JPH05107236A - Scanning device of ultrasonic probe - Google Patents

Abstract

PURPOSE:To facilitate highly accurate attitude of an ultrasonic probe at the time of scanning control of an inspection device using ultrasonic wave, CONSTITUTION:A title item is provided with a support fitment, an arc-shaped guide rail 2 which is supported by a tip part of the support fitment, a slider 4 which is supported so that it can travel freely along an arc of the arc-shaped guide rail 2, and an ultrasonic probe 1 which is supported at the slider 4 toward a center of a curvature of the guide rail 2. The slider 4 can travel between both edge parts of the guide rail 2 and its direction can constantly pass the center of curvature of the arc of the guide rail 2 even if an angle of the ultrasonic probe 1 is changed, thus enabling a direction of the ultrasonic probe 1 to be set easily for any surface of a body to be inspected with a two- dimensional curved surface or a three-dimensional curved surface by installing two guide rails 2 at right angle each other.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection apparatus using ultrasonic waves, and more particularly, it is suitable and constant for setting an ultrasonic probe in a normal direction to an arbitrary surface of a subject. The present invention relates to an ultrasonic probe scanning device suitable for performing ultrasonic inspection while maintaining an angle and a constant distance.

[0002]

2. Description of the Related Art An ultrasonic probe scanning device in a conventional ultrasonic inspection device is disclosed in "Non-destructive Inspection Society of Japan", Spring Conference, 1988, pp. 152 to 153, "For curved surface shape tracking". Development of automatic ultrasonic flaw detector "is known. According to this, an ultrasonic probe scanning device has a rectangular coordinate system device that can be driven in the X-axis, Y-axis, and Z-axis directions, a θ-axis that rotates around the Z-axis, and a θ-axis with respect to the θ-axis. The ultrasonic probe is attached to the tip of this α-axis.

[0003]

SUMMARY OF THE INVENTION In the above-mentioned prior art, the ultrasonic probe is arranged such that the ultrasonic probe is rotated on a plane with respect to the θ axis and the α axis is rotated in a direction perpendicular to the θ axis. Attitude control is performed by the Z axis. Now, in order to adjust the posture in the normal direction after moving the X, Y and Z axes to match the direction of the ultrasonic probe with the target inspection position of the subject,
The α axis and the θ axis will be moved. However, if the α axis and the θ axis are moved, the orientation of the ultrasonic probe deviates from the target inspection position, and in order to compensate for this deviation, the X axis, Y axis, and
There has been a problem that attitude control becomes complicated because all axes of the Z axis must be controlled cooperatively.

An object of the present invention is to provide a scanning device for an ultrasonic probe, which makes it possible to control the attitude of the ultrasonic probe with high accuracy and easily during scanning of the inspection device using ultrasonic waves. is there.

[0005]

In order to achieve the above object, in a scanning device for an ultrasonic probe according to the first aspect of the present invention, a support metal fitting and an arcuate guide rail supported by the tip of the support metal fitting are provided. And a slider movably supported along the arc of the arc-shaped guide rail, and an ultrasonic probe supported by the slider toward the center of curvature of the arc-shaped guide rail. ..

In order to achieve the above object, in the ultrasonic probe scanning device of the second invention, a support fitting, and an arc-shaped first guide rail supported by the tip of the support fitting, An arc-shaped second guide rail which is movably supported along the arc of the arc-shaped first guide rail and has the same curvature center as that of the arc-shaped first guide rail;
A slider movably supported along the arc of the arc-shaped second guide rail, and an ultrasonic probe supported by the slider toward the centers of curvature of the guide rails. ..

A third aspect of the invention is the ultrasonic probe scanning device according to the first or second aspect of the invention, in which the arc of the arc-shaped guide rail is similar to the arc of the subject. ..

In order to achieve the above object, in the ultrasonic probe scanning device of the fourth invention, a supporting member and a tip end portion of the supporting member are supported, and have a similar shape to the arc surface of the subject. A first arc-shaped guide rail, a first guide rail slidably engaged with the first arc-shaped guide rail, a first slider supported by the first slider, and orthogonal to the first arc-shaped guide rail. A second arc-shaped guide rail having the same center of curvature in the direction of rotation, a second slider slidably engaged with the second arc-shaped guide rail, and the same guide rails on the second slider. An ultrasonic probe supported toward the center of curvature of an arc.

A fifth invention is the ultrasonic probe scanning device according to any one of the first to fourth inventions, wherein a slider is provided on the arc-shaped guide rail along the arc of the arc-shaped guide rail. It is provided with a traveling means for moving.

