JP2009088375A - Tape carrier holding device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a tape carrier holding device for reliably executing the appearance inspection of a wiring pattern formed in a tape carrier for mounting an electronic component. <P>SOLUTION: The tape carrier holding device includes: a conveying means for conveying a tape carrier 7 with an inspected face turned up; image pickup means 15 and 25 for irradiating the inspected face with the rays of light; and a sucking stage 24 formed so as to be freely elevated with an absorption face on the upper face. When the tape carrier 7 is conveyed by the conveying means, the absorption stage 24 is positioned to the lower part where it is not brought into contact with the tape carrier 7, and when the conveyance is stopped, and image pickup is performed by the image pickup means 15 and 25, the suction stage 24 is moved upward, and the upper face is brought into contact with the lower face of the tape carrier 7 so that the tape carrier can be absorbed and held. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a tape carrier pattern inspection apparatus used in, for example, a TAB (Tape Automated Bonding) method, and to a tape carrier holding apparatus.

  2. Description of the Related Art Conventionally, integrated circuit production methods such as TCP (Tape Carrier Package) and COP (Chip On Film), in which an IC chip is mounted on a long tape based on a resin film and external terminals are provided, have been widely used. Yes. This tape is referred to as a tape carrier, and generally, the following process is performed to manufacture such a tape carrier.

First, after punching a polyimide film to be an insulating base material into a desired shape, a copper foil is stuck via an adhesive. Next, a photoresist is coated on the copper foil, exposed and developed using a photomask, and a wiring pattern is formed by etching. And in order to protect between wiring and wiring, a soldering resist is printed except for the part used as a connection terminal among wiring patterns. Next, after the solder resist is dried and cured, a desired plating process such as tin plating or gold plating is performed on the exposed connection terminal portion.

  As described above, even in the process before the IC chip is mounted on the tape carrier, a hot air blowing process using a drying device is required in some processes for drying and heat coagulation after the process. When the heat treatment is performed in this way, as described above, the tape carrier mainly composed of the insulating base material and the copper foil is warped due to the difference in thermal expansion coefficient between the two. This warp generally becomes a warp in the width direction of the tape carrier 51 as shown in FIG. 9, and this warp has been a problem in a conventional apparatus for optically inspecting a defect in a wiring pattern.

In addition, the following phenomenon is another phenomenon. Generally, the tape carrier 51 is wound around a reel and handled. However, when only the tape carrier 51 is wound around the reel, the front and back surfaces of the tape carrier 51 come into contact with each other and scratches occur. Spacer tape, which is approximately the same as the outer dimensions, is layered and wound around a reel. Furthermore, the shape of this spacer tape is not simply a flat surface but is often used in which both ends in the width direction are formed in a wave shape as shown in FIG. 10, and such a spacer tape 53 and a tape carrier 51 are overlapped. By winding around the reel 52, a gap can be provided between the tape carriers 51 as shown in FIG.

  By adopting such a configuration, in addition to the surfaces of the tape carriers 51 not contacting each other, contact with the spacer tape 53 can be prevented in the region where the wiring pattern of the tape carrier 51 is formed. Furthermore, since there is a gap between the tape carriers 51, when performing the hot air drying or the hot air heating as described above, as shown in FIG. It becomes possible to blow warm air.

  However, the tape carrier 51 heated in the state shown in FIG. 11 has a phenomenon in which the wavy portions of the spacer tape 53 are transferred, and the tape carrier 51 itself has both ends in the width direction. Corrugated deformation occurs. In addition, as shown in FIG. 11A, this corrugation is random in the positional relationship of the corrugated portions of the spacer tape 53 that presses the front and back of the tape carrier 51. Irregular corrugated deformation occurs. Therefore, this irregular deformation also influences the warp in the width direction of the tape carrier 51 described above, which makes it more difficult to keep the tape carrier flat, which is a big problem in the optical wiring pattern inspection apparatus. It has become.

  In order to solve the above-described problems, one of the methods has been conventionally used. As disclosed in Patent Document 1, the line sensor 70 as an imaging unit is arranged along the longitudinal direction of the tape carrier 51. The line sensor 70 is scanned in the width direction of the tape carrier 51 in accordance with the warp of the surface to be inspected which is warped in the width direction, that is, the width direction of the tape while moving the line sensor 70 in the direction of the surface to be inspected. (Fig. 12). As another method, as disclosed in Patent Document 2, the both ends of the tape carrier 51 in the width direction are mechanically gripped, and the carrier tape 51 is pulled in the width direction to thereby warp the carrier tape 51. That's what it does (Figure 13).

