JP2009158902A - スピナーシステムの搬送ロボット、その搬送ハンド及びその真空印加装置 - Google Patents

スピナーシステムの搬送ロボット、その搬送ハンド及びその真空印加装置 Download PDF

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Publication number
JP2009158902A
JP2009158902A JP2008022597A JP2008022597A JP2009158902A JP 2009158902 A JP2009158902 A JP 2009158902A JP 2008022597 A JP2008022597 A JP 2008022597A JP 2008022597 A JP2008022597 A JP 2008022597A JP 2009158902 A JP2009158902 A JP 2009158902A
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Japan
Prior art keywords
vacuum
wafer
transfer
hand
contact ring
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Pending
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JP2008022597A
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English (en)
Japanese (ja)
Inventor
Zaibun Ryu
在文 柳
Shunkei Lee
俊炯 李
Shoken Kim
昌顕 金
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OPTO FINETECH CO Ltd
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OPTO FINETECH CO Ltd
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Application filed by OPTO FINETECH CO Ltd filed Critical OPTO FINETECH CO Ltd
Publication of JP2009158902A publication Critical patent/JP2009158902A/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
JP2008022597A 2007-12-27 2008-02-01 スピナーシステムの搬送ロボット、その搬送ハンド及びその真空印加装置 Pending JP2009158902A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020070138553A KR20090070521A (ko) 2007-12-27 2007-12-27 스피너 시스템의 트랜스퍼 로봇, 그 이송 핸드 및 그 진공인가 장치

Publications (1)

Publication Number Publication Date
JP2009158902A true JP2009158902A (ja) 2009-07-16

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JP2008022597A Pending JP2009158902A (ja) 2007-12-27 2008-02-01 スピナーシステムの搬送ロボット、その搬送ハンド及びその真空印加装置

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JP (1) JP2009158902A (ko)
KR (1) KR20090070521A (ko)
TW (1) TW200927622A (ko)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150255322A1 (en) * 2014-03-06 2015-09-10 Cascade Microtech, Inc. Wafer-handling end effectors
CN106505019A (zh) * 2016-11-30 2017-03-15 武汉帝尔激光科技股份有限公司 一种全自动太阳能电池片抗光衰激光加工设备
CN108621192A (zh) * 2018-06-13 2018-10-09 广东速美达自动化股份有限公司 一种液晶屏搬运装置
CN111180373A (zh) * 2018-11-13 2020-05-19 科美仪器 用于制造有机发光元件面板的基板移动装置及方法
CN112442724A (zh) * 2016-06-30 2021-03-05 株式会社荏原制作所 搬送系统及基板支承构件

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101559420B1 (ko) * 2011-01-19 2015-10-13 (주)테크윙 테스트핸들러용 반도체소자 파지 및 파지 해제 압 제공 시스템
CN111554603B (zh) * 2020-06-02 2023-04-28 江西维易尔半导体设备有限公司 一种带孔方形硅片加工传送系统
KR102617398B1 (ko) * 2020-08-13 2023-12-26 세메스 주식회사 기판 반송 장치, 기판 처리 장치 및 기판 반송 방법
CN113707593B (zh) * 2021-07-13 2024-05-28 宁波复升新材料科技有限公司 一种碳纤维晶圆搬运手指的制作方法
CN114107959A (zh) * 2021-11-30 2022-03-01 重庆忽米网络科技有限公司 一种用于cvd设备的晶圆传送方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0590387A (ja) * 1991-10-21 1993-04-09 Tokyo Electron Ltd 処理装置
JP2002346965A (ja) * 2001-05-23 2002-12-04 Assist Japan Kk ロボットにおける冷却ハンド
JP2002368060A (ja) * 2001-06-11 2002-12-20 Dainippon Screen Mfg Co Ltd 基板支持部材、基板処理装置、基板処理方法および基板処理システム
JP2004153288A (ja) * 1999-08-23 2004-05-27 Ibiden Co Ltd ウエハプローバ装置
JP2007091433A (ja) * 2005-09-29 2007-04-12 Nidec Sankyo Corp ロボットのハンドおよびこれを用いたワーク搬送ロボット

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0590387A (ja) * 1991-10-21 1993-04-09 Tokyo Electron Ltd 処理装置
JP2004153288A (ja) * 1999-08-23 2004-05-27 Ibiden Co Ltd ウエハプローバ装置
JP2002346965A (ja) * 2001-05-23 2002-12-04 Assist Japan Kk ロボットにおける冷却ハンド
JP2002368060A (ja) * 2001-06-11 2002-12-20 Dainippon Screen Mfg Co Ltd 基板支持部材、基板処理装置、基板処理方法および基板処理システム
JP2007091433A (ja) * 2005-09-29 2007-04-12 Nidec Sankyo Corp ロボットのハンドおよびこれを用いたワーク搬送ロボット

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150255322A1 (en) * 2014-03-06 2015-09-10 Cascade Microtech, Inc. Wafer-handling end effectors
JP2016538711A (ja) * 2014-03-06 2016-12-08 カスケード マイクロテック インコーポレイテッドＣａｓｃａｄｅ Ｍｉｃｒｏｔｅｃｈ，Ｉｎｃｏｒｐｏｒａｔｅｄ ウェーハ‐ハンドリング・エンドエフェクタ
US9991152B2 (en) * 2014-03-06 2018-06-05 Cascade Microtech, Inc. Wafer-handling end effectors with wafer-contacting surfaces and sealing structures
JP2018157221A (ja) * 2014-03-06 2018-10-04 カスケード マイクロテック インコーポレイテッドＣａｓｃａｄｅ Ｍｉｃｒｏｔｅｃｈ，Ｉｎｃｏｒｐｏｒａｔｅｄ ウェーハ‐ハンドリング・エンドエフェクタ
DE112015000181B4 (de) 2014-03-06 2023-01-26 Formfactor, Inc. Waferhandling-Endeffektoren und Halbleiterherstellungseinrichtung mit einem Waferhandling-Endeffektor
CN112442724A (zh) * 2016-06-30 2021-03-05 株式会社荏原制作所 搬送系统及基板支承构件
CN112442724B (zh) * 2016-06-30 2024-02-06 株式会社荏原制作所 搬送系统及基板支承构件
CN106505019A (zh) * 2016-11-30 2017-03-15 武汉帝尔激光科技股份有限公司 一种全自动太阳能电池片抗光衰激光加工设备
CN106505019B (zh) * 2016-11-30 2023-09-08 武汉帝尔激光科技股份有限公司 一种全自动太阳能电池片抗光衰激光加工设备
CN108621192A (zh) * 2018-06-13 2018-10-09 广东速美达自动化股份有限公司 一种液晶屏搬运装置
CN111180373A (zh) * 2018-11-13 2020-05-19 科美仪器 用于制造有机发光元件面板的基板移动装置及方法
CN111180373B (zh) * 2018-11-13 2023-10-03 恒邦解决方案有限公司 用于制造有机发光元件面板的基板移动装置及方法

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Publication number Publication date
KR20090070521A (ko) 2009-07-01
TW200927622A (en) 2009-07-01

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