According to a sixth aspect of the invention, in the ultrasonic probe scanning apparatus according to the fifth aspect, the traveling means meshes with the rack installed along the arc surface of the arc-shaped guide rail, and engages with the rack. It is provided with a pinion rotatably supported by the slider and a motor for rotationally driving the pinion.

According to a seventh aspect of the invention, in the ultrasonic probe scanning apparatus according to the fifth aspect, the traveling means comprises a friction wheel for moving the arc-shaped guide rail while pressing the arc-shaped guide rail along the arc surface. And a motor that rotationally drives the friction wheel.

An eighth invention is the ultrasonic probe scanning device according to any one of the first to fifth inventions, wherein an arc-shaped guide rail moves the slider by the traveling means. The guide means is provided with a V guide longitudinally installed on the arc-shaped guide rail, rolling contact with the V guide so as to sandwich the V guide from both sides, and rotatably supported by the slider. It has a plurality of guide rollers.

A ninth invention is the ultrasonic probe scanning device according to any one of the first, second, and fourth inventions, wherein the support fittings are provided on the automatic inspection device side and on the guide rail side. The swinging mechanism is connected to the joint portion so as to be rotatable in the direction perpendicular to the axial direction.

A tenth aspect of the present invention is the ultrasonic probe scanning apparatus according to any one of the first, second, and fourth aspects of the present invention, wherein the support metal fittings are provided on the automatic inspection apparatus side and on the track or It is provided with a turning mechanism which is divided into either one of the guide rails and rotates both of them around the axial direction.

An eleventh invention is the ultrasonic probe scanning apparatus according to any one of the first, second, and fourth inventions, wherein the beam of the ultrasonic probe is of a focal type. It is a thing.

[0016]

According to the first invention, the slider to which the ultrasonic probe is attached can move on the guide rail from the end of the arc-shaped guide rail to the other end. Therefore, the direction of the ultrasonic probe always passes through the center of curvature of the arc. First, to match this curvature center with the inspection point on the subject,
The supporting metal fitting supporting the scanning device is operated in the X-, Y-, and Z-axis directions by another three-dimensional scanner. Next, by moving the slider, the direction of the ultrasonic probe can be made to coincide with the normal direction to the inspection point or the desired incident angle. In this way, even if the slider moves on the arc-shaped guide rail, the direction of the ultrasonic probe does not deviate from the inspection point, so it is not necessary to repeatedly operate the support bracket, and it is extremely easy to control the attitude. be able to.

According to the second aspect of the invention, since the operating range of the slider is expanded, the angle of the ultrasonic wave emitting beam can be increased.

According to the third invention, if the angle formed between the ultrasonic probe and the subject is first determined and the guide rail is scanned,
Ultrasonic waves can be emitted at the same angle as the initial set angle on any surface on the subject. Therefore, since the operation is the same as the copying control simply by traveling on the guide rails, the control becomes simple, and it is particularly effective when a large number of products having the same shape are inspected.

According to the fourth invention, since the slider operates two-dimensionally, it is more effective than the third invention.

According to the sixth aspect of the present invention, by providing the rack on the rail, it is possible to improve the reliability, improve the operation type, and reduce the size.

According to the seventh aspect of the invention, the backlash in the gear can be eliminated, so that the traveling accuracy of the ultrasonic probe can be improved.

According to the eighth aspect of the present invention, the V guide and the V-shaped guide roller can receive loads in all directions, and can constitute a small guide means having good traveling property without backlash.

According to the ninth and tenth aspects of the invention, when the shape of the subject is known in advance, the scanning direction can be set in advance in a direction that facilitates inspection, thereby expanding the inspection range. You can measure.

According to the eleventh aspect, since the focused echo is detected by using the focus type ultrasonic probe, the angle can be detected with higher accuracy.

[0025]

EXAMPLE A screen showing an example of the present invention will be described below.

FIG. 1 is a perspective view showing a first embodiment of the present invention, FIG. 2 is a side view showing a guide rail and a slider, and FIG.
FIG. 4 is an explanatory diagram showing a positional relationship between an ultrasonic probe and a subject.