FIG. 13 is a view of a cross section of the tape carrier 51 as viewed from the transport direction of the tape carrier 51. Here, the tape retainer 54 moves in the direction of arrow A to grip both ends of the tape carrier 51 in the width direction, and then the actuator 55 is driven to move the column 56 in the direction of arrow A to move the tape carrier 51. It is to make it flat. Since both ends in the width direction of the tape carrier 51 are band-like regions where sprocket holes are formed and wiring patterns are not formed, this method is used.

  As another method, Patent Document 3 discloses that a suction stage is provided between the gripping mechanisms in addition to a gripping mechanism that grips both ends of the tape carrier 51 in the width direction and pulls the tape in the width direction. It is. FIG. 14 illustrates this method. The operations of the gripping mechanism 57 for gripping both ends of the tape carrier 51 in the width direction and the drive mechanism 58 for pulling the tape in the width direction are the same as those described above based on FIG. A suction stage 59 is provided between the holding mechanisms 57. A vacuum suction hole or groove 60 is formed on the upper surface of the suction stage 59 and sucks the tape carrier 51 in a state where the transport is stopped for inspection.

In the case of Patent Document 3, an imaging unit is provided above the tape carrier 51, and illumination is provided on both the upper and lower sides so that transmitted light of illumination from below can be imaged in addition to reflected light of illumination from above. Therefore, two suction stages 59 are formed in the width direction of the tape carrier 51, and two of them are prepared in the front-rear direction as viewed in FIG. It is assumed that inspection is performed in an area where 59 does not exist.

JP 2002-372503 A (2nd page, FIG. 2, FIG. 3) JP 2004-28597 A (5th page, FIG. 3, FIG. 5) JP 2006-17642 A (Page 6, FIGS. 1 and 5)

  However, the method described in Patent Document 1 described with reference to FIG. 12 detects the warp depth of the tape carrier 51 by the first scanning, and the line sensor 70 is in line with the warp based on this data. Scanning with movement, the disadvantage that the inspection time becomes longer by scanning one area twice, and moving the sensor in the width direction of the tape while moving the sensor in the direction perpendicular to the surface to be inspected, that is, A large-scale mechanism for scanning with a curvilinear operation must be provided, and the apparatus becomes expensive and large-scale. It is also conceivable that a distance measuring sensor for detecting the distance between the line sensor 70 and the surface to be inspected is provided in the vicinity of the line sensor 70 so that the operation along the warp of the tape is performed in one scan. However, a similar or larger mechanism must be provided, and the apparatus becomes expensive and large-scale.

  Further, the method described in Patent Document 2 described based on FIG. 13 is a multi-row product that has been widely used in recent years, that is, as shown in FIG. 15, a plurality of rows of pieces to be inspected are arranged in the width direction of the carrier tape. When inspecting the arranged wide tape (in the figure, four strips in which four rows of pieces to be inspected are arranged), many tapes having a width of about 160 mm are used, so both ends of the tape in the width direction are pulled. It has become difficult to keep the entire surface to be inspected within the range of the focal depth of the imaging unit.

The wide tape will be described with reference to FIG. 15. First, a large square represents the inspected piece 61, which is provided in four rows, that is, four rows in the tape transport direction. Further, small squares indicated by reference numeral 62 are perforation holes, and are arranged on both sides of the inspected piece 61. Small squares arranged at both ends of the tape in the width direction are perforation holes 63 for transporting and positioning the entire four-line tape carrier. Therefore, such a wide tape often exhibits a phenomenon in which each of the four rows of the inspected pieces arranged in the four strips is bent in a tendency like a single strip product.

  Further, when there is an irregular deformation at both ends in the width direction of the tape carrier caused by the corrugated shape of the spacer tape 53 and the heating process described based on FIGS. 10 and 11, the description has been made based on FIG. 13. Since the technology only grips both ends of the tape in the width direction and mechanically corrects it to a flat surface, when the irregular deformation at both ends of the tape is corrected, the repulsive force appears inside the tape carrier. On the contrary, there is a possibility that the region to be inspected is irregularly curved. Therefore, the tape carrier 51 cannot be sufficiently flattened only by mechanically sandwiching both ends in the width direction of the tape carrier 51 and pulling in the width direction.

