methods 0.000 claims abstract description 7
- 239000006185 dispersion Substances 0.000 abstract description 11
- 238000010586 diagram Methods 0.000 description 11
- 238000003491 array Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 9
- 238000004364 calculation method Methods 0.000 description 6
- 238000003860 storage Methods 0.000 description 6
- 230000005856 abnormality Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000003321 amplification Effects 0.000 description 3
- 238000011109 contamination Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000003199 nucleic acid amplification method Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 230000032683 aging Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34746—Linear encoders
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34776—Absolute encoders with analogue or digital scales
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- Transmission And Conversion Of Sensor Element Output (AREA)
Abstract
【解決手段】擬似ランダム符号に基づいたABSパターン104を備えると共に、該ABSパターン104で明暗パターンを形成するスケール102と、該明暗パターンを受光する受光素子112と、該受光素子112から出力される信号SA1に従うデジタル信号SA3を、輝度が高いモードBと輝度が低いモードDの2つに分け、該2つのモードの間の分散(モード間分散)が最大となるしきい値kにより2値化処理を行うと共に、該2値化処理された値から前記ABSパターン104の最小線幅PABS単位で擬似ランダム符号を復号する2値化回路124と、該復号された擬似ランダム符号と前記擬似ランダム符号の設計値との相関を取ることで前記スケール102の受光素子112に対する絶対位置を算出する位置検出回路130と、を備える。
【選択図】図1
Description
102…スケール
104…ABSパターン(アブソリュートパターン)
106…INCパターン
108…発光素子
110…レンズ
110A〜110E…小レンズ
112…受光素子
114…ABS用受光素子アレイ
114A〜114E…小アレイ
116…INC用受光素子アレイ
118…信号処理回路
120、140…ノイズフィルタ・増幅回路
122…A/D変換回路
124…2値化回路
130…ABS位置検出回路(位置検出回路)
142…INC位置検出回路
144…絶対位置合成回路
SA1…ABS明暗信号
SA4…ABS復号信号
SA5…ABS位置信号
SI1…INC明暗信号
Sout…位置データ信号
Claims (3)
- 発光素子と、
擬似ランダム符号に基づいたアブソリュートパターンを備えると共に、前記発光素子からの投射光に該アブソリュートパターンで明暗パターンを形成するスケールと、
該明暗パターンを受光する受光素子と、
該受光素子から出力される信号に従うデジタル信号を、輝度が高いモードと輝度が低いモードの2つに分け、該2つのモードの間の分散が最大となるしきい値により2値化処理を行うと共に、該2値化処理された値から前記アブソリュートパターンの最小線幅単位で擬似ランダム符号を復号する2値化回路と、
該復号された擬似ランダム符号と前記擬似ランダム符号の設計値との相関を取ることで前記受光素子に対する前記スケールの絶対位置を算出する位置検出回路と、
を備えることを特徴とする絶対位置測長型エンコーダ。 - 前記スケールによって形成された明暗パターンは、複数のレンズが並列に繋がったレンズアレイを介して、受光素子上に結像されることを特徴とする請求項1に記載の絶対位置測長型エンコーダ。
- 前記2値化回路は、前記アブソリュートパターンの最小線幅周期で、前記2値化処理された値のそれぞれの総数を求めて、該総数の多いほうの値で、該最小線幅の符号を決定して復号することを特徴とする請求項1又は2に記載の絶対位置測長型エンコーダ。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008106131A JP5203024B2 (ja) | 2008-04-15 | 2008-04-15 | 絶対位置測長型エンコーダ |
US12/423,297 US8227744B2 (en) | 2008-04-15 | 2009-04-14 | Absolute position length measurement type encoder |
EP09157934.2A EP2110645B1 (en) | 2008-04-15 | 2009-04-15 | Absolute position length measurement type encoder |
Applications Claiming Priority (1)
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JP2008106131A JP5203024B2 (ja) | 2008-04-15 | 2008-04-15 | 絶対位置測長型エンコーダ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009257891A true JP2009257891A (ja) | 2009-11-05 |
JP5203024B2 JP5203024B2 (ja) | 2013-06-05 |
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JP2008106131A Expired - Fee Related JP5203024B2 (ja) | 2008-04-15 | 2008-04-15 | 絶対位置測長型エンコーダ |
Country Status (3)
Country | Link |
---|---|
US (1) | US8227744B2 (ja) |
EP (1) | EP2110645B1 (ja) |
JP (1) | JP5203024B2 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011237429A (ja) * | 2010-05-05 | 2011-11-24 | Mitsutoyo Corp | 光学式エンコーダおよび位置測定方法 |