As shown in FIG. 1, an arc-shaped guide rail 2 having a radius of curvature R has a holding frame 8, a support metal fitting 13 installed vertically in the center of the holding frame 8, and the support metal fitting 13.
It is composed of a base 10 which is fixed to the upper end of the base by welding or the like and is fastened to an automatic inspection device (not shown) with bolts or the like. The arc-shaped guide rail 2 is provided with a slider 4 movably supported along the arc. The holding frame 8 is for fixing the support fitting 13 and the guide rail 2 and is formed so as not to hinder the traveling of the slider 4. The guide rail 2 and the slider 4 are, as shown in FIG. 2, a pair of arcuate V-shaped members provided in a part of the guide rail 2.
The guide 20 is rotatably supported so as to be sandwiched from both sides by a plurality of V-shaped guide rollers 21 provided on the slider 4. A rack 23 is fixed on the arc of the guide rail 2 over the entire length. On the other hand, a motor 6 is fixed to the slider 4, and a pinion 25 meshing with a rack 23 is fixed to the tip of a rotary shaft 24 of the motor 6. The motor 6 has an encoder (not shown).
Is built in, and the scanning position is detected by measuring the pulse output from the encoder.
The ultrasonic probe 1 is installed in a holder 11 fixed to a slider 4 of a guide rail 2 and its direction is
The guide rail 2 is directed toward the center point P of curvature. Therefore, the direction of the emission beam of the ultrasonic probe 1 will pass through the center point P regardless of the position of the slider 4 in the operating range, and for example, the subject 1
By aligning the center point P with the position of 2, the ultrasonic probe 1 can take a free angle with respect to the surface. In the present embodiment, since the surface of the subject 12 is limited to two dimensions, in order to set the ultrasonic probe 1 in the normal direction to an arbitrary surface of the subject 12, first, the center point P Is aligned with an arbitrary surface of the subject 12. Then ultrasonic probe 1
A beam is continuously emitted at an appropriate interval from the above, the slider 4 is scanned along the guide rail 2 while observing the echo, and the position where the magnitude of the echo reaches the maximum value is arbitrary on the subject 12. The ultrasonic probe 1 on the surface is oriented in the normal direction. Although the curved surface of the subject 12 undulates in the Y direction in FIG. 1, the support metal fitting 13 is arranged in the vertical direction so that the guide rail 2 can be aligned in any direction of the curved surface. The Z-axis can be horizontally swiveled by rotating the lower part by the swiveling mechanism 30 provided at the joint part. Further, by using a point focus type for the ultrasonic probe 1, as shown in FIG. 3, if the focal length F is matched with the center point P and the above scanning is performed, a converged echo can be detected. Therefore, the angle can be set with higher accuracy.

However, the above configuration cannot be applied to the following cases.

That is, depending on the shape of the subject 12,
It may be necessary to move the ultrasonic probe 1 to about a horizontal position. In such a case, if the angle of the arc of the guide rail 2 is increased, it can be expanded to a circular shape.
When the ultrasonic probe 1 is moved to the X axis or the Y axis, the subject 12 and the guide rail 2 collide with each other and the angle cannot be increased so much.

Therefore, an embodiment applicable to the above case will be described below.

The second embodiment shown in FIG. 4 is similar to FIG. 4 except that the arc of the guide rail 8 has a shape similar to the shape of the subject 12.

In the second embodiment shown in FIG. 4, the angle formed between the ultrasonic probe 1 and the subject 12 is first determined, and then the ultrasonic probe 1 is mounted on the guide rail 8 via the slider 4. By scanning in this way, ultrasonic waves can be emitted from the ultrasonic probe 1 at the same angle as the initial set angle on any surface on the subject 12. Therefore, the object 12 and the guide rail 8 do not collide with each other, and only the ultrasonic probe 1 travels on the guide rail 8 so that the operation is the same as the scanning control, and thus the control is simple and many with the same shape. It is especially effective when inspecting other products. Further, by connecting the scanning devices in two stages, inspection can be performed when the arc of the subject 12 is formed in the X and Y directions.

Next, FIGS. 5 to 7 showing the third embodiment of the present invention will be described. 5 is a perspective view showing a third embodiment of the present invention, FIG. 6 is a view taken along the line II-II in FIG.
FIG. 7 is a view taken along the line III-III in FIG.

As shown in FIGS. 5 and 6, the support fitting 1
The central portion of the arc-shaped first guide rail 40 is fixed to the tip of 3. A V guide groove 54 is formed on the inner peripheral surface of the first guide rail 40. In the V guide groove 54, a V guide 55 protruding from the outer peripheral surface of the arc-shaped second guide rail 42 is slidably fitted and supported.

