JP2009121961A - X-ray inspection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an X-ray inspection device for well inspecting and observing an inspecting object by optimally changing an X-ray fluoroscoping direction on the inspecting object. <P>SOLUTION: This X-ray inspection device includes: a base member comprising a table with the inspecting object mounted thereon; an X-ray generation point emitting X rays to the inspecting object; an X-ray image detection means for detecting X rays passing through the inspecting object; first link bar members disposed in front of and symmetrically on both sides of the base member to support the base member via first movable fulcrums and fixed on a frame via first fixed fulcrums; second link bar members disposed at the rear of and symmetrically on both sides of the base member to support the detection means at one end part thereof via a support bar member and supporting the base member at a middle part thereof via a second movable fulcrum and fixed on the frame via a second fixed fulcrum at the other end part thereof; an observation center point adjustment means for adjusting the vertical position of the table; and a turning drive means for rocking the base member. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an X-ray inspection apparatus for inspecting a defect or the like of an inspection object by seeing through the inspection object using X-rays. More specifically, the fluoroscopic direction of the inspection object can be optimally changed. The present invention relates to an X-ray inspection apparatus.

  In recent years, with the advance of technology, high-definition and highly-integrated parts such as semiconductors are manufactured, and these parts are used in devices in various fields. And, when inspecting internal defects etc. of such high-density parts, it is possible to inspect internal and external defects etc. of the inspection object by seeing through the inspection object using X-rays. Possible X-ray inspection equipment is used.

  This type of X-ray inspection apparatus has a structure in which a rotary table for placing an inspection object and an X-ray image detector are arranged on a center line passing through an X-ray generation point of an X-ray generation means. In these X-ray inspection apparatuses, it is required that the inside of these inspection objects can be observed at a high magnification and from any angle as the density of semiconductors and the like as inspection objects increases. It was.

  Therefore, in the conventional X-ray inspection apparatus, when it is desired to change the fluoroscopic direction of the inspection object in this way, a method of rotating the X-ray image detector alone around the X-ray generation source or the X-ray generation source as the center. The method of simultaneously swinging the X-ray generating means and the rotary table has been adopted. An X-ray inspection apparatus that employs the latter of these methods is disclosed in, for example, Patent Document 1.

JP 2003-240734 A

  However, the X-ray inspection apparatus disclosed in Patent Document 1 requires a means for preventing the displacement of the inspection object due to the inclination of the test table, and there is a concern about an increase in the number of parts and an increase in manufacturing cost associated therewith. There was a problem. In addition, by providing such inspection object fixing means on the test table, there is a possibility that these members may interfere with the observation of the inspection object, and a good inspection cannot be performed. was there.

  In addition, in the conventional X-ray inspection apparatus that employs the former method, it is not possible to rotate while keeping the observation center point of the inspection object at the center of the X-ray image, so that good inspection and observation are performed. There is a problem that the operation time for performing inspection and observation increases.

  Furthermore, as means for changing the fluoroscopic direction of the inspection object, computer software for independently controlling the movement of the rotary table in the X-axis, Y-axis, and Z-axis directions and the operation of the X-ray image detector for each element is used. There are known devices that control the drive of servo motors, stepping motors, and the like. However, in such a configuration in which the operation of each element is controlled separately, it is difficult to track a desired observation center point while changing the fluoroscopic direction of the inspection object, and such tracking is difficult. It took a great deal of labor and cost to develop possible software. Further, in such a configuration, when the enlargement ratio of the X-ray image is increased at the time of perspective observation, there is a high risk of causing a serious problem that a desired observation center point is deviated from the display.

  Therefore, the present invention has been made in view of the above circumstances, and its object is to optimally inspect and observe an inspection object by optimally changing the X-ray fluoroscopic direction of the inspection object. An object of the present invention is to provide an X-ray inspection apparatus capable of performing the above.

  The above object of the present invention is to provide a base member having a table on which the inspection object is placed in an X-ray inspection apparatus that inspects the inspection object by seeing through the inspection object using X-rays. X-ray generation means having an X-ray generation point that emits X-rays to the inspection object placed on the table, and X-rays emitted from the X-ray generation point and transmitted through the inspection object X-ray image detection means for detecting, and arranged in a symmetrical relationship on both front sides of the base member, and rotatably supporting the base member via a first movable fulcrum provided at one end, A first link bar member that is pivotally fixed to the frame via a first fixed fulcrum provided at the other end, and is disposed in a symmetrical relationship on both sides behind the base member, and provided at one end. X-ray emission through the supported bar member The X-ray image detection means arranged on an extension line between the point and the observation center point of the inspection object is supported, and the base member can be rotated via a second movable fulcrum provided in an intermediate portion. A second link bar member supported and rotatably fixed to the frame via a second fixed fulcrum provided at the other end, and the vertical position where the observation center point is the same as the second movable fulcrum And a vertical position adjusting means for adjusting a vertical position of the table so as to be disposed on the base member, and the base member that is swingably supported by the first link bar member and the second link bar member. Turning drive means, the X-ray generation point is arranged on a straight line connecting the second fixed fulcrum of the second link bar member, the first movable fulcrum and the second movable fulcrum are the Base member and The table is fixed at a position where the table can be maintained in a horizontal state, and the observation center point and the X-ray image detection means are rotated synchronously around the X-ray generation point by the operation of the turning drive means. Is achieved.

  Further, the object is that the first movable fulcrum and the second movable fulcrum are supported via linear motion bearings provided along the longitudinal direction of each member, and the observation center point is the base member. The distance to the X-ray generation point can be changed by the operation of the enlargement ratio changing means connected to the head.

