JP2009088181A - Sheet type electrolytic capacitor and manufacturing method thereof - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sheet type electrolytic capacitor which is thin and has high electrostatic capacity density and improved connection strength, and to provide a manufacturing method thereof. <P>SOLUTION: The sheet type electrolytic capacitor is configured by: bonding a smooth surface of a valve metal sheet body 12 on a resin sheet 11; forming a valve metal roughening layer 13 on a surface opposite to the valve metal sheet body 12 except at a partial unroughened part; forming a valve metal oxide film1 14 and a solid electrolytic layer 15 in order on the valve metal roughening layer 13; and forming a resin layer 17 covering the whole valve metal sheet body 12, wherein the solid electrolytic layer 15 and the unroughened part on the valve metal roughening layer surface of the valve metal sheet body 12 are led out to the same surface through a resin opening portion and the respective lead-out electrodes are connected to terminal electrodes 20A and 20B which are provided at both ends of the capacitor, have concave and curved surfaces with metallized internal surfaces, and are electrically insulated from the valve metal sheet body 12. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a sheet electrolytic capacitor which is thin and has a high capacitance density, and which has improved connection reliability, and a manufacturing method thereof.

  The decoupling capacitor is a capacitor used to compensate for a temporary drop in power supply voltage when the CPU switch is turned ON / OFF. In recent years, since the CPU operates at high speed, it is necessary to supply electric charge to the CPU as soon as possible from a decoupling capacitor mounted near the CPU. In order to supply charges at high speed in the high frequency region, it is necessary to reduce the inductive component. The inductive component is the sum of the parasitic inductance of the decoupling capacitor and the wiring inductance with the power source and ground terminal of the CPU. Therefore, it is necessary to reduce both inductance components as much as possible. At the same time, since the power consumption of the CPU is increasing, it is necessary to increase the charge supply amount, that is, the capacitance as much as possible.

  One of the effective means for satisfying such a requirement is a technology for incorporating a capacitor having a capacity as high as possible into the circuit board and the interposer board so that the wiring inductance between the CPU and the decoupling capacitor is minimized. . It is also effective to mount a high-capacitance capacitor excellent in high-speed response close to the CPU.

  As a capacitor that satisfies these requirements, an electrolytic capacitor having a high capacitance density is promising. Regarding the component built-in technology using an electrolytic capacitor, for example, in Patent Document 1, a dielectric layer, an electrolyte layer, and a conductor layer are sequentially formed on both sides of a plate-like anode body, and a cathode terminal is provided via each conductor layer. There is disclosed a solid electrolytic capacitor in which a printed circuit board having a wiring pattern on both sides of the capacitor element is bonded with a resin layer.

  Regarding an electrolytic capacitor with excellent high-speed response, for example, in Patent Document 2, there is an anode body provided with a plurality of through holes in the thickness direction and a lead portion formed inside the through hole, and the exposed portion of the lead portion A solid electrolytic capacitor is disclosed in which the anode terminal and the cathode terminal are alternately arranged in the same plane, where is the anode terminal and the exposed portion of the cathode is the cathode terminal.

  Patent Document 3 discloses a solid electrolytic capacitor in which a dielectric film is formed on the surface of a valve metal porous foil, and a solid electrolyte layer and a current collector layer are formed on the dielectric film. A small-sized and large-capacity solid electrolytic capacitor having an excellent high-frequency response and a low equivalent series resistance (ESR) has been disclosed.

  On the other hand, Patent Document 4 is characterized in that, although not an electrolytic capacitor, electrodes are provided at four corners, and a conductive plate for forming a capacitor is connected to each electrode pair, so that a plurality of capacitors are accommodated in one chip. A composite chip capacitor is disclosed.