EP2811263A2 (en) | 2013-06-07 | 2014-12-10 | Mitutoyo Corporation | Position detection encoder |
JP2015105849A (ja) * | 2013-11-29 | 2015-06-08 | キヤノン株式会社 | アブソリュートエンコーダ、信号処理方法、およびプログラム |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5103267B2 (ja) * | 2008-05-13 | 2012-12-19 | 株式会社ミツトヨ | 絶対位置測長型エンコーダ |
JP6533360B2 (ja) * | 2013-10-30 | 2019-06-19 | キヤノン株式会社 | 位置検出装置及びそれを有するレンズ装置及び撮影装置 |
JP6359340B2 (ja) * | 2014-05-27 | 2018-07-18 | 株式会社ミツトヨ | スケール及び光学式エンコーダ |
US10243668B2 (en) | 2016-04-27 | 2019-03-26 | Industrial Technology Research Institute | Positioning measurement device and the method thereof |
JP6723827B2 (ja) * | 2016-05-24 | 2020-07-15 | 株式会社ミツトヨ | エンコーダ |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003337941A (ja) * | 2002-05-20 | 2003-11-28 | Matsushita Electric Ind Co Ltd | 画像認識装置と画像認識方法とプログラム |
JP2006226987A (ja) * | 2005-01-18 | 2006-08-31 | Mitsutoyo Corp | 光電式エンコーダ、及び、そのスケール |
JP2007218691A (ja) * | 2006-02-15 | 2007-08-30 | Mitsutoyo Corp | 光電式エンコーダ |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4266125A (en) * | 1978-12-21 | 1981-05-05 | Hewlett-Packard Company | Optical shaft angle encoder |
JPS6482270A (en) | 1987-09-25 | 1989-03-28 | Omron Tateisi Electronics Co | Device for calculating binarization threshold value of image |
JPH0368081A (ja) | 1989-08-08 | 1991-03-25 | Toppan Printing Co Ltd | 二値化のための閾値設定方法及びその装置 |
US6279248B1 (en) * | 1999-09-22 | 2001-08-28 | Central Purchasing, Inc. | Digital measuring system having a multi-row encoder disk |
JP2001221633A (ja) * | 2000-02-09 | 2001-08-17 | Olympus Optical Co Ltd | 測距装置 |
GB0109057D0 (en) * | 2001-04-11 | 2001-05-30 | Renishaw Plc | Absolute postition measurement |
JP5021244B2 (ja) * | 2006-07-03 | 2012-09-05 | 株式会社ミツトヨ | 変位検出エンコーダ |
JP5011201B2 (ja) * | 2008-05-01 | 2012-08-29 | 株式会社ミツトヨ | 絶対位置測長型エンコーダ |
-
2008
- 2008-04-15 JP JP2008106131A patent/JP5203024B2/ja not_active Expired - Fee Related
-
2009
- 2009-04-14 US US12/423,297 patent/US8227744B2/en active Active
- 2009-04-15 EP EP09157934.2A patent/EP2110645B1/en not_active Not-in-force
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003337941A (ja) * | 2002-05-20 | 2003-11-28 | Matsushita Electric Ind Co Ltd | 画像認識装置と画像認識方法とプログラム |
JP2006226987A (ja) * | 2005-01-18 | 2006-08-31 | Mitsutoyo Corp | 光電式エンコーダ、及び、そのスケール |
JP2007218691A (ja) * | 2006-02-15 | 2007-08-30 | Mitsutoyo Corp | 光電式エンコーダ |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011237429A (ja) * | 2010-05-05 | 2011-11-24 | Mitsutoyo Corp | 光学式エンコーダおよび位置測定方法 |
EP2811263A2 (en) | 2013-06-07 | 2014-12-10 | Mitutoyo Corporation | Position detection encoder |
US9036285B2 (en) | 2013-06-07 | 2015-05-19 | Mitutoyo Corporation | Position detection encoder |
JP2015105849A (ja) * | 2013-11-29 | 2015-06-08 | キヤノン株式会社 | アブソリュートエンコーダ、信号処理方法、およびプログラム |
Also Published As
Publication number | Publication date |
---|---|
EP2110645A2 (en) | 2009-10-21 |
EP2110645B1 (en) | 2018-02-21 |
EP2110645A3 (en) | 2012-03-28 |
JP5203024B2 (ja) | 2013-06-05 |
US8227744B2 (en) | 2012-07-24 |
US20090256065A1 (en) | 2009-10-15 |
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