  Also, the above-mentioned object is that the enlargement ratio changing means includes a flexible linear member having a distal end portion fixed to at least two points on the left and right sides of the base member, and an upper portion of each fixed point of the linear member. A pulley disposed on the winding member, a winding portion to which a base end of the linear member connected via the pulley is fixed, and a winding motor that applies rotational power to the winding portion. Is effectively achieved.

  Further, the object is that the turning drive means is connected to the turning motor connected to the support bar member, a sprocket attached to the tip of the drive shaft of the turning motor and rotating integrally with the drive shaft, A turning guide base having an arc-shaped curved surface having a radius from the X-ray generation point to the sprocket in the longitudinal direction of the second link bar member, and a chain engaged with the sprocket laid on the curved surface This is effectively achieved.

  Further, the object is that the turning drive means is connected to a fixed base attached to the frame, a turning motor rotatably supported on the fixed base, and a drive shaft of the turning motor, A screw shaft that rotates integrally with the drive shaft; a nut that is screwed into the screw shaft; and an engagement hole that is formed in the nut; and the nut is engaged with the second link bar member. This is achieved effectively by being slidably attached via the joint hole.

  Further, the object is that the turning drive means is connected to the turning motor fixed to the frame, the worm is connected to the driving shaft of the turning motor, and rotates integrally with the driving shaft, and the second fixed fulcrum. A sector gear that is rotatably supported via an outer peripheral surface and has an outer gear that meshes with the worm, and a connecting pin that rotatably connects the second link bar member and the sector gear. Is effectively achieved.

  Further, the object is that the turning drive means is a turning motor fixed to the frame, a gear attached to the tip of the drive shaft of the turning motor and rotating integrally with the drive shaft, A sector gear supported rotatably via a second fixed fulcrum and having an outer gear formed on the outer peripheral surface thereof meshing with the gear, and a connection for rotatably connecting the second link bar member and the sector gear. This is achieved effectively by having a pin.

  Further, the object is that the turning drive means is connected to the turning motor fixed to the frame, the screw shaft connected to the turning shaft of the turning motor, and rotated integrally with the driving shaft, and the screw shaft. A nut to be screwed together, a nut guide member that slidably supports the nut along the axial direction of the screw shaft, and a third link bar member that connects the nut and a part of the second link bar member This is effectively achieved.

  Further, the object is that the second link bar member has one end of the second fixed fulcrum extended, has a balancer member at one end of the extension, and the turning drive means is attached to the frame. A fixed turning motor, and a motor drive shaft direct connection means for directly connecting the drive shaft of the turning motor and the second fixed fulcrum and fitting and fixing the second fixed fulcrum to the second link bar member This is effectively achieved.

  Further, the object is that the turning drive means is attached to a turning motor fixed to the frame, a tip of the drive shaft of the turning motor, and a cam plate that rotates integrally with the drive shaft; This is achieved effectively by including a cam roller rotatably attached to the second link bar member so as to contact the outer edge of the cam plate.

  Further, the object is that the turning drive means is a turning motor fixed to the frame, a first roller attached to the tip of the drive shaft of the turning motor and rotating integrally with the drive shaft, A second roller disposed on the opposite side of the first roller with respect to the first link bar member and the second link bar member, and rotatably supported by the frame; the first roller; A belt wound around a second roller; a first belt connecting portion that connects the first link bar member to the belt; and a second belt connecting portion that fixes the second link bar member to the belt. Is effectively achieved.

  Further, the object is that the turning drive means is attached to the turning motor fixed to the frame and the tip of the drive shaft of the turning motor, and rotates together with the drive shaft. And a crank bar member that connects a part of the surface of the disk and a part of the second link bar member.

  According to the X-ray inspection apparatus according to the present invention, when the X-ray fluoroscopic direction of the inspection object placed on the table of the base member is changed, the base member is the first link bar member and the second link bar member. Is a four-bar link structure that is supported at four points so as to be rotatable. Therefore, if the vertical position adjustment means adjusts the vertical position of the table so that the observation center point of the inspection object is arranged at the same vertical position as the second movable fulcrum of the second link bar member, X The observation center point and the detection center point of the X-ray image detection means can be rotated synchronously around the line source. That is, with such a simple mechanical structure, the observation center point can always be captured at the center of the X-ray image even when the observation angle (X-ray fluoroscopic direction) is changed, and a constant observation magnification ratio is maintained. can do. As a result, it is possible to satisfactorily observe the inspection object in the optimum fluoroscopic direction without developing and using expensive control software or the like for moving the observation center point and the detection center point synchronously.

  Further, when observing at a high magnification in this type of X-ray detection apparatus, an error in manufacturing the apparatus can be a major obstacle in changing the observation angle. However, in the X-ray inspection apparatus according to the present invention, due to the manufacturing error. Since the observation angle can be changed while checking the displacement on the X-ray image display, the position correction can be performed very easily.

  Furthermore, in the X-ray inspection apparatus according to the present invention, the inspection object placed on the table of the base member has a structure in which the horizontal state is always maintained even when the base member is turned. Thereby, since it is not necessary to provide a means for preventing the deviation of the inspection object, the number of parts and the assembly process can be reduced, and a better observation can be performed.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[First Embodiment]
FIG. 1 is a main part front view showing a schematic configuration of the X-ray inspection apparatus according to the first embodiment of the present invention, and FIG. 2 is a side view of the main part. In these drawings, the X-ray inspection apparatus 1 emits X-rays to a base member 4 having a rotary table 3 on which an inspection object 2 is placed and an inspection object 2 placed on the rotation table 3. An X-ray generation means 5 having an X-ray generation point 5 a and an X-ray image detection means 6 for detecting X-rays emitted from the X-ray generation point 5 a and transmitted through the inspection object 2 are provided in the frame 7. Yes.