JP 2006-147606 A Japanese Patent Laid-Open No. 2002-237431 Japanese Patent Laid-Open No. 2005-45007 Japanese Utility Model Publication No. 63-157919

  If an attempt is made to use the sheet-shaped electrolytic capacitor described in Patent Document 1 in order to make the sheet-shaped electrolytic capacitor thin, the technique described in Patent Document 1 has a structure in which electrodes are drawn from the upper and lower surfaces of the sheet to provide pads. So there is a problem that it becomes thicker. Further, in order to provide the anode and cathode lead electrode pads on one surface of the sheet-like electrolytic capacitor, it is necessary to draw the anode drawn on the back surface to the front surface through the through vias, which increases the number of manufacturing steps.

  Even in the solid electrolytic capacitor described in Patent Document 2, the outer peripheral portion is molded with an epoxy resin or the like, so that the thickness of the parts is increased, and the anode foil is provided with a through-hole, thereby increasing the number of manufacturing processes and increasing the cost. There is sex.

  Similarly, the solid electrolytic capacitor described in Patent Document 3 also has a problem that the outer electrode is formed on the end face after being molded with an epoxy resin or the like, and the part becomes thick.

  Further, when the sheet electrolytic capacitor is thinned, when the capacitor is mounted on the substrate, the contact area of the solder is reduced, so that the connection strength between the capacitor and the substrate is lowered. Further, when the capacitor becomes thinner, there arises a new problem that it becomes difficult to mount the capacitor on the substrate using the mounter because the strength of the capacitor itself is lowered.

  On the other hand, in the solid electrolytic capacitor described in Patent Document 3, since the external electrode formed on the end face is formed flat and perpendicular to the bottom surface of the capacitor, the connection strength between the capacitor and the substrate is particularly high. The idea to do is not added.

  On the other hand, in the technique described in Patent Document 4, since terminal electrodes having concave shapes at the four corners and curved inner surfaces are formed, the connection strength between the capacitor and the substrate can be increased to some extent. However, if the contact area of the solder is reduced by making the capacitor thinner, further improvement in connection strength is required. In addition, since the technique described in Patent Document 4 is a capacitor characterized by combining multilayer ceramic capacitors, it is considered that the minimum thickness of multilayer ceramic capacitors currently on the market is 0.2 mm. Then, it is considered difficult to thin the capacitor to 0.2 mm or less.

  In view of the above problems, an object of the present invention is to provide a sheet electrolytic capacitor that is thin and has a high capacitance density and has improved connection strength, and a method for manufacturing the same.

  In one aspect of the present invention, a smooth surface of a valve metal sheet body is bonded on a resin sheet, and a valve metal roughened layer is formed on the opposite surface of the valve metal sheet body except for some non-roughened portions. A sheet-like electrolytic capacitor having a structure in which a valve metal oxide film and a solid electrolyte layer are sequentially formed on the roughened valve metal layer, and a resin layer is formed on the valve metal sheet body so as to cover the entire valve metal sheet body The solid electrolyte layer and the non-roughened portion on the roughened layer surface of the valve metal sheet body are electrically drawn out to the same surface through a resin opening, and each lead electrode is connected to both ends of the capacitor. It has a structure in which it is a concave shape provided in the part and is a curved surface whose inner surface is metallized and connected to a terminal electrode which is electrically insulated from the valve metal sheet body.

  The terminal electrodes may be provided at the four corners of the sheet-like electrolytic capacitor.

  Two or more terminal electrodes may be provided on each of the two side surfaces of the sheet-like electrolytic capacitor.

  The curved surface of the terminal electrode is preferably formed non-perpendicular to the bottom surface of the sheet-like electrolytic capacitor.

  The metallized curved surface of the terminal electrode is preferably formed of gold or solder plating.

  Moreover, it is preferable that the resin layer which covers the whole said valve metal sheet body is a resin layer formed by the coating method.

  Furthermore, it is preferable that the resin covering the entire valve metal sheet body is a photosensitive resin.

  Furthermore, it is preferable that the whole thickness is 0.1 mm or less.

