JP2009163799A - 熱アシスト磁気ヘッドの製造方法及びその製造方法に用いられるアパーチャ - Google Patents
熱アシスト磁気ヘッドの製造方法及びその製造方法に用いられるアパーチャ Download PDFInfo
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- JP2009163799A JP2009163799A JP2007340678A JP2007340678A JP2009163799A JP 2009163799 A JP2009163799 A JP 2009163799A JP 2007340678 A JP2007340678 A JP 2007340678A JP 2007340678 A JP2007340678 A JP 2007340678A JP 2009163799 A JP2009163799 A JP 2009163799A
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
- G11B5/3166—Testing or indicating in relation thereto, e.g. before the fabrication is completed
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/313—Disposition of layers
- G11B5/3133—Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure
- G11B5/314—Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure where the layers are extra layers normally not provided in the transducing structure, e.g. optical layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B2005/0002—Special dispositions or recording techniques
- G11B2005/0005—Arrangements, methods or circuits
- G11B2005/0021—Thermally assisted recording using an auxiliary energy source for heating the recording layer locally to assist the magnetization reversal
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
- Y10T29/49046—Depositing magnetic layer or coating with etching or machining of magnetic material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
- Y10T29/49052—Machining magnetic material [e.g., grinding, etching, polishing] by etching
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Magnetic Heads (AREA)
- Recording Or Reproducing By Magnetic Means (AREA)
Abstract
【解決手段】凹面52を有し凹面52内にピンホール54が形成された遮光膜50のピンホール54の凹面52側の端面54Xと光出射面4Bとを対向させ、この際、遮光膜50と媒体対向面Sの遮光膜50の厚み方向の最短距離A52が、ピンホール54の透明基板58側とは反対側の端面54Xと光出射面4Bとの最短距離A54よりも短くなるようにする対向工程と、発光素子3から出射光3Aを出射させる光出射工程と、光出射面4Bから出射され、ピンホール54を通過した光を検出する検出工程とを備える。
【選択図】図2
Description
Claims (7)
- 媒体対向面と、前記媒体対向面に形成された光出射面を含む光導波路のコアと、出射光が前記光導波路のコアの光入射面に到達するように設けられた発光素子と、を有する熱アシスト磁気ヘッドの製造方法であって、
凹面を有し当該凹面内にピンホールが形成された遮光膜の前記ピンホールの前記凹面側の端面と前記光出射面とを対向させ、この際、前記遮光膜と前記媒体対向面の前記遮光膜の厚み方向の最短距離が、前記ピンホールの前記凹面側の端面と前記光出射面との最短距離よりも短くなるようにする対向工程と、
前記発光素子から光を出射させる光出射工程と、
前記光出射面から出射され、前記ピンホールを通過した光を検出する検出工程と、
を備えることを特徴とする熱アシスト磁気ヘッドの製造方法。 - 媒体対向面と、前記媒体対向面に形成された光出射面を含む光導波路のコアと、出射光が前記光導波路のコアの光入射面に到達するように設けられた発光素子と、を有する熱アシスト磁気ヘッドの製造方法であって、
透明基板の凹部内に設けられピンホールが形成された遮光膜の前記ピンホールの前記透明基板側とは反対側の端面と前記光出射面とを対向させ、この際、前記透明基板と前記媒体対向面の前記遮光膜の厚み方向の最短距離が、前記ピンホールの前記透明基板側とは反対側の端面と前記光出射面との最短距離よりも短くなるようにする対向工程と、
前記発光素子から光を出射させる光出射工程と、
前記光出射面から出射され、前記ピンホールを通過した光を検出する検出工程と、
を備えることを特徴とする熱アシスト磁気ヘッドの製造方法。 - 前記検出工程における光の検出結果に基づいて、前記光出射面から出射される光の強度を調整する調整工程をさらに備えることを特徴とする請求項1又は2に記載の熱アシスト磁気ヘッドの製造方法。
- 前記調整工程において、前記発光素子の駆動電流値を変えることによって、前記光出射面から出射される光の強度を調整することを特徴とする請求項3に記載の熱アシスト磁気ヘッドの製造方法。
- 前記調整工程において、前記発光素子と前記光導波路のコアとの相対的な位置関係を変えることによって、前記光出射面から出射される光の強度を調整することを特徴とする請求項3に記載の熱アシスト磁気ヘッドの製造方法。
- 透明基板と、
当該透明基板上に設けられた遮光膜と、
を備え、
前記遮光膜は、前記透明基板側とは反対側に凹面を有し当該凹面にピンホールが形成されていることを特徴とするアパーチャ。 - 透明基板と、
当該透明基板上に設けられた遮光膜と、
を備え、
前記遮光膜は、前記透明基板に形成された凹部内に設けられピンホールが形成されていることを特徴とするアパーチャ。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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JP2007340678A JP4497201B2 (ja) | 2007-12-28 | 2007-12-28 | 熱アシスト磁気ヘッドの製造方法 |
US12/199,526 US7930817B2 (en) | 2007-12-28 | 2008-08-27 | Method of manufacturing a thermally assisted magnetic head |
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JP2007340678A JP4497201B2 (ja) | 2007-12-28 | 2007-12-28 | 熱アシスト磁気ヘッドの製造方法 |
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JP2009163799A true JP2009163799A (ja) | 2009-07-23 |
JP4497201B2 JP4497201B2 (ja) | 2010-07-07 |
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JP (1) | JP4497201B2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011078069A1 (ja) * | 2009-12-24 | 2011-06-30 | コニカミノルタオプト株式会社 | 光アシスト磁気ヘッドの組み付け方法 |