  Furthermore, although the method described in Patent Document 3 described with reference to FIG. 14 arranges the suction stage 59 between the gripping mechanisms 57, although there is some improvement, the inspection target imaged by the imaging unit Since the piece is not sucked on the suction stage 59, it is difficult to prevent the influence of the bending of each of the plurality of strips of the wide tape and the irregular deformation at both ends of the tape in the width direction. Further, when the inspection apparatus performs inspection only by imaging reflected light without using transmitted light, the suction stage 59 can be disposed immediately below the imaging region, but it has become a thin trend in recent years. When a tape carrier composed of an insulating substrate (thickness of about 20 μm) is sucked by a mechanically perforated suction port or groove, unevenness occurs on the surface to be inspected due to the suction force, which is a high-definition wiring. It greatly adversely affects pattern inspection.

As a first aspect of the present invention, in a pattern inspection apparatus for optically acquiring and inspecting the shape of a wiring pattern formed on a tape carrier for mounting electronic components, the tape carrier is conveyed with the surface to be inspected facing upward. A conveying unit; an imaging unit that irradiates light to the surface to be inspected to acquire the reflected light; and an adsorption stage that has an adsorption surface on an upper surface and that can be moved up and down. The suction stage is positioned below the tape carrier so as not to be in contact with the tape carrier. When the image pickup means stops the conveyance and the imaging means performs imaging, the suction stage moves upward and the upper surface of the suction stage is moved to the tape. Provided is a tape carrier holding device which is brought into contact with the lower surface of the carrier and sucks and holds the tape carrier.

As a second aspect of the present invention, the suction plate constituting the upper surface of the suction stage is made of a porous member, and in the dimension of the suction region on the upper surface, the width dimension of the suction region corresponding to the width direction of the tape carrier. The tape carrier holding device is provided as described in the first aspect, which is larger than the entire width of the tape carrier.

According to a third aspect of the present invention, as a third aspect, a pressing unit is fixed above the tape carrier, and when the suction stage rises to push up the tape carrier, the pressing unit provided in the pressing unit has The tape carrier holding device according to the second aspect of the present invention is in contact with an area including at least a perforation hole of the tape carrier on the suction stage.

Further, according to a fourth aspect of the present invention, there is provided the tape carrier holding device according to the third aspect, wherein the pressing portion is an elastic band-shaped part that is elongated in the transport direction of the tape carrier. To do.

  According to the first aspect of the present invention, since the suction stage is configured to move up and down, the suction stage is retracted downward when the tape carrier is being transported, and the tape carrier is moved for imaging by the camera. When stopped, the suction stage moves upward to suck and hold the tape carrier. Therefore, the holding state of the tape can be switched reliably between the tape transport and the imaging without damaging the lower surface of the tape carrier, and at the same time, there is no movable part for holding the tape above the tape carrier. It is easy to configure the image pickup apparatus that moves for scanning by approaching the surface to be inspected above the tape carrier so as not to interfere with the tape pressing mechanism.

  Further, according to the second aspect of the present invention, since both ends in the width direction of the tape carrier are also included in the suction area on the suction stage, the tension in the transport direction of the tape carrier itself and the suction force of the suction stage are simultaneously Acts at both ends in the width direction. Therefore, even if irregular deformation at both ends in the width direction of the tape carrier due to the lap winding with the spacer tape on the reel occurs, it is expected to flatten this to prevent at least affecting the inspection area. it can.

  Further, according to the third aspect of the present invention, since the perforation hole, which is one factor that hinders the suction of the tape carrier by the suction stage, can be blocked, there are a plurality of piece rows in the width direction of the tape, Even if the gaps are lifted up or the both ends of the tape in the width direction are irregularly deformed, the suction force of the suction stage can be reliably applied to these parts, so the inspection area of the tape is more reliable. Can be flattened.

  Furthermore, according to the fourth aspect of the present invention, the area to be pressed of the tape carrier is simultaneously pressed by the elasticity of the pressing section itself and the increase in the adsorption force by closing the perforation hole, thereby reliably ensuring the tape. The carrier can be flattened. In addition, these functions can be realized without providing a drive unit above the tape carrier, that is, it can be configured in a flat and flat shape. Therefore, the image pickup apparatus moves close to the pressing unit and moves in the horizontal direction. Interference can be easily avoided.

  Next, an embodiment of a tape carrier holding device according to the present invention will be described in detail with reference to the accompanying drawings.

  As an embodiment, a tape carrier holding device provided in a pattern appearance inspection device for a tape carrier on which a wiring pattern is formed will be described. First, the overall configuration of this pattern appearance inspection apparatus will be described with reference to FIG. In FIG. 1, reference numeral 1 is an unwinding part, 2 is an inspection part, 3 is a tensioner part, 4 is a punching part, and 5 is a winding part. Here, a control unit that controls the operation of the apparatus and a data processing unit that processes images acquired by the inspection unit and inspects whether or not a wiring pattern has a defect are not shown.

  First, as seen from the left, the unwinding reel 6 is mounted on the unwinding portion 1 from the left, and the unreeling tape carrier 7 and spacer tape 8 are accommodated in the unwinding reel 6. The tape carrier 7 is transported to the inspection unit 2 with the wiring pattern surface facing upward as seen in the figure. On the other hand, the spacer tape 8 is taken up by the spacer take-up reel 9. The tape carrier 7 transported to the inspection unit 2 is transported to an inspection stage 10 which will be described in detail later, and imaging for appearance inspection is performed. Here, intermittent conveyance is performed in which the conveyance of the tape is stopped during the imaging, and the imaging is performed to capture the next inspection area when the imaging is completed.

  Next, the tape carrier 7 that has been imaged is conveyed to the punch unit 4 via the tensioner unit 3. The punch unit 4 is provided with a punch unit 11, which punches a hole to be inspected by the data processing unit determined to be defective based on an image acquired by the inspection stage 10 so as not to flow out to the next process. . Further, the tensioner unit 3 applies a desired tension to the tape carrier 7 in the inspection stage 10 and the punch unit 11 and absorbs a change in the tape length between the inspection unit 2 and the punch unit 4 due to the asynchronousness of conveyance. . The tape carrier 7 that has passed through the punch unit 4 is finally conveyed to the take-up unit 5 and taken up on the take-up reel 12. At this time, the spacer tape 14 unwound from the spacer unwinding reel 13 and the tape carrier 7 are wound in an overlapping state.

  FIG. 2 is a front view showing the configuration in the inspection stage 10 shown in FIG. 1, and shows the first embodiment of the present invention. This figure shows a state before the conveyance of the tape carrier 7 is stopped and imaging by the camera 15 is started. Here, the tape carrier 7 is stopped in a state in which a predetermined tension is applied between the auxiliary rollers 16 and 17. However, since the tape carrier 7 is only in the air between the auxiliary rollers 16 and 17, the surface to be inspected of the tape carrier 7. Is warped in the width direction of the tape, and is not in a state in which effective imaging can be performed for the camera 15 that acquires an image with a resolution in units of microns. In FIG. 2, reference numeral 18 denotes an adsorption plate made of a porous ceramic plate having a large number of pores having a diameter of about 1 μm or less, and most of the area other than the upper surface is covered with an adsorption box 19. An exhaust pipe 20 is connected to the bottom surface of the suction box 19 so that a negative pressure is applied to the suction box 19 by exhaust means (not shown).

  Further, an air cylinder 21 is disposed on the bottom surface of the suction box 19, and the suction box 19 is moved in the vertical direction by driving thereof. Further, the position of the uppermost part of the vertical movement is limited by the contact of the protrusion 22 protruding downward in the L shape from the suction box 19 and the stopper 23 provided adjacent thereto. The stoppers 23 are respectively arranged in the vicinity of the four corners of the suction box 19 having a rectangular shape when viewed from above. By adjusting the micrometers 23A provided in the stopper 23, the suction plates rise together with the suction box 19 and are located at the top. The inclination posture of the upper surface of 18 can be adjusted. In this document, the suction plate 18 and the suction box 19 are collectively referred to as a suction stage 24.

  FIG. 3 shows a state in which the suction stage 24 moves upward for imaging by the camera 15 and is positioned at the top. Here, the tape carrier 7 that is applied with tension between the auxiliary rollers 16 and 17 and is held almost horizontally is set to be lifted upward by several mm by the upper surface of the suction stage 24. When the inside of the suction stage 24 is depressurized through the exhaust pipe 20 by an exhaust means (not shown), suction force is generated in many fine pores on the upper surface of the suction stage 24, and the tape carrier 7 is vacuum-sucked. As a result, warping in the width direction of the tape is forced, and the tape is stuck to the upper surface of the suction stage 24 finished in a flat surface.

  Next, the camera 15 starts imaging. In this embodiment, the camera 15 is a line sensor, and the dome-shaped illumination indicated by reference numeral 25 in FIG. 3 is arranged in the gap between the camera 15 and the imaging target. is there. The dome-shaped illumination 25 irradiates the surface to be inspected with light irregularly reflected inside the hemispherical dome via a light guide 71 that is a bundle of optical fibers from a light source device (not shown). The dome-shaped illumination 25 moves back and forth and right and left integrally with the camera 15, and the line sensor of the camera 15 images the surface to be inspected from the slit 25 </ b> A provided in the dome-shaped illumination 25.

  Here, since a large number of pores provided on the upper surface of the suction stage 24 have a diameter of about 1 μm, the tape carrier 7 is not uneven, and imaging is not adversely affected. Further, it has been taken up as a technical problem that irregular wave-shaped deformation is generated at both ends in the width direction of the tape carrier 7 by the spacer tape 8, but when this is not so large, it is given to the tape carrier. By the tension in the transport direction and the vacuum suction, at least the area to be inspected where the wiring pattern exists can be kept flat, and the imaging of the camera 15 is not adversely affected.

  However, if the irregular tape-shaped deformation is greatly generated at both ends in the width direction of the tape carrier 7 by the spacer tape 8, it is difficult to hold the tape carrier 7 with the configuration of FIG. 3 described so far. Become. Furthermore, even when the tape carrier 7 is a multi-striped wide tape, each of the 1 st and 1 st warps in the width direction of the tape as described above as the technical problem, Cause the phenomenon of rising). These two phenomena occur in the portion where the perforation holes 62 and 63 are present, and it can be seen that one of the causes is that air circulation through the perforation holes hinders vacuum adsorption. FIG. 4 shows the tape carrier in a state where these two phenomena have occurred.

  Next, as a second embodiment, even though the tape carrier is vacuum-sucked on the suction stage 24, the wave shape deformation at both ends in the width direction of the tape affects the flatness of the region to be inspected. A description will be given of a tape carrier holding device in the case where the gap between the two affects the flatness of the inspection area.

  First, in the second embodiment, the suction stage 24 described in the first embodiment and the surrounding configuration are maintained as they are, and a pressing unit 27 shown in a perspective view in FIG. 5 is added. In FIG. 5, the holding unit 27 having four legs 26 has a structure in which almost the entire rigidity is maintained by two first frames 28 and two second frames 29. . Two rollers 30 are rotatably supported between the two first frames 28, and belts 31 and 32 are stretched between the two second frames. The two belts 31 on the outer side in the tape width direction are wider than the three inner belts 32. As will be described in detail later, the belts 31 and 32 serve as pressing portions that directly contact the tape carrier.

  Next, FIG. 6 shows a state in which the pressing unit 27 shown in FIG. 5 is mounted in the inspection stage 10. In FIG. 6, the holding unit 27 is fixed by four legs 26 so as to straddle the suction stage 24. In this figure, only the suction stage 24 is drawn, and peripheral components such as an air cylinder and a camera are not shown. Here, the holding unit 27 is fixed to a base (not shown), and only the suction stage 24 moves up and down. This figure also shows a state where the suction stage 24 is in a lowered position, and the tape carrier 7A, which is a four wide tape, is stopped above the suction stage 24.

  The five large-diameter portions 30A of the two rollers 30 provided in the pressing unit 27 are positioned so as to correspond to the three strips of the tape carrier 7A and both ends in the tape width direction, respectively. The two belts 31 correspond to both ends of the tape in the width direction, and the three belts 32 are positioned to correspond to the gaps. These belts 31 and 32 are made of a belt-like elastic body, and in this embodiment, silicon rubber is used as a material. This material is preferably non-breathable or slight.

  Next, the operation of the suction stage 24 and the pressing unit 27 will be described based on the sectional view shown in FIG. FIG. 7 is a front view of the tape carrier 7A and the pressing unit 27 cut along the tape transport direction. FIG. 7A shows a state when the camera 15 is not imaging, and FIG. 7B shows a state when the imaging is being performed. In the state of FIG. 7A, the tape carrier 7A is transported from the left to the right as viewed in the figure and stopped. At this time, since the suction stage 24 is positioned below, there is no contact with the tape 7A. The pressing unit 27 described with reference to FIGS. 5 and 6 is fixed at a position where the large diameter portion 30A of the roller 30 contacts the upper surface of the tape carrier 7A. The large-diameter portion 30A is rotatably contacted between both ends and strips in the width direction of the tape, and the lower end 29A of the second frame 29 is located above the contact point, so that the tape carrier 7A is conveyed. Even if it vibrates up and down when being done, the lower end 29A does not come into contact with the tape carrier 7A to damage the surface to be inspected.

