JP2003279492A - Multidegree-of-freedom positioning device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To simplify a structure of a leg part for supporting a rocking frame to facilitate its manufacture and to miniaturize it and reduce its weight. <P>SOLUTION: A board holder 3 is supported above a base 2 by interlaying first and second leg parts 4 and 5 having a telescopic adjustment function. The base-end side of the leg part 4 is formed into a connection structure movable on second guide members 6a and 6b on the base 2 in a Y-axis direction through a first moving member 7 and rotatable around a Y-axis. In the leg part 5, the base-end side thereof is formed into a connection structure movable on a third guide members 6c on the base 2 in the Y-axis direction through a second moving member 8. The upper-end sides of the leg parts 4 and 5 and the board holder 3 are so structured as to be connected through the U-shaped rocking frame 9 and joint means 10 rotatable around the Y-axis and a Z-axis perpendicular to the Y-axis. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention
The present invention relates to a multi-degree-of-freedom positioning device that can be carried out as a glass substrate visual inspection in which a defective portion is easily found by changing a light reflection angle during a visual inspection of a glass substrate such as DP.

[0002]

2. Description of the Related Art In recent years, there is a visual inspection of glass substrates such as LCD and PDP which employs a novel multi-degree-of-freedom positioning device. In this visual inspection device for glass substrates, a substrate holder directly or indirectly swings a swing frame. It is configured to be supported by three legs via the above. Each of these three legs has a retractable mechanism built therein, and a guide member provided on the base is arranged so as to be movable by a movement drive mechanism.
It is said that the substrate holder can be freely moved, swung, or swung by appropriately driving the expansion / contraction mechanism and the movement driving mechanism of the three legs.

[0003]

Therefore, since each leg is accompanied by the driving portion such as the expansion mechanism and the movement driving mechanism as described above, it is unavoidable that the mechanism becomes complicated and the weight of the apparatus increases. The problem of inevitably increasing the size of the drive unit has occurred, and the present invention has been proposed in order to improve such a problem, and further simplifies the configuration of the leg unit that supports the swing frame. Therefore, it is an object of the present invention to provide a multi-degree-of-freedom positioning device that is easy to manufacture, compact, and lightweight, and suitable for a glass substrate visual inspection device.

[0004]

In order to solve the above-mentioned problems, according to the present invention, in claim 1, the substrate holder is mounted on the base, and the first and second legs having the expansion and contraction adjusting function are provided. Of the first and second legs, the first leg of the first leg is movable on the base end side in the first axial direction on the base and is rotated around the first axis. The second leg has a base end side, and the second leg is movable in the first axial direction on the base, and the upper end side of the first and second leg parts and the substrate holder. Discloses a multi-degree-of-freedom positioning device configured to be coupled at least around the first axis and a second axis orthogonal to the first axis via a joint means that is rotatable. Further, in the present invention, in claim 2, the first end of each of the first and second legs is movably arranged on a first axial guide member provided on the base. First and second moving members, which are rotatably attached to the moving member and the second moving member about the first axis, for moving and adjusting the first and second moving members in the first axis direction. (2) A multi-degree-of-freedom positioning device including a linear motion drive mechanism and a third linear motion drive mechanism for swinging and adjusting the first leg portion around the first axis on the first moving member. Further, in the present invention, in claim 3, the guide member is arranged on both sides of the base in an axial direction orthogonal to the first axis, and the first and second guides are arranged in parallel with each other in parallel to the first axial direction. The first moving member is movably mounted on the first and second guide members and the first and second guide members. The first linear motion drive mechanism is disposed between the second guide members, the second moving member is movably mounted on the third guide member, and the second linear motion drive mechanism is provided side by side to provide multiple degrees of freedom. A positioning device is disclosed. Further, according to the present invention, in claim 4, the first and second linear drive mechanisms are respectively arranged on a base, and are connected to the motor to be parallel to the first, second, and third guide members. Disclosed is a multi-degree-of-freedom positioning device configured by a screw shaft arranged as described above and a nut attached to the first and second moving members and screwed into the screw shaft. Further, in the present invention, in claim 5, the substrate holder is rotated around a third axis which is orthogonal to the first axis in the horizontal direction by any one of the coupling means on the upper end sides of the first and second legs. A multi-degree-of-freedom positioning device configured to support a substrate holder via a substrate holder rotation drive means is disclosed. In the present invention,
In Claim 6, the said 1st, 2nd leg part is on a base,
Slidingly mounted on the first and second guide members and the first and second guide members arranged in parallel to each other, and sliding on the first and second guide members by a linear drive mechanism, respectively. The first and second sliding members, which are adapted to
The lower ends of a pair of lower links of equal length that are rotatably connected at a midpoint and are rotatably attached around an axis orthogonal to the first and second guide members, while The lower ends of a pair of upper links of equal length, which are crossed in an X shape and are rotatably connected at an intermediate point, are rotatably connected to the upper ends of the lower links. Disclosed is a multi-degree-of-freedom positioning device configured to support a swing frame and a substrate holder via a relay member and a joint unit having two degrees of freedom. Further, in the present invention, in claim 7, any one of the first and second guide members is supported on the base so as to be swingable around the axes of the first and second guide members via a swing base. A multi-degree-of-freedom positioning device having a swing drive mechanism for swinging the swing base is disclosed.