On both sides of the second guide rail 42 in the width direction, a V guide 47 and a rack 45 are provided over the entire length. A U-shaped slider 44 is provided from the lower side so as to surround the second guide rail 42. A plurality of V-shaped guide rollers 41 are provided on one of both side frames of the slider 44. This guide roller 41 is
The guide 47 is provided so as to be sandwiched from above and below. A pinion 25, which is engaged with the rack 45 and can rotate, is pivotally supported on the side frame opposite to the slide 44. The pinion 25 is connected to the motor 43 via the rotary shaft 24. In addition, on the lower surface of the slider 44, the cylindrical holder 1
1 is attached, and an ultrasonic probe 1 is provided at the tip of the holder 11. The central axis 16 of the scanning device 1 of the ultrasonic probe is the center of curvature P of the second guide rail 42.
It is provided so as to intersect with.

The operation of the embodiment thus constructed will be described with reference to FIG. As shown in FIG. 7, the base 10 is fixed to the Z axis (vertical axis) of FIG. 5 and the tip of the θ axis that can rotate around the Z axis.

Now, the inspection point p on the subject 12 and the central axis 16 of the support fitting 13 are made to coincide with each other. At this position, the inspection point p of the subject 12 cannot be inspected in the normal direction. Therefore, the second guide rail 42 and the slider 44 are moved so that the central axis 16 of the ultrasonic probe 1 moves to 2α which coincides with the normal line p-A3 at the inspection point p. Even by this movement, the central axis 16 of the ultrasonic probe 1 is not moved to the inspection point p.
Since it does not come off, the posture can be easily adjusted.

If a liquid such as water is introduced between the ultrasonic probe 1 and the ultrasonic probe 1, the inspection point p can be detected. If the normal line at the inspection point p is p-A1, the guide rail 42
Need only move the slider 44 by α1 without sliding.

Further, if the scanning devices of the above-mentioned embodiment are connected in two stages, the posture control becomes easier. That is, instead of the ultrasonic probe 1 of one scanning device, the base 10 of another scanning device is attached, and these guide rails 42 are made orthogonal to each other. According to this, even if the θ axis is not rotated, if the respective sliders 5 are combined and controlled, the same operation and effect as when the θ axis is driven are exhibited.

This is especially effective when the θ axis cannot be turned due to the subject 12 or surrounding obstacles, or when the subject 12 has a three-dimensional curved surface.

FIG. 8 is a side view of the fourth embodiment of the present invention. In this embodiment, the sliding operation of the second guide rail 42 is automated by controlling the motor 36. That is, the rack 35 is provided on the upper center of the guide rail 42, and the pinion 39 that meshes with the rack 35 is provided.
Is rotatably attached to the first guide rail 40, and the pinion 39 is driven by the motor 36 via the shaft 38. The components and the like denoted by the same reference numerals as those shown in FIG. 6 have the same functions and configurations, and thus the description thereof will be omitted.

FIG. 9 is a front view of the fifth embodiment of the present invention. In this embodiment, the support fitting 13 is divided into a base portion 13A on the side of the base 10 and a tip portion 13B on the side of the first guide rail 40, and a pin 31 constituting a swing mechanism in a direction orthogonal to the track 40 between them. (Hexagon head bolt)
The other side is fixed by a nut (not shown). According to this, the guide rail 42 can be swung about the axis of the pin 31, and the central shaft 16 can be moved to, for example, the position of ± P ′ (A4 axis).

FIG. 10 is a front view showing a sixth embodiment capable of enlarging the scanning range shown in FIG.
1 is a side view thereof. In this embodiment, a pair of V guides 60 and 61 are provided on both sides of an arc-shaped guide rail 62, and a rack 73 is provided along the upper surface of the arc. The guide rail 62 is attached to the support fitting 13,
A plurality of guide rollers 70 are rollably provided so as to sandwich the V guide 61. Further, a motor 66 for remotely operating the guide rail 62 has a pinion 67 attached to the tip of the rotating shaft, and is attached so as to be able to roll by meshing with the rack 73 at a half or less of its thickness. Therefore, by rotating the motor 66, the guide rail 62 swings in an arc shape according to the rotation direction of the motor 66, with the center point P of the curvature serving as a fulcrum.
On the other hand, the V guide 60 is also held in a rollable manner by a plurality of V-shaped guide rollers 65 attached to the slider 64, as described with reference to FIG. The motor 63 has a slider 6 so that a pinion 69 attached to one end of a rotary shaft meshes with the rack 73 at a half or less of its thickness.
It is attached to 4. Therefore, the pinion 67 and the pinion 69 do not interfere when rolling the rack 73. By adopting such a configuration, the motor 66 causes the guide rail 62 to move in an arc shape together with the slider 64, and the motor 66 allows the slider 64 to move along the guide rail 62. It is possible to perform an operation in which the movement amount is added. In this embodiment, the second guide rail 3, the slider 5 and the ultrasonic probe 1 shown in FIG. 1 are mounted on the slider 64 so as to be orthogonal to the guide rail 62 and have the same effect as in FIG. The encoder 71 is externally attached for the purpose of downsizing the motor 63, and a pinion (not shown) attached to the tip of the rotary shaft of the encoder 71 can roll with the rack 73 like the pinion 67. To mesh with
It is attached to the slider 64. The encoder 72 is also externally attached for the purpose of downsizing the motor 7, and is an example in which the motor 7 and the encoder 72 are attached so as to be opposed to each other on the same axis.

