JP2009117803A5 - - Google Patents

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Publication number
JP2009117803A5
JP2009117803A5 JP2008231445A JP2008231445A JP2009117803A5 JP 2009117803 A5 JP2009117803 A5 JP 2009117803A5 JP 2008231445 A JP2008231445 A JP 2008231445A JP 2008231445 A JP2008231445 A JP 2008231445A JP 2009117803 A5 JP2009117803 A5 JP 2009117803A5
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JP
Japan
Prior art keywords
movable body
support
concave portion
drive device
guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008231445A
Other languages
Japanese (ja)
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JP5132491B2 (en
JP2009117803A (en
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2008231445A external-priority patent/JP5132491B2/en
Priority to JP2008231445A priority Critical patent/JP5132491B2/en
Priority to US12/247,037 priority patent/US8035805B2/en
Priority to TW97139359A priority patent/TWI393207B/en
Priority to KR20080100474A priority patent/KR101061759B1/en
Priority to EP20080166583 priority patent/EP2051141B1/en
Publication of JP2009117803A publication Critical patent/JP2009117803A/en
Priority to US13/227,180 priority patent/US9081308B2/en
Publication of JP2009117803A5 publication Critical patent/JP2009117803A5/ja
Publication of JP5132491B2 publication Critical patent/JP5132491B2/en
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Claims (10)

ガイドによって支持された可動体を駆動ユニットにより駆動する駆動装置であって、
前記ガイドは、
磁性材で形成され前記可動体をガイドする側に凹部と凸部とを有する支持体と、該支持体の少なくとも凹部を覆うとともに前記可動体をガイドするガイド面を形成する脆性物質層とを有し、
前記可動体は、
前記ガイド面から浮上するためのエアパッドと、前記支持体との間に吸引力を得るためのマグネットとを有し、
前記支持体の凸部は、
前記駆動ユニットが駆動する前記可動体の移動方向に沿って設けられ、前記マグネットと対向するように配置される
ことを特徴とする駆動装置。 A drive device for driving a movable body supported by a guide by a drive unit ,
The guide is
A support body made of a magnetic material and having a concave portion and a convex portion on the side that guides the movable body, and a brittle material layer that covers at least the concave portion of the support body and forms a guide surface that guides the movable body. And
The movable body is
And air pad for floating from the guide surface, and a magnet for obtaining a suction force between the support possess,
The convex part of the support is
A driving device provided along the moving direction of the movable body driven by the driving unit and arranged to face the magnet . 前記凹部及び前記凸部は、矩形形状であり、
前記凹部及び前記凸部は、その長手方向が前記可動体の移動方向に沿って形成される
ことを特徴とする請求項１記載の駆動装置。 The concave portion and the convex portion are rectangular.
The driving device according to claim 1, wherein the concave portion and the convex portion are formed such that a longitudinal direction thereof is along a moving direction of the movable body. 前記脆性物質層は、前記凹部と前記凸部とを覆う
ことを特徴とする請求項１又は２記載の駆動装置。 The driving device according to claim 1, wherein the brittle substance layer covers the concave portion and the convex portion. 前記支持体の凹部は、
前記駆動ユニットが駆動する前記可動体の移動方向に沿って設けられ、前記エアパッドと対向するように配置される
ことを特徴とする請求項１乃至３のいずれか１項に記載の駆動装置。 The recess of the support is
4. The drive device according to claim 1 , wherein the drive device is provided along a moving direction of the movable body driven by the drive unit, and is disposed so as to face the air pad . 5. 前記ガイド面としての前記脆性物質層の表面は、平面である
ことを特徴とする請求項１乃至４のいずれか一項に記載の駆動装置。 The driving device according to any one of claims 1 to 4, wherein a surface of the brittle substance layer as the guide surface is a flat surface. 前記凹部及び前記凸部の高低差は、２０μｍ以上で形成される
ことを特徴とする請求項１乃至５のいずれか１項に記載の駆動装置。 The drive device according to any one of claims 1 to 5, wherein a height difference between the concave portion and the convex portion is formed to be 20 µm or more. 前記脆性物質層は、セラミックス層であるThe brittle material layer is a ceramic layer.
ことを特徴とする請求項１乃至６のいずれか１項に記載の駆動装置。  The drive device according to any one of claims 1 to 6, wherein the drive device is configured as described above. ガイドによって支持された可動体を駆動ユニットにより駆動する駆動装置であって、A drive device for driving a movable body supported by a guide by a drive unit,
前記ガイドは、  The guide is
磁性材で形成され前記可動体をガイドする側に凹部と凸部とを有する支持体と、該支持体の少なくとも凹部を覆うとともに前記可動体をガイドするガイド面を形成する層とを有し、  A support body formed of a magnetic material and having a concave portion and a convex portion on the side that guides the movable body; and a layer that covers at least the concave portion of the support body and forms a guide surface that guides the movable body;
前記可動体は、  The movable body is
前記ガイド面から浮上するためのエアパッドと、前記支持体との間に吸引力を得るためのマグネットとを有し、  An air pad for rising from the guide surface, and a magnet for obtaining an attractive force between the support and
前記支持体の凸部は、  The convex part of the support is
前記駆動ユニットが駆動する前記可動体の移動方向に沿って設けられ、前記マグネットと対向するように配置され、  Provided along the moving direction of the movable body driven by the drive unit, arranged to face the magnet,
前記層は、  The layer is
セラミックス、ガラス、ダイヤモンド、カーボン複合材、石材のいずれかを含む  Includes ceramics, glass, diamond, carbon composite, or stone
ことを特徴とする駆動装置。  A drive device characterized by that. 原版ステージに保持された原版のパターンを基板ステージに保持された基板に投影光学系によって投影し該基板を露光する露光装置であって、
請求項１乃至８のいずれか１項に記載された駆動装置を備え、
前記駆動装置は、該駆動装置の前記可動体の移動に応じて前記原版ステージ又は前記基板ステージの少なくとも一方を駆動するように構成されている、
ことを特徴とする露光装置。 An exposure apparatus that projects a pattern of an original held on an original stage onto a substrate held on a substrate stage by a projection optical system and exposes the substrate,
A drive device according to any one of claims 1 to 8 , comprising:
The driving device is configured to drive at least one of the original stage or the substrate stage according to the movement of the movable body of the driving device.
An exposure apparatus characterized by that. デバイス製造方法であって、
請求項９に記載の露光装置によって基板を露光する工程と、
該基板を現像する工程と、
を含むことを特徴とするデバイス製造方法。 A device manufacturing method comprising:
Exposing the substrate by the exposure apparatus according to claim 9 ;
Developing the substrate;
A device manufacturing method comprising:
JP2008231445A 2007-10-17 2008-09-09 Drive apparatus, exposure apparatus, and device manufacturing method Active JP5132491B2 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2008231445A JP5132491B2 (en) 2007-10-17 2008-09-09 Drive apparatus, exposure apparatus, and device manufacturing method
US12/247,037 US8035805B2 (en) 2007-10-17 2008-10-07 Driving apparatus and exposure apparatus, and device fabrication method
EP20080166583 EP2051141B1 (en) 2007-10-17 2008-10-14 Driving apparatus, exposure apparatus, and device fabrication method
KR20080100474A KR101061759B1 (en) 2007-10-17 2008-10-14 Driving apparatus, exposure apparatus, and device manufacturing method
TW97139359A TWI393207B (en) 2007-10-17 2008-10-14 Driving apparatus and exposure apparatus, and device fabrication method
US13/227,180 US9081308B2 (en) 2007-10-17 2011-09-07 Driving apparatus and exposure apparatus and device fabrication method