  Moreover, the manufacturing method of the sheet-like electrolytic capacitor according to the present invention includes a step of removing a roughened layer on one side of a valve metal sheet body having both surfaces roughened, and a resin sheet is bonded to the single side from which the roughened layer has been removed. A step, a step of forming a valve metal oxide film on the surface of the roughened layer opposite to the one side by an anodic oxidation method, a step of forming a solid electrolyte layer on the valve metal oxide film, and the valve metal sheet body Removing the valve metal oxide film formed in order on the roughened layer and a part of the solid electrolyte layer by chemical etching to expose the core of the valve metal sheet body, and applying the valve by a coating method. A step of forming a resin layer on the metal sheet body, and a step of drilling holes in the resin layer so as to contact the exposed portion of the valve metal sheet body and the solid electrolyte layer.

  A step of providing a conical through hole having a taper such that an upper diameter is larger than a lower diameter at a predetermined position of the valve metal sheet body including the resin layer; and an inner surface of the through hole with a resin or the like A step of insulating, and a terminal metallized on the insulating resin on the inner surface of the through hole by extracting the anode lead electrode to the predetermined through hole through the hole of the resin layer on the exposed portion of the valve metal sheet body by metal plating It is preferable to further include a step of connecting to the electrode.

  A step of fixing the valve metal sheet body to a support after forming the hole, the through hole, and the lead electrode, metallizing the inner surface of the through hole, and electrically connecting the lead electrode by a metal plating method; A step of cutting along a cutting line passing through the center of the through hole, a step of embedding a resin in the cut portion, a step of cutting the embedded resin again, and removing the support from the valve metal sheet body It is preferable that the method further includes a step of making individual pieces.

  According to the present invention, it is possible to provide a capacitor having a high capacitance density, a thin capacitor, and a high adhesive strength with a substrate. In addition, the manufacturing process can be streamlined to reduce the manufacturing cost.

  Next, embodiments of the present invention will be described in detail with reference to the drawings.

(Embodiment 1)
FIG. 1 is a bird's-eye view of a first embodiment of a sheet-like electrolytic capacitor according to the present invention. A sheet-like electrolytic capacitor 1 in FIG. 1 has holes 5 and 5 formed in the insulating resin layer 2 with metal layers 3 formed on the surfaces of concave portions that have curved inner surfaces and are not perpendicular to the bottom surface of the capacitor at both ends. They are connected to the anode and cathode of the electrolytic capacitor via '(shown by dotted lines because they are under the metal layer 3). Although the resin layer 2 covering the surface of the valve metal sheet body and the resin layer 4 covering the side surface of the valve metal sheet body are described separately, resins of the same material may be used. The sheet-like electrolytic capacitor 1 has a size of approximately 0.4 mm × 0.4 mm to 10 mm × 10 mm and a thickness of approximately 0.05 mm to 0.2 mm. In FIG. 1, the valve metal sheet body is not visible because it is covered with the resin layer 2 formed on the valve metal sheet body and the resin layer 4 formed on the side surface of the valve metal sheet body. Also, the resin sheet attached to the bottom surface of the valve metal sheet body is not visible.

In order to more clearly show the capacitor structure, FIG. 2 shows a cross-sectional view taken along a plane ABB′A ′ passing through the terminal electrode portion of FIG. A valve metal sheet body 12 is bonded onto the resin sheet 11 via a thin adhesive layer. A valve metal roughened layer 13 roughened by chemical etching is formed on the surface of the valve metal sheet body 12. An oxidized dielectric film (valve metal oxide film) 14 is formed on the surface of the rough valve metal layer 13, and a solid electrolyte layer 15 is formed thereon. Thereby, the capacity density of a sheet-like electrolytic capacitor can be increased to 0.1 μF / mm ² or more.

  A portion where the valve metal roughened layer 13, the valve metal oxide film 14, and the solid electrolyte layer 15 are removed from a part of the valve metal sheet body 12 to expose the valve metal sheet body 12 (valve metal sheet body exposed portion 16). Is provided. A resin layer 17 is formed so as to cover the solid electrolyte layer 15 and the valve metal sheet body exposed portion 16. The resin layer 17 corresponds to the resin layer 2 in FIG. The thickness of the resin sheet 11 which is a constituent element so far is approximately 20 μm or less, the valve metal sheet body 12 is 50 to 100 μm including the valve metal roughened layer 13, the dielectric film 14 is 0.1 μm or less, and the solid electrolyte layer 15 is 1-10 micrometers, and the thickness of the resin layer 17 is about 30 micrometers or less.