JP2012234615A (ja) * | 2011-04-29 | 2012-11-29 | Seagate Technology Llc | レーザダイオードをスライダ上で整列させるための方法および装置 |
Families Citing this family (15)
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US8077418B1 (en) * | 2009-03-31 | 2011-12-13 | Western Digital (Fremont), Llc | Reducing thermal protrusion of a near field transducer in an energy assisted magnetic recording head |
US8441895B2 (en) * | 2009-11-20 | 2013-05-14 | Tdk Corporation | Thermally-assisted magnetic recording head with light detector in element-integration surface |
JP5943503B2 (ja) * | 2010-09-14 | 2016-07-05 | セイコーインスツル株式会社 | 近接場光発生素子、及び近接場光発生素子の製造方法、近接場光ヘッド、近接場光ヘッドの製造方法並びに情報記録再生装置 |
US8248898B2 (en) | 2010-10-18 | 2012-08-21 | Headway Technologies, Inc. | Thermally-assisted magnetic recording head having main waveguide and sub-waveguides |
US8238202B2 (en) | 2010-12-16 | 2012-08-07 | Headway Technologies, Inc. | Directional waveguide coupler for ABS reflected light |
US8670295B1 (en) * | 2010-12-20 | 2014-03-11 | Western Digital (Fremont), Llc | Method and system for optically coupling a laser with a transducer in an energy assisted magnetic recording disk drive |
US8787126B2 (en) * | 2011-10-10 | 2014-07-22 | Seagate Technology Llc | Waveguide with blocking layer |
US8984739B2 (en) * | 2011-10-14 | 2015-03-24 | Tdk Corporation | Method of manufacturing a thermally-assisted magnetic recording head that suppresses protrusion of a plasmon generator |
US8749790B1 (en) | 2011-12-08 | 2014-06-10 | Western Digital (Fremont), Llc | Structure and method to measure waveguide power absorption by surface plasmon element |
US8753903B1 (en) | 2012-05-22 | 2014-06-17 | Western Digital (Fremont), Llc | Methods and apparatuses for performing wafer level characterization of a plasmon element |
US9202487B2 (en) * | 2013-04-10 | 2015-12-01 | Seagate Technology Llc | Light source alignment for heat assisted magnetic recording |
US9315008B1 (en) | 2013-07-16 | 2016-04-19 | Western Digital Technologies, Inc. | Method and apparatus for aligning an illumination unit to a slider for a magnetic recording device |
US9441938B1 (en) | 2013-10-08 | 2016-09-13 | Western Digital (Fremont), Llc | Test structures for measuring near field transducer disc length |
US9099145B1 (en) | 2013-12-24 | 2015-08-04 | Western Digital (Fremont), Llc | High contrast alignment marker |
US9202488B2 (en) * | 2014-01-09 | 2015-12-01 | Seagate Technology Llc | Light blocker for stray light reduction within a slider |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2008204586A (ja) * | 2007-02-22 | 2008-09-04 | Hitachi Ltd | 熱アシスト磁気記録ヘッドおよび磁気記録装置 |
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JP4635607B2 (ja) | 2004-12-28 | 2011-02-23 | Tdk株式会社 | 熱アシスト磁気記録ヘッド及び熱アシスト磁気記録装置 |
JP2008059697A (ja) * | 2006-08-31 | 2008-03-13 | Tdk Corp | 熱アシスト磁気ヘッド、ヘッドジンバルアセンブリ及びハードディスク装置 |
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- 2007-12-28 JP JP2007340678A patent/JP4497201B2/ja not_active Expired - Fee Related
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- 2008-08-27 US US12/199,526 patent/US7930817B2/en active Active
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JP2008204586A (ja) * | 2007-02-22 | 2008-09-04 | Hitachi Ltd | 熱アシスト磁気記録ヘッドおよび磁気記録装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011078069A1 (ja) * | 2009-12-24 | 2011-06-30 | コニカミノルタオプト株式会社 | 光アシスト磁気ヘッドの組み付け方法 |
JP2012234615A (ja) * | 2011-04-29 | 2012-11-29 | Seagate Technology Llc | レーザダイオードをスライダ上で整列させるための方法および装置 |
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US20090165285A1 (en) | 2009-07-02 |
US7930817B2 (en) | 2011-04-26 |
JP4497201B2 (ja) | 2010-07-07 |
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