JP2009185255A5 - - Google Patents
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- Publication number
- JP2009185255A5 JP2009185255A5 JP2008029221A JP2008029221A JP2009185255A5 JP 2009185255 A5 JP2009185255 A5 JP 2009185255A5 JP 2008029221 A JP2008029221 A JP 2008029221A JP 2008029221 A JP2008029221 A JP 2008029221A JP 2009185255 A5 JP2009185255 A5 JP 2009185255A5
- Authority
- JP
- Japan
- Prior art keywords
- mass
- halogen atom
- parts
- relief pattern
- polycondensation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 150000001875 compounds Chemical class 0.000 claims 4
- 125000005843 halogen group Chemical group 0.000 claims 3
- 238000006068 polycondensation reaction Methods 0.000 claims 3
- 239000011247 coating layer Substances 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 125000000962 organic group Chemical group 0.000 claims 2
- 239000011342 resin composition Substances 0.000 claims 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- -1 diazonaphthoquinone compound Chemical class 0.000 claims 1
- 238000010894 electron beam technology Methods 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000003960 organic solvent Substances 0.000 claims 1
- 230000005855 radiation Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008029221A JP5129598B2 (ja) | 2008-02-08 | 2008-02-08 | 重縮合化合物及びポジ型感光性樹脂組成物 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008029221A JP5129598B2 (ja) | 2008-02-08 | 2008-02-08 | 重縮合化合物及びポジ型感光性樹脂組成物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009185255A JP2009185255A (ja) | 2009-08-20 |
| JP2009185255A5 true JP2009185255A5 (enrdf_load_stackoverflow) | 2011-03-17 |
| JP5129598B2 JP5129598B2 (ja) | 2013-01-30 |
Family
ID=41068810
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008029221A Expired - Fee Related JP5129598B2 (ja) | 2008-02-08 | 2008-02-08 | 重縮合化合物及びポジ型感光性樹脂組成物 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5129598B2 (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI402296B (zh) * | 2009-12-31 | 2013-07-21 | Daxin Materials Corp | 聚醯胺酸樹脂與聚亞醯胺樹脂的純化方法 |
| JP2011256219A (ja) * | 2010-06-04 | 2011-12-22 | Nippon Kayaku Co Ltd | ポリベンゾオキサゾール樹脂及びその前駆体樹脂 |
| JP5953796B2 (ja) * | 2012-02-15 | 2016-07-20 | 日立化成デュポンマイクロシステムズ株式会社 | 感光性樹脂組成物、パターン硬化膜の製造方法及び電子部品 |
| WO2018155188A1 (ja) * | 2017-02-21 | 2018-08-30 | 日本ゼオン株式会社 | 感光性樹脂組成物 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3440832B2 (ja) * | 1997-07-14 | 2003-08-25 | 東レ株式会社 | 感光性ポリイミド前駆体組成物 |
| JP2000075478A (ja) * | 1998-08-31 | 2000-03-14 | Toray Ind Inc | ポジ型感光性樹脂前駆体組成物 |
| JP3449250B2 (ja) * | 1998-10-12 | 2003-09-22 | 東レ株式会社 | 感光性樹脂前駆体組成物 |
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2008
- 2008-02-08 JP JP2008029221A patent/JP5129598B2/ja not_active Expired - Fee Related