  The base member 4 is a rectangular housing having at least an open top surface, and includes the rotary table 3 described above, a Y-axis stage 8 disposed below the rotary table 3, and the Y-axis. An X-axis stage 9 disposed below the stage 8 is disposed. The X-axis stage 9 and the Y-axis stage 8 are configured such that members arranged on the upper surfaces thereof are arranged in the X-axis direction (arrow X1-X2 direction in FIG. 1) and the Y-axis direction (arrow Y1-Y2 direction in FIG. 2). It is composed of a linear actuator that moves the actuator. Although not shown, the rotary table 3 includes drive means (for example, a worm gear mechanism) that can rotate around the center of the lower portion thereof. A vertical position between the rotary table 3 and the Y-axis stage 8 that adjusts the position of the rotary table 3 in the vertical direction (arrow Z1-Z2 direction in FIG. 1) according to the thickness of the inspection object 2. An adjusting means 10 (for example, an elevating means using a screw mechanism, a wedge mechanism, a cam mechanism, etc.) is provided.

  As shown in FIG. 2, the first link bar member 11 is disposed on both sides of the base member 4 in the front (left side of FIG. 2) in a symmetrical relationship, and the first link bar member 11 has one end. The base member 4 is rotatably supported via a first movable fulcrum (connecting pin) 11a provided at the portion, and the frame 7 via a first fixed fulcrum (connecting pin) 11b provided at the other end. It is fixed to a part of it so that it can rotate freely. On the other hand, on the both sides of the base member 4 (right side in FIG. 2), second link bar members 12 are arranged in a symmetrical relationship, and the second link bar member 12 is a support bar provided at one end. A second movable fulcrum (supported at an intermediate portion) is supported through the member 13 while supporting the X-ray image detection means 6 arranged on an extension line between the X-ray generation point 5a and the observation center point 2a of the inspection object 2. The base member 4 is rotatably supported via a connecting pin) 12a, and is fixed to a part of the frame 7 via a second fixed fulcrum (connecting pin) 12b provided at the other end. Has been. That is, the support structure of the base member 4 is rocked by the first movable fulcrum 11a and the first fixed fulcrum 11b of the first link bar member 11, and the second movable fulcrum 12a and the second fixed fulcrum 12b of the second link bar member 12. It is a four-bar link structure supported movably. The first movable fulcrum 11a and the second movable fulcrum 12a are fixed at a position where the base member 4 and the rotary table 3 in the base member 4 can be kept in a horizontal state.

  The X-ray generation point 5a of the X-ray generation means 5 is a straight line connecting the second fixed fulcrums 12b and 12b of the second link bar member 12 disposed on both sides of the base member 4, as shown in FIG. Arranged above. As shown in FIG. 2, the observation center point 2a of the inspection object 2 is positioned in the vertical direction of the X-ray generation point 5a when the turning angle of the base member 4 is 0 °, and the observation center point 2a is The vertical position of the rotary table 3 is adjusted by the vertical position adjusting means 10 so as to be arranged at the same vertical position as the second movable fulcrum 12a. Further, the X-ray image detecting means 6 attached between the one end portions of the second link bar member 12 via the support bar member 13 has a detection center point 6a on an extension line of the X-ray generation point 5a and the observation center point 2a. It is arranged to become.

  As shown in FIG. 3, the base member 4 and the X-ray image detection means 6 having such a configuration are arranged such that the X-ray generation point 5 a is detected by the turning drive means 14 connected to one end of the second link bar member 12. Turned to the center. At this time, the X-ray generation point 5a, the observation center point 2a, and the detection center point 6a are always located on the same straight line, the distance between these points is always kept constant, and the inspection object 2 is placed. The rotary table 3 is always kept in a horizontal state.

  The turning drive means 14 includes a turning motor 16 attached to the support bar member 13 via a connecting member 15, and a sprocket 16b attached to the drive shaft 16a of the turning motor 16 and rotating integrally with the drive shaft 16a. And an arc-like curved surface having a radius from the X-ray generation point in the longitudinal direction of the second link bar member 12 to the sprocket 16b, and a chain 17a meshing with the gear is laid on the curved surface. And a guide stand 17. Further, the turning guide base 17 has a guide 17b that can correspond to the circular arc track of the chain 17a at the lower part of the chain 17a, and the guide 17b has an engaging portion 16c provided at the lower part of the turning motor 16. Are engaged. Here, the power transmission mechanism of the turning motor 16 is configured by the engagement of the sprocket 16b and the chain 17a. However, the present invention is not limited to this. For example, instead of the sprocket 16b, a gear is attached to the drive shaft 16a. In addition, a power transmission mechanism in which gear teeth meshing with the gears are formed on the curved surface of the guide base 17 instead of the chain 17a may be used.

  In the X-ray inspection apparatus 1 according to the present embodiment, the first movable fulcrum 11a of the first link bar member 11 and the second movable fulcrum 12a of the second link bar member 12 are arranged in the longitudinal direction of the members 11 and 12. The base member 4 is moved in the directions of arrows Z3-Z4 by the enlargement ratio changing means 19 supported through the linear motion bearing 18 provided along and connected to the base member 4, thereby observing the X-ray generation point 5a. The distance from the center point 2a can be changed.

  The enlargement ratio changing means 19 includes a flexible linear member 20 such as a wire, a chain, a rope, and a belt whose front end portions are fixed to the left and right sides of the base member 4 and each of the linear members 20. A pulley 21 made of a pulley or a sprocket arranged above a fixed point, a winding portion 22 to which a base end of a linear member 20 connected via the pulley 21 is fixed, and the winding portion 22 rotate. A winding motor 23 for applying power is provided. With such a configuration of the enlargement ratio changing means 19, not only when the turning angle of the base member 4 is 0 ° as shown in FIG. 2, but also when the base member 4 is in a swinging state as shown in FIG. Even in such a case, it is possible to change the magnification while maintaining the horizontal state of the rotary table 3 while keeping the observation center point 2a at the center of the X-ray detection image.

  In addition, although illustration is abbreviate | omitted in this embodiment in order to simplify description, as another component, the power supply which supplies electric power to the housing | casing for shielding X-rays, the X-ray generation means 5, An X-ray control unit for controlling the output of X-rays, a mechanism control unit for controlling each positioning operation of the driving of the motors 16 and 23, the X-axis stage 9, the Y-axis stage 8, the vertical position adjusting means 10, and the like. An operation panel for operating the mechanism, an image display means for displaying an X-ray transmission image based on the output of the X-ray image detection means 6, and the like are provided.

  Next, the operation of the X-ray inspection apparatus 1 according to this embodiment configured as described above will be described.

  First, as shown in FIG. 2, the observation center point 2a of the inspection object 2 is positioned by the X-axis stage 9 and the Y-axis stage 8 while the turning angle is 0 °, and the observation center point 2a is The rotary table 3 is moved in the vertical direction (arrow Z1-Z2 direction in FIG. 2) by the vertical position adjusting means 10 so as to be in the same vertical position as the movable fulcrum 12a of the two link bar member.

  Then, when the turning motor 16 of the turning drive means 14 is driven and this power is transmitted to the second link bar member 12, the base member 4 and the X-ray image detecting means 6 are swung, and the observation center point 2a. The detection center point 6a is turned around the X-ray generation point 5a. Thereby, the X-ray fluoroscopic direction of the inspection object 2 can be changed to a desired observation angle without shifting the observation center point 2a.

  When it is desired to change the observation magnification rate, the magnification rate changing means 19 is operated to move the base member 4 in the longitudinal direction (arrow Z3-Z4 direction) of the first link bar member 11 and the second link bar member 12. Move along. Thereby, regardless of whether the base member 4 is in the swinging state, it is possible to change the enlargement ratio while keeping the observation center point 2a at the center of the X-ray detection image.

  As described above, the X-ray inspection apparatus 1 according to this embodiment includes the X-ray generation point 5a of the X-ray generation unit 5, the observation center point 2a of the inspection object 2, and the detection center of the X-ray image detection unit 6. A mechanical structure that allows the observation center point 2a and the detection center point 6a to be rotated synchronously with the X-ray generation point 5a as the center while the point 6a is positioned on the same straight line and maintaining this positional relationship. have. Thereby, even if the observation angle (X-ray fluoroscopic direction) is changed, the observation center point 2a can always be captured at the center of the X-ray image, and a constant observation magnification can be maintained. The operation labor of the operator) can be reduced.

  Further, in the X-ray inspection apparatus 1 according to the present embodiment, the base member 4 and the X-ray image detection means 6 are turned while the base member 4 is maintained in the horizontal state, so that it is placed on the rotary table 3. In addition, the fixing means for the inspection object 2 is not required, which can reduce the number of parts and the assembly labor.

  Furthermore, in the X-ray inspection apparatus 1 according to the present embodiment, the support structure of the second link bar member 12 is not only supported by the second fixed fulcrum 12b whose other end is a rotating shaft, but one end is a turning guide. Since it is supported by the base 17, higher detection accuracy can be maintained. Therefore, the X-ray inspection apparatus 1 according to the present embodiment is useful when performing a highly accurate inspection where the distance between the X-ray generation point 5a and the observation center point 2a is very close (for example, 10 μm or less).

[Second Embodiment]
FIG. 4 is a side view of an essential part showing a schematic configuration of an X-ray inspection apparatus according to the second embodiment of the present invention. In the figure, the same members as those in the first embodiment described above are denoted by the same reference numerals, and the description thereof is omitted. Here, only portions different from those in the first embodiment will be described.

  As shown in FIG. 4, in the X-ray inspection apparatus 1 </ b> A according to the present embodiment, the configuration of the turning drive means 14 </ b> A that transmits power to the second link bar member 12 to swing the base member 4 is the first described above. It differs from the turning drive means 14 of the embodiment. That is, the turning drive means 14A according to the present embodiment includes a fixed base 24 attached to the frame 7, a turning motor 16A rotatably supported on the fixed base 24, and a drive shaft of the turning motor 16A. , A screw shaft 25A that rotates integrally with the drive shaft, a nut 26A that is screwed into the screw shaft 25A, and an engagement hole 27 that is formed in the nut 26A. The two link bar members 12 are slidably attached via the engagement holes 27.

  In this turning drive means 14A, the screw shaft 25A rotates as the turning motor 16A is driven, and the nut 26A follows the axial direction of the screw shaft 25A (arrow A1-A2 direction in FIG. 4) in response to this rotation. Move. With the movement of the nut 26A, the second link bar member 12 is turned around the second fixed fulcrum 12b, and the observation center point 2a of the inspection object 2 and the detection center point of the X-ray image detection means 6 are detected. 6a is rotated synchronously about the X-ray generation point 5a of the X-ray generation means 5.

  Note that by using a ball screw mechanism in which the screw shaft 25A is a ball screw shaft and the nut 26A is a ball nut, sliding friction between these members is reduced, and a more effective turning motion can be performed. . Further, the same effect can be obtained even when the cylinder mechanism is used instead of the turning motor 16A described here and the screw mechanism made up of the screw shaft 25A and the nut 26A, and the turning is made at every predetermined turning angle. be able to.

  As described above, in the X-ray inspection apparatus 1A according to this embodiment, the X-ray generation point 5a is positioned while the X-ray generation point 5a, the observation center point 2a, and the detection center point 6a are positioned on the same straight line. By providing a screw mechanism that can rotate the observation center point 2a and the detection center point 6a synchronously with the center as the center, the same effects as those of the first embodiment described above can be obtained.

[Third Embodiment]
FIG. 5 is a main part side view showing a schematic configuration of an X-ray inspection apparatus according to a third embodiment of the present invention, and FIG. 6 is a main part side view showing a schematic configuration of a modification thereof. In these drawings, the same members as those in the first embodiment described above are denoted by the same reference numerals, and the description thereof will be omitted. Only portions different from those in the first embodiment will be described here.

  As shown in FIG. 5, in the X-ray inspection apparatus 1 </ b> B according to the present embodiment, the configuration of the turning drive means 14 </ b> B that transmits power to the second link bar member 12 to swing the base member 4 is the first described above. It differs from the turning drive means 14 of the embodiment. That is, the turning drive means 14B according to the present embodiment is connected to the turning motor 16B fixed to a part of the frame 7 and the drive shaft 16aB of the turning motor 16B, and rotates integrally with the drive shaft 16aB. A worm 28, a sector gear 29 that is rotatably supported via the second fixed fulcrum 12bB and has an outer gear that engages with the worm 28 on the outer peripheral surface, and the sector gear 29 and the second link bar member 12 The second link bar member 12 is rotatably supported by the sector gear 29 via the connection pin 30.

  Here, the worm 28 is used as the power transmission means to the sector gear 29, but is not limited to this. For example, a gear fitted and fixed to the tip of the drive shaft 16aB of the turning motor 16B is used. May be. Similarly to the first embodiment described above, a sector gear 29 is formed by fitting and fixing a sprocket to the tip of the drive shaft 16aB of the turning motor 16B and laying a chain that meshes with the sprocket on the outer peripheral surface of the sector gear. You may use as a power transmission means to.

  In the turning drive means 14B, the sector gear 29 is swung around the second fixed fulcrum 12bB as the turning motor 16B is driven, and the second link bar member 12 is moved along with the swing of the sector gear 29. The vehicle is turned in the direction of arrow B1-B2 around the second fixed fulcrum 12bB. Thereby, the observation center point 2a of the inspection object 2 and the detection center point 6a of the X-ray image detection means 6 are rotated synchronously about the X-ray generation point 5a of the X-ray generation means 5.

  As described above, in the X-ray inspection apparatus 1B according to the present embodiment, the X-ray generation point 5a is positioned while the X-ray generation point 5a, the observation center point 2a, and the detection center point 6a are positioned on the same straight line. By providing a worm gear mechanism that can rotate the observation center point 2a and the detection center point 6a synchronously with the center as the center, the same effects as those of the first embodiment described above can be obtained.

  In the present embodiment, the axial direction of the worm 28 is arranged in a positional relationship parallel to the axial direction of the second fixed fulcrum 12bB that supports the sector gear 29 so as to be swingable. As shown in the modification, the same effect can be obtained even when the axial direction of the worm 28 is arranged in a positional relationship orthogonal to the axial direction of the second fixed fulcrum 12bB.

[Fourth Embodiment]
FIG. 7 is a side view of an essential part showing a schematic configuration of an X-ray inspection apparatus according to the fourth embodiment of the present invention. In the figure, the same members as those in the above-described fourth embodiment are denoted by the same reference numerals, and the description thereof is omitted. Here, only portions different from those in the first embodiment will be described.

  As shown in FIG. 7, in the X-ray inspection apparatus 1 </ b> C according to the present embodiment, the configuration of the turning drive means 14 </ b> C that transmits the power to the second link bar member 12 to swing the base member 4 is the first described above. It differs from the turning drive means 14 of the embodiment. That is, the turning drive means 14C according to the present embodiment includes a turning motor 16C fixed to a part of the frame 7, and a screw shaft that is connected to the driving shaft of the turning motor 16C and rotates integrally with the driving shaft. 25C, a nut 26C screwed onto the screw shaft 25C, a nut guide member 31 that supports the nut 26C slidably along the axial direction of the screw shaft 25C, and the nut 26C and the second link bar member 12 And a third link bar member 32 for connecting a part thereof.

  In the turning drive means 14C, the screw shaft 25C rotates in accordance with the driving of the turning motor 16C, and the nut 26C rotates in the axial direction of the screw shaft 25C (arrows C1-C2 in FIG. 7) according to the rotation of the screw shaft 25C. Direction). The linear motion of the nut 26C is transmitted to the second link bar member 12 via the third link bar member 32, and the second link bar member 12 is turned about the second fixed fulcrum 12b. Thereby, the observation center point 2a of the inspection object 2 and the detection center point 6a of the X-ray image detection means 6 are rotated synchronously around the X-ray generation point 5a of the X-ray generation means 5.

  Similar to the second embodiment described above, by using a ball screw mechanism in which the screw shaft 25C is a ball screw shaft and the nut 26C is a ball nut, sliding friction between these members is reduced, and more An effective turning motion can be performed. Further, the same effect can be obtained even if the cylinder mechanism is used instead of the turning motor 16C described here and the screw mechanism made up of the screw shaft 25C and the nut 26C to make the turn at every predetermined turning angle. be able to.

  As described above, in the X-ray inspection apparatus 1C according to the present embodiment, the X-ray generation point 5a is positioned while the X-ray generation point 5a, the observation center point 2a, and the detection center point 6a are positioned on the same straight line. By providing a slide link mechanism that can rotate the observation center point 2a and the detection center point 6a synchronously with the center as the center, the same effects as those of the first embodiment described above can be obtained.

[Fifth Embodiment]
FIG. 8 is a side view of an essential part showing a schematic configuration of an X-ray inspection apparatus according to the fifth embodiment of the present invention. In the figure, the same members as those in the first embodiment described above are denoted by the same reference numerals, and the description thereof is omitted. Here, only portions different from those in the first embodiment will be described.

  As shown in FIG. 8, in the X-ray inspection apparatus 1D according to the present embodiment, the configuration of the turning drive means 14D that transmits power to the second link bar member 12 to swing the base member 4 is the first described above. It differs from the turning drive means 14 of the embodiment. That is, in the present embodiment, the second link bar member 12D has one end of the second fixed fulcrum 12bD extended, has a balancer member 33 at the extended end, and the turning drive means 14D has a frame 7, and the drive shaft 16 a D of the turning motor 16 D is directly connected to the second fixed fulcrum 12 b D, and the second fixed fulcrum 12 b D is connected to the second link bar member 12 D. The fitting is fixed.

  In this turning drive means 14D, the connecting pin 12bD of the second fixed fulcrum rotates in conjunction with the rotation of the drive shaft 16aD of the turning motor 16D, and this rotational force is directly transmitted to the second link bar member 12D as it is. The Thereby, the second link bar member 12D is turned around the second fixed fulcrum 12bD, and the observation center point 2a of the inspection object 2 and the detection center point 6a of the X-ray image detection means 6 are the X-ray generation means 5. Around the X-ray generation point 5a.

  As described above, in the X-ray inspection apparatus 1D according to the present embodiment, the X-ray generation point 5a is positioned while the X-ray generation point 5a, the observation center point 2a, and the detection center point 6a are positioned on the same straight line. By providing a motor driving force direct transmission mechanism that can turn the observation center point 2a and the detection center point 6a synchronously with the center as the center, the same effect as in the first embodiment described above can be obtained.

[Sixth Embodiment]
FIG. 9 is a side view of an essential part showing a schematic configuration of an X-ray inspection apparatus according to the sixth embodiment of the present invention. In the figure, the same members as those in the first embodiment described above are denoted by the same reference numerals, and the description thereof is omitted. Here, only portions different from those in the first embodiment will be described.

  As shown in FIG. 9, in the X-ray inspection apparatus 1E according to the present embodiment, the structure of the turning drive means 14E that transmits power to the second link bar member 12 to swing the base member 4 is the first described above. It differs from the turning drive means 14 of the embodiment. That is, the turning drive means 14E according to the present embodiment is attached to the turning motor 16E fixed to a part of the frame 7, and the tip of the drive shaft 16aE of the turning motor 16E, and is integrated with the drive shaft 16aE. A rotating cam plate 34 and a cam roller 35 rotatably attached to the second link bar member 12 so as to contact the outer edge of the cam plate 34 are provided.

  In the turning drive means 14E, the cam plate 34 rotates as the turning motor 16E is driven, and the second link bar member 12 is centered on the second fixed fulcrum 12b in conjunction with the rotation of the cam plate 34. It is turned. Thereby, the observation center point 2a of the inspection object 2 and the detection center point 6a of the X-ray image detection means 6 are rotated synchronously around the X-ray generation point 5a of the X-ray generation means 5.

  As described above, in the X-ray inspection apparatus 1E according to the present embodiment, the X-ray generation point 5a is positioned while the X-ray generation point 5a, the observation center point 2a, and the detection center point 6a are positioned on the same straight line. By providing a cam mechanism capable of rotating the observation center point 2a and the detection center point 6a synchronously with the center as the center, the same effects as those of the first embodiment described above can be obtained.

[Seventh Embodiment]
FIG. 10 is a side view of an essential part showing a schematic configuration of an X-ray inspection apparatus according to a seventh embodiment of the present invention. In the figure, the same members as those in the first embodiment described above are denoted by the same reference numerals, and the description thereof is omitted. Here, only portions different from those in the first embodiment will be described.

  As shown in FIG. 10, in the X-ray inspection apparatus 1 </ b> F according to the present embodiment, the configuration of the turning drive means 14 </ b> F that transmits power to the second link bar member 12 to swing the base member 4 is the first described above. It differs from the turning drive means 14 of the embodiment. That is, the turning drive means 14F according to the present embodiment is attached to the turning motor 16F fixed to a part of the frame 7, and the tip of the drive shaft 16aF of the turning motor 16F, and is integrated with the drive shaft 16aF. A first roller 36 that rotates, and a second roller 36 that is disposed on the opposite side of the first roller 36 across the first link bar member 11 and the second link bar member 12 and is rotatably supported by the frame 7. A roller 37, a belt (or chain) 38 wound around the first roller 36 and the second roller 37, a first belt connecting portion 39 for connecting the first link bar member 11 to the belt 38, and a second link bar. And a second belt connecting portion 40 for fixing the member 12 to the belt 37.

  In this turning drive means 14F, the first roller 36 rotates as the turning motor 16F is driven, and the rotational movement of the first roller 36 is caused by the first link bar member 11 and the second link bar member via the belt 38. 12 and the link bar members 11 and 12 are turned around the fixed fulcrums 11b and 12b. Thereby, the observation center point 2a of the inspection object 2 and the detection center point 6a of the X-ray image detection means 6 are rotated synchronously around the X-ray generation point 5a of the X-ray generation means 5.

  As described above, in the X-ray inspection apparatus 1F according to the present embodiment, the X-ray generation point 5a is positioned while the X-ray generation point 5a, the observation center point 2a, and the detection center point 6a are positioned on the same straight line. By providing a winding belt mechanism capable of synchronously turning the observation center point 2a and the detection center point 6a around the center, the same effects as those of the first embodiment described above can be obtained.

[Eighth Embodiment]
FIG. 11 is a side view of an essential part showing a schematic configuration of an X-ray inspection apparatus according to an eighth embodiment of the present invention. In the figure, the same members as those in the first embodiment described above are denoted by the same reference numerals, and the description thereof is omitted. Here, only portions different from those in the first embodiment will be described.

  As shown in FIG. 11, in the X-ray inspection apparatus 1G according to the present embodiment, the configuration of the turning drive means 14G that transmits power to the second link bar member 12 to swing the base member 4 is the first described above. It differs from the turning drive means 14 of the embodiment. That is, the turning drive means 14G according to the present embodiment is attached to the turning motor 16G fixed to a part of the frame 7, and the tip of the drive shaft 16aG of the turning motor 16G, and is integrated with the drive shaft 16aG. And a crank bar member 42 that connects a part of the surface of the disk 41 and a part of the second link bar member 12.

  In this turning drive means 14G, the disk 41 rotates as the turning motor 16G is driven, and the rotational motion of this disk 41 is transmitted to the second link bar member 12 via the crank bar member 42, and The two link bar members 12 are turned around the second fixed fulcrum 12b. Thereby, the observation center point 2a of the inspection object 2 and the detection center point 6a of the X-ray image detection means 6 are rotated synchronously around the X-ray generation point 5a of the X-ray generation means 5.

  As described above, in the X-ray inspection apparatus 1G according to the present embodiment, the X-ray generation point 5a is positioned while the X-ray generation point 5a, the observation center point 2a, and the detection center point 6a are positioned on the same straight line. By providing a crank mechanism that can turn the observation center point 2a and the detection center point 6a synchronously with the center as the center, the same effects as those of the first embodiment described above can be obtained.

  In addition, although the turning drive means 14A-14G demonstrated by 2nd-8th embodiment may be provided with respect to both the left and right 2nd link bar members 12 and 12, the 2nd link bar of either right and left. Even if it is provided only for the member 12, the same effect can be obtained.

  Although omitted in the second to eighth embodiments for the sake of simplification, in the X-ray inspection apparatuses 1A to 1G according to these embodiments, the enlargement factor changing means as described in the first embodiment. 19 can be provided to change the enlargement ratio.

  As mentioned above, although embodiment of this invention was described concretely, this invention is not limited to this, In the range which does not deviate from the meaning, it can change suitably.

It is a principal part front view which shows the principal part schematic structure of the X-ray inspection apparatus which concerns on 1st Embodiment of this invention. It is a principal part side view which shows schematic structure of the X-ray inspection apparatus which concerns on 1st Embodiment of this invention. It is explanatory drawing which shows the state which changed the inspection angle of the X-ray inspection apparatus of FIG. It is a principal part side view which shows schematic structure of the X-ray inspection apparatus which concerns on 2nd Embodiment of this invention. It is a principal part side view which shows schematic structure of the X-ray inspection apparatus which concerns on 3rd Embodiment of this invention. It is a principal part side view which shows schematic structure of the modification of the X-ray inspection apparatus which concerns on 3rd Embodiment of this invention. It is a principal part side view which shows schematic structure of the X-ray inspection apparatus which concerns on 4th Embodiment of this invention. It is a principal part side view which shows schematic structure of the X-ray inspection apparatus which concerns on 5th Embodiment of this invention. It is a principal part side view which shows schematic structure of the X-ray inspection apparatus which concerns on 6th Embodiment of this invention. It is a principal part side view which shows schematic structure of the X-ray inspection apparatus which concerns on 7th Embodiment of this invention. It is a principal part side view which shows schematic structure of the X-ray inspection apparatus which concerns on 8th Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1,1A-1G ... X-ray inspection apparatus 2 ... Inspection object 2a ... Observation center point 3 ... Rotary table 4 ... Base member 5 ... X-ray generation means 5a ... X-ray generation point 6 ... X-ray image detection means 6a ... detection center point 7 ... frame 8 ... Y-axis stage 9 ... X-axis stage 10 ... vertical position adjustment means 11 ..First link bar member 11a ... first movable fulcrum (connecting pin)
11b ... 1st fixed fulcrum (connection pin)
12, 12D ... 2nd link bar member 12a ... 2nd movable fulcrum (connection pin)
12b, 12bB, 12bD ... 2nd fixed fulcrum (connection pin)
13 ... support bar members 14, 14A-14G ... turning drive means 15 ... connecting members 16, 16A-16G ... turning motors 16a, 16aB, 16aD-16aG ... drive shaft 16b ... · Sprocket 16c ··· engaging portion 17 ··· turning guide base 17a ··· chain 17b ··· guide 18 ··· linear motion bearing 19 · · · magnification changing means 20 · · · linear member 21 ... pulley 22 ... winding part 23 ... winding motor 24 ... fixing bases 25A, 25C ... screw shafts 26A, 26C ... nuts 27 ... engagement holes 28 ... · Worm 29 · · · Sector gear 30 · · · Connection pin 31 · · · Nut guide member 32 · · · Third link bar member 33 · · · Balancer member 34 · · · Cam plate 35 · · · Cam roller 36 · · · First roller 37 ... second Over La 38 ... belt 39 ... first belt connecting portion 40 ... second belt connecting portion 41 ... disk 42 ... crank bar member

