JP4538285B2 - Processing system - Google Patents

Description

The present invention relates to a machining system. For example, regarding the processing system provided with a linear drive mechanism for moving the two directions perpendicular to factory tools together.

In machine tools and measuring devices, machining and measurement are performed while moving a tool, a measuring element, or the like with respect to the workpiece.
Conventionally, a feed mechanism using a ball screw has been widely used as a mechanism for moving a tool, a probe, etc., but recently, a linear motor composed of a stator and a mover has been demanded for high accuracy and high speed. Has come to be adopted.

  When a linear motor is used as the feed mechanism, the stator is usually fixed to a base or the like, and the mover is attached to the movable member side to which a tool, a measuring element or the like is attached. When the mover is accelerated, the reaction force is applied to the base. If the mover is suddenly accelerated or decelerated due to a demand for higher speed, the reaction applied to the base also increases, so the machine body including the base is bent or tilted. Since such a phenomenon is a problem that cannot be ignored in terms of accuracy, a method of increasing the rigidity of the machine body is employed. However, this makes the machine body heavy and large.

  A linear drive device (see Patent Document 1) has been proposed as a means for suppressing bending and tilting of the machine body without increasing the rigidity of the machine body. This is a linear drive device including a base, a stator mounted on the base, and a slider driven and moved by the stator, and the stator is supported so as to be movable in a linear direction with respect to the base, and The slider is supported by the stator so as to be movable in the same direction as the linear direction.

  In the case of this configuration, when the slider accelerates, the stator is accelerated in the reverse direction by receiving the reaction force. Since the stator is supported so as to be movable in a linear direction with respect to the base, the stator is moved in the opposite direction with respect to the base. Therefore, no force is transmitted from the stator moved by the reaction caused by the drive of the slider to the base. In other words, the acceleration of the slider does not affect the base, so the machine body does not have to be heavy and large.

JP 2002-283174 A

  However, in the linear drive device described in Patent Document 1, since the slider moves only in one direction, it can be configured relatively compactly. However, when the slider moves in two or three dimensions, the linear drive described above is used. Since the apparatus is configured for each axis (for example, for each of the X, Y, and Z axes) and these must be stacked sequentially, there arises a problem that the structure becomes complicated.

The object of the present invention is that even if the movable part moves, the main body does not bend due to the reaction, and the movable part can be moved at high speed in two different directions with a relatively simple configuration. It is to provide a machining system.

Processing system of the present invention, a linear driving mechanism for moving the tool holding means holding the tool to at least two different directions, a processing system that includes a workpiece holding means for holding a workpiece, said linear drive mechanism and the workpiece A support plate that supports the holding means , a main body that supports the support plate, and the support plate are movably supported with respect to the main body in a direction including at least two different directions in which the tool holding means is moved. And the main body is constituted by a structure having a suspension member on the upper part, and the support means is constituted by suspension means for hanging and supporting the support plate on the suspension member of the structure. It is characterized by.
Here, the structure may be any structure as long as it has a structure capable of supporting the weight of at least the support plate and the linear drive mechanism mounted thereon, for example, a box-shaped structure. Or a gate-type structure.
According to this invention, when the tool holding means is moved by the linear drive mechanism, a force in the opposite direction is applied to the support plate as the reaction force. Then, the support plate is moved in the direction opposite to the moving direction of the tool holding means . At this time, the support plate relative to the body, since it is movably supported in a direction including the two different directions, at least the tool holding means is moved, the tool holding means is moved in the two different directions by the linear drive mechanism However, all of the reaction force in the direction opposite to the movement of the tool holding means is absorbed by the movement of the support plate. That is, the reaction force accompanying the movement of the tool holding means is absorbed and attenuated by the movement of the support plate, so that even if the tool holding means moves, the main body does not bend due to the reaction, and the comparison The movable part can be moved in two different directions at high speed with a simple configuration.
Further, since the support plate is suspended and supported by the suspension member of the structure, when the tool holding means is moved in two different directions by the linear drive mechanism, the movement direction of the tool holding means is The support plate is swung in the opposite direction. In other words, all the reaction force in the direction opposite to the movement of the tool holding means is absorbed and attenuated by the swinging of the support plate, so that even if the tool holding means moves, the structure may be bent by the reaction. In addition, the movable part can be moved in two different directions at a high speed with a relatively simple configuration.