According to the first aspect, by simultaneously moving both the first and second legs in the first axis direction, the substrate holder can be moved in the first axis direction in the initial posture. . Further, if only one leg is moved, the joint means can displace the substrate holder around the second axis. Furthermore, the substrate holder can be displaced around the first axis by expanding and contracting the joint means side of the upper ends of both the first and second legs, or displacing the first leg around the first axis.

According to the second aspect of the present invention, the base end sides of the first and second legs are provided on the guide member on the base by the linear drive mechanism to move the first moving member and the second moving member, respectively. It is possible to adjust the movement of the first leg portion in the first axis direction and the first leg portion by swinging about the first axis by the third linear drive mechanism.

According to the third aspect of the present invention, the first and second linear motion drive mechanisms control the selective operation so that the first axis extends along the first axis.
~ By moving the first and second moving members on the third guide member to move the substrate holder in the first axial direction, or by moving the first or second moving member, the first and second moving members can be moved. The substrate holder can be displaced around the second axis by the joint means on the upper end side of the leg portion.

According to claim 4, when the motor is started,
The first and second moving members on the first to third guide members can move on the guide members by moving nuts screwed on the screw shafts on the screw shafts.

According to the fifth aspect, the substrate holder can be pivotally adjusted about the third axis by the joint means on the upper end sides of the first and second legs, and the substrate holder can be set at various angular positions. It can be adjusted.

According to the sixth aspect of the present invention, the pair of lower links are appropriately slid on the first and second guide members by the selective control operation of the linear drive mechanism. Also, the substrate holder can be brought to a desired posture position by controlling the opening and closing of the upper link.

According to the seventh aspect, the substrate holder can be rocked and adjusted by rocking the rocking table on which the first or second guide member is mounted by the rocking drive mechanism.

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION A multi-degree-of-freedom positioning device according to the present invention will now be described with reference to the accompanying drawings, showing one embodiment of a glass substrate visual inspection device. Figure 1
Substrate visual inspection device for glass substrates such as LCD and PDP 1
Indicates. In this board visual inspection apparatus 1, a board holder 3 is mounted on a base 2 and first and second leg portions 4 having expansion and contraction adjusting functions.
It supports through 5. These first and second legs 4, 5
Among them, the first leg portion 4 is on the base end side, on the base 2, on the first and second guide members 6a and 6b, in the first axial direction via the first moving member 7, that is, In the figure (Y-axis direction)
In addition to being movable, the structure is such that it can rotate about the Y axis. On the other hand, also in the second leg portion 5,
The base end side is on the base 2 and the third guide member 6c
The upper part has a coupling structure that is movable in the Y-axis direction via the second moving member 8. These first and second legs 4, 5
The upper end side of the substrate holder 3 and the substrate holder 3 are rotatable about a U-shaped swing frame 9 and a second axis about the Y axis and a second axis orthogonal to the Y axis, that is, about the Z axis in the drawing. Joint means 1
It is configured to be coupled via 0.

The base 2 is a rectangular frame member and has adjuster members A attached to the four corners for grounding so as not to rattle the floor surface. The first and second guide members 6a and 6b, and the third guide member 6a and 6b are arranged parallel to the Y-axis direction on the upper surface of the base 2 near both ends in the X-axis direction orthogonal to the Y-axis.
A guide member 6c is provided so as to project.

