JP2009101454A - Method of polishing object and object polishing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To well finish the surfaces of objects by finely polishing even deformed objects. <P>SOLUTION: In this method of polishing an object, a polishing body 40 is brought into contact with the surface of the object 1, and while so finely vibrating the polishing body 40 that the path of the end 41 of the polishing body draws a Lissajous figure, the polishing body 40 is moved relative to the surface 2 of the object 1 for polishing the surface 2 of the object 1. The path of the end 41 of the polishing body 40 is figure of eight when viewed from above. The crossing point of eight figure when viewed from above is the crest of the polishing body in contact with the object 1 in a U-shape. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an object polishing method and an object polishing apparatus for polishing an object such as a fine and irregularly shaped mold for producing an IC package or the like.

In general, mold sculpting is performed by sculpture electric discharge machining, but the surface obtained by electric discharge machining has a large surface roughness, and a work-affected layer is often observed. Therefore, in order to use it as a surface of a mold, a polishing process is often performed as a post process. In addition, since rotating tools cannot be applied to processing of irregularly shaped molds, the current situation is that polishing is performed manually. However, recently, the miniaturization of molds has progressed rapidly, and fine polishing by hand has become extremely difficult.
Therefore, conventionally, as an object polishing apparatus for polishing an object such as a mold, one disclosed in Patent Document 1 (Japanese Patent Application Laid-Open No. 5-162064) is known.
As shown in FIG. 15, this is at the tip of the polishing shaft 112 supported so as to move in two directions parallel to the surface 101 of the object 100 and perpendicular to each other and in a direction perpendicular to the surface 101 of the object 100. The magnetic sphere 111 is rotatably held to form a polishing unit 110. An abrasive is held between the polishing unit 110 and the surface 101 of the object 100 by a magnetic field, and the polishing unit 110 and the surface 101 of the object 100 are brought into contact with each other. Thus, the surface 101 of the object 100 is polished by minutely moving the polishing unit 110.
The actuator 120 that minutely moves the polishing shaft 112 and the polishing unit 110 is composed of a piezoelectric element. By applying a voltage to the piezoelectric element, the polishing shaft 112 and the polishing unit 110 are parallel to the surface 101 of the object 100 and are perpendicular to each other. Move in the direction. As a result, the polishing unit 110 moves minutely so as to draw an arc. Further, at the time of polishing, the magnetic sphere 111 as the polishing unit 110 is appropriately rotated.
The object 100 is polished by the minute movement and rotation of the polishing unit 110.

JP-A-5-162064

  However, in this conventional object polishing apparatus, when polishing is performed using linear vibration or elliptical vibration, the polishing direction is one direction, but the polishing unit 110 moves minutely so as to draw a simple circle. Therefore, there is a problem that streak-like streaks are likely to remain on the surface 101 of the object 100 and the polishing finish accuracy is poor. Further, when the object has a corner portion of a recess, there is a problem that the corner portion is not always sufficiently polished. Furthermore, the shape of the surface 101 of the object 100 to which these polishing apparatuses can be applied is a simple shape such as a cylindrical surface, a flat surface, or an arc surface, and is limited to a case where the polishing region is wide.

  The present invention has been made in view of such problems, and it is difficult to leave streaks to improve the finishing accuracy of polishing, and also reliably performs fine polishing on the corners of the recesses. It is an object of the present invention to provide an object polishing method and an object polishing apparatus that can make the surface of the object a good finished surface.

  In order to achieve such an object, the polishing method for an object of the present invention is such that the polishing body is brought into contact with the surface of the object, and the polishing body is vibrated so that the trajectory of the tip of the polishing body draws a Lissajous figure. In the method of polishing an object for polishing the surface of the object by moving the object relative to the surface of the object, the trajectory of the tip of the polishing body has an 8-shaped shape when viewed from the plane and is viewed from the front. The crossing point of the figure 8 is a U-shape in which the intersection point of the object comes into contact with the object.

  Thus, when polishing the object, the polishing body is brought into contact with the surface of the object, and polishing is performed while the polishing body is slightly vibrated. In this case, the tip of the polishing body draws a figure 8 when the trajectory is viewed from the plane, and the intersection of the figure 8 contacts the surface of the object, that is, the tip of the polishing body has a cross to draw a cross. Contact with the surface. Then, by moving the polishing body relative to the surface of the object, a state in which the intersections (crosses) of FIG. 8 are continuously drawn on the surface of the object with a phase shift, that is, the cross hatch is continuous. Is applied and polishing is performed. Therefore, since the surface of the object is polished at the intersection of the figure 8, the streaks or the like are hardly left on the surface of the object, and the surface of the object can be made a good finished surface. Further, since the surface of the object is polished at the intersection of the figure 8, the fine polishing can be surely performed on the corners of the recesses.