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007270468 2007-10-17
JP2007270468 2007-10-17
JP2008231445A JP5132491B2 (en) 2007-10-17 2008-09-09 Drive apparatus, exposure apparatus, and device manufacturing method

Publications (3)

Publication Number Publication Date
JP2009117803A JP2009117803A (en) 2009-05-28
JP2009117803A5 true JP2009117803A5 (en) 2011-10-27
JP5132491B2 JP5132491B2 (en) 2013-01-30

Family

ID=40784547

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008231445A Active JP5132491B2 (en) 2007-10-17 2008-09-09 Drive apparatus, exposure apparatus, and device manufacturing method

Country Status (2)

Country Link
JP (1) JP5132491B2 (en)
TW (1) TWI393207B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6960653B2 (en) * 2017-03-30 2021-11-05 ピー・ヂー・ダブリュー株式会社 Slider device and its manufacturing method

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US658385A (en) * 1900-06-23 1900-09-25 John Calvin Maun Cloth-cleaning device for sieves in bolting-machines.
US5828142A (en) * 1994-10-03 1998-10-27 Mrs Technology, Inc. Platen for use with lithographic stages and method of making same
JP3709896B2 (en) * 1995-06-15 2005-10-26 株式会社ニコン Stage equipment
JP3483452B2 (en) * 1998-02-04 2004-01-06 キヤノン株式会社 Stage apparatus, exposure apparatus, and device manufacturing method
JP4341101B2 (en) * 1999-03-08 2009-10-07 株式会社ニコン Stage apparatus and exposure apparatus
WO2000079574A1 (en) * 1999-06-18 2000-12-28 Nikon Corporation Stage device and exposure system
US6426790B1 (en) * 2000-02-28 2002-07-30 Nikon Corporation Stage apparatus and holder, and scanning exposure apparatus and exposure apparatus
JP2003031646A (en) * 2001-07-16 2003-01-31 Nikon Corp Stage unit and aligner
JPWO2006006730A1 (en) * 2004-07-15 2008-05-01 株式会社ニコン Planar motor apparatus, stage apparatus, exposure apparatus, and device manufacturing method

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