The substrate holder 3 includes an LCD to be inspected,
It is a rectangular frame member capable of mounting a glass substrate such as a PDP, and is rotated from the opposite outer sides through the swing frame 9 with an axis (not shown) parallel to the X axis as a rotation axis. Supported as possible. In this case, between the joint means 10 on the upper end side of the first leg 4 and the swing frame 9,
Substrate holder driving means 11 for rotating the substrate holder 3 is provided in connection with the rotary shaft of the substrate holder 3.

Although not shown in detail, the first and second legs 4 and 5 are basically the base pipes 4a and 5a, respectively.
And a telescopic support column 4 provided so as to be movable back and forth by a telescopic drive mechanism (not shown) built in these base pipes 4a, 5a.
b and 5b. The base end side of the base pipe 4a in the first leg portion 4 is attached to the first moving member 7 movably mounted on the first and second guide members 6a and 6b on the base 2 in the Y-axis. It is attached rotatably around the base 2, and the base end side of the base pipe 5a of the second leg 5 is mounted on the base 2
The second moving member 8 movably mounted on the upper guide member 6c is rotatably attached around the Y axis.

The first moving member 7 is slidably engaged with the first and second guide members 6a, 6b on the base 2 in the vicinity of both ends of the lower surface thereof so as to be slidable. , 7a are provided. Further, a nut 12n forming the first linear motion drive mechanism 12 is attached to the middle of the first moving member 7. Then, as described above, the protrusion 7b for attaching the base end side of the base pipe 4a of the first leg 4 to the first movement member 7 rotatably around the Y-axis is projected on the one end side. I have set up.
Further, on the upper surface of the first moving member 7 and the other end side, a projecting portion 7b for mounting the third linear drive mechanism 13 is provided so as to project. On the other hand, the second moving member 8 is provided with a slide receiving portion 8a, which is slidably locked on the third guide member 6c on the base 2, on the lower surface side, and has a second linear motion. A nut 14n that constitutes the drive mechanism 14 is also provided. Further, on the upper surface of the second moving member 8, a protrusion 8b for attaching the base end side of the base pipe 5a of the second leg 5 rotatably around the Y-axis is provided.

Next, the first and second moving members 7 and 8 are
The first and second linear motion drive mechanisms 12 and 14 for adjusting movement in the Y-axis direction will be described respectively. First, the linear drive mechanism 12 includes a motor 12a arranged on the base 2.
And the first and second on the base 2 connected to the motor 12a.
Between the guide members 6a, 6b of the screw shaft 12b arranged parallel to the first and second guide members 6a, 6b.
And a nut 12n attached to the lower surface of the first moving member 7 and the center side. On the other hand, the second linear drive mechanism 14 also includes a motor 14a arranged on the base 2.
A screw shaft 14b connected to the motor 14a and arranged parallel to the third guide member 6c on the base 2;
The moving member 8 and the nut 14n are provided together.

The third linear drive mechanism 13 is basically similar to the first and second legs 4 and 5 in the base pipe 13a.
And an expansion / contraction strut 13b provided so as to be movable back and forth by an expansion / contraction drive mechanism (not shown) built in the base pipe 13a.
And have. The base end side of the base pipe 13a is
The upper surface of the first moving member 7 movably mounted on the first and second guide members 6a and 6b on the base 2 and the protrusion 7b on the other end side are rotatable about the Y axis. I am attached. On the other hand, the upper end side of the telescopic column 13b is rotatably (around the Y axis) pivotally attached to the intermediate portion of the base pipe 4a of the first leg 4.

Further, a joint means 10 for connecting the upper end sides of the first and second leg portions 4 and 5 and the substrate holder 3 via the swing frame 9 will be described. Joint means 10 on the upper end side of the first leg portion 4, that is, on the tip end side of the telescopic column 4b.
Is composed of a receiving portion 10a coupled to the swing frame 9 via the substrate holder driving means 11 and a connecting portion 10b axially fixed to the receiving portion 10a (see FIG. 2). The receiving portion 10a has a circumference around an axis orthogonal to the Y axis,
That is, the shaft portion 10z that is rotatable around the Z axis is held. On the other hand, the connecting portion 10b is fixed to the tip end of the telescopic support column 4b, and is fixed to the shaft portion 10Z so as to be rotatable about the Y axis. On the other hand, the joint means 10 on the upper end of the second leg portion 5 is directly coupled to the swing frame 9, and basically has the same structure as the joint means 10 on the upper end side of the first leg portion 4. Since it has two degrees of freedom, its explanation is omitted.