In the processing system of the present invention, the suspension means includes a plurality of suspension wires that suspend and support the support plate on the structure, and a shock absorber provided in the middle or end of the suspension wire. It is preferable that it is comprised including.
According to this invention, even when the tool holding means is moved in the vertical direction, the reaction force accompanying the movement of the tool holding means is absorbed by the shock absorber provided in the middle or at the end of each hanging wire. Therefore, even when the tool holding means moves in the vertical direction, the tool holding means can be moved at high speed without the structure being bent.

In the processing system of the present invention, it is preferable that the linear drive mechanism includes three linear drive mechanisms that move the movable portion in three axial directions orthogonal to each other, and each linear drive mechanism is configured by a linear motor.
According to the present invention, a high speed comprises three linear driving mechanism for moving the three-axis direction perpendicular to the tool holding means together, since each linear drive mechanism is constituted by a linear motor, a tool holding means to the three-dimensional directions Can be moved.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
<First Embodiment>
FIG. 1 shows a machining system according to a first embodiment to which the drive system of the present invention is applied. The processing system of the first embodiment includes a structure 30 as a main body, a support plate 40 supported by the structure 30 via a support means 50, and a work holding means 60 mounted on the upper surface of the support plate 40. And a three-dimensional drive mechanism 10 as a linear drive mechanism that is mounted on the upper surface of the support plate 40 and moves a tool for machining a workpiece in a three-dimensional direction.

  The structural body 30 includes a pair of side wall bodies 31, 32, a rear wall body 33, and a ceiling wall body 34, and is formed in a box shape having an opening 35 on the front surface, and is entirely made of a metal (or metal such as cast iron). It is formed in a structure with high rigidity. That is, the support plate 40, the three-dimensional drive mechanism 10 mounted on the support plate 40, the work holding means 60, and the like are formed in a structure having rigidity capable of supporting the weight.

  The support plate 40 is formed in a rectangular plate size that allows the work holding means 60 and the three-dimensional drive mechanism 10 to be placed, and includes support columns 41 at four corners.

  The support means 50 supports the support plate 40 so as to be movable in directions including at least two different directions in which the movable part (a Z-axis slider 11 and tool holding means 25 described later) is moved. Here, the suspension member 51 (the ceiling wall body 34) of the structure 30 is configured by suspension means 51 that supports the support plate 40 in a suspended manner. The suspension means 51 includes a plurality of suspension wires 52 that suspend and support the support plate 40 from the ceiling wall body 34 of the structure 30, and a shock absorber provided in the middle (or end portion) of the suspension wires 52. And a Zoba 53. Each suspension wire 52 is hooked at both ends on a hook 54 provided on the ceiling wall 34 of the structure 30 and a hook 55 provided on the upper end surface of the column 41 of the support plate 40.

  The work holding means 60 is for holding a work, and includes a mounting plate 61 and a work chuck mechanism 62 for holding the work provided on the mounting plate 61.

  The three-dimensional drive mechanism 10 includes a linear drive mechanism that moves a tool holding unit that holds a tool in at least two different directions. Here, as shown in FIG. 2, with respect to the work holding means 60, the Z-axis slider 11 (the member to which the tool holding means 25 is attached) is triaxially orthogonal to each other (X-axis direction, Y-axis direction, and Z-axis). 3 linear drive mechanisms that are moved in the direction). That is, the X-axis drive mechanism 12X, the Y-axis drive mechanism 12Y, and the Z-axis drive mechanism 12Z are provided.

  The Y-axis drive mechanism 12Y includes a pair of left and right guide rails 13 arranged along the front-rear direction, a Y-axis beam 14 spanned between the guide rails 13, and the Y-axis beam 14 along the guide rail 13. And a linear motor 15 that moves in the front-rear direction (Y-axis direction). A displacement detector 16 is provided between one guide rail 13 and one end side of the Y-axis beam 14 to detect the position (movement displacement amount) of the Y-axis beam 14 in the Y-axis direction. The displacement detector 16 includes a scale 17 disposed along one guide rail 13 and a detection head 18 disposed on one end side of the Y-axis beam 14 so as to face the scale 17 with a slight gap. It is configured.

