JP5256433B2 - 散乱型近接場顕微鏡 - Google Patents
散乱型近接場顕微鏡 Download PDFInfo
- Publication number
- JP5256433B2 JP5256433B2 JP2007332046A JP2007332046A JP5256433B2 JP 5256433 B2 JP5256433 B2 JP 5256433B2 JP 2007332046 A JP2007332046 A JP 2007332046A JP 2007332046 A JP2007332046 A JP 2007332046A JP 5256433 B2 JP5256433 B2 JP 5256433B2
- Authority
- JP
- Japan
- Prior art keywords
- probe
- layer
- sio
- resonance wavelength
- wavelength
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000523 sample Substances 0.000 claims description 90
- 239000010410 layer Substances 0.000 claims description 55
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 32
- 238000001069 Raman spectroscopy Methods 0.000 claims description 31
- 229910052751 metal Inorganic materials 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 15
- 230000005284 excitation Effects 0.000 claims description 9
- 239000002344 surface layer Substances 0.000 claims description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 15
- 229910052709 silver Inorganic materials 0.000 description 15
- 239000004332 silver Substances 0.000 description 15
- 230000005684 electric field Effects 0.000 description 11
- 230000003647 oxidation Effects 0.000 description 11
- 238000007254 oxidation reaction Methods 0.000 description 11
- 230000000694 effects Effects 0.000 description 10
- 239000010408 film Substances 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 238000004416 surface enhanced Raman spectroscopy Methods 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 239000003921 oil Substances 0.000 description 4
- 238000001228 spectrum Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 230000001965 increasing effect Effects 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000003574 free electron Substances 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 238000012821 model calculation Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000001237 Raman spectrum Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000000772 tip-enhanced Raman spectroscopy Methods 0.000 description 1
- 238000012800 visualization Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
05〜1010倍程度まで増強することができる。
的な屈折率の調節が困難であり、所望の共鳴波長を得ることができないという問題がある。
クとなる波長がプラズモン共鳴波長である。図2(b)から分かるように、SiO2層を変化させることでプラズモン共鳴波長が調整できることが分かる。共鳴波長は可視光域で連続的に変化しており、SiO2層を厚くするほど共鳴波長が短くなる。
。図4がその結果を示す図である。図に示すように、2層探針では660nm付近にピークがあるのに対し3層探針では600nm付近にピークがあり、プラズモン共鳴波長が短波長側にシフトしていることが分かる。
2 SiO2層(中間部)
3 Ag層(表面部)
101 カンチレバー
102 プローブ
103 試料
104 油浸オイル
105 対物レンズ
106 励起レーザ
107 散乱光
Claims (1)
- 励起レーザとチップ増強ラマンプローブとを有する散乱型近接場顕微鏡であって、
前記チップ増強ラマンプローブは、
Siからなる中心層と、SiO2からなる中間層と、金属からなる表面層との3層構造を有し、
前記中心層と前記中間層の厚さの比は、該プローブのプラズモン共鳴波長と前記励起レーザの波長とが等しくなるような比である、
散乱型近接場顕微鏡。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007332046A JP5256433B2 (ja) | 2007-12-25 | 2007-12-25 | 散乱型近接場顕微鏡 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007332046A JP5256433B2 (ja) | 2007-12-25 | 2007-12-25 | 散乱型近接場顕微鏡 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012281268A Division JP5716196B2 (ja) | 2012-12-25 | 2012-12-25 | 分光測定方法、散乱型近接場顕微鏡、及びチップ増強ラマンプローブの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009156602A JP2009156602A (ja) | 2009-07-16 |
JP5256433B2 true JP5256433B2 (ja) | 2013-08-07 |
Family
ID=40960804
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007332046A Active JP5256433B2 (ja) | 2007-12-25 | 2007-12-25 | 散乱型近接場顕微鏡 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5256433B2 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5971789B2 (ja) * | 2010-08-31 | 2016-08-17 | 国立研究開発法人物質・材料研究機構 | ファイバー用プローブの作製方法 |
JP2012052848A (ja) * | 2010-08-31 | 2012-03-15 | Canon Inc | 散乱型近接場光プローブ、散乱型近接場光プローブを備えた近接場光学顕微鏡 |
KR101813184B1 (ko) | 2011-11-17 | 2017-12-28 | 삼성전자주식회사 | 라만 분광용 탐침 및 그 제조방법 |
JP5716196B2 (ja) * | 2012-12-25 | 2015-05-13 | ナノフォトン株式会社 | 分光測定方法、散乱型近接場顕微鏡、及びチップ増強ラマンプローブの製造方法 |
CN104931733B (zh) * | 2015-06-18 | 2017-12-22 | 厦门大学 | 一种壳层隔绝银纳米针尖的制备方法 |
CN109416326B (zh) | 2016-06-30 | 2021-12-14 | 国立大学法人京都大学 | 探针的制造方法和探针 |
IT202000004426A1 (it) * | 2020-03-03 | 2021-09-03 | Univ Degli Studi Di Napoli Federico Ii | Metodo per produrre elementi plasmonicamente attivi, in particolare per spettroscopia TERS e SERS |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4968585A (en) * | 1989-06-20 | 1990-11-06 | The Board Of Trustees Of The Leland Stanford Jr. University | Microfabricated cantilever stylus with integrated conical tip |