Although not shown, the substrate holder driving means 11 connects the output shaft of the motor and the rotation shaft of the substrate holder 3, which is parallel to the X axis. And a second axis orthogonal to the Y axis and the Y axis, that is,
In the figure, it is configured so as to be coupled via a rotatable about X axis. In addition, the expansion and contraction drive mechanism in the first and second leg portions 4 and 5 and the first and second linear motion drive mechanisms 12 and 1 described above.
4, the third linear drive mechanism 13, and the substrate holder drive means 11 are configured to operate based on software set in the control device (not shown). Also,
In the board visual inspection device 1 described above, the first axis direction is Y.
The description has been made assuming that the axial direction is the Z axis, the second axial direction is the Z axis, and the axis orthogonal to the Y axis of the base 2 is the X axis.
The method of determining the Y and Z axes is arbitrary.

Since the board visual inspection apparatus 1 according to the present invention is configured as described above, various adjustment operations of the board holder 3 are possible. For example, the substrate holder driving means 11
To displace the substrate holder 3 in a substantially horizontal direction,
The glass substrate to be inspected is placed on the substrate holder 3 and the first and second linear motion drive mechanisms 12 and 14 are activated to synchronously move the first and second guide members 6a and 6b to the first and second guide members 6a and 6b. 1 moving member 7
Then, if the second moving member 8 on the third guide member 6c is moved in the same direction, the substrate holder 3 can be moved in the Y-axis direction in a substantially horizontal state (see FIG. 3).

On the other hand, the first and second linear drive mechanisms 12,
By activating either one of the four or the motors 12a and 14a in reverse, the joint means 10 at the upper end of the telescopic columns 4b and 5b of the first and second leg portions 4 and 5 is activated.
In the receiving portion 10a, the connecting portion 10b of the joint means 10 is displaced around the shaft portion 10z, whereby the substrate holder 3 can be rotated around the Z axis (see FIG. 2).

Further, by simultaneously expanding and contracting the expansion / contraction drive mechanism in the first and second legs 4 and 5, the joint means 1
The connection part 10b of 0 rotates about the Y-axis, and the substrate holder 3 can be adjusted up and down in a horizontal state. In addition, the third linear motion drive mechanism 13 is activated to extend and retract the telescopic support column 13b while the telescopic drive mechanisms of the first and second leg portions 4 and 5 are stopped, so that the first leg portion 4 side is moved. As the active side, the second leg 5 is provided with a mounting shaft for the base pipe 5a and the projection 8b on the upper surface of the second moving member 8 on the third guide member 6c,
The substrate holder 3 can be displaced in the X-axis direction by interlocking displacement around the Y-axis around the connecting portion 10b of the joint means 10 at the upper end of the second leg portion 5. Furthermore, the third linear drive mechanism 1
When the third linear motion drive mechanism 13 is regulated by activating either one of the expansion and contraction drive mechanisms in the first and second leg portions 4 and 5 in the state in which 3 is stopped or operating in reverse to each other. The substrate holder 3 can be swingably displaced around an axis parallel to the Y axis (see FIG. 2).

In addition to this, of course, based on the software in the control device, the expansion and contraction drive mechanism in the first and second leg portions 4 and 5, the first and second linear motion drive mechanisms 12 and 14, and the third drive mechanism.
The linear drive mechanism 13 and the substrate holder drive means 11 are combined and drive-controlled, whereby the first and second leg portions 4 and 5 are driven.
Is moved on the first and second guide members 6a and 6b and the third guide member 6c, the telescopic columns 4b and 5b of the first and second leg portions 4 and 5 are telescopically moved, and the third linear drive mechanism 13 is moved. By expanding and contracting the expansion / contraction support column 13b, the substrate holder 3 can be freely swung in a desired direction. As described above, in the present invention, since the substrate holder 3 is supported by the first and second leg portions 4 and 5, the structure is simplified,
As described above, the combination drive of the expansion / contraction drive mechanism in the first and second leg portions 4 and 5, the first and second linear drive mechanisms 12 and 14, the third linear drive mechanism 13, and the substrate holder drive means 11 is performed. By performing the control operation, the substrate holder 3 can be freely adjusted, which can contribute to the inspection of the substrate.

