JP2009109768A5 - - Google Patents

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Publication number
JP2009109768A5
JP2009109768A5 JP2007282375A JP2007282375A JP2009109768A5 JP 2009109768 A5 JP2009109768 A5 JP 2009109768A5 JP 2007282375 A JP2007282375 A JP 2007282375A JP 2007282375 A JP2007282375 A JP 2007282375A JP 2009109768 A5 JP2009109768 A5 JP 2009109768A5
Authority
JP
Japan
Prior art keywords
forming
film
lower layer
resist pattern
intermediate film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007282375A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009109768A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007282375A priority Critical patent/JP2009109768A/ja
Priority claimed from JP2007282375A external-priority patent/JP2009109768A/ja
Priority to US12/260,659 priority patent/US8084192B2/en
Publication of JP2009109768A publication Critical patent/JP2009109768A/ja
Publication of JP2009109768A5 publication Critical patent/JP2009109768A5/ja
Pending legal-status Critical Current

Links

JP2007282375A 2007-10-30 2007-10-30 レジストパターン形成方法 Pending JP2009109768A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2007282375A JP2009109768A (ja) 2007-10-30 2007-10-30 レジストパターン形成方法
US12/260,659 US8084192B2 (en) 2007-10-30 2008-10-29 Method for forming resist pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007282375A JP2009109768A (ja) 2007-10-30 2007-10-30 レジストパターン形成方法

Publications (2)

Publication Number Publication Date
JP2009109768A JP2009109768A (ja) 2009-05-21
JP2009109768A5 true JP2009109768A5 (enExample) 2010-04-22

Family

ID=40778312

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007282375A Pending JP2009109768A (ja) 2007-10-30 2007-10-30 レジストパターン形成方法

Country Status (2)

Country Link
US (1) US8084192B2 (enExample)
JP (1) JP2009109768A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220193828A1 (en) * 2020-12-23 2022-06-23 Amulaire Thermal Technology, Inc. Lift-off structure for sprayed thin layer on substrate surface and method for the same
TW202305924A (zh) * 2021-06-24 2023-02-01 日商東京威力科創股份有限公司 基板處理方法及基板處理系統

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3806121B2 (ja) * 1996-09-13 2006-08-09 株式会社東芝 レジストパターン形成方法
US5939236A (en) * 1997-02-07 1999-08-17 Shipley Company, L.L.C. Antireflective coating compositions comprising photoacid generators
JP4346358B2 (ja) 2003-06-20 2009-10-21 Ｎｅｃエレクトロニクス株式会社 化学増幅型レジスト組成物およびそれを用いた半導体装置の製造方法、パターン形成方法
US7416833B2 (en) * 2004-07-15 2008-08-26 Shin-Etsu Chemical Co., Ltd. Photoresist undercoat-forming material and patterning process
JP4482763B2 (ja) * 2004-07-15 2010-06-16 信越化学工業株式会社 フォトレジスト下層膜形成材料及びパターン形成方法
JP4638378B2 (ja) * 2005-06-07 2011-02-23 信越化学工業株式会社 レジスト下層膜材料並びにそれを用いたパターン形成方法
JP4666166B2 (ja) * 2005-11-28 2011-04-06 信越化学工業株式会社 レジスト下層膜材料及びパターン形成方法
JP4718390B2 (ja) 2006-08-01 2011-07-06 信越化学工業株式会社 レジスト下層膜材料並びにそれを用いたレジスト下層膜基板およびパターン形成方法

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