  And as needed, it is set as the structure which made the said relative movement direction the front-back direction seeing from the front. Thereby, even if the grinding | polishing area | region is large, the cross hatch can be orderly and reliably provided to all the surfaces of an object.

  Furthermore, the main axis passing through the apex of the U shape and the normal of the surface of the object are made to coincide with each other as necessary. Thereby, even if the surface of the object is inclined or uneven, the tip of the polishing body reliably comes into contact with the surface of the object, so that fine polishing can be performed.

  In order to achieve the above object, the object polishing apparatus of the present invention is in contact with a base, a table provided on the base, on which the object is installed, a stand provided on the base, and the surface of the object. A polishing body to be held, a holder that is supported by the stand and holds the polishing body, vibration means for minutely vibrating the polishing body through the holder, and a trajectory of the tip of the polishing body is a Lissajous figure. In a polishing apparatus for an object, comprising: a control means for controlling the object to be drawn; and a moving means for enabling the polishing body to move relative to the surface of the object. And having a function of controlling the vibration means so that the intersection of the figure 8 when viewed from the front is a U-shape where the intersection of the figure 8 is the apex in contact with the object. ing.

  Thus, when polishing, first, the object to be polished is placed on the table. Next, the polishing body is brought into contact with the surface of the object. In this state, polishing is performed by vibrating the polishing body with vibration means. At this time, the trajectory at the tip of the polishing body is controlled by the control means to have a U shape when viewed from the plane, and the intersection of the 8 shapes when viewed from the front is the U shape that is the apex that contacts the object. Therefore, the intersection of the figure 8 of the polishing body comes into contact with the surface of the object, that is, the trajectory of the tip of the polishing body comes into contact with the surface of the object while drawing a cross. Then, by moving the polishing body relative to the surface of the object by the moving means, a state in which intersections (crosses) of FIG. 8 are continuously drawn on the surface of the object with a phase shift, that is, a cross Polishing is performed by continuously applying hatches. Therefore, since the surface of the object is polished at the intersection of the figure 8, the streaks or the like are hardly left on the surface of the object, and the surface of the object can be made a good finished surface. Further, since the surface of the object is polished at the intersection of the figure 8, the fine polishing can be surely performed on the corners of the recesses.

  And the said control means is equipped with the function which controls a movement means so that the said relative movement direction may turn into the front-back direction seeing from the front as needed. Thereby, even if the grinding | polishing area | region is large, the cross hatch can be orderly and reliably provided to all the surfaces of an object.

  Further, if necessary, the vibration means is constituted by a plurality of piezoelectric actuators having one end fixed to a fixing member provided on the stand and the other end fixed to the holder. Since it is a piezoelectric actuator, the vibration mechanism can be simply configured. When a voltage is applied to the piezoelectric actuator, electrical energy is converted into mechanical energy, and the piezoelectric actuator expands and contracts to vibrate. Since one end of the piezoelectric actuator is fixed to the fixing member, the other end is vibrated. That is, the holder is vibrated. The polishing body is vibrated by the vibration of the holder, and the surface of the object can be polished.

Furthermore, if necessary, an attachment portion for attaching the polishing body is provided on one end face side of the holder facing the object side so that the central axis of the holder and the central axis of the polishing body are coaxial. Three or more piezoelectric actuators are provided on the other end surface side of the holder, each piezoelectric actuator is symmetrically arranged with respect to the central axis of the holder, and a coil spring is provided corresponding to each piezoelectric actuator. One end is fixed to the holder and the other end is fixed to the fixing member so that the coil spring is pulled in the axial direction of the corresponding piezoelectric actuator. By attaching the central axis of the holder and the central axis of the polishing body so as to be coaxial, the polishing body can be easily brought into contact with the portion of the object to be polished. In addition, since the piezoelectric actuators are symmetrically arranged in an equiangular relationship around the center axis of the holder, the holder is reliably supported and the entire holder vibrates evenly. It becomes easy to control movement so as to draw a trajectory. Further, since the coil spring is provided so as to pull the holder in the axial direction of the corresponding piezoelectric actuator, the coil spring can apply a preload to the other end of the piezoelectric actuator and keep a substantially constant preload amount during polishing. be able to.
When the polishing body is made detachable from the holder, the polishing body can be replaced with a new polishing body when the polishing body is worn by the polishing operation and its tip is deformed.

  In addition, if necessary, each of the piezoelectric actuators is configured so that its axis extends from the holder toward the fixing member. As a result, it is easy to apply vibration to the holder, and vibration control can be reliably performed.

  Further, if necessary, the fixing member is configured to be movable with respect to the stand so that the polishing body held by the holder can be moved toward and away from the object. Thus, when polishing is performed, the fixing member may be brought close to the object and the tip of the polishing body may be brought into contact with the surface of the object. When polishing is not performed, for example, after the polishing is finished or when the object to be polished is replaced, the fixing member may be separated from the object, and the tip of the polishing body may be separated from the surface of the object. Therefore, it is possible to reliably set the polishing body with respect to the object.

  Further, if necessary, the moving means includes a support unit that allows the table to move relative to the base and a drive unit that moves the table relative to the base. The support portion allows the table to freely move back and forth and from side to side with respect to the plane of the base, and can easily move the object relative to the polishing body. In addition, when the drive unit is configured by an electric motor, control becomes easy.

  According to the present invention, the trajectory of the tip of the abrasive body draws a figure 8 when viewed from the plane, and the intersection of the figure 8 contacts the surface of the object, that is, the trajectory of the tip of the abrasive body draws a cross. By contacting the surface of the object and moving the polishing body relative to the surface of the object, the cross-hatch is continuously applied to the surface of the object to perform polishing. Therefore, since the surface of the object is polished at the intersection of the figure 8, the streaks or the like are hardly left on the surface of the object, and the surface of the object can be made a good finished surface. Further, since the surface of the object is polished at the intersection of the figure 8, the fine polishing can be surely performed on the corners of the recesses.

  Hereinafter, an object polishing method and an object polishing apparatus according to embodiments of the present invention will be described with reference to the accompanying drawings. Since the object polishing method according to the embodiment of the present invention is realized by the object polishing apparatus of the present invention, it will be described in the operation of the object polishing apparatus of the present invention.

  1 to 10 show an object polishing apparatus S according to an embodiment of the present invention. The basic configuration of the polishing apparatus S includes a base 10, a table 20, a stand 30, a polishing body 40, a holder 50, a vibrating means 60, a control means 70, and a moving means 80. . In the present embodiment, the object 1 to be polished is a rectangular mold as shown in FIGS. 1 and 2, and a rectangular recess 3 is provided on the surface 2 thereof.

The base 10 is formed in a rectangular shape as shown in FIGS. 1 and 10.
As shown in FIGS. 1 and 10, the table 20 is formed in the same shape as the base 10, and is provided on the top of the base 10 so as to be movable on the XsYs plane in FIG. 1. The object 1 is placed on the upper surface 21 of the table 20. In the embodiment, a columnar installation table 22 is provided on the upper surface 21 of the table 20, and the object 1 is installed on the installation table 22.

  As shown in FIG. 1, the stand 30 is provided to extend perpendicularly to the plane of the base 10 (in the Zs axis direction in FIG. 1). The stand 30 is provided with a holder 50 and a polishing body 40 via a fixing member 31. As shown in FIGS. 1 and 4, the fixing member 31 is provided to be movable relative to the stand 30 in the Zs-axis direction so that the polishing body 40 can be moved closer to and away from the object 1. This movement in the Zs-axis direction may be automated by a mechanism similar to the moving means 80 described later.

  As shown in FIGS. 1, 3, 4, and 9, the polishing body 40 comes into contact with the surface 2 of the object 1 and polishes the recess 3. The polishing body 40 is formed in a prismatic shape and has a flat tip 41. It is formed in a rectangle. Abrasive grains 43 are provided on the tip 41 and the side surface 42 of the polishing body 40. Note that polishing may be performed by supplying abrasive grains 43 from the outside.