The multi-degree-of-freedom positioning device according to the present invention comprises:
It can also be implemented as the substrate visual inspection apparatus 1 shown in FIGS. In the board visual inspection apparatus 1 in this case, the first and second guide members 15 and 16 arranged in parallel to each other on the base 2 and the first and second guide members 15 and 1 are arranged.
6 slidably mounted on each of the linear drive mechanisms 1
7 and 17, first and second sliding members 18 and 19 adapted to slide on the first and second guide members 15 and 16, respectively. The lower ends of a pair of lower links 20, 20 of equal length, which are crossed in an X shape and are rotatably connected at an intermediate point, are provided in the bearing 21.
While being attached so as to be rotatable around an axis orthogonal to the first guide member 15, the pair of lower links 20, 2
Similarly, the lower ends of a pair of upper links 22 and 22 of equal length, which are similarly crossed in an X shape and rotatably connected at an intermediate point, are rotatably connected to the upper end of 0, respectively. The swing frame 9 and the substrate holder 3 are provided on the upper end portions of the members 22 and 22 via a relay member 23 and a joint means (which will be described later) having two degrees of freedom.
To support. The lower link 2 mentioned above
0 and 20 and the upper links 22 and 22 do not necessarily have to be this mechanism, and the length dimension is longer than the lower link 20 and the upper link 22, and they are made to cross in an X shape only by a pair of links. It may be configured to be rotatably connected at an intermediate point. Further, the first guide member 15 is supported by the base 2 via a rocking base 24 so as to be rockable around the axis of the first guide member 15, and the rocking drive mechanism 25 is connected to the rocking base 24. is doing. The swing drive mechanism 25 is configured to be connected to the swing base 24 via a speed reduction mechanism (not shown) of a motor 25a, and swings the swing base 24 around the Y axis.

The linear drive mechanism 17, 17 is a motor 1
7a, a screw shaft 17b connected to the motor 17a on both sides of the first and second guide members 15 and 16 in parallel at predetermined intervals, and the first and second sliding members 18 respectively. , 19 to move the screw shaft 17b on the screw shaft 17b.

Next, the support structure of the swing frame 9 and the substrate holder 3 supported on the upper ends of the upper links 22, 22 will be described. An upper end portion of one of the upper links 22, 22 is connected to a lower surface side of the relay member 23 via a bearing 26 rotatable about the X axis, and a side surface side of the relay member 23. In addition, it is attached to the swing frame 9 via the joint means 27 rotatable about the Y axis and about the Z axis (see FIG. 7). Further, the upper end portion of the other upper link 22 of the upper links 22, 22 is a bearing 26 that is rotatable with the lower surface side of the relay member 23 around the X axis.
The joint means 27, which is rotatable around the Y axis and around the Z axis, is connected to the side surface of the relay member 23 via the slide support means 28. It is attached to the frame 9.

In the board visual inspection apparatus 1, the first and second sliding members 18 and 19 are moved to the first and second guide members 15 and 15 by the selective control operation of the linear drive mechanisms 17 and 17, respectively.
16 is slidably moved to control opening / closing of the pair of lower links 20 and 20 and upper links 22 and 22,
Further, the rocking frame 24 and the substrate holder 3 are moved in the X-axis, Y-axis, and Z-axis directions by rocking the rocking table 24 equipped with the first guide member 15 by the rocking drive mechanism 25. It can be adjusted and swivel adjusted.

The multi-degree-of-freedom positioning device according to the present invention has been described above with reference to the embodiment adopted in the visual inspection apparatus for glass substrates. Of course, the multi-degree-of-freedom positioning device of the present invention is not limited to other precision measuring instruments. It is also useful in precision processing machines.

[0030]

According to the present invention, the glass substrate or the like installed on the substrate holder supported by the left and right first and second legs can be expanded and contracted and swung with the first and second legs. According to the above, the visual inspection of the substrate surface is performed by translating along the three orthogonal axes or rotating around the three axes, so that the manufacturing is easy, and the size and weight can be reduced.

[0031]

[Brief description of drawings]

FIG. 1 is an abbreviated and schematic perspective explanatory view showing one embodiment of a substrate visual inspection apparatus adopting a multi-degree-of-freedom positioning device according to the present invention.

2 is a side view for explaining the configuration and operation of the board visual inspection apparatus shown in FIG. 1. FIG.

FIG. 3 is another side explanatory view for explaining the configuration and operation of the board visual inspection apparatus shown in FIG.

FIG. 4 is a schematic view showing another embodiment of a substrate visual inspection apparatus adopting the multi-degree-of-freedom positioning device according to the present invention, which is omitted.
It is a schematic perspective explanatory view.

5 is an abbreviated plan view of the substrate visual inspection apparatus shown in FIG. 4. FIG.