  The resin layer 17 has a hole connected to the valve metal sheet body exposed portion 16 and a hole connected to the solid electrolyte layer 15, and an electrode is formed in each hole by metal paste or metal plating. It is pulled up to form an anode lead electrode 18 and a cathode lead electrode 18 ′. A resin layer 19 is formed so as to cover and electrically insulate the side surface of the above structure, and an electrode connected to the anode lead electrode 18 is formed thereon by metal paste and metal plating, and this is connected to the anode terminal electrode 20A. To do. On the other hand, an electrode connected to the cathode lead electrode 18 'is formed by metal paste and metal plating, and this is used as the cathode terminal electrode 20B. The terminal electrodes 20A and 20B correspond to the metal layer 3 in FIG.

  Thus, the resin layer is formed so that the entire valve metal sheet body is covered, and the non-roughened portions on the roughened layer surface of the solid electrolyte member and the valve metal sheet body are electrically connected through the resin openings, respectively. With the structure drawn out on the same surface, the thickness of the sheet-like electrolytic capacitor can be reduced to 0.1 mm or less.

  Further, the structure in which the lead electrodes for the anode and the cathode are drawn on the same surface can be expected to shorten the process and reduce the manufacturing cost as compared with the structure in which both are drawn on the other surface.

  The metal used for the terminal electrode is silver, copper or the like, and the surface is preferably formed by gold / nickel or solder plating. As a result, when solder is used for connection to the substrate, the terminal electrode and the solder are better wetted, so that the connection strength can be improved.

  The material of the valve metal sheet body 12 can be aluminum, tantalum, zirconium, or the like. The solid electrolyte layer 15 is preferably polypyrrole, polythiophene, or the like. The resin sheet 11, the resin layer 17, or the resin layer 19 is preferably an epoxy resin, a phenol resin, an imide resin, or the like.

(Embodiment 2)
FIG. 3 is a bird's-eye view of the second embodiment of the sheet electrolytic capacitor according to the present invention. The internal configuration of the capacitor is the same as the cross-sectional view of the sheet-like electrolytic capacitor of the first embodiment shown in FIG.

  In FIG. 3, terminal electrodes having a metal layer 23 formed on the surface of a recess having a curved inner surface and non-perpendicular to the capacitor bottom are formed at the four corners of the sheet-like electrolytic capacitor. The terminal electrode, which is a concave shape with a metallized inner surface that is connected to the lead electrode, is non-perpendicular to the bottom surface of the capacitor, and at the same time, it is provided at the four corners instead of the capacitor end surface, thereby increasing the number of connection points with the substrate. By doing so, the connection strength can be further increased.

  The terminal electrode 23 is connected to the anode and cathode of the electrolytic capacitor through holes 25 and 25 ′ (shown by dotted lines in the figure) formed in the insulating resin layer 22. There is no problem even if the anode and cathode of the terminal electrode 23 are arranged next to each other or alternately. Alternatively, the cathode may be one place and the remaining three places may be anodes. Conversely, the anode may be one place and the remaining three places may be cathodes.

(Embodiment 3)
FIG. 4 is a bird's-eye view of the third embodiment of the sheet electrolytic capacitor according to the present invention. The configuration of the internal capacitor is the same as the cross-sectional view of the sheet-like electrolytic capacitor of the first embodiment shown in FIG.