JP4585053B2 (ja) * | 1998-09-05 | 2010-11-24 | 聡 河田 | 散乱型近接場顕微鏡 |
JP4656761B2 (ja) * | 2001-05-31 | 2011-03-23 | オリンパス株式会社 | Spmカンチレバー |
JP4451252B2 (ja) * | 2004-09-02 | 2010-04-14 | エスアイアイ・ナノテクノロジー株式会社 | 近接場顕微鏡用プローブおよびその製造方法ならびにそのプローブを用いた走査型プローブ顕微鏡 |
-
2007
- 2007-12-25 JP JP2007332046A patent/JP5256433B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2009156602A (ja) | 2009-07-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5256433B2 (ja) | 散乱型近接場顕微鏡 | |
Bonyár et al. | Investigation of the performance of thermally generated gold nanoislands for LSPR and SERS applications | |
US7241987B2 (en) | Probe for near-field microscope, the method for manufacturing the probe and scanning probe microscope using the probe | |
Yan et al. | Hollow core photonic crystal fiber surface-enhanced Raman probe | |
De Angelis et al. | Nanoscale chemical mapping using three-dimensional adiabatic compression of surface plasmon polaritons | |
Viets et al. | Comparison of fibre-optic SERS sensors with differently prepared tips | |
Sackrow et al. | Imaging nanometre‐sized hot spots on smooth Au films with high‐resolution tip‐enhanced luminescence and Raman near‐field optical microscopy | |
US7397558B2 (en) | Ordered array of nanoparticles for efficient nanoenhanced Raman scattering detection and methods of forming the same | |
US6838121B2 (en) | System and method for controlling deposition parameters in producing a surface to tune the surface's plasmon resonance wavelength | |
Zhang et al. | Whispering-gallery nanocavity plasmon-enhanced Raman spectroscopy | |
US20060017917A1 (en) | Surface enhanced Raman spectroscopic nano-imaging probe and uses therefor | |
Taguchi et al. | Controlling the plasmon resonance wavelength in metal-coated probe using refractive index modification | |
Jin et al. | Large-area nanogap plasmon resonator arrays for plasmonics applications | |
Yang et al. | Hybrid nanostructure of SiO 2@ Si with Au-nanoparticles for surface enhanced Raman spectroscopy | |
Manoharan et al. | Controlled in situ seed-mediated growth of gold and silver nanoparticles on an optical fiber platform for plasmonic sensing applications | |
Yuan et al. | Comparison of silica and sapphire fiber SERS probes fabricated by a femtosecond laser | |
Liu et al. | Released plasmonic electric field of ultrathin tetrahedral-amorphous-carbon films coated Ag nanoparticles for SERS | |
Milenko et al. | Optimization of SERS sensing with micro-lensed optical fibers and Au nano-film | |
Gurbatov et al. | Mapping the refractive index with single plasmonic nanoantenna | |
JP5716196B2 (ja) | 分光測定方法、散乱型近接場顕微鏡、及びチップ増強ラマンプローブの製造方法 | |
JP2010286397A (ja) | 紫外近接場光学顕微鏡 | |
Kaur et al. | Plasmonic structure on a tapered optical fiber for application as a surface‐enhanced Raman spectroscopy substrate | |
Pearce et al. | Nanostructured surface enhanced Raman scattering sensor platform with integrated waveguide core | |
Takahashi et al. | Spectroscopy with scanning near‐field optical microscopy using photon tunnelling mode | |
JP2007003354A (ja) | 結晶表面の歪み測定方法およびその装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20100916 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20120126 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120131 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120329 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120703 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120903 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20120925 |
|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A711 Effective date: 20121221 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20121225 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20121221 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20130129 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130226 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130322 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20160502 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5256433 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |