JP4341540B2 - 3-axis drive - Google Patents

3-axis drive Download PDF

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JP4341540B2
JP4341540B2 JP2004354428A JP2004354428A JP4341540B2 JP 4341540 B2 JP4341540 B2 JP 4341540B2 JP 2004354428 A JP2004354428 A JP 2004354428A JP 2004354428 A JP2004354428 A JP 2004354428A JP 4341540 B2 JP4341540 B2 JP 4341540B2
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pulley
belt
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drives
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JP2006159346A (en
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俊文 田口
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本発明は、例えば自動分析装置、電子部品実装装置、各種加工機、搬送装置などに用いられる三軸駆動装置に関する。   The present invention relates to a triaxial drive device used in, for example, an automatic analyzer, an electronic component mounting device, various processing machines, a conveyance device, and the like.

例えばウエルプレート等の反応容器に採取された血液や尿等の試料を分析する自動分析装置においては、反応容器に試薬を分注する分注ノズルを所定位置に位置させるために、分注ノズルを互いに直交する三つの軸方向に移動させる必要がある。従来、分注ノズル等の被駆動部材を互いに直交する三つの軸方向に駆動する三軸駆動装置は、ベースと、このベースの上方に設けられた第１の可動部を前記三つの軸方向のうち第１の軸方向（例えばＸ軸方向）に移動可能に支持する第１の案内機構と、前記第１の可動部上に設けられた第２の可動部を前記三つの軸方向のうち第１の軸方向と直交する第２の軸方向（例えばＹ軸方向）に移動可能に支持する第２の案内機構と、前記第１の可動部を前記第１の軸方向に駆動する第１のベルト式駆動機構と、前記第２の可動部を前記第２の軸方向に駆動する第２のベルト式駆動機構と、前記第２の可動部に回転自在に支持された第１のプーリと、この第１のプーリと平行に設けられた第２のプーリと、これらのプーリと協働して前記被駆動部材を前記第１及び第２の軸方向と直交する第３の軸方向（例えばＺ軸方向）に駆動する伝動ベルトと、前記第２のプーリを駆動するプーリ駆動機構とを備えた構成となっている。   For example, in an automatic analyzer that analyzes a sample such as blood or urine collected in a reaction container such as a well plate, in order to position a dispensing nozzle for dispensing a reagent in the reaction container, a dispensing nozzle is provided. It is necessary to move in three axial directions orthogonal to each other. Conventionally, a triaxial driving apparatus that drives a driven member such as a dispensing nozzle in three axial directions orthogonal to each other includes a base and a first movable portion provided above the base in the three axial directions. Of these three axial directions, a first guide mechanism that is movably supported in a first axial direction (for example, the X-axis direction) and a second movable portion provided on the first movable portion are provided. A second guide mechanism that is movably supported in a second axial direction (for example, the Y-axis direction) orthogonal to the first axial direction, and a first that drives the first movable portion in the first axial direction. A belt-type drive mechanism; a second belt-type drive mechanism that drives the second movable portion in the second axial direction; and a first pulley that is rotatably supported by the second movable portion; A second pulley provided in parallel with the first pulley, and the driven member in cooperation with these pulleys. The power transmission belt that drives in a third axial direction (for example, the Z-axis direction) orthogonal to the first and second axial directions and a pulley drive mechanism that drives the second pulley are provided. .

このような三軸駆動機構では、第１のベルト式駆動機構により第１の可動部を第１の軸方向に移動させると、被駆動部材が第１の軸方向に移動する。また、第２のベルト式駆動機構により第２の可動部を第２の軸方向に移動させると被駆動部材が第２の軸方向に移動し、プーリ駆動機構により第２のプーリを回転させると被駆動部材が第３の軸方向に移動するので、被駆動部材を互いに直交する三つの軸方向に駆動することができる。   In such a triaxial drive mechanism, when the first movable part is moved in the first axial direction by the first belt-type drive mechanism, the driven member moves in the first axial direction. Further, when the second movable portion is moved in the second axial direction by the second belt type driving mechanism, the driven member is moved in the second axial direction, and when the second pulley is rotated by the pulley driving mechanism. Since the driven member moves in the third axial direction, the driven member can be driven in three axial directions orthogonal to each other.

しかしながら、上述した三軸駆動装置では、プーリ駆動機構の駆動モータが第２の可動部に設けられているため、プーリ駆動機構の駆動モータが第２の可動部と一体に第２の軸方向に移動する。このため、第２の可動部が第２の軸方向に移動したときに駆動モータの電源ケーブルを保護するケーブルベアが引きずられ、騒音が発生するという問題があった。また、プーリ駆動機構の駆動モータが第２の可動部に設けられているため、可動部の軽量化を図ることが困難であった。
本発明は、このような問題点に着目してなされたものであり、ケーブルベアによる騒音の発生を抑制できると共に可動部の軽量化を図ることのできる三軸駆動装置を提供することを目的とするものである。 However, in the above-described three-axis drive device, since the drive motor of the pulley drive mechanism is provided in the second movable part, the drive motor of the pulley drive mechanism is integrated with the second movable part in the second axial direction. Moving. For this reason, when the 2nd movable part moved to the 2nd axial direction, the cable bear which protects the power cable of a drive motor was dragged, and there existed a problem that a noise generate | occur | produced. Moreover, since the drive motor of the pulley drive mechanism is provided in the second movable part, it is difficult to reduce the weight of the movable part.
The present invention has been made paying attention to such problems, and an object of the present invention is to provide a triaxial drive device that can suppress the generation of noise due to a cable bear and can reduce the weight of a movable part. To do.

上記の目的を達成するために、本発明は、被駆動部材を互いに直交する三つの軸方向に駆動するものであって、ベースと、このベースの上方に設けられた第１の可動部を前記三つの軸方向のうち第１の軸方向に移動可能に支持する第１の案内機構と、前記第１の可動部上に設けられた第２の可動部を前記三つの軸方向のうち前記第１の軸方向と直交する第２の軸方向に移動可能に支持する第２の案内機構と、前記第１の可動部を前記第１の軸方向に駆動する第１のベルト式駆動機構（ベルトによって第１の可動部を駆動する機構）と、前記第２の可動部を前記第２の軸方向に駆動する第２のベルト式駆動機構（ベルトによって第２の可動部を駆動する機構）と、前記第２の可動部に回転自在に支持された第１のプーリと、この第１のプーリと平行に設けられた第２のプーリと、これらプーリと協働して前記被駆動部材を前記第１及び第２の軸方向と直交する第３の軸方向に駆動する伝動ベルトと、前記第２のプーリを駆動するプーリ駆動機構（第２のプーリを駆動する機構）と、を備えた三軸駆動装置において、
前記プーリ駆動機構を、前記第２のプーリと一体に回転し且つ前記第２のプーリを前記第２の軸方向に移動可能に支持するスプライン軸と、前記スプライン軸の一端部に設けられた第３のプーリと、この第３のプーリを介して前記スプライン軸を駆動する第３のベルト式駆動機構（ベルトによってスプライン軸を駆動する機構）とで構成し、前記第１のベルト式駆動機構は、前記第１の可動部に対して固定された、前記第１の可動部を前記第１の軸方向に駆動する伝動ベルトと、前記ベース上に設けられた、前記伝動ベルトを複数のプーリを介して駆動する駆動モータとを備え、前記第２のベルト式駆動機構は、前記第２の可動部に対して固定された、前記第２の可動部を前記第２の軸方向に駆動する伝動ベルトと、前記ベース上に設けられた、前記伝動ベルトを複数のプーリを介して駆動する駆動モータとを備え、前記第３のベルト式駆動機構は、前記第３のプーリを駆動する伝動ベルトと、前記ベース上に設けられた、前記伝動ベルトを複数のプーリを介して駆動する駆動モータとを備えたことを特徴とする。 In order to achieve the above object, the present invention drives a driven member in three axial directions orthogonal to each other, and includes a base and a first movable portion provided above the base. A first guide mechanism that is movably supported in the first axial direction among the three axial directions, and a second movable portion provided on the first movable portion are arranged in the first axial direction among the three axial directions. A second guide mechanism that is movably supported in a second axial direction perpendicular to the first axial direction, and a first belt-type drive mechanism (belt) that drives the first movable portion in the first axial direction. And a second belt-type drive mechanism (mechanism for driving the second movable part by the belt ) for driving the second movable part in the second axial direction. A first pulley rotatably supported by the second movable part, and the first pulley A second pulley provided in a row, a transmission belt for driving the driven member in a third axial direction orthogonal to the first and second axial directions in cooperation with the pulleys, and the second A three-axis drive device including a pulley drive mechanism ( mechanism for driving a second pulley) that drives the pulley of
A spline shaft that rotates the pulley driving mechanism integrally with the second pulley and supports the second pulley so as to be movable in the second axial direction, and a first shaft provided at one end of the spline shaft. and 3 of the pulley, the third through the pulley and configuration out with (mechanism for driving the spline shaft by the belt) the third belt drive mechanism for driving the spline shaft, said first belt drive mechanism Includes a transmission belt that is fixed to the first movable portion and that drives the first movable portion in the first axial direction, and the transmission belt provided on the base includes a plurality of pulleys. The second belt-type drive mechanism drives the second movable part fixed to the second movable part in the second axial direction. A transmission belt and provided on the base A drive motor that drives the transmission belt via a plurality of pulleys, and the third belt-type drive mechanism is provided on the base, the transmission belt that drives the third pulley, and the base And a drive motor that drives the transmission belt via a plurality of pulleys .

ここで、前記第１の可動部はベースの上方に設けられた一対のガイドロッドにより第１の軸方向に移動可能に両端部を支持されてもよいし、あるいはベースの上方に設けられたガイドレールにより第１の軸方向に移動可能に一端部を支持されてもよい。 Here, the first movable portion before SL can may be supported movably at both ends in the first axial direction by a pair of guide rods provided above the base, or disposed above the base One end may be supported by the guide rail so as to be movable in the first axial direction.

本発明に係る三軸駆動装置によれば、第２のプーリを駆動するプーリ駆動機構を、第２のプーリと一体に回転し且つ第２のプーリを第２の軸方向に移動可能に支持するスプライン軸と、このスプライン軸の一端部に設けられた第３のプーリと、この第３のプーリを介してスプライン軸を駆動する第３のベルト式駆動機構とで構成したことにより、第３のベルト式駆動機構を定位置に固定した状態で第２のプーリを回転させることができる。したがって、第２のプーリを駆動するプーリ駆動機構を第２の可動部に搭載する必要がないので、可動部の軽量化を図ることができる。また、第２のプーリを駆動するプーリ駆動機構が第２の可動部と一体に第２の軸方向に移動することがないので、ケーブルベアによる騒音の発生を抑制することができる。   According to the three-axis drive device according to the present invention, the pulley drive mechanism that drives the second pulley rotates together with the second pulley and supports the second pulley so as to be movable in the second axial direction. By comprising a spline shaft, a third pulley provided at one end of the spline shaft, and a third belt type drive mechanism for driving the spline shaft via the third pulley, The second pulley can be rotated while the belt-type drive mechanism is fixed in place. Therefore, it is not necessary to mount a pulley drive mechanism for driving the second pulley on the second movable part, and thus the weight of the movable part can be reduced. Moreover, since the pulley drive mechanism that drives the second pulley does not move in the second axial direction integrally with the second movable portion, it is possible to suppress the generation of noise due to the cable bear.

以下、図面を参照して本発明の実施の形態について説明する。
本発明の第１の実施形態に係る三軸駆動装置の概略構成を図１に示す。同図に示すように、本発明の第１の実施形態に係る三軸駆動装置１はプレート状のベース２を備えており、このベース２の上方には、被駆動部材２４を互いに直交する三つの軸方向のうち第１の軸方向（図中Ｘ軸方向）と直交する第２の軸方向（図中Ｙ軸方向）に移動させるためのリニアガイド３が第２の案内機構として設けられている。このリニアガイド３のガイドレール３ａはガイドレールサポート５に延在方向が図中Ｙ軸方向（第２の軸方向）に沿うように固定されており、ガイドレールサポート５はベース２の上方に設けられた二本のガイドロッド４により案内される図示しない略円筒状のベアリングを夫々内嵌する一対のブロック５ａ、一対のブロック５ａ間に架設されるプレート５ｂ及びプレート５ｂに固定されるレール支持部材５ｃからなる。ガイドレール３ａはレール支持部材５ｃに固定されている。一対のガイドロッド４及び図示しないベアリングが第１の案内機構を構成する。このような構成により、ガイドレールサポート５は図中Ｘ軸方向（第１の軸方向）に移動可能に支持されている。ガイドレールサポート５等が第１の可動部を構成する。 Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 shows a schematic configuration of a triaxial drive device according to the first embodiment of the present invention. As shown in the figure, the triaxial drive device 1 according to the first embodiment of the present invention includes a plate-like base 2, and above the base 2, driven members 24 are arranged in three orthogonal directions. A linear guide 3 for moving in a second axial direction (Y-axis direction in the figure) orthogonal to the first axial direction (X-axis direction in the figure) of the two axial directions is provided as a second guide mechanism. Yes. The guide rail 3a of the linear guide 3 is fixed to the guide rail support 5 so that its extending direction is along the Y-axis direction (second axial direction) in the figure, and the guide rail support 5 is provided above the base 2. A pair of blocks 5a in which substantially cylindrical bearings (not shown) guided by the two guide rods 4 are fitted, a plate 5b installed between the pair of blocks 5a, and a rail support member fixed to the plate 5b. 5c. The guide rail 3a is fixed to the rail support member 5c. The pair of guide rods 4 and a bearing (not shown) constitute a first guide mechanism. With such a configuration, the guide rail support 5 is supported so as to be movable in the X-axis direction (first axial direction) in the drawing. The guide rail support 5 and the like constitute the first movable part.

また、リニアガイド３のガイドレール３ａはガイドレールサポート５を介して第１のベルト式駆動機構６により図中Ｘ軸方向に駆動されるようになっており、この第１のベルト式駆動機構６は、ガイドレールサポート５に取り付けられ、従って、これも第１の可動部を構成するベルト取付け部材７と、このベルト取付け部材７を介してガイドレールサポート５を図中Ｘ軸方向に駆動する伝動ベルトとしてのタイミングベルト８と、このタイミングベルト８をプーリ９，１０を介して駆動する駆動モータ１１とで構成されている。   The guide rail 3a of the linear guide 3 is driven in the X-axis direction in the figure by a first belt type driving mechanism 6 via a guide rail support 5, and this first belt type driving mechanism 6 Is attached to the guide rail support 5, and accordingly, the belt mounting member 7 that also constitutes the first movable part, and the transmission for driving the guide rail support 5 in the X-axis direction in the figure via the belt mounting member 7. A timing belt 8 as a belt and a drive motor 11 that drives the timing belt 8 via pulleys 9 and 10 are configured.

一方、リニアガイド３のスライダ３ｂは第２のベルト式駆動機構１２により図中Ｙ軸方向に駆動されるようになっており、この第２のベルト式駆動機構１２は、リニアガイド３のスライダ３ｂに取り付けられたベルト取付け部材１３と、このベルト取付け部材１３を介してスライダ３ｂを図中Ｙ軸方向に駆動する伝動ベルトとしてのタイミングベルト１４と、このタイミングベルト１４をプーリ１５，１６，１７，１８，１９を介して駆動する駆動モータ２０とで構成されている。   On the other hand, the slider 3b of the linear guide 3 is driven in the Y-axis direction in the figure by the second belt-type drive mechanism 12, and the second belt-type drive mechanism 12 is driven by the slider 3b of the linear guide 3. A timing belt 14 as a transmission belt for driving the slider 3b in the Y-axis direction in the figure through the belt mounting member 13, and the timing belt 14 as pulleys 15, 16, 17, And a drive motor 20 that is driven through 18 and 19.

また、第１の実施形態に係る三軸駆動装置１は、図２に示すように、リニアガイド３のスライダ３ｂにベルト取付け部材１３とともに第２の可動部を構成するブラケット２１を介して回転自在に支持された第１のプーリ２２と、この第１のプーリ２２と平行に設けられた第２のプーリ２３と、これらのプーリ２２，２３と協働して被駆動部材２４を第１及び第２の軸方向と直交する第３の軸方向（図中Ｚ軸方向）に駆動する伝動ベルトとしてのタイミングベルト２５と、第２のプーリ２３を駆動するプーリ駆動機構２６（図１参照）とを備えている。   Further, as shown in FIG. 2, the triaxial drive device 1 according to the first embodiment is freely rotatable via a bracket 21 that constitutes a second movable portion together with the belt mounting member 13 on the slider 3 b of the linear guide 3. The first pulley 22 supported by the first pulley 22, the second pulley 23 provided in parallel to the first pulley 22, and the driven member 24 in cooperation with the pulleys 22 and 23. A timing belt 25 as a transmission belt for driving in a third axial direction (Z-axis direction in the figure) orthogonal to the axial direction of 2 and a pulley drive mechanism 26 (see FIG. 1) for driving the second pulley 23. I have.

ここで、プーリ駆動機構２６は第２のプーリ２３と一体に回転し且つ第２のプーリ２３を図中Ｙ軸方向に移動可能に支持するスプライン軸２７と、このスプライン軸２７の一端部に設けられた第３のプーリ２８と、この第３のプーリ２８を介してスプライン軸２７を駆動する第３のベルト式駆動機構２９とからなり、第３のベルト式駆動機構２９は第３のプーリ２８を駆動する伝動ベルトとしてのタイミングベルト３０と、このタイミングベルト３０をプーリ３１，３２，３３，３４を介して駆動する駆動モータ３５とで構成されている。   Here, the pulley driving mechanism 26 is provided at one end of the spline shaft 27 and a spline shaft 27 that rotates integrally with the second pulley 23 and supports the second pulley 23 so as to be movable in the Y-axis direction in the figure. The third pulley 28 and a third belt type drive mechanism 29 that drives the spline shaft 27 via the third pulley 28, and the third belt type drive mechanism 29 is composed of the third pulley 28. And a drive motor 35 that drives the timing belt 30 via pulleys 31, 32, 33, and 34.

このような構成において、第３のベルト式駆動機構２９の駆動モータ３５が駆動されると、第２のプーリ２３がスプライン軸２７と一体に回転する。また、第２のベルト式駆動機構１２の駆動モータ２０が駆動されると、第２のプーリ２３がスライダ３ｂと一体にスプライン軸２７の軸方向に移動する。したがって、上述した第１の実施形態では、第２のプーリ２３を駆動するプーリ駆動機構２６を、第２のプーリ２３と一体に回転し且つ第２のプーリ２３を図中Ｙ軸方向（第２の軸方向）に移動可能に支持するスプライン軸２７と、このスプライン軸２７の一端部に設けられた第３のプーリ２８と、この第３のプーリ２８を介してスプライン軸２７を駆動する第３のベルト式駆動機構２９とで構成したことで、第３のベルト式駆動機構２９を定位置に固定した状態で第２のプーリ２３を回転させることができる。したがって、第２のプーリ２３を駆動するプーリ駆動機構２６をリニアガイド３のスライダ３ｂに搭載する必要がないので、可動部の軽量化を図ることができる。また、第２のプーリ２３を駆動するプーリ駆動機構２６がリニアガイド３のスライダ３ｂと一体に第２の軸方向に移動することがないので、ケーブルベアによる騒音の発生を抑制することができる。   In such a configuration, when the drive motor 35 of the third belt drive mechanism 29 is driven, the second pulley 23 rotates integrally with the spline shaft 27. When the drive motor 20 of the second belt type drive mechanism 12 is driven, the second pulley 23 moves in the axial direction of the spline shaft 27 integrally with the slider 3b. Therefore, in the first embodiment described above, the pulley drive mechanism 26 that drives the second pulley 23 rotates integrally with the second pulley 23 and the second pulley 23 is moved in the Y-axis direction (second A spline shaft 27 that is movably supported in the axial direction), a third pulley 28 provided at one end of the spline shaft 27, and a third pulley that drives the spline shaft 27 via the third pulley 28. The second pulley 23 can be rotated with the third belt type drive mechanism 29 fixed at a fixed position. Therefore, since it is not necessary to mount the pulley drive mechanism 26 that drives the second pulley 23 on the slider 3b of the linear guide 3, the weight of the movable portion can be reduced. Moreover, since the pulley drive mechanism 26 that drives the second pulley 23 does not move in the second axial direction integrally with the slider 3b of the linear guide 3, the generation of noise by the cable bear can be suppressed.

なお、本発明は上述した実施の形態に限定されるものではない。たとえば、上述した第１の実施形態ではリニアガイド３のガイドレール３ａを支持するガイドレールサポート（第１の可動部）５を支持する第１の案内機構を二本のガイドロッド４及び円筒状のベアリングで支持するようにしたが、図３に示す第２の実施形態のように、ガイドレールサポート５もリニアガイドを使用し、リニアガイド３のガイドレール３ａとは別のガイドレール３６で支持するようにしたり、被駆動部材を支持するベアリングを略円筒状のものに代えるようにしてもよい。同様に、第２の案内機構も上記のものに限られず、リニアガイド３に代えて、例えばガイドロッドと略円筒状のベアリングとの組合せに代えてもよい。いずれの場合も案内機構としては、転がり案内に限らず、すべり案内でもよく、あるいは静圧案内等の非接触式の案内でもよい。   The present invention is not limited to the embodiment described above. For example, in the first embodiment described above, the first guide mechanism that supports the guide rail support (first movable portion) 5 that supports the guide rail 3 a of the linear guide 3 is replaced with the two guide rods 4 and the cylindrical shape. Although it is supported by the bearing, as in the second embodiment shown in FIG. 3, the guide rail support 5 also uses a linear guide and is supported by a guide rail 36 different from the guide rail 3 a of the linear guide 3. Alternatively, the bearing that supports the driven member may be replaced with a substantially cylindrical one. Similarly, the second guide mechanism is not limited to the above, and may be replaced with, for example, a combination of a guide rod and a substantially cylindrical bearing instead of the linear guide 3. In any case, the guide mechanism is not limited to rolling guidance, but may be sliding guidance or non-contact guidance such as static pressure guidance.

本発明の第１の実施形態に係る三軸駆動装置の概略構成を示す斜視図である。1 is a perspective view showing a schematic configuration of a triaxial drive device according to a first embodiment of the present invention. 図１に示す三軸駆動装置の一部を示す断面図である。It is sectional drawing which shows a part of triaxial drive device shown in FIG. 本発明の第２の実施形態に係る三軸駆動装置の概略構成を示す斜視図である。It is a perspective view which shows schematic structure of the triaxial drive device which concerns on the 2nd Embodiment of this invention.

符号の説明Explanation of symbols

１ 三軸駆動装置
２ ベース
３ リニアガイド
３ａ ガイドレール
３ｂ スライダ
４ ガイドロッド
５ ガイドレールサポート
６ 第１のベルト式駆動機構
７ ベルト取付け部材
８ タイミングベルト
９，１０ プーリ
１１ 駆動モータ
１２ 第２のベルト式駆動機構
１３ ベルト取付け部材
１４ タイミングベルト
１５，１６，１７，１８，１９ プーリ
２０ 駆動モータ
２１ ブラケット
２２ 第１のプーリ
２３ 第２のプーリ
２４ 被駆動部材
２５ タイミングベルト
２６ プーリ駆動機構
２７ スプライン軸
２８ 第３のプーリ
２９ 第３のベルト式駆動機構
３０ タイミングベルト
３１，３２，３３，３４ プーリ
３５ 駆動モータ
３６ ガイドレール DESCRIPTION OF SYMBOLS 1 Triaxial drive device 2 Base 3 Linear guide 3a Guide rail 3b Slider 4 Guide rod 5 Guide rail support 6 1st belt type drive mechanism 7 Belt attachment member 8 Timing belt 9, 10 Pulley 11 Drive motor 12 2nd belt type Drive mechanism 13 Belt attachment member 14 Timing belt 15, 16, 17, 18, 19 Pulley 20 Drive motor 21 Bracket 22 First pulley 23 Second pulley 24 Driven member 25 Timing belt 26 Pulley drive mechanism 27 Spline shaft 28 First 3 pulley 29 third belt type drive mechanism 30 timing belt 31, 32, 33, 34 pulley 35 drive motor 36 guide rail

Claims (3)

被駆動部材を互いに直交する三つの軸方向に駆動するものであって、ベースと、このベースの上方に設けられた第１の可動部を前記三つの軸方向のうち第１の軸方向に移動可能に支持する第１の案内機構と、前記第１の可動部上に設けられた第２の可動部を前記三つの軸方向のうち前記第１の軸方向と直交する第２の軸方向に移動可能に支持する第２の案内機構と、前記第１の可動部を前記第１の軸方向に駆動する第１のベルト式駆動機構（ベルトによって第１の可動部を駆動する機構）と、前記第２の可動部を前記第２の軸方向に駆動する第２のベルト式駆動機構（ベルトによって第２の可動部を駆動する機構）と、前記第２の可動部に回転自在に支持された第１のプーリと、この第１のプーリと平行に設けられた第２のプーリと、これらプーリと協働して前記被駆動部材を前記第１及び第２の軸方向と直交する第３の軸方向に駆動する伝動ベルトと、前記第２のプーリを駆動するプーリ駆動機構（第２のプーリを駆動する機構）と、を備えた三軸駆動装置において、
前記プーリ駆動機構を、前記第２のプーリと一体に回転し且つ前記第２のプーリを前記第２の軸方向に移動可能に支持するスプライン軸と、前記スプライン軸の一端部に設けられた第３のプーリと、この第３のプーリを介して前記スプライン軸を駆動する第３のベルト式駆動機構（ベルトによってスプライン軸を駆動する機構）とで構成し、
前記第１のベルト式駆動機構は、前記第１の可動部に対して固定された、前記第１の可動部を前記第１の軸方向に駆動する伝動ベルトと、前記ベース上に設けられた、前記伝動ベルトを複数のプーリを介して駆動する駆動モータとを備え、
前記第２のベルト式駆動機構は、前記第２の可動部に対して固定された、前記第２の可動部を前記第２の軸方向に駆動する伝動ベルトと、前記ベース上に設けられた、前記伝動ベルトを複数のプーリを介して駆動する駆動モータとを備え、
前記第３のベルト式駆動機構は、前記第３のプーリを駆動する伝動ベルトと、前記ベース上に設けられた、前記伝動ベルトを複数のプーリを介して駆動する駆動モータとを備えたことを特徴とする三軸駆動装置。 The driven member is driven in three axial directions orthogonal to each other, and the base and the first movable portion provided above the base are moved in the first axial direction among the three axial directions. A first guide mechanism that supports the first movable portion and a second movable portion provided on the first movable portion in a second axial direction orthogonal to the first axial direction among the three axial directions. A second guide mechanism that is movably supported; a first belt-type drive mechanism that drives the first movable portion in the first axial direction (a mechanism that drives the first movable portion by a belt) ; A second belt type drive mechanism ( mechanism for driving the second movable part by a belt) for driving the second movable part in the second axial direction, and a second movable part rotatably supported by the second movable part. A first pulley, a second pulley provided in parallel with the first pulley, and these Over Li and the transmission belt which drives the third axis direction in cooperation with orthogonal to the driven member and the first and second axial, pulley driving mechanism for driving the second pulley (second A mechanism for driving the pulley) , and a three-axis drive device comprising:
A spline shaft that rotates the pulley driving mechanism integrally with the second pulley and supports the second pulley so as to be movable in the second axial direction, and a first shaft provided at one end of the spline shaft. and 3 of the pulley, and configuration out with the third third belt drive mechanism via a pulley for driving said spline shaft (mechanism for driving the spline shaft by the belt),
The first belt-type drive mechanism is provided on the base, and a transmission belt that is fixed to the first movable part and drives the first movable part in the first axial direction. A drive motor for driving the transmission belt via a plurality of pulleys,
The second belt-type drive mechanism is provided on the base, and a transmission belt fixed to the second movable part and driving the second movable part in the second axial direction. A drive motor for driving the transmission belt via a plurality of pulleys,
The third belt-type drive mechanism includes a transmission belt that drives the third pulley, and a drive motor that is provided on the base and drives the transmission belt via a plurality of pulleys. A triaxial drive device. 前記第１の可動部は、前記ベースの上方に設けられた一対のガイドロッドにより前記第１の軸方向（Ｘ軸方向）に移動可能に両端部を支持されていることを特徴とする請求項１記載の三軸駆動装置。 The first movable portion is supported at both ends by a pair of guide rods provided above the base so as to be movable in the first axial direction (X-axis direction). 3. The triaxial drive device according to 1. 前記第１の可動部は、前記ベースの上方に設けられたガイドレールにより一端部を支持されていることを特徴とする請求項１記載の三軸駆動装置。 Said first movable portion is three-axis driving apparatus according to claim 1, characterized in that it is supported at one end portion by the guide rail provided above the base.
JP2004354428A 2004-12-07 2004-12-07 3-axis drive Expired - Fee Related JP4341540B2 (en)

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