  FIG. 4 shows that terminal electrodes having a curved inner surface and a metal layer 33 formed on the surface of a recess non-perpendicular to the capacitor bottom surface are formed on the side surface of the sheet-like electrolytic capacitor at four locations in total. Yes. The terminal electrode 33 is connected to the anode and cathode of the electrolytic capacitor via holes 35 and 35 ′ (shown by dotted lines in the figure) formed in the insulating resin layer 32. There is no problem even if the anode and cathode of the terminal electrode are arranged adjacent to each other or alternately. Alternatively, the cathode may be one place and the remaining three places may be anodes. Conversely, the anode may be one place and the remaining three places may be cathodes.

  Thus, the connection strength can be further increased by increasing the number of connection points with the substrate by providing two or more terminal electrodes on one side of the capacitor.

  In addition to the sheet-like electrolytic capacitors of the first to third embodiments, a terminal electrode in which a metal layer is formed on the surface of a concave portion whose inner surface is curved and is not perpendicular to the capacitor bottom surface is a sheet-like electrolytic capacitor Four or more corners or side surfaces may be formed. In the sheet-like electrolytic capacitors of the second to third embodiments, if necessary, if at least one of the terminal electrodes is connected to the anode and cathode of the capacitor formed on the valve metal sheet body, the remaining The terminal electrode may not be connected to the electrode of the capacitor.

  Next, the manufacturing method of the sheet-like electrolytic capacitor shown in FIG. 1 will be described with reference to the flowchart of FIG.

  First, the roughened layer is removed by etching on one side of a valve metal sheet body 12 (FIG. 5 (1)) such as aluminum whose surfaces are roughened (FIG. 5 (2)). The resin sheet 11 is fixed to the smoothed surface with an adhesive or the like (FIG. 5 (3)). By adding a step of removing the roughened layer on one side of the valve metal sheet body having both surfaces roughened, the valve metal sheet body can be made thinner. In addition, by attaching a resin sheet to the smooth surface from which the roughened layer has been removed, the insulator can be made thinner than the resin molding, and the strength of the capacitor can be increased, so that handling is facilitated.

  Next, a valve metal oxide film 14 is formed by anodic oxidation on the other roughened metal surface (FIG. 5 (4)), and a solid electrolyte layer 15 is formed thereon (FIG. 5 (5)). . Next, part of the sheet body is removed together with the roughened layer, the oxide layer, and the solid electrolyte layer by a chemical etching method, thereby forming the valve metal sheet body exposed portion 16 (FIG. 5 (6)).

  In addition to the above method, a valve metal oxide film is formed on the surface of the roughened layer by anodic oxidation, and a part of the roughened layer on which the valve metal oxide film is formed is removed by chemical etching. A high capacity density can also be obtained by a method in which the core of the metal sheet body is exposed and a solid electrolyte layer is selectively formed at a portion where the valve metal oxide film remains.

In this way, one surface of the valve metal sheet body is roughened except for a part thereof, and an oxide film and a solid electrolyte are sequentially formed on the valve metal roughened layer, whereby the capacity density of the sheet-like electrolytic capacitor is increased. Can be increased to 0.1 μF / mm ² or more.

  Next, moving to FIG. 6, a resin layer 17 is formed so as to cover the entire surface (FIG. 6 (7)). The resin used here is preferably in the form of a varnish, and is preferably formed thin by spin coating or coating. By forming a resin film by a coating method instead of resin molding the valve metal sheet body, the capacitor can be made thin.

  Next, a hole 5 (hole 5 is the same position as the position where the valve metal sheet body exposed portion 16 is formed) is formed in the resin layer 17 so as to reach the valve metal sheet body 12, and a hole 5 ′ is formed so as to reach the solid electrolyte layer 15. Is formed (FIG. 6 (8)). The holes 5 and 5 'may be formed by a laser, but it is desirable to form holes by PR (photolithography) using a photosensitive resin for the resin layer 17. As a result, it is possible to improve the capacitor characteristics and reduce the manufacturing cost without damaging the solid electrolyte. In addition, the step of punching the resin layer so as to contact the valve metal sheet body and the solid electrolyte layer forms the holes on the same surface, so that the manufacturing cost can be reduced.

