JP2009156602A - チップ増強ラマンプローブ及びその製造方法 - Google Patents
チップ増強ラマンプローブ及びその製造方法 Download PDFInfo
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- JP2009156602A JP2009156602A JP2007332046A JP2007332046A JP2009156602A JP 2009156602 A JP2009156602 A JP 2009156602A JP 2007332046 A JP2007332046 A JP 2007332046A JP 2007332046 A JP2007332046 A JP 2007332046A JP 2009156602 A JP2009156602 A JP 2009156602A
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- 239000000523 sample Substances 0.000 title claims abstract description 102
- 238000001069 Raman spectroscopy Methods 0.000 title claims abstract description 35
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 9
- 230000003647 oxidation Effects 0.000 claims abstract description 13
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 13
- 239000011248 coating agent Substances 0.000 claims abstract description 3
- 238000000576 coating method Methods 0.000 claims abstract description 3
- 239000010410 layer Substances 0.000 claims description 56
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 32
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 16
- 230000005284 excitation Effects 0.000 claims description 9
- 239000002344 surface layer Substances 0.000 claims description 3
- 230000001590 oxidative effect Effects 0.000 claims description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract description 16
- 229910052709 silver Inorganic materials 0.000 abstract description 16
- 239000004332 silver Substances 0.000 abstract description 16
- 239000011521 glass Substances 0.000 abstract 1
- 230000005684 electric field Effects 0.000 description 11
- 230000000694 effects Effects 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 239000010408 film Substances 0.000 description 7
- 239000000758 substrate Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 238000004416 surface enhanced Raman spectroscopy Methods 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 239000003921 oil Substances 0.000 description 4
- 238000001228 spectrum Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 239000003574 free electron Substances 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 238000012821 model calculation Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000001237 Raman spectrum Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000000772 tip-enhanced Raman spectroscopy Methods 0.000 description 1
- 238000012800 visualization Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
【解決手段】Si製のプローブの表面を熱酸化しSiO2ガラスとし、その表面を銀で被膜することによって3層構造のチップ増強ラマンプローブを製造する。最初に用意するSi製のプローブの形や銀コートの膜厚を一定としつつ、熱酸化の処理時間を調整してSi層とSiO2層の比を変化させることで、プローブの実効的屈折率が制御可能となり、最終的にプローブのプラズモン共鳴波長を連続的に調整可能となる。
【選択図】図1
Description
05〜1010倍程度まで増強することができる。
的な屈折率の調節が困難であり、所望の共鳴波長を得ることができないという問題がある。
クとなる波長がプラズモン共鳴波長である。図2(b)から分かるように、SiO2層を変化させることでプラズモン共鳴波長が調整できることが分かる。共鳴波長は可視光域で連続的に変化しており、SiO2層を厚くするほど共鳴波長が短くなる。
。図4がその結果を示す図である。図に示すように、2層探針では660nm付近にピークがあるのに対し3層探針では600nm付近にピークがあり、プラズモン共鳴波長が短波長側にシフトしていることが分かる。
2 SiO2層(中間部)
3 Ag層(表面部)
101 カンチレバー
102 プローブ
103 試料
104 油浸オイル
105 対物レンズ
106 励起レーザ
107 散乱光
Claims (4)
- Si製のプローブの表面を熱酸化させる工程と、
熱酸化されたプローブの表面に金属を被膜する工程と、