Claims (12)

An X-ray inspection apparatus for inspecting an inspection object by seeing through the inspection object using X-rays,
A base member having a table on which the inspection object is placed;
X-ray generation means having an X-ray generation point for emitting X-rays to the inspection object placed on the table;
X-ray image detection means for detecting X-rays radiated from the X-ray generation point and transmitted through the inspection object;
The base member is disposed on both front sides of the base member in a symmetrical relationship, and supports the base member rotatably via a first movable fulcrum provided at one end and a first provided at the other end. A first link bar member rotatably fixed to the frame via a fixed fulcrum;
Arranged symmetrically on both sides of the base member in the left-right direction, and arranged on an extension line between the X-ray generation point and the observation center point of the inspection object via a support bar member provided at one end. The X-ray image detecting means is supported, the base member is rotatably supported via a second movable fulcrum provided at an intermediate portion, and the second fixed fulcrum provided at the other end is supported. A second link bar member rotatably fixed to the frame;
Vertical position adjusting means for adjusting the vertical position of the table so that the observation center point is arranged at the same vertical position as the second movable fulcrum;
Swivel drive means for swinging the base member swingably supported by the first link bar member and the second link bar member;
The X-ray generation point is arranged on a straight line connecting the second fixed fulcrums of the second link bar members,
The first movable fulcrum and the second movable fulcrum are fixed at a position where the base member and the table can be kept in a horizontal state, and
The X-ray inspection apparatus characterized in that the observation center point and the X-ray image detection means are rotated around the X-ray generation point synchronously by the operation of the turning drive means. The first movable fulcrum of the first link bar member and the second movable fulcrum of the second link bar member are supported via linear motion bearings provided along the longitudinal direction of each member, and
The X-ray inspection apparatus according to claim 1, wherein the observation center point is capable of changing a distance from the X-ray generation point by operation of an enlargement ratio changing unit connected to the base member.   The enlargement ratio changing means includes a flexible linear member whose tip is fixed to at least two points on the left and right sides of the base member, and a pulley disposed above each fixed point of the linear member; The winding part which fixed the base end of the said linear member connected via this pulley was fixed, and the motor for winding which provides rotational power to this winding part are provided. X-ray inspection equipment.   The turning drive means includes a turning motor coupled to the support bar member, a sprocket attached to a tip end of a drive shaft of the turning motor and rotating integrally with the drive shaft, and the second link bar member A turning guide base having an arc-shaped curved surface having a radius from the X-ray generation point to the sprocket in the longitudinal direction of the shaft, and a chain meshing with the sprocket is laid on the curved surface. Item 4. The X-ray inspection apparatus according to any one of Items 1 to 3. The turning drive means is connected to a fixed base attached to the frame, a turning motor rotatably supported on the fixed base, a drive shaft of the turning motor, and rotates integrally with the drive shaft. A screw shaft, a nut screwed into the screw shaft, an engagement hole formed in the nut, and
The X-ray inspection apparatus according to claim 1, wherein the nut is slidably attached to the second link bar member via the engagement hole.   The turning drive means is turnable via a turning motor fixed to the frame, a worm connected to the drive shaft of the turning motor and rotating integrally with the drive shaft, and the second fixed fulcrum. And a connecting pin for rotatably connecting the second link bar member and the sector gear to each other. X-ray inspection apparatus in any one of.   The turning drive means includes a turning motor fixed to the frame, a gear attached to a tip of a drive shaft of the turning motor, and a gear that rotates integrally with the drive shaft, and the second fixed fulcrum. And a sector gear having an outer peripheral surface formed with an external gear meshing with the gear, and a connecting pin for rotatably connecting the second link bar member and the sector gear. Item 4. The X-ray inspection apparatus according to any one of Items 1 to 3.   The turning drive means includes a turning motor fixed to the frame, a screw shaft coupled to the drive shaft of the turning motor and rotating integrally with the drive shaft, and a nut screwed to the screw shaft; A nut guide member that slidably supports the nut along the axial direction of the screw shaft, and a third link bar member that connects the nut and a part of the second link bar member. Item 4. The X-ray inspection apparatus according to any one of Items 1 to 3. The second link bar member has one end side of the second fixed fulcrum extended, and has a balancer member at the extended end, and
The turning drive means directly connects the turning motor fixed to the frame, the drive shaft of the turning motor, and the second fixed fulcrum, and the second fixed fulcrum is connected to the second link bar member. The X-ray inspection apparatus according to claim 1, further comprising a motor drive shaft direct coupling means for fitting and fixing.   The turning drive means is attached to a turning motor fixed to the frame, a tip of a drive shaft of the turning motor, a cam plate that rotates integrally with the drive shaft, and an outer edge of the cam plate. The X-ray inspection apparatus according to claim 1, further comprising a cam roller rotatably attached to the second link bar member.   The swivel driving means includes a swivel motor fixed to the frame, a first roller attached to a tip of a drive shaft of the swivel motor, and rotating integrally with the drive shaft; A second roller disposed on the opposite side of the first link bar member and the second link bar member and rotatably supported by the frame, and wound around the first roller and the second roller And a second belt connecting portion for fixing the second link bar member to the belt. 2. A first belt connecting portion for connecting the first link bar member to the belt, and a second belt connecting portion for fixing the second link bar member to the belt. The X-ray inspection apparatus according to any one of 3 above.   The turning drive means includes: a turning motor fixed to the frame; a disk attached to a distal end portion of the drive shaft of the turning motor; and a disk that rotates integrally with the drive shaft; The X-ray inspection apparatus according to claim 1, further comprising a crank bar member that connects a part of a surface of a disk and a part of the second link bar member.

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