  The X-axis drive mechanism 12X includes an X-axis slider 19 movably provided on the Y-axis beam 14 and a linear motor that moves the X-axis slider 19 in the left-right direction (X-axis direction) along the Y-axis beam 14. 20. Between the X-axis slider 19 and the Y-axis beam 14, a displacement detector (not shown) that detects the position (movement displacement amount) of the X-axis slider 19 in the X-axis direction is provided. Since this displacement detector has the same configuration as the displacement detector 16, description thereof is omitted.

  The Z-axis drive mechanism 12Z includes a Z-axis guide plate 21 that is attached to the X-axis slider 19 and extends in the vertical direction, a Z-axis slider 11 that is movably provided along the Z-axis guide plate 21, and the Z-axis slider 11 The linear slider 22 is configured to move the shaft slider 11 in the vertical direction along the Z-axis guide plate 21. Between the Z-axis slider 11 and the Z-axis guide plate 21, a displacement detector (not shown) that detects the position (movement displacement amount) of the Z-axis slider 11 in the Z-axis direction is provided. Since this displacement detector has the same configuration as the displacement detector 16, the description thereof is omitted.

The Z-axis slider 11 is provided with a tool holding means 25 for attaching the tool so as to be replaceable. The tool holder 25 holds a spindle device 26 that rotates the tool.
Further, the sum of the weight of the guide rail 13 of the Y-axis beam 14 and the weight of the lower member is sufficient with respect to the sum of the weight of the Y-axis beam 14 of the three-dimensional drive mechanism 10 and the weight of the upper member. The weight of the support plate 40 is set so as to increase.

  The linear motors 15, 20, and 22 have the same structure as a known linear motor, and include a stator fixed to the stationary member side and a movable element fixed to the movable member side. In this structure, the movable part side is driven by a force generated between a magnetic field generated when a current is passed through the coil on the mover side.

Next, the operation of this embodiment will be described.
The spindle device 26 having a tool is attached to the tool holding means 25 of the three-dimensional drive mechanism 10 and the work is attached to the work holding means 60 and then machining is performed.
In the machining, the three-dimensional drive mechanism 10 is moved in the three-dimensional direction (X-axis, Y-axis, Z-axis direction), and the tool held by the tool holding means 25 is made relative to the work held by the work holding means 60. Processing while moving.

  After processing, measure as necessary. In the measurement, a measuring device is attached to the tool holding means 25, and in this state, the three-dimensional drive mechanism 10 is moved in the three-dimensional direction (X-axis, Y-axis, Z-axis direction), and the measurement held by the tool holding means 25 Measure while moving the device relative to the workpiece.

In these processes or measurements, when the Y-axis beam 14 moves in the Y-axis direction, the X-axis slider 19 moves in the X-axis direction, and the Z-axis slider 11 moves in the Z-axis direction, the reaction force is applied to the support plate 40.
For example, when the Y-axis beam 14 moves in the Y + direction (here, the upper right direction in FIG. 1), the reaction force is applied to the guide rail 13. Then, the support plate 40 integrated with the guide rail 13 is swung in the Y-direction (lower left direction in FIG. 1). That is, the reaction force accompanying the movement of the Y-axis beam 14 is absorbed and attenuated by the swinging of the support plate 40, so that the influence on the structure 30 can be reduced.

  Further, when the X-axis slider 19 moves in the X + direction (here, the lower right direction in FIG. 1), the reaction force is applied to the guide rail 13. Then, the support plate 40 integrated with the guide rail 13 is swung in the X-direction (upper left direction in FIG. 1). That is, the reaction force accompanying the movement of the X-axis slider 19 is absorbed and attenuated by the swinging of the support plate 40, so that the influence on the structure 30 can be reduced.

  When the Z-axis slider 11 moves in the Z + direction (upward in FIG. 1), the reaction force is applied to the guide rail 13 via the Y-axis beam 14. Then, the support plate 40 integrated with the guide rail 13 is moved by the shock absorber 53 in the Z-direction (downward in FIG. 1). That is, since the reaction force accompanying the movement of the Z-axis slider 11 is absorbed and attenuated by the lowering of the support plate 40, the influence on the structure 30 can be reduced.