を含むチップ増強ラマンプローブの製造方法。 - 前記熱酸化工程では、プローブのプラズモン共鳴波長が励起レーザの波長と等しくなるように、酸化層の厚さを調整する
ことを特徴とする請求項1に記載のチップ増強ラマンプローブの製造方法。 - Siからなる中心層と、SiO2からなる中間層と、金属からなる表面層との3層構造を有するチップ増強ラマンプローブ。
- 前記中心層と前記中間層の厚さの比が、プローブのプラズモン共鳴波長と励起レーザの波長とが等しくなるように調整されていることを特徴とする請求項3に記載のチップ増強ラマンプローブ。
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JP2012281268A Division JP5716196B2 (ja) | 2012-12-25 | 2012-12-25 | 分光測定方法、散乱型近接場顕微鏡、及びチップ増強ラマンプローブの製造方法 |
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012052848A (ja) * | 2010-08-31 | 2012-03-15 | Canon Inc | 散乱型近接場光プローブ、散乱型近接場光プローブを備えた近接場光学顕微鏡 |
JP2012073226A (ja) * | 2010-08-31 | 2012-04-12 | National Institute For Materials Science | ファイバー用プローブ及びその製作方法 |
JP2013057689A (ja) * | 2012-12-25 | 2013-03-28 | Nano Photon Kk | 分光測定方法、散乱型近接場顕微鏡、及びチップ増強ラマンプローブの製造方法 |
CN104931733A (zh) * | 2015-06-18 | 2015-09-23 | 厦门大学 | 一种壳层隔绝银纳米针尖的制备方法 |
KR101813184B1 (ko) | 2011-11-17 | 2017-12-28 | 삼성전자주식회사 | 라만 분광용 탐침 및 그 제조방법 |
WO2018003991A1 (ja) | 2016-06-30 | 2018-01-04 | 国立大学法人京都大学 | 探針の製造方法及び探針 |
IT202000004426A1 (it) * | 2020-03-03 | 2021-09-03 | Univ Degli Studi Di Napoli Federico Ii | Metodo per produrre elementi plasmonicamente attivi, in particolare per spettroscopia TERS e SERS |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0375501A (ja) * | 1989-06-20 | 1991-03-29 | Univ Leland Stanford Jr | 一体型円錐先端部を有する片持ち針及びその製造方法 |
JP2000081383A (ja) * | 1998-09-05 | 2000-03-21 | Satoshi Kawada | 散乱型近接場顕微鏡 |
JP2002357529A (ja) * | 2001-05-31 | 2002-12-13 | Olympus Optical Co Ltd | Spmカンチレバー |
JP2006071448A (ja) * | 2004-09-02 | 2006-03-16 | Sii Nanotechnology Inc | 近接場顕微鏡用プローブおよびその製造方法ならびにそのプローブを用いた走査型プローブ顕微鏡 |
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- 2007-12-25 JP JP2007332046A patent/JP5256433B2/ja active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0375501A (ja) * | 1989-06-20 | 1991-03-29 | Univ Leland Stanford Jr | 一体型円錐先端部を有する片持ち針及びその製造方法 |
JP2000081383A (ja) * | 1998-09-05 | 2000-03-21 | Satoshi Kawada | 散乱型近接場顕微鏡 |
JP2002357529A (ja) * | 2001-05-31 | 2002-12-13 | Olympus Optical Co Ltd | Spmカンチレバー |
JP2006071448A (ja) * | 2004-09-02 | 2006-03-16 | Sii Nanotechnology Inc | 近接場顕微鏡用プローブおよびその製造方法ならびにそのプローブを用いた走査型プローブ顕微鏡 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012052848A (ja) * | 2010-08-31 | 2012-03-15 | Canon Inc | 散乱型近接場光プローブ、散乱型近接場光プローブを備えた近接場光学顕微鏡 |
JP2012073226A (ja) * | 2010-08-31 | 2012-04-12 | National Institute For Materials Science | ファイバー用プローブ及びその製作方法 |
KR101813184B1 (ko) | 2011-11-17 | 2017-12-28 | 삼성전자주식회사 | 라만 분광용 탐침 및 그 제조방법 |
JP2013057689A (ja) * | 2012-12-25 | 2013-03-28 | Nano Photon Kk | 分光測定方法、散乱型近接場顕微鏡、及びチップ増強ラマンプローブの製造方法 |
CN104931733A (zh) * | 2015-06-18 | 2015-09-23 | 厦门大学 | 一种壳层隔绝银纳米针尖的制备方法 |
WO2018003991A1 (ja) | 2016-06-30 | 2018-01-04 | 国立大学法人京都大学 | 探針の製造方法及び探針 |
US10900905B2 (en) | 2016-06-30 | 2021-01-26 | Horiba, Ltd. | Probe manufacturing method and probe |
IT202000004426A1 (it) * | 2020-03-03 | 2021-09-03 | Univ Degli Studi Di Napoli Federico Ii | Metodo per produrre elementi plasmonicamente attivi, in particolare per spettroscopia TERS e SERS |
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