  As shown in FIGS. 1, 4 to 6, the holder 50 holds the polishing body 40, and one end surface side 51 facing the object 1 is formed in a truncated cone shape, and the center axis 52 Is provided with a mounting portion 53 for mounting the polishing body 40. In the embodiment, the attachment portion 53 is configured by a collet chuck, and is provided so that the central axis 52 of the holder 50 and the central axis 44 of the polishing body 40 are coaxial. In the embodiment, as shown in FIG. 1, the holder 50 is supported by the stand 30 via the fixing member 31 so that the direction of the central axis 52 is along the Zs axis direction of the base 10. Furthermore, the other end surface side 54 of the holder 50 has a top surface formed in a hexagonal shape and a truncated pyramid shape.

As shown in FIGS. 1, 4 to 6, and 9, the vibrating means 60 vibrates the polishing body 40 through a holder 50, and includes a piezoelectric actuator 61. The piezoelectric actuator 61 has one end 62 fixed to the protruding portion 55 of the fixing member 31 and the other end 63 fixed to the pyramid surface 56 on the other end surface side 54 of the holder 50. In the embodiment, three piezoelectric actuators 61 are provided, are arranged symmetrically with an equiangular relationship around the central axis 52 of the holder 50, and the axis 64 extends from the holder 50 toward the fixing member 31. Is provided. For example, as shown in FIG. 9, the piezoelectric actuator 61 is provided such that the plane formed by one end 62 of each piezoelectric actuator 61 is a bottom surface, and the angle φ of the axis 64 of the piezoelectric actuator 61 with respect to the bottom surface is 45 °. It has been. Further, the polishing body 40 is fixed so that the tip 41 is positioned at the apex of the triangular pyramid formed by the axis 64 of the piezoelectric actuator 61.
Examples of the piezoelectric actuator 61 include, for example, ASB510C801NP0 (total length: about 78.4 mm, recommended drive voltage DC100V) manufactured by NEC TOKIN.

  In addition, coil springs 65 corresponding to the respective piezoelectric actuators 61 are provided in the vicinity of the piezoelectric actuators 61. As shown in FIGS. 1 and 4, each coil spring 65 has one end 66 fixed to the holder 50 and the other end 67 fixed to the holder 50 so as to pull the holder 50 in the direction of the axis 64 of the corresponding piezoelectric actuator 61. It is fixed to the projecting portion 55 of the fixing member 31.

The control means 70 controls the vibration means 60 so that the trajectory of the tip 41 of the polishing body 40 draws a Lissajous figure as shown in FIGS. 1, 7 to 9, for example, as shown in FIG. When the XYZ orthogonal coordinate system is used for the three piezoelectric actuators 61a, 61b, 61c, the trajectory (D _X , D _Y , D _Z ) of the tip 41 of the polishing body 40 satisfies the following formula. . ω is the angular velocity and t is time.

  That is, as shown in FIG. 7A, the control means 70 has a figure 8 shape when viewed from the plane, and the intersection of the figure 8 when viewed from the front is the object as shown in FIG. 7B. As shown in FIG. 7C, it has a function of controlling the vibration means 60 so as to be substantially elliptical when viewed from the side. In the embodiment, the front surface (FIG. 7B) is set according to the XsZs plane of the base 10 shown in FIG. Further, as shown in FIG. 8, this control means 70 will be described later so that the relative movement direction of the polishing body 40 is the front-rear direction (Ys axis direction in FIG. 1) when viewed from the front (FIG. 7B). A function of controlling the moving means 80 is provided.

Next, the theory of control by the control means 70 will be described in detail. As shown in FIG. 9, the three piezoelectric actuators 61a, 61b, 61c will be described using an XYZ orthogonal coordinate system.
The position of the tip 41 of the polishing body 40 when the lengths of the three piezoelectric actuators 61a, 61b, 61c are neutral is defined as the origin (0, 0, 0) of the XYZ orthogonal coordinate system. The piezoelectric actuator 61a and the piezoelectric actuator 61b are symmetric with respect to the YZ plane, and the central axis of the piezoelectric actuator 61c is on the YZ plane. If the expansion / contraction amounts of the piezoelectric actuators 61a, 61b, 61c are δ _A , δ _B , δ _C and the coordinates of the tip 41 of the polishing body 40 are (D _X , D _Y , D _Z ), the piezoelectric actuators 61 will be described. When the plane formed by the one end 62 of the first electrode 62 is the bottom surface and the angle φ of the axis 64 of the piezoelectric actuator 61 with respect to the bottom surface is 45 °, the following mathematical relationship is approximately established.

Next, δ _A , δ _B , and δ _C when an 8-shaped three-dimensional vibration is applied to the tip 41 of the polishing body 40 will be described. The basic vibration form of the figure-shaped three-dimensional vibration is (D _X , D _Y , D _Z ) = (Osin ωt, Nsin 2ωt, −K cos 2ωt). ω is the angular velocity and t is time. O, N, and K are positive constants. If this basic vibration form is to be rotated around the X axis by an angle α, an angle β around the Y axis, and an angle γ around the Z axis, δ _A , δ _B , and δ _C can be given by the following equations: good.

  As shown in FIGS. 1 and 10, the moving means 80 allows the polishing body 40 to move relative to the surface 2 of the object 1. 1 includes a support portion 81 that can move on the XsYs plane, and a drive portion 90 that moves the table 20 relative to the base 10.

  As shown in FIGS. 1 and 10, the support portion 81 is formed in the same shape as the base 10 and the table 20, and is provided between the base 10 and the table 20. A first rail 83 that moves in one direction with respect to the base 10 via a moving body (not shown), and the table 20 orthogonal to the one direction with respect to the base member 82 via a rolling element (not shown). And a second rail 84 that is moved in the other direction.

As shown in FIGS. 1 and 10, the drive unit 90 includes a first drive unit 90 a provided between the base 10 and the base member 82, and a second drive provided between the table 20 and the base member 82. Part 90b.
The first drive unit 90a is fixed to the lower surface of the base member 82 and moves on the upper surface of the base 10 in a direction parallel to the first rail 83. The male screw 92 moves the first moving member 91a. The first rod-shaped body 93a having the first rod-shaped body 93a and the first prime mover 94a that rotates the first rod-shaped body 93a about the axis thereof as a rotation axis. The first moving member 91a is provided with a female screw 95 at a substantially central portion thereof, and is formed so that the female screw 95 and the first rod-shaped body 93a are screwed together.
The second drive unit 90b includes a second moving member 91b that is fixed to the lower surface of the table 20 and moves on the upper surface of the base member 82 in a direction parallel to the second rail 84, and a male screw 92 that moves the second moving member 91b. The second rod-shaped body 93b is provided, and a second driving portion 94b that rotates the second rod-shaped body 93b about the axis thereof as a rotation axis. The second moving member 91b is provided with a female screw 95 at a substantially central portion thereof, and is formed such that the female screw 95 and the second rod-shaped body 93b are screwed together.

  Therefore, when the object 1 is polished using the object polishing apparatus S according to this embodiment, the following is performed. First, the object 1 to be polished is installed on the installation table 22 provided on the upper surface 21 of the table 20. Further, the polishing body 40 is attached to the attachment portion 53 of the holder 50. Since the collet chuck which is the attachment portion 53 is opened, the polishing body 40 is inserted, and then the collet chuck is closed, the attachment can be performed relatively easily.

  Next, the fixing member 31 is moved relative to the stand 30 to a position where the tip 41 of the polishing body 40 contacts the surface 2 of the object 1. At this time, the position of the object is finely adjusted so that the tip 41 of the polishing body 40 and the recess 3 provided on the surface 2 of the object 1 are in contact with each other. Since the collet chuck is provided on the central axis 52 of the holder 50, the collet chuck can be mounted so that the central axis 52 of the holder 50 and the central axis 44 of the polishing body 40 are coaxial. It becomes easy to make it contact the location which 1 grind | polishes. When the tip 41 of the polishing body 40 is brought into contact with the location to be polished, polishing is started.

  First, voltages are applied to the three piezoelectric actuators 61. The piezoelectric actuator 61 to which the voltage is applied converts electrical energy into mechanical energy, and expands and contracts to vibrate. Since one end 62 of the piezoelectric actuator 61 is fixed to the fixing member 31, the holder 50 connected to the other end 63 vibrates. Further, a coil spring 65 provided corresponding to each piezoelectric actuator 61 can apply a preload to the other end 63 of the piezoelectric actuator 61 and can maintain a substantially constant preload amount during polishing.

  When the holder 50 vibrates, the polishing body 40 attached to the holder 50 also vibrates, and the recess 3 of the object 1 is polished by the abrasive grains 43 provided on the tip 41 and the side surface 42 of the polishing body 40. . At this time, the expansion and contraction of the piezoelectric actuator 61 is controlled by the control means 70, and the trajectory of the tip 41 of the polishing body 40 has an 8-shaped shape when viewed from the plane, and the intersection of the 8-shaped shapes when viewed from the front. It becomes a U-shape which becomes the vertex which contacts an object. Therefore, when polishing, the orbit of the tip 41 of the polishing body 40 comes into contact with the surface 2 of the object 1 so as to draw a cross, and the surface of the object is polished at the intersection (cross) of FIG. It is difficult for streaks or the like to remain on the surface of the object, and the surface of the object can be made into a good finished surface.

  Then, the polishing body 40 is moved. In this case, for example, the polishing body 40 is first moved in the forward direction with respect to the surface 2 of the object 1, for example, when viewed from the front (FIG. 7B). Specifically, the first drive unit 90a is driven to move the table 20 in one direction (the Ys axis direction in FIG. 1) with respect to the base 10. The movement of the table 20 first drives the first prime mover 94a. When the first prime mover 94a is driven, the first rod 93a rotates with its axis as the rotation axis. As a result, the first moving member 91a through which the first rod 93a is screwed is moved on the upper surface of the base 10 in the direction parallel to the first rail 83 by the pitch of the male screw 92. The wheel rotates on the first rail 83 and the base member 82 moves. Since the first moving member 91a is fixed to the base member 82, the base member 82 moves, and thereby the table 20 moves. By moving the polishing body 40 forward with respect to the surface 2 of the object 1 as viewed from the front, a cross is continuously drawn on the surface 2 of the object 1 with a phase shift as shown in FIG. Therefore, the surface 2 of the object 1 can be made into a good finished surface. Moreover, even if the polishing area is wide compared to the case where the polishing body 40 is moved relative to the surface 2 of the object 1 in the left-right direction when viewed from the front, the cross hatch is regularly and reliably applied to the entire surface of the object. be able to.

  In addition, since the object polishing method of the present invention polishes the surface of the object at the intersection of the figure eight, it can reliably perform fine polishing even at the corners of the recess 3. It becomes like this.

  When polishing in the front-rear direction as viewed from the front surface (FIG. 7B) of the polishing body 40 is completed, the polishing body 40 is placed on the surface 2 of the object 1 to the right when viewed from the front surface (FIG. 7B), for example. Move slightly in the direction. The movement is performed by driving the second drive unit 90b and moving the table 20 in the other direction (Xs axis direction in FIG. 1) perpendicular to one direction with respect to the base member 82. The operation is the same as that of the first drive unit 90a.

  Then, the polishing body 40 is moved backward as viewed from the front (FIG. 7B), and polishing is performed in the same manner as described above. Such reciprocation is repeated to polish the recess 3 provided on the surface 2 of the object 1.

  When the polishing is finished, the fixing member 31 is moved with respect to the stand 30 to a position where the tip 41 of the polishing body 40 is separated from the surface 2 of the object 1. Then, the object to be polished next is set on the upper surface 21 of the table 20, and polishing is performed in the same manner as described above.

  Further, if polishing is performed several times, the accuracy of polishing may be reduced, for example, the amount of abrasive grains 43 may be reduced or the tip 41 of the polishing body 40 may be deformed due to wear. In this case, the polishing body 40 can be removed from the mounting portion 53 of the holder 50 and replaced with a new polishing body 40. The polishing body 40 can be replaced by opening the collet chuck, which is the mounting portion 53, removing the polishing body 40, inserting a new polishing body 40, and then closing the collet chuck. Can do.

Experimental example

  Next, a vibration experiment was performed using the above-described apparatus, and the vibration of the tip 41 of the polishing body 40 was measured. Hereinafter, the vibration form of the tip 41 of the polishing body 40 and the measurement result will be described. This test was performed by independently measuring vibration components in the X-axis, Y-axis, and Z-axis directions using a laser Doppler vibrometer (for example, AT0022 and AT3500 manufactured by Graphtec). A measurement result is obtained by combining each measurement value.

As a first experimental example, (D _X , D _Y , D _Z ) = (Osinωt, Nsin2ωt, −Kcos2ωt) (O = N = K) was given as the target vibration. 11A and 11B show target vibration forms, where FIG. 11A shows an XY plan view, FIG. 11B shows an XZ plan view, and FIG. 11C shows a YZ plan view. FIG. 12 shows the measurement results, (A) shows an XY plan view, (B) shows an XZ plan view, and (C) shows a YZ plan view.
The measurement result was slightly distorted compared to the target vibration form, but the result was almost the same as the target vibration form. It is considered that the distortion of the vibration form is caused by the hysteresis of the piezoelectric actuator.

As a second experimental example, the above vibration form was rotated by 39.2 ° around the X axis, −24.1 ° around the Y axis, and −63.4 ° around the Z axis to obtain a target vibration. 13A and 13B show the target vibration form, where FIG. 13A shows an XY plan view, FIG. 13B shows an XZ plan view, and FIG. 13C shows a YZ plan view. FIG. 14 shows the measurement results, (A) shows an XY plan view, (B) shows an XZ plan view, and (C) shows a YZ plan view.
The measurement result was slightly distorted compared to the target vibration form, but the result was almost the same as the target vibration form.

In the above-described embodiment, the base 10, the table 20, and the base member 82 are formed in a rectangular shape. However, the shape is not necessarily limited to this, and any shape may be used and may be appropriately changed.
Moreover, in the said embodiment, although the grinding | polishing body 40 was formed in prismatic shape, it is not necessarily limited to this, What kind of shape may be sufficient and can change suitably.
Furthermore, in the said embodiment, although the holder 50 was made into the above-mentioned shape, it is not necessarily limited to this, Any shape may be sufficient and can change suitably.
Furthermore, in the above-described embodiment, the mounting portion 53 is configured by a collet chuck, but the present invention is not necessarily limited to this, and it is only necessary that the polishing body can be mounted and may be appropriately changed.

In the above-described embodiment, the vibration means 60 is constituted by the piezoelectric actuator 61. However, the vibration means 60 is not necessarily limited to this, and may be anything that can be controlled by the control means and can vibrate. There is no problem.
In the above embodiment, three piezoelectric actuators 61 are provided. However, the present invention is not necessarily limited to this, and any number of piezoelectric actuators 61 may be provided and may be appropriately changed.
Furthermore, in the above-described embodiment, the piezoelectric actuator 61 is arranged as described above. However, the present invention is not necessarily limited to this arrangement, and may be arranged in any manner and may be appropriately changed.
Furthermore, in the above embodiment, the plane formed by the one end 62 of each piezoelectric actuator 61 is the bottom surface, and the angle φ of the axis 64 of the piezoelectric actuator 61 with respect to the bottom surface is 45 °. It is not a thing and may be changed as many times as necessary.

In the above embodiment, the coil spring 65 is provided. However, the present invention is not necessarily limited to this, and any coil can be used as long as a preload is applied, and can be appropriately changed. Moreover, it does not need to provide in particular.
Furthermore, in the above embodiment, the moving unit 80 has the above-described configuration, but the moving unit 80 is not necessarily limited to this. For example, a handy type object or the like may be used as long as the object can be relatively moved. Absent.
Furthermore, in the object polishing method according to the present invention, when the surface 2 of the object 1 is inclined or uneven, the main axis passing through the U-shaped apex and the normal of the surface 2 of the object 1 By matching these, the tip 41 of the polishing body 40 is surely in contact with the surface 2 of the object 1, so that fine polishing can be performed.

1 is a diagram illustrating an object polishing apparatus according to an embodiment of the present invention. It is a figure which shows an example of the object which concerns on embodiment of this invention. It is a figure which shows the polishing body which concerns on embodiment of this invention. It is a figure shown in the state where the piezoelectric actuator concerning an embodiment of the invention was fixed to a holder and a fixing member. It is a front view shown in the state where the piezoelectric actuator concerning an embodiment of the invention was fixed to a holder. It is a top view shown in the state where the piezoelectric actuator concerning an embodiment of the invention was fixed to a holder. The track | orbit of the front-end | tip of the grinding | polishing body which concerns on embodiment of this invention is shown, (A) is a top view, (B) is a front view, (C) is a side view. It is a figure which shows the track | orbit of the front-end | tip of the grinding | polishing body which concerns on embodiment of this invention, and shows the state which moved the grinding | polishing body relative to the front-back direction seeing from the front. It is a figure which shows the control theory of the control means which concerns on embodiment of this invention. It is a disassembled perspective view which shows the moving means which concerns on embodiment of this invention. The target vibration form which concerns on the 1st experiment example of this invention is shown, (A) is a XY top view, (B) is a XZ top view, (C) is a figure which shows a YZ top view. The measurement result which concerns on the 1st experiment example of this invention is shown, (A) is a XY top view, (B) is a XZ top view, (C) is a figure which shows a YZ top view. The target vibration form which concerns on the 2nd experiment example of this invention is shown, (A) is a XY top view, (B) is a XZ top view, (C) is a figure which shows a YZ top view. The measurement result which concerns on the 2nd experiment example of this invention is shown, (A) is a XY top view, (B) is a XZ top view, (C) is a figure which shows a YZ top view. It is a figure which shows an example of the grinding | polishing apparatus of the conventional object.

Explanation of symbols

DESCRIPTION OF SYMBOLS S Polishing apparatus 1 Object 2 Surface 3 Recess 10 Base 20 Table 21 Upper surface 22 Installation stand 30 Stand 31 Fixing member 40 Polishing body 41 Tip 42 Side surface 43 Abrasive grain 44 Center shaft 50 Holder 51 One end surface side 52 Center shaft 53 Attachment part 54 Other end surface side 55 Projection portion 56 Pyramidal surface 60 Vibrating means 61 Piezoelectric actuator 62 One end 63 Other end 64 Axis 65 Coil spring 66 One end 67 Other end 70 Control means 80 Moving means 81 Supporting part 82 Base member 83 First rail 84 First Two-rail 90 drive part 90a first drive part 90b second drive part 91a first moving member 91b second moving member 92 male screw 93a first rod-like body 93b second rod-like body 94a first prime mover 94b second prime mover 95 female screw

Claims (10)

The abrasive body is brought into contact with the surface of the object, and the abrasive body is moved relative to the surface of the object while slightly vibrating so that the trajectory of the tip of the abrasive body draws a Lissajous figure. In a polishing method for an object to be polished,
An object characterized in that a trajectory of the tip of the polishing body has a U-shape when viewed from a plane, and a U-shape in which an intersection point of the 8-shape when viewed from the front is a vertex in contact with the object. Polishing method.   2. The object polishing method according to claim 1, wherein the relative movement direction is a front-rear direction when viewed from the front.   3. A method for polishing an object according to claim 1, wherein a principal axis passing through the apex of the U-shape is matched with a normal of the surface of the object. A base, a table provided on the base on which an object is placed, a stand provided on the base, a polishing body brought into contact with the surface of the object, and a holder supported by the stand and holding the polishing body Vibration means for minutely vibrating the polishing body via the holder, control means for controlling the vibration means so that the trajectory of the tip of the polishing body draws a Lissajous figure, and the polishing body on the surface of the object In an object polishing apparatus comprising a moving means that can move relative to the object,
The control means is arranged so that the trajectory of the tip of the polishing body has an 8-shaped shape when viewed from the plane, and the intersection of the 8-shaped shapes when viewed from the front is a U-shape that is the apex that contacts the object. An object polishing apparatus comprising a function of controlling the vibration means.   5. The object polishing apparatus according to claim 4, wherein the control means has a function of controlling the movement means so that the relative movement direction is a front-rear direction when viewed from the front.   6. The object polishing apparatus according to claim 4, wherein the vibration means is composed of a plurality of piezoelectric actuators having one end fixed to a fixing member provided on a stand and the other end fixed to the holder.   An attachment portion for attaching the polishing body is provided on one end face of the holder facing the object side so that the central axis of the holder and the central axis of the polishing body are coaxial, and the piezoelectric actuator is attached to the holder. Three or more are provided on the other end surface side, each piezoelectric actuator is arranged symmetrically with an equiangular relationship about the central axis of the holder, a coil spring is provided corresponding to each piezoelectric actuator, and each of the coil springs corresponds to the corresponding piezoelectric spring. 7. The object polishing apparatus according to claim 6, wherein one end is fixed to the holder and the other end is fixed to the fixing member so as to pull the holder in the axial direction of the actuator.   8. The object polishing apparatus according to claim 7, wherein each of the piezoelectric actuators is provided such that an axis thereof is expanded from the holder toward the fixing member.   9. The object polishing apparatus according to claim 4, wherein the fixing member is movable with respect to the stand so that the polishing body held by the holder can be moved toward and away from the object.   10. The moving means according to any one of claims 4 to 9, wherein the moving means includes a support portion that allows the table to move relative to the base, and a drive portion that moves the table relative to the base. The object polishing apparatus as described.

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