According to the first embodiment, the following effects can be expected.
(1) When the tool holding means 25 is moved by the drive mechanisms 12X and 12Y, a force in the opposite direction is applied to the support plate 40 as a reaction force. Since the support plate 40 is supported by the ceiling wall body 34 of the structure 30 via the suspension means 51, the tool holding means 25 is moved in the X axis direction and the Y axis direction by the drive mechanisms 12X and 12Y. When moved, the support plate 40 is swung in the direction opposite to the moving direction. That is, the reaction force accompanying the movement of the tool holding means 25 is absorbed and attenuated by the swinging of the support plate 40, so that even if the tool holding means 25 moves, the structural body 30 bends due to the reaction. There is no. Moreover, the tool holding means 25 can be moved at high speed in the X-axis direction and the Y-axis direction with a relatively simple configuration.

  (2) The suspending means 51 includes a plurality of suspending wires 52 that suspend and support the support plate 40 from the structure 30 and a shock absorber 53 provided in the middle or end of the suspending wire 52. Therefore, even when the tool holding means 25 is moved in the vertical direction, the reaction force caused by the movement of the tool holding means 25 is a shock absorber provided in the middle or at the end of each hanging wire 52. Since it is absorbed by the Zober 53, even when the tool holding means 25 moves in the vertical direction, the tool holding means 25 can be moved at a high speed.

(3) The total of the weight of the guide rail 13 of the Y-axis beam 14 and the weight of the lower member than that of the weight of the Y-axis beam 14 of the three-dimensional drive mechanism 10 and the upper member thereof is Since the weight of the support plate 40 is set so as to be sufficiently large, the swing amount of the support plate 40 can be reduced with respect to the movement amounts of the Y-axis beam 14, the X-axis slider 19, and the Z-axis slider 11.
That is, the swinging amount of the support plate 40 can be reduced according to the ratio between the total weight above the Y-axis beam 14 and the total weight below the guide rail 13.

Second Embodiment
FIG. 3 shows a machining system according to the second embodiment of the present invention. The machining system according to the second embodiment is different from the machining system according to the first embodiment in that the support plate 40 is not supported by the structure 30 via the suspension means 51, but the main body via the ball bearing means 70. The point which is supported by the bed 71 and the point which the damping means 80 which suppresses the vibration of the support plate 40 are added differ.

The ball bearing means 70 is constituted by a plurality of rotatable ball bearings 72 provided on the upper surface of the bed 71 at regular pitch intervals, and the support plate 40 can be moved in an arbitrary direction within a plane parallel to the upper surface of the bed 71. I support it.
The damping means 80 is provided at two locations on both sides of the upper surface of the bed 71 along the X-axis and Y-axis directions with the support plate 40 interposed therebetween. Each damping means 80 includes a pulley 81 rotatably provided on the upper surface of the bed 71, a wire 82 wound around the pulley 81 and having one end fixed to the support plate 40 and the other end fixed to the bed 71, A spring 83 is provided in the middle of the wire 82.

According to the second embodiment, the following effects can be expected.
(4) Since the support plate 40 is supported by the upper surface of the bed 71 via the ball bearing means 80 so as to be movable in an arbitrary direction within a plane parallel to the upper surface of the bed 71, the tool holding means 25 is X , The support plate 40 is moved in the direction opposite to the moving direction of the tool holding means 25. That is, since the reaction force accompanying the movement of the tool holding means 25 is absorbed and attenuated by the movement of the support plate 40, the influence on the bed 71 can be reduced. Therefore, even if the tool holding means 25 moves, the bed 71 does not bend or vibrate due to the reaction.

(5) Since the ball bearing means 80 is provided on the upper surface of the bed 71, it can be easily configured.
(6) Since the damping means 80 for suppressing the vibration of the support plate 40 is added, even if the support plate 40 moves in the X and Y axis directions, the vibration generated during the movement is also suppressed by the damping means 80. Therefore, the tool holding means 25 can be accurately positioned at a predetermined position. Therefore, highly accurate positioning is possible. Further, after the reaction force accompanying the movement of the tool holding means 25 is absorbed by the movement of the support plate 40, that is, after the movement of the tool holding means 25 is stopped, the support plate 40 is moved by the spring 83 of the damping means 80. The original position is restored.