  When the inspection area to be inspected next on the tape carrier 7A has been transported above the suction stage 24, the transport is stopped and the suction stage 24 is raised as shown in FIG. 7B. At this time, since the upper surface of the suction stage 24 is raised to a position where the tape carrier 7A is pushed up by a predetermined amount (several millimeters), the upper surface comes into contact with the belts 31 and 32 when the tape carrier 7A is pushed up. Further, when the suction stage 24 is slightly raised, the belts 31 and 32 are also pushed upward slightly. By this operation, the elastic belts 31 and 32 press the both ends in the width direction of the carrier tape 7A and the stripes toward the upper surface of the suction stage 7A by their own tension and weight, and each presses. Partial perforation holes 62 and 63 are blocked.

  When the suction stage 24 starts suctioning in the state of FIG. 7B, the belts 31 and 32 press the both ends in the width direction of the tape carrier 7A and the gaps toward the upper surface of the suction stage 24. At the same time, since the perforation holes that hinder the adsorption action are closed, the adsorption force of the adsorption stage 24 acting on these pressing parts can also be increased. Therefore, it is possible to reliably flatten the tape carrier 7A and position the entire region to be inspected in the range of the focal depth of the camera 15.

  Further, in the embodiment described so far, the tape carrier 7A that has been an inspection target is a multi-row product in which a plurality of test pieces are arranged in the width direction of the tape, but even when the tape carrier is a single product. By using only 31 of the belts 31 and 32 shown in FIGS. 5 and 6 without using 32, both ends in the width direction of the tape can be pressed against the upper surface of the suction stage 24. Needless to say, there is no difference in the effect of flattening.

  In this case, the same effect can be obtained as a pressing unit as shown in FIG. FIG. 8 is a cross-sectional view of the holding portion of the tape carrier 7B as viewed from the tape transport direction. Here, a pressing unit in which a belt-like elastic member 33 is supported by a leaf spring member 34 is provided in the vicinity of the width direction of the tape carrier 7B. When the suction stage 24 rises from this state, the elastic member 33 presses both ends in the width direction of the tape including the perforation holes toward the upper surface of the suction stage 24.

Front view showing an embodiment of the present invention Front view showing an embodiment of the present invention Front view showing an embodiment of the present invention Perspective view showing the state of the tape carrier The perspective view which shows embodiment of this invention The perspective view which shows embodiment of this invention Sectional drawing which shows embodiment of this invention Sectional drawing which shows embodiment of this invention Perspective view related to the prior art Perspective view related to the prior art Side view related to conventional technology Perspective view showing conventional technology Side view showing conventional technology Side view showing conventional technology Perspective view related to the prior art

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Unwinding part 2 Inspection | inspection part 3 Tensioner part 4 Punch part 5 Winding part 6 Unwinding reel 7 Tape carrier 8, 14 Spacer tape 9 Spacer take-up reel 10 Inspection stage 11 Punch unit 12 Take-up reel 13 Spacer unwinding reel 15 Camera 16, 17 Auxiliary roller 18 Suction plate 19 Suction box 20 Exhaust pipe 21 Air cylinder 22 Protrusion 23 Stopper 24 Suction stage 25 Dome type illumination

Claims (4)

In a pattern inspection apparatus for optically acquiring and inspecting the shape of a wiring pattern formed on a tape carrier for mounting electronic components, a conveying means for conveying the tape carrier with the surface to be inspected facing upward, and light on the surface to be inspected And a suction stage that has a suction surface on the upper surface and is provided so as to be movable up and down.When the transport means transports the tape carrier, the suction stage is When the image pickup means is located at a lower position not in contact with the tape carrier and the conveyance is stopped, the suction stage is moved upward to bring the upper surface into contact with the lower surface of the tape carrier. A holding device for a tape carrier, which holds the carrier by suction. The suction plate constituting the upper surface of the suction stage is made of a porous member, and the width dimension of the suction region corresponding to the width direction of the tape carrier is larger than the entire width of the tape carrier in the dimension of the suction region on the upper surface. The tape carrier holding device according to claim 1. A holding unit is fixed above the tape carrier, and when the suction stage rises and pushes up the tape carrier, the holding unit provided on the holding unit has the holding unit on the suction stage. The tape carrier holding device according to claim 2, wherein the tape carrier is in contact with a region including at least a perforation hole. 4. The tape carrier holding device according to claim 3, wherein the pressing portion is elastic and is a strip-like component elongated in the transport direction of the tape carrier.

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