Although various embodiments have been described above, all of them have been described on the premise of remote operation by a motor, but the same effect can be obtained even if the motor is detached and manually operated. ..

In each of the above embodiments, the rack and the pinion are used to move the slider, but instead of this, the friction wheel is pressed against the arc of the flat guide rail. As a result, backlash can be prevented and traveling accuracy can be improved.

Although not shown, the same effect can be obtained by attaching another sensor such as a proximity sensor, a reflection type optical sensor, or a laser range finder instead of the ultrasonic probe. Further, by providing a tool such as a driver or a nut runner as an end effector of the manipulator, it can be applied as a working device.

[0047]

Since the present invention is configured as described above, it has the following effects.

According to the first invention, the slider to which the ultrasonic probe is attached can move on the guide rail from the end of the arc-shaped guide rail to the other end. Therefore, the direction of the ultrasonic probe always passes through the center of curvature of the arc. First, the supporting metal fitting supporting the scanning device is operated in the X-, Y-, and Z-axis directions by another three-dimensional scanner so that the center of curvature coincides with the inspection point on the subject. Next, by moving the slider, the direction of the ultrasonic probe can be made to coincide with the normal direction to the inspection point or the desired incident angle. In this way, even if the slider moves on the arc-shaped guide rail, the direction of the ultrasonic probe does not deviate from the inspection point, so it is not necessary to repeatedly operate the support fitting, and attitude control is extremely easy. be able to.

According to the second aspect of the invention, since the operating range of the slider is expanded, the angle of the ultrasonic wave emitting beam can be increased.

According to the third aspect of the invention, if the angle formed between the ultrasonic probe and the subject is first determined and the guide rail is scanned,
Ultrasonic waves can be emitted at the same angle as the initial set angle on any surface on the subject. Therefore, since the operation is the same as the copying control simply by traveling on the guide rails, the control becomes simple, and it is particularly effective when a large number of products having the same shape are inspected.

According to the fourth invention, the slider operates two-dimensionally and is more effective than the third invention.

According to the sixth aspect, by providing the rack on the rail, it is possible to improve reliability, improve operability and reduce the size.

According to the seventh invention, the backlash in the gear can be removed, so that the traveling accuracy of the ultrasonic probe can be improved.

According to the eighth aspect of the present invention, the V guide and the V-shaped guide roller can receive loads in all directions, and can constitute a small guide means which is free from backlash and has good traveling performance.

According to the ninth and tenth aspects of the invention, when the shape of the subject is known in advance, the scanning direction can be set in advance in a direction that facilitates inspection, thereby expanding the inspection range. You can measure.

According to the eleventh aspect, since the focused echo is detected by using the focus type ultrasonic probe, the angle can be detected with higher accuracy.

[Brief description of drawings]

FIG. 1 is a perspective view showing a first embodiment of the present invention.

[Fig. 2] Configuration diagram of guide rail and slider

FIG. 3 is an explanatory diagram showing a positional relationship between an ultrasonic probe and a subject.

FIG. 4 is a perspective view showing a second embodiment of the present invention.

FIG. 5 is a perspective view showing a third embodiment of the present invention.

6 is a view taken along the line II-II of FIG.

7 is a view taken along the line III-III in FIG.

FIG. 8 is a side view showing a fourth embodiment of the present invention.

FIG. 9 is a diagram showing a fifth embodiment of the present invention.

FIG. 10 is a diagram showing a fifth embodiment of the present invention.

11 is a side view of FIG.