<Third Embodiment>
FIG. 4 shows a machining system according to a third embodiment of the present invention. The processing system of the third embodiment is different from the processing system of the second embodiment in that the support plate 40 is not supported by the bed 71 as the main body via the ball bearing means 70 but via the air bearing means 90. It is different in that it is supported.
As shown in FIG. 5, the air bearing means 90 includes an air supply passage 91 formed inside the support plate 40, an air supply pipe 92 that supplies air to the air supply passage 91, and an air supply passage. 91 and an air ejection hole 93 opened to the bottom surface of the support plate 40.

  Therefore, when air is supplied to the air supply passage 91 through the air supply pipe 92, the air is jetted from the air jet hole 93 toward the upper surface of the bed 71. Thus, an air layer is formed between the bed 71 and the support plate 40, that is, the support plate 40 is kept floating from the upper surface of the bed 71. Since it can move freely in this direction, the same effect as in the second embodiment can be achieved.

According to the third embodiment, the following effects can be expected.
(7) Since the support plate 40 is supported by the upper surface of the bed 71 via the air bearing means 90 so as to be movable in an arbitrary direction within the plane parallel to the bed upper surface, the tool holding means 25 is X, Y When moved in the axial direction, the support plate 40 is moved in the direction opposite to the moving direction of the tool holding means 25. That is, since the reaction force accompanying the movement of the tool holding means 25 is absorbed and attenuated by the movement of the support plate 40, even if the tool holding means 25 moves, the bed 71 does not bend or vibrate due to the reaction. .
In the third embodiment, the air supply channel 91, the air supply pipe 92, and the air ejection hole 93 may be provided on the bed 71 side.

The present invention is not limited to the above-described embodiments, and modifications, improvements, and the like within the scope that can achieve the object of the present invention are included in the present invention.
For example, in the first embodiment, the support plate 40 is suspended and supported on the structure 30 by the four suspension wires 52, but may be suspended by three or five or more suspension wires 52. Good.
In the first embodiment, the structure 30 is a box-shaped structure. However, the structure 30 is not limited to this and may be a portal structure. In short, any other structure may be used as long as it can support the support plate 40 and the drive mechanism 10 mounted thereon, and a structure such as a crane may be used.

  In the second embodiment, the ball bearing means 80 in which a large number of balls are arranged on the upper surface of the bed 71 is provided. In the third embodiment, the air bearing means 90 is provided on the upper surface of the bed 71. The support plate 40 may be magnetically levitated with respect to the upper surface.

The present invention can be used in a processing system such as a machine tool.

The perspective view which shows the processing system which concerns on 1st Embodiment of this invention. The perspective view which shows the three-dimensional drive mechanism and table means of embodiment same as the above. The perspective view which shows the processing system which concerns on 2nd Embodiment of this invention. The perspective view which shows the processing system which concerns on 3rd Embodiment of this invention. The figure which shows the air bearing means of embodiment same as the above.

Explanation of symbols

10 ... Three-dimensional drive mechanism 11 ... Z-axis slider (movable part)
12X, 12Y, 12Z ... X, Y, Z axis drive mechanism 22 ... Linear motor 25 ... Tool holding means 30 ... Structure 34 ... Ceiling wall (suspending member)
DESCRIPTION OF SYMBOLS 40 ... Support plate 50 ... Support means 51 ... Hanging means 52 ... Hanging wire 53 ... Shock absorber 60 ... Work holding means 70 ... Ball bearing means 80 ... Damping means 90 ... Air bearing means

Claims (3)

A machining system comprising a linear drive mechanism for moving a tool holding means holding a tool in at least two different directions, and a work holding means for holding a work ,
A support plate that supports the linear drive mechanism and the work holding means ;
A body that supports the support plate;
Support means for supporting the support plate movably in a direction including at least two different directions in which the tool holding means is moved with respect to the main body ;
The main body is constituted by a structure having a suspension member on the upper part,
The processing system is characterized in that the support means is constituted by a suspension means for hanging and supporting the support plate on a suspension member of the structure . The processing system according to claim 1 ,
The suspension means includes a plurality of suspension wires that suspend and support the support plate on the structure, and a shock absorber provided in the middle or end of the suspension wire. A processing system characterized by that. In the processing system according to claim 1 or 2 ,
Processing system wherein the linear drive mechanism comprises three linear driving mechanism for moving the three-axis direction perpendicular to the movable portion to each other, each linear drive mechanism, characterized in that it is constituted by a linear motor.

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