  Next, the through-hole 100 is formed so that the upper end has a larger cross-sectional area so that the tip reaches the resin sheet 11, that is, is non-perpendicular to the capacitor bottom surface and the inner surface is concave and curved ( Next, the resin 19 is poured so that the inside of the through hole 100 is filled (FIG. 6 (10)). The resin 19 is preferably varnish like the resin 17. The supply method of the resin 19 may be either a coating method or a dispensing method.

  Next, the anode lead electrode 18 is formed by plating or the like from the inside of the hole 5 reaching the valve metal sheet body 12, and at the same time, the cathode lead electrode 18 ′ is formed by the plating method or the like from the inside of the hole 5 ′ reaching the solid electrolyte layer. (FIG. 6 (11)).

  The terminal electrode, which is non-perpendicular to the bottom surface of the capacitor and has a concave inner surface and a curved surface, has a conical shape with a taper that causes the upper diameter to be larger than the lower diameter using a drill at a predetermined position of the valve metal sheet body. It can be easily provided by providing a hole, a step of insulating the inner surface of the through-hole with a resin or the like, and metallizing the inner surface.

  Next, proceeding to FIG. 7, the entire sheet body is fixed on the support body 101 (FIG. 7 (12)), and the hole 102 is formed so as to pass through the center of the through hole 100 and have a smaller diameter than the through hole 100. Then, terminal electrodes 20A and 20B are formed by plating or the like so as to be electrically connected to the inner surface of the hole 102, the anode lead electrode and the cathode lead electrode (FIG. 7 (14)).

  Further, a cutting line is formed with a wide blade so as to pass through the center of the hole 102, the resin 19 is poured again so that the valve metal sheet body is not exposed inside the formed cutting line, and a thinner blade is used again at the same position. By cutting the substrate 101 and finally removing the support 101, an individual sheet-shaped electrolytic capacitor in which the side surface of the sheet-shaped electrolytic capacitor is covered with an insulator can be produced (FIG. 7 (15)).

  FIG. 8 shows an example in which the sheet-like electrolytic capacitor according to the second embodiment and the third embodiment of the present invention is mounted between the external terminals of the CPU package. The external terminals of the package are solder balls and are formed in an array. The interval between the external terminals is approximately 0.4 mm to 1 mm. As described above, since most of the external terminals of the package are often power / ground terminals, mounting the sheet-like electrolytic capacitor of the present invention as a decoupling capacitor between the terminals reduces the distance between the CPU and the decoupling capacitor. Can do. Further, since the sheet-like electrolytic capacitor is thin, if it is mounted between the external terminals of the package as shown in FIG. 8, there is a possibility that the connection strength is not sufficient. This is advantageous in terms of reliability.

  The present invention has been described with reference to the above embodiment, but the present invention is not limited only to the configuration of the above embodiment, and various modifications that can be made by those skilled in the art within the scope of the present invention. Of course, including modifications.

1 is a bird's-eye view of a sheet electrolytic capacitor according to Embodiment 1. FIG. FIG. 3 is a cross-sectional view taken along ABB′A ′ of the first embodiment. 3 is a bird's-eye view of a sheet electrolytic capacitor according to Embodiment 2. FIG. 6 is a bird's-eye view of a sheet electrolytic capacitor according to Embodiment 3. FIG. 3 is a process flow showing a method for producing the sheet-shaped electrolytic capacitor of Embodiment 1. 3 is a process flow showing a method for producing the sheet-shaped electrolytic capacitor of Embodiment 1. 3 is a process flow showing a method for producing the sheet-shaped electrolytic capacitor of Embodiment 1. It is one Example which mounted the sheet-like electrolytic capacitor based on this invention.