6 is a side view for explaining the configuration and operation of the board visual inspection apparatus shown in FIG.

FIG. 7 is an enlarged side view of essential parts for explaining a pivot frame structure of a swing frame and a substrate holder in the substrate visual inspection apparatus shown in FIG.

[Explanation of symbols] 1 Board visual inspection device 2 bases 3 substrate holder 4 First leg 5 Second leg 4a, 5a Base pipe 4b, 5b telescopic support 6a First guide member 6b Second guide member 6c Third guide member 7 First moving member 7a Sliding receiving part 7b protrusion 8 Second moving member 8a Sliding receiving part 8b protrusion 9 swing frame 10 Joint means 10a receiver 10b connection part 10Z shaft 11 Substrate holder drive means 12 First linear drive mechanism 12a motor 12b screw shaft 12n nut 13 Swing drive mechanism 13a Base pipe 13b Telescopic support 14 Second linear drive mechanism 14a motor 14b screw shaft 14n nut 15 First guide member 16 Second guide member 17 Linear drive mechanism 17a motor 17b screw shaft 17n nut 18 First sliding member 19 Second sliding member 20 bottom link 21 bearings 22 Top link 23 Relay member 24 rocker 25 Swing drive mechanism 25a motor 26 Bearing 27 Joint means 28 Sliding support means

Claims (7)

[Claims] 1. A substrate holder is supported on a base via first and second leg portions having an expansion and contraction adjusting function, and the first leg portion of the first and second leg portions is a base end. The side is movable in the first axial direction on the base, and is configured to be rotatable around the first axis, and the second leg is on the base end side on the base. 1 is configured to be movable in the axial direction, and the upper end sides of the first and second legs and the substrate holder are at least around the first axis and around a second axis orthogonal to the first axis. A multi-degree-of-freedom positioning device, characterized in that it is coupled to the shaft via a rotatable joint means. 2. A first moving member and a second moving member, which are movably arranged on the base end sides of the first and second legs, respectively, on a guide member in the first axial direction provided on the base. Is rotatably attached to the movable member around the first axis.
First and second linear drive mechanisms for moving and adjusting the second moving member in the first axis direction are provided, and the first moving member is provided with the first leg portion for swinging adjustment about the first axis. The multi-degree-of-freedom positioning device according to claim 1, further comprising a third linear drive mechanism for performing the above. 3. The guide member includes first and second guide members, which are arranged close to each other on both sides in an axial direction orthogonal to the first axis on a base, parallel to each other in the first axial direction. And a third guide member disposed apart from the first and second guide members, the first moving member being movably mounted on the first and second guide members, and between the first and second guide members. A first linear drive mechanism is provided in the second moving member
3. The multi-degree-of-freedom positioning device according to claim 2, wherein the guide member is movably mounted and a second linear drive mechanism is provided side by side. 4. The first and second linear drive mechanisms are respectively motors arranged on a base and screws connected to the motors and arranged in parallel with the first, second and third guide members. The multi-degree-of-freedom positioning device according to claim 2, wherein the shaft and a nut attached to the first and second moving members and screwed into the screw shaft are included. 5. A substrate holder rotation drive for rotating the substrate holder around a third axis orthogonal to the first axis in the horizontal direction by one of the coupling means on the upper ends of the first and second legs. The multi-degree-of-freedom positioning device according to any one of claims 1 to 4, wherein the substrate holder is supported via the means. 6. The first and second legs are mounted parallel to each other on a base, and first and second guide members are slidably mounted on the first and second guide members. Then, they are connected to the first and second sliding members, which are slid on the first and second guide members by the linear drive mechanisms, respectively, so as to intersect each other in an X shape and to be rotatable at an intermediate point. While the lower ends of the pair of lower links having the same length are rotatably attached around the axis orthogonal to the first and second guide members, the upper ends of the pair of lower links are made to intersect in an X shape. The lower ends of a pair of upper links of equal length that are rotatably connected at an intermediate point,
2. The structure in which the swing frame and the substrate holder are rotatably connected to each other, and the swing frame and the substrate holder are supported on the upper ends of the upper links through a relay member and a joint means having two degrees of freedom. Multi-degree-of-freedom positioning device. 7. One of the first and second guide members is swingably supported around a shaft of the first and second guide members on a base via a swing base, and the swing base is supported. 7. The multi-degree-of-freedom positioning device according to claim 6, further comprising a rocking drive mechanism for rocking.