[Explanation of symbols]

1 ... Ultrasonic probe, 2 ... Guide rail, 4 ... Slider,
6 ... Motor, 12 ... Subject, 20 ... V guide, 21 ... Guide roller, 23 ... Rack, 25 ... Pinion, 30 ... Rotating mechanism, 40 ... First guide rail, 54 ... V guide groove, 7
1,72 ... Encoder

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Shigeru Kajiyama 1168 Moriyama-cho, Hitachi City, Ibaraki Pref., Institute of Energy Research, Ltd. (72) Masahiro Koike 1168 Moriyama-cho, Hitachi City, Ibaraki Nitate Corporation Energy Research Institute (72) Inventor Shuji Kamimoto 1168 Moriyama-cho, Hitachi City, Ibaraki Prefecture Hiritsu Seisakusho Co., Ltd. Energy Research Institute (72) Inventor Yukio Arima 650 Jinmachi-cho, Tsuchiura City, Ibaraki Hitachi Construction Machinery Co., Ltd. Within

Claims (11)

[Claims] 1. A scanning device for an ultrasonic probe used during scanning of an automatic inspection device for automatically inspecting a subject using ultrasonic waves, comprising: a support fitting supported by the automatic inspection device; An arc-shaped guide rail supported by the tip of the support metal fitting, a slider orbitally supported along an arc of the arc-shaped guide rail, and a slider directed toward the center of curvature of the arc-shaped guide rail. And an ultrasonic probe supported by a scanning device for the ultrasonic probe. 2. A scanning device for an ultrasonic probe used during scanning of an automatic inspection device for automatically inspecting a subject using ultrasonic waves, comprising: a support metal member supported by the automatic inspection device; An arc-shaped first guide rail supported by the tip of the support fitting, and movably supported along the arc of the arc-shaped first guide rail, and having the same curvature as the arc-shaped first guide rail. An arc-shaped second guide rail having a center, a slider movably supported along the arc of the arc-shaped second guide rail, and a slider supported by the slider toward the centers of curvature of the guide rails. An ultrasonic probe scanning device equipped with an ultrasonic probe. 3. The arc-shaped guide rail is configured so that the arc is similar to the arc of the subject.
A scanning device for an ultrasonic probe according to any one of items 2. 4. An ultrasonic probe scanning device used during scanning of an automatic inspection device for automatically inspecting a subject using ultrasonic waves, comprising: a support metal piece supported by a main body of the automatic inspection device; A first arc-shaped guide rail that is supported by the tip of the support fitting and has a shape similar to the arc of the subject, and a first slider that is slidably engaged along the first arc-shaped guide rail. And a first slider supported by the first slider,
A second arc-shaped guide rail having the same center of curvature in a direction orthogonal to the arc-shaped guide rail, a second slider slidably engaged with the second arc-shaped guide rail, and a second slider. An ultrasonic probe scanning device comprising: the guide rails and an ultrasonic probe supported toward the center of curvature of the same arc. 5. The scanning device for an ultrasonic probe according to claim 1, wherein the arc-shaped guide rail includes a traveling unit that moves the slider along the arc of the arc-shaped guide rail. .. 6. The traveling means includes a rack installed along an arc surface of the arc-shaped guide rail, a pinion that meshes with the rack and is rotatably supported by the slider, and a motor that rotationally drives the pinion. The scanning device for the ultrasonic probe according to claim 5, further comprising: 7. The traveling means comprises a friction wheel for moving the arc-shaped guide rail while press-contacting the arc-shaped guide rail, and a motor for rotationally driving the friction wheel. Ultrasonic probe scanning device. 8. The arc-shaped guide rail includes guide means for moving the slider by the traveling means, and the guide means is a V guide installed on the arc-shaped guide rail in a longitudinal direction. 6. The ultrasonic probe according to claim 1, further comprising: a plurality of guide rollers which are rollingly contacted so as to sandwich the V guide from both sides and are rotatably supported by the slider. Scanning device. 9. The support fitting is on the automatic inspection device side,
5. The swing mechanism which is divided into the guide rail side and has a swinging mechanism connected to the joint portion so as to be rotatable in a direction perpendicular to the axial direction, according to any one of claims 1, 2, and 4. A scanning device for the ultrasonic probe described. 10. The support fitting is provided with a turning mechanism that divides the support fitting into the automatic inspection device side and either one of the track or the guide rail and rotates both of them about the axial direction. 1st term, 2nd term, 4th
Item 2. An ultrasonic probe scanning device according to any one of items. 11. The ultrasonic probe scanning device according to claim 1, wherein the beam of the ultrasonic probe is formed in a focus shape.