Explanation of symbols

1 Sheet-like electrolytic capacitor 2, 17, 22, 32 (Insulation) Resin layer (upper surface of valve metal)
3, 23, 33 Terminal electrode (metal layer)
4, 19, 24, 34 (Insulation) Resin layer (valve metal side)
5, 25, 35 holes (anode (cathode) lead electrode)
5 ', 25', 35 'hole (cathode (anode) lead electrode)
11 Resin sheet 12 Valve metal sheet body 13 Valve metal roughening layer 14 Dielectric film (valve metal oxide film)
15 Solid Electrolyte Layer 16 Valve Metal Sheet Body Exposed Portion 18 Anode Leading Electrode 18 ′ Cathode Leading Electrode 20A Terminal Electrode (Anode)
20B Terminal electrode (cathode)
100 through hole 101 support 102 hole

Claims (11)

A smooth surface of the valve metal sheet body is bonded onto the resin sheet, and a valve metal roughened layer is formed on the opposite surface of the valve metal sheet body except for some non-roughened portions. A sheet-shaped electrolytic capacitor having a structure in which a valve metal oxide film and a solid electrolyte layer are sequentially formed, and a resin layer is formed thereon so as to cover the entire valve metal sheet body,
The non-roughened portions on the surfaces of the solid electrolyte layer and the valve metal roughened layer are electrically drawn out to the same surface through resin openings, and each lead-out electrode is a concave and inner surface provided at both ends of the capacitor. Is a sheet-like electrolytic capacitor having a structure that is a metallized curved surface and is connected to a terminal electrode that is electrically insulated from the valve metal sheet body.   The sheet-like electrolytic capacitor according to claim 1, wherein the terminal electrodes are provided at four corners of the sheet-like electrolytic capacitor.   The sheet-like electrolytic capacitor according to claim 1, wherein the terminal electrode is provided at two or more locations on each of two side surfaces of the sheet-like electrolytic capacitor.   The sheet-shaped electrolytic capacitor according to any one of claims 1 to 3, wherein the curved surface of the terminal electrode is formed non-perpendicular to a bottom surface of the sheet-shaped electrolytic capacitor.   The sheet-like electrolytic capacitor according to any one of claims 1 to 4, wherein the curved surface of the metallized terminal electrode is formed of gold or solder plating.   The sheet-shaped electrolytic capacitor according to claim 1, wherein the resin layer covering the entire valve metal sheet body is a resin layer formed by a coating method.   The sheet-like electrolytic capacitor according to any one of claims 1 to 6, wherein the resin covering the entire valve metal sheet body is a photosensitive resin.   The sheet-like electrolytic capacitor according to any one of claims 1 to 7, wherein the thickness is 0.1 mm or less. Removing the roughened layer on one side of the valve metal sheet body roughened on both sides;
Adhering a resin sheet to the one side from which the roughening layer has been removed;
Forming a valve metal oxide film on the surface of the roughened layer on the opposite side of the one surface by an anodic oxidation method;
Forming a solid electrolyte layer on the valve metal oxide film;
Removing the valve metal oxide film formed in order on the roughened layer of the valve metal sheet body and a part of the solid electrolyte layer by chemical etching to expose the core of the valve metal sheet body;
Forming a resin layer on the valve metal sheet body by a coating method;
Forming a hole in the resin layer so as to be in contact with the exposed portion of the valve metal sheet body and the solid electrolyte layer. Providing a conical through hole having a taper such that the upper diameter is larger than the lower diameter at a predetermined position of the valve metal sheet body including the resin layer;
Insulating the inner surface of the through hole with a resin or the like;
A step of drawing the anode lead electrode through a hole in the resin layer on the exposed portion of the valve metal sheet to the predetermined through hole by metal plating and connecting it to a terminal electrode metallized on the insulating resin on the inner surface of the through hole The manufacturing method of the sheet-like electrolytic capacitor of Claim 9 further including these. After forming the hole, the through hole, and the extraction electrode, fixing the valve metal sheet body to a support, metallizing the inner surface of the through hole, and electrically connecting the extraction electrode by a metal plating method;
Cutting along a cutting line passing through the center of the through hole;
Embedding a resin in the cut portion;
Cutting the embedded resin again;
The manufacturing method of the sheet-like electrolytic capacitor of Claim 9 or 10 which further includes the process of removing this support body from the said valve metal sheet body, and making it into each piece.

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