JP2009182364A5 - - Google Patents

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Publication number
JP2009182364A5
JP2009182364A5 JP2009123179A JP2009123179A JP2009182364A5 JP 2009182364 A5 JP2009182364 A5 JP 2009182364A5 JP 2009123179 A JP2009123179 A JP 2009123179A JP 2009123179 A JP2009123179 A JP 2009123179A JP 2009182364 A5 JP2009182364 A5 JP 2009182364A5
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JP
Japan
Prior art keywords
substrate
holding
holding unit
wafer
holding portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009123179A
Other languages
English (en)
Japanese (ja)
Other versions
JP4617385B2 (ja
JP2009182364A (ja
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Publication date
Application filed filed Critical
Priority to JP2009123179A priority Critical patent/JP4617385B2/ja
Priority claimed from JP2009123179A external-priority patent/JP4617385B2/ja
Publication of JP2009182364A publication Critical patent/JP2009182364A/ja
Publication of JP2009182364A5 publication Critical patent/JP2009182364A5/ja
Application granted granted Critical
Publication of JP4617385B2 publication Critical patent/JP4617385B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2009123179A 2009-05-21 2009-05-21 基板保持機構およびそれを用いた露光装置並びにデバイス製造方法 Expired - Fee Related JP4617385B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009123179A JP4617385B2 (ja) 2009-05-21 2009-05-21 基板保持機構およびそれを用いた露光装置並びにデバイス製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009123179A JP4617385B2 (ja) 2009-05-21 2009-05-21 基板保持機構およびそれを用いた露光装置並びにデバイス製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2003372036A Division JP4332409B2 (ja) 2003-10-31 2003-10-31 基板保持機構およびそれを用いた露光装置並びにデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2009182364A JP2009182364A (ja) 2009-08-13
JP2009182364A5 true JP2009182364A5 (https=) 2010-11-11
JP4617385B2 JP4617385B2 (ja) 2011-01-26

Family

ID=41036032

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009123179A Expired - Fee Related JP4617385B2 (ja) 2009-05-21 2009-05-21 基板保持機構およびそれを用いた露光装置並びにデバイス製造方法

Country Status (1)

Country Link
JP (1) JP4617385B2 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL2009332A (en) * 2011-09-23 2013-03-26 Asml Netherlands Bv Lithographic apparatus and substrate handling method.
KR101469001B1 (ko) * 2013-11-25 2014-12-23 주식회사 나노솔텍 부품흡착유닛의 틸팅장치
CN112897056B (zh) * 2021-01-04 2022-11-18 江苏立讯机器人有限公司 吸取机构
KR20240036860A (ko) * 2022-09-14 2024-03-21 주식회사 엘지에너지솔루션 전지셀 취출장치 및 이의 제어방법

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01321257A (ja) * 1988-06-21 1989-12-27 Nitto Denko Corp 薄板と粘着テープの貼着方法
JP2691299B2 (ja) * 1989-06-12 1997-12-17 株式会社ニコン 基板ホルダ
JPH0555351A (ja) * 1991-08-23 1993-03-05 Mitsubishi Electric Corp ワークハンドリング機構
JP4309992B2 (ja) * 1999-04-16 2009-08-05 キヤノン株式会社 試料保持装置およびこの保持装置を用いた露光装置
JP3513437B2 (ja) * 1999-09-01 2004-03-31 キヤノン株式会社 基板管理方法及び半導体露光装置

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