JP2009100076A - 圧電振動片 - Google Patents
圧電振動片 Download PDFInfo
- Publication number
- JP2009100076A JP2009100076A JP2007267478A JP2007267478A JP2009100076A JP 2009100076 A JP2009100076 A JP 2009100076A JP 2007267478 A JP2007267478 A JP 2007267478A JP 2007267478 A JP2007267478 A JP 2007267478A JP 2009100076 A JP2009100076 A JP 2009100076A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- lower electrode
- piezoelectric thin
- piezoelectric
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000010409 thin film Substances 0.000 claims abstract description 115
- 239000010453 quartz Substances 0.000 claims abstract description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 15
- 230000010287 polarization Effects 0.000 claims description 20
- 239000000463 material Substances 0.000 claims description 13
- 238000005452 bending Methods 0.000 claims description 10
- 239000010408 film Substances 0.000 abstract description 4
- 235000014676 Phragmites communis Nutrition 0.000 abstract 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 239000013013 elastic material Substances 0.000 description 6
- 230000005684 electric field Effects 0.000 description 5
- 230000005284 excitation Effects 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 239000011787 zinc oxide Substances 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910000942 Elinvar Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
Images
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007267478A JP2009100076A (ja) | 2007-10-15 | 2007-10-15 | 圧電振動片 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007267478A JP2009100076A (ja) | 2007-10-15 | 2007-10-15 | 圧電振動片 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009100076A true JP2009100076A (ja) | 2009-05-07 |
| JP2009100076A5 JP2009100076A5 (enExample) | 2010-10-28 |
Family
ID=40702697
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007267478A Withdrawn JP2009100076A (ja) | 2007-10-15 | 2007-10-15 | 圧電振動片 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2009100076A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013178179A (ja) * | 2012-02-28 | 2013-09-09 | Seiko Epson Corp | センサー素子、センサーデバイスおよび電子機器 |
| JPWO2015111503A1 (ja) * | 2014-01-24 | 2017-03-23 | 株式会社村田製作所 | 圧電振動子及び圧電振動装置 |
| US11538981B2 (en) | 2019-06-26 | 2022-12-27 | Seiko Epson Corporation | Vibration element, electronic apparatus, and vehicle |
-
2007
- 2007-10-15 JP JP2007267478A patent/JP2009100076A/ja not_active Withdrawn
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013178179A (ja) * | 2012-02-28 | 2013-09-09 | Seiko Epson Corp | センサー素子、センサーデバイスおよび電子機器 |
| CN103292797A (zh) * | 2012-02-28 | 2013-09-11 | 精工爱普生株式会社 | 传感器元件、传感器器件以及电子设备 |
| JPWO2015111503A1 (ja) * | 2014-01-24 | 2017-03-23 | 株式会社村田製作所 | 圧電振動子及び圧電振動装置 |
| US11538981B2 (en) | 2019-06-26 | 2022-12-27 | Seiko Epson Corporation | Vibration element, electronic apparatus, and vehicle |
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| A521 | Request for written amendment filed |
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| A761 